Automatic crucible loading machine for semiconductor manufacturing

Abstract

The utility model relates to the technical field of semiconductor manufacturing, and discloses an automatic crucible charging machine for semiconductor manufacturing, which comprises a firing container, the outer side of the firing container is communicated with an inclined feeding channel, and the top of the inclined feeding channel is communicated with a transmission sleeve extending into the inclined feeding channel. An electric lifting rod extending into the conveying sleeve is fixedly installed outside the conveying sleeve, a temporary storage sleeve is fixedly connected to the movable end of the electric lifting rod, a capacity sensing assembly extending into the temporary storage sleeve is connected to the outside of the temporary storage sleeve, a feeding container communicates with the outer side of the conveying sleeve, and a funnel communicates with the top of the feeding container. A material pushing assembly extending into the feeding container is fixedly installed outside the feeding container, and a material height sensor is fixedly installed in the feeding container. The automatic crucible loading machine for semiconductor manufacturing has the advantages of small heat loss and convenience in feeding in the feeding process.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor manufacturing technology, specifically to an automatic crucible loading machine for semiconductor manufacturing. Background Technology

[0002] In the semiconductor material preparation stage, such as the growth of single crystal silicon, the Czochralski method or the zone melting method is usually used. In the Czochralski method, polycrystalline silicon raw material is placed in a quartz crucible. In semiconductor device production, taking the growth of single crystal silicon by the Czochralski method as an example, first, high-purity polycrystalline silicon raw material is placed in a quartz crucible. Then, the crucible is heated by a heating device to melt the polycrystalline silicon raw material in the crucible and form a high-temperature silicon melt.

[0003] During use, crucibles typically need to be filled with materials. Existing methods usually involve manual material feeding after the work is completed. This method requires opening the feeding window, resulting in significant heat loss and poor energy efficiency. Therefore, an automatic crucible filling machine for semiconductor manufacturing is proposed to address these issues. Utility Model Content

[0004] (a) Technical problems to be solved

[0005] To address the shortcomings of existing technologies, this utility model provides an automatic crucible loading machine for semiconductor manufacturing. It has the advantages of low heat loss during the material loading process and convenient material feeding. It solves the problem that crucibles usually need to be loaded with materials during use. The existing feeding method is usually to manually feed materials after the operation is completed. This feeding method requires opening the feeding window, resulting in a lot of heat loss and poor energy efficiency.

[0006] (II) Technical Solution

[0007] The technical solution of this utility model to solve the above-mentioned technical problems is as follows: An automatic crucible loading machine for semiconductor manufacturing includes a firing container, an inclined feeding channel connected to the outside of the firing container, a transfer sleeve extending into the top of the inclined feeding channel, an electric lifting rod extending into the outside of the transfer sleeve, a temporary storage sleeve fixedly connected to the moving end of the electric lifting rod, a capacity sensing component extending into the outside of the temporary storage sleeve, a feeding container connected to the outside of the transfer sleeve, a funnel connected to the top of the feeding container, a pushing component extending into the outside of the feeding container, and a material height sensor fixedly installed inside the feeding container.

[0008] The beneficial effects of this utility model are:

[0009] This automatic crucible loading machine for semiconductor manufacturing has the advantages of low heat loss and convenient material addition during the filling process.

[0010] Based on the above technical solution, the present invention can be further improved as follows.

[0011] Furthermore, the material height sensor is composed of multiple reflective photoelectric switches, which are distributed at equal intervals vertically.

[0012] The advantage of adopting the above-mentioned further solution is that the material height sensor can easily detect the amount of material inside, preventing a situation where there is no material to add.

[0013] Furthermore, the capacity sensing component includes a sensing sleeve that communicates with the temporary storage sleeve and is located at its upper left corner. A pressure sensing pad is fixedly installed on the inner top wall of the sensing sleeve. A compression spring is fixedly installed at the other end of the pressure sensing pad. The other end of the compression spring is fixedly connected to a compression sleeve that is slidably connected to the sensing sleeve.

[0014] The advantage of adopting the above-mentioned further solution is that the capacity sensing component can be conveniently used to detect the capacity inside the temporary storage sleeve.

[0015] Furthermore, when the bottom of the compression sleeve and the sensing sleeve are in the same plane, the pressure sensing pad is triggered, and the electric lifting rod of the pressure sensing pad is connected to and controls it.

[0016] Furthermore, the outer side of the transmission sleeve is provided with a discharge hole, and the distance difference between the top wall of the discharge hole and the connection between the transmission sleeve and the feeding container is greater than the distance between the upper and lower walls of the temporary storage sleeve.

[0017] The advantage of adopting the above-mentioned further solution is that this arrangement allows materials to be transported from the temporary storage sleeve, preventing heat loss.

[0018] The feeding assembly includes a feeding push rod extending into the inside of the feeding container, and the movable end of the feeding push rod is fixedly connected to an L-shaped partition push plate extending to its outside.

[0019] The beneficial effect of adopting the above-mentioned further solution is that the L-shaped partition push plate can prevent materials from entering its inner side, thereby preventing material jamming. Attached Figure Description

[0020] Figure 1 This is a schematic diagram of the structure of this utility model;

[0021] Figure 2 This is an enlarged view of point A in the figure of this utility model;

[0022] Figure 3 This is a top view showing the connection between the transmission sleeve and the temporary storage sleeve of this utility model;

[0023] Figure 4 This is a diagram showing the connection between the electric lifting rod and the temporary storage sleeve of this utility model.

[0024] In the diagram: 1. Firing container; 2. Inclined feed channel; 3. Transfer sleeve; 4. Electric lifting rod; 5. Temporary storage sleeve; 6. Capacity sensing component; 61. Sensing sleeve; 62. Pressure sensing pad; 63. Compression spring; 64. Compression sleeve; 7. Feed container; 8. Funnel; 9. Pushing component; 91. Feed push rod; 92. L-shaped partition push plate; 10. Material height sensor. Detailed Implementation

[0025] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0026] In the embodiments, by Figure 1-4 An automatic crucible loading machine for semiconductor manufacturing is provided. The invention includes a firing container 1, an inclined feeding channel 2 connected to the outer side of the firing container 1, a transfer sleeve 3 extending into the top of the inclined feeding channel 2, an electric lifting rod 4 extending into the outer side of the transfer sleeve 3, a temporary storage sleeve 5 fixedly connected to the moving end of the electric lifting rod 4, a capacity sensing component 6 extending into the outer side of the temporary storage sleeve 5, a feeding container 7 connected to the outer side of the transfer sleeve 3, a funnel 8 connected to the top of the feeding container 7, a pushing component 9 extending into the outer side of the feeding container 7, and a material height sensor 10 fixedly installed inside the feeding container 7.

[0027] Furthermore, the material height sensor 10 is composed of multiple reflective photoelectric switches, which are distributed at equal intervals vertically.

[0028] Furthermore, the capacity sensing component 6 includes a sensing sleeve 61 that communicates with the temporary storage sleeve 5 and is located at its upper left corner. A pressure sensing pad 62 is fixedly installed on the inner top wall of the sensing sleeve 61. A compression spring 63 is fixedly installed on the other end of the pressure sensing pad 62. A compression sleeve 64 that is slidably connected to the other end of the compression spring 63 is fixedly connected to the sensing sleeve 61.

[0029] Furthermore, when the bottom of the compression sleeve 64 and the sensing sleeve 61 are in the same plane, the pressure sensing pad 62 is triggered, and the electric lifting rod 4 of the pressure sensing pad 62 is connected to and controls it.

[0030] The capacity sensing component 61 is set by sensing through the compression sleeve 64 extending into the temporary storage sleeve 5. When the material inside the temporary storage sleeve is full, the material squeezes the compression sleeve 64 until the bottom of the compression sleeve 64 is flush with the bottom of the sensing sleeve 61, triggering the pressure sensing pad 62 to start the electric lifting rod 4.

[0031] Furthermore, the outside of the transmission sleeve 3 is provided with a discharge hole, and the distance difference between the top wall of the discharge hole and the connection between the transmission sleeve 3 and the feeding container 7 is greater than the distance between the upper and lower walls of the temporary storage sleeve 5.

[0032] The feeding assembly 9 includes a feeding push rod 91 extending into the feed container 7, and an L-shaped partition push plate 92 extending to the outside of the feeding push rod 91 is fixedly connected to the moving end of the feeding push rod 91.

[0033] The front and rear sides of the special L-shaped partition push plate 92 contact the front and rear inner walls of the feed container 7 and form a seal. When the L-shaped partition push plate 92 contacts the inner wall of the feed container 7, the other end is located outside the feed container 7. A pressure sensor is provided at the connection between the feed push rod 91 and the L-shaped partition push plate 92. When the L-shaped partition push plate 92 cannot be pushed, the feed push rod 81 remains in the current position.

[0034] Working principle:

[0035] When it is necessary to add material, the electric lifting rod 4 and the electric temporary storage sleeve 5 move to the upper limit so that the temporary storage sleeve 5 can be connected to the feeding container 7. At this time, the material inside the feeding container 7 can be pushed into the temporary storage sleeve 5 by the feeding push rod 91 in conjunction with the L-shaped partition push plate 92, so that the temporary storage sleeve 5 begins to fill with material until the capacity sensing component 6 is triggered.

[0036] After the capacity sensing component 6 is triggered, the electric lifting rod 4 starts to drive the temporary storage sleeve 5 to move downward so that it can connect with the inclined feeding channel 2. At this time, the material inside the temporary storage sleeve 5 can be released and put into the firing container 1 through the inclined feeding channel 2, thereby completing the feeding operation.

[0037] It should be noted that, in this document, relational terms such as "first" and "second" are used only to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or apparatus. Without further limitations, an element defined by the phrase "comprising one..." does not exclude the presence of other identical elements in the process, method, article, or apparatus that includes said element.

[0038] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. An automatic crucible loader for semiconductor manufacturing, comprising a firing vessel (1), characterized in that: The outer side of the firing container (1) is communicated with an inclined feeding channel (2), the top of the inclined feeding channel (2) is communicated with a transmission sleeve (3) extending into the inside, the outside of the transmission sleeve (3) is fixedly installed with an electric lifting rod (4) extending into the inside, the moving end of the electric lifting rod (4) is fixedly connected with a temporary storage sleeve (5), the outside of the temporary storage sleeve (5) is connected with a capacity sensing assembly (6) extending into the inside, the outer side of the transmission sleeve (3) is communicated with a feeding container (7), the top of the feeding container (7) is communicated with a hopper (8), the outside of the feeding container (7) is fixedly installed with a pushing assembly (9) extending into the inside, and the inside of the feeding container (7) is fixedly installed with a material height sensor (10).

2. An automatic crucible charging machine for semiconductor manufacturing according to claim 1, characterized by: The material height sensor (10) is composed of a plurality of reflective photoelectric switches, and the reflective photoelectric switches are equidistantly distributed upward and downward.

3. An automatic crucible charger for semiconductor manufacturing according to claim 1, wherein: The capacity sensing assembly (6) comprises a sensing sleeve (61) communicated with the temporary storage sleeve (5) and located at the upper left corner of the temporary storage sleeve (5), the inner side top wall of the sensing sleeve (61) is fixedly installed with a pressure sensing pad (62), the other end of the pressure sensing pad (62) is fixedly installed with a pressing spring (63), and the other end of the pressing spring (63) is fixedly connected with a pressing sleeve (64) slidingly connected with the sensing sleeve (61).

4. An automatic crucible charger for semiconductor manufacturing according to claim 3, wherein: When the pressing sleeve (64) is in the same plane as the bottom of the sensing sleeve (61), the pressure sensing pad (62) is triggered, and the pressure sensing pad (62) is connected with and controls the electric lifting rod (4).

5. An automatic crucible charger for semiconductor manufacturing according to claim 1, wherein: The outside of the transmission sleeve (3) is provided with a discharging hole, and the distance difference between the inner top wall of the discharging hole and the communication part of the transmission sleeve (3) and the feeding container (7) is greater than the distance between the upper and lower walls of the temporary storage sleeve (5).

6. An automatic crucible charger for semiconductor manufacturing according to claim 1, wherein: The pushing assembly (9) comprises a feeding pushing rod (91) extending into the inside of the feeding container (7), and the moving end of the feeding pushing rod (91) is fixedly connected with an L-shaped partition pushing plate (92) extending to the outside.

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