Vacuum chamber sealing device

Abstract

The utility model discloses a vacuum chamber sealing device which comprises a transmission shell which is installed on the side wall of a vacuum chamber, the axis of the transmission shell extends in the first direction, a transmission shaft extends in the first direction, one end of the transmission shaft movably penetrates through the transmission shell, extends into the vacuum chamber and is connected with a moving device, and a sealing unit is arranged on the transmission shaft in a sleeving mode and located in the transmission shell. The sealing unit is arranged on the transmission shell and used for guaranteeing the sealing performance between the transmission shell and the transmission shaft so as to guarantee the sealing performance between the sealing device and the vacuum chamber, and the pressing unit is arranged on the transmission shell and used for pressing the sealing unit and can adjust the pressing strength of the sealing unit; the sealing performance between the sealing device and the vacuum chamber can be guaranteed through the sealing unit, after equipment operates for a long time, the sealing unit can be aged and abraded, the sealing unit is further pressed by adjusting the pressing strength of the pressing unit on the sealing unit, and therefore the sealing performance is guaranteed.

Description

Technical Field

[0001] This disclosure relates to the field of sealing technology, specifically to a vacuum chamber sealing device. Background Technology

[0002] Vacuum welding furnaces, as a key piece of equipment, are widely used in precision manufacturing industries with extremely high welding quality requirements, such as electronic component manufacturing and aerospace parts processing. They enable welding operations in a vacuum environment, effectively preventing the metal from coming into contact with oxygen in the air during the welding process, thus ensuring the high quality and reliability of the weld joints.

[0003] In the structure of a vacuum welding furnace, the connection between the motor and the vacuum chamber is crucial. The motor provides power to various mechanical moving parts within the furnace, such as the rotating worktable and the welding head moving device. Ensuring the sealing performance between the motor output shaft and the vacuum chamber is a key factor in maintaining the stable operation of the vacuum welding furnace.

[0004] Magnetofluidic (MFL) sealing devices are widely used in the industry to meet this sealing requirement. MFL seals, with their excellent sealing performance, can prevent external gases from entering the vacuum chamber to a certain extent, ensuring the stability of the vacuum environment, and have played an important role in past vacuum welding furnace equipment. However, with the increasing demands of welding processes on the vacuum environment and the growing complexity of high-temperature conditions during welding, the application of MFL seals in vacuum welding furnaces has gradually revealed serious problems. During welding, high temperatures are generated within the vacuum chamber, which alters the physical properties of the MFL, leading to a decrease in viscosity and a decline in stability. Once these performance indicators of the MFL exceed its normal operating range, leakage is highly likely to occur. Leakage of the MFL directly leads to seal failure, allowing outside air to rapidly enter the vacuum chamber and disrupt the original vacuum environment. This not only severely affects welding quality, causing defects such as porosity and oxidation in the weld joint, reducing product performance and reliability, but frequent seal leakage problems also lead to equipment downtime for maintenance, increasing production costs and production cycles, and reducing production efficiency.

[0005] There is an urgent need to design a completely new device to replace the magnetorheological fluid, which can be installed between the motor output shaft and the vacuum chamber to effectively improve the sealing leakage problem caused by high temperature, ensure that the vacuum welding furnace can operate continuously in a stable and reliable vacuum environment, and improve welding quality and production efficiency. Summary of the Invention

[0006] In view of the above-mentioned defects or deficiencies in the prior art, it is desirable to provide a vacuum chamber sealing device.

[0007] In a first aspect, this application provides a vacuum chamber sealing device, which is installed on a vacuum chamber and used to connect a drive shaft and a moving device inside the vacuum chamber. The vacuum chamber sealing device includes:

[0008] A transmission housing, which is mounted on the side wall of the vacuum chamber and whose axis extends along a first direction;

[0009] A drive shaft extends along the first direction, with one end movably penetrating the drive housing and extending into the vacuum chamber, and connected to the moving device;

[0010] A sealing unit is sleeved on the drive shaft and located inside the drive housing to ensure the sealing between the drive housing and the drive shaft;

[0011] A clamping unit is disposed on the transmission housing and is used to clamp the sealing unit. The clamping intensity on the sealing unit can be adjusted to ensure the sealing performance of the transmission housing.

[0012] According to the technical solution provided in the embodiments of this application, a through hole is provided on the transmission housing along its axial direction, the transmission shaft is movably disposed inside the through hole, one end of the transmission shaft passes through the interior of the vacuum chamber and is connected to the moving device, and the other end extends to the outside of the transmission housing and is connected to the drive shaft of the drive component through a shaft connector.

[0013] According to the technical solution provided in the embodiments of this application, the end of the transmission housing near the vacuum chamber is the first end. The first end is installed on the side wall of the vacuum chamber by a mounting component, and a sealing groove is provided on the side wall of the first end, and a first sealing element is provided in the sealing groove.

[0014] According to the technical solution provided in the embodiments of this application, a receiving groove is provided at the first end, and the receiving groove is connected to the through hole. At least two bearings are arranged in the receiving groove along the first direction. A bearing spacer is provided between the bearings. An inner retaining ring and an outer retaining ring are provided on the bearing near the first end. The inner retaining ring and the outer retaining ring are respectively provided for the inner ring and outer ring of the bearing. The transmission shaft is fixedly connected to the inner ring of the bearing.

[0015] According to the technical solution provided in the embodiments of this application, the sealing unit is disposed in the through hole and located on the side of the bearing away from the vacuum chamber. The sealing unit includes a plurality of second sealing elements and a plurality of sealing pressure rings. The plurality of second sealing elements and the plurality of sealing pressure rings are all sleeved on the transmission shaft, and the plurality of second sealing elements and the plurality of sealing pressure rings are arranged sequentially at intervals.

[0016] According to the technical solution provided in the embodiments of this application, a vacuum chamber sealing device is characterized in that the end of the transmission housing away from the vacuum chamber is the second end, the inner wall of the second end is provided with threads, and a fastening hole is provided on the circumferential side wall of the transmission housing along the second direction, the fastening hole and the through hole are connected, and the inner wall of the fastening hole is provided with threads; the second direction is perpendicular to the first direction.

[0017] According to the technical solution provided in the embodiments of this application, the clamping unit includes a clamping nut, which is sleeved on the transmission shaft. One end of the nut has a thread on its outer wall and extends from the second end into the through hole, and is screwed to the transmission housing for clamping the sealing unit. The clamping unit also includes a fastener, which has a thread on its outer wall and is threaded in the fastening hole. One end of the fastener abuts against the outer wall of the clamping nut for limiting the clamping nut.

[0018] In summary, this technical solution specifically discloses a vacuum chamber sealing device, including a transmission housing installed on the side wall of the vacuum chamber with its axis extending along a first direction, a transmission shaft extending along the first direction with one end movably penetrating the transmission housing and extending into the vacuum chamber and connected to a moving device, a sealing unit sleeved on the transmission shaft and located inside the transmission housing to ensure the sealing between the transmission housing and the transmission shaft, thereby ensuring the sealing between the sealing device and the vacuum chamber, and a pressing unit disposed on the transmission housing to press the sealing unit and adjust the pressing strength of the sealing unit.

[0019] The sealing unit ensures the airtightness between the sealing device and the vacuum chamber. After the equipment has been running for a long time, the sealing unit will age and wear. By adjusting the clamping strength of the clamping unit on the sealing unit, the sealing unit can be further tightened to ensure the airtightness. Attached Figure Description

[0020] Other features, objects, and advantages of this application will become more apparent from the following detailed description of non-limiting embodiments with reference to the accompanying drawings:

[0021] Figure 1 Top view showing the connection between the sealing device and the vacuum chamber.

[0022] Figure 2 This is a schematic diagram of the sealing device.

[0023] Figure 3 This is a cross-sectional view of the sealing device.

[0024] The following are the labeling elements in the diagram: 1. Drive component; 2. Shaft connector; 3. Sealing device; 4. Vacuum chamber; 31. Drive shaft; 32. Compression nut; 33. Fastener; 34. Drive housing; 35. Second seal; 36. Sealing ring; 37. Bearing; 38. Bearing spacer; 39. Outer retaining ring; 310. Inner retaining ring; 311. First seal. Detailed Implementation

[0025] The present application will now be described in further detail with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and not intended to limit it. Furthermore, it should be noted that, for ease of description, only the parts relevant to the invention are shown in the accompanying drawings.

[0026] It should be noted that, unless otherwise specified, the embodiments and features described in this application can be combined with each other. This application will now be described in detail with reference to the accompanying drawings and embodiments.

[0027] Example 1

[0028] Please refer to Figures 1 to 3 As shown, a vacuum chamber sealing device is installed on a vacuum chamber 4 and is used to connect the drive shaft of the drive component 1 and the moving device inside the vacuum chamber 4.

[0029] Specifically, the sealing device 3 includes:

[0030] Transmission housing 34 is mounted on the side wall of vacuum chamber 4, and its axis extends along a first direction; the first direction is... Figure 3 Mid-horizontal direction;

[0031] The drive shaft 31 extends along a first direction, with one end movably penetrating the transmission housing 34 and extending into the vacuum chamber 4, where it is connected to the moving device. The other end is connected to the drive shaft of the drive unit 1 via the shaft connector 2. Optionally, the moving device and the shaft connector 2 are keyed to both ends of the drive shaft 31, which can increase the connection strength.

[0032] The type of driving component 1 can be: a motor;

[0033] Furthermore, the end of the transmission housing 34 closest to the vacuum chamber 4 is the first end, and the first end is mounted on the side wall of the vacuum chamber 4 by a mounting component;

[0034] Specifically, a mounting hole is provided at the first end. Optionally, the mounting holes can be evenly arranged circumferentially. Correspondingly, a mounting hole is provided on the side wall of the vacuum chamber 4. The mounting component extends through the mounting hole at the first end into the mounting hole of the vacuum chamber 4. Optionally, the type of mounting component is a screw.

[0035] Furthermore, a sealing groove is provided on the first end sidewall, and a first sealing element 311 is provided in the sealing groove; by providing the first sealing element 311, the sealing between the transmission housing 34 and the vacuum chamber 4 is enhanced; optionally, the first sealing element 311 is a rubber sealing ring.

[0036] A through hole is provided on the transmission housing 34 along its axial direction, and a receiving groove is provided at the first end, and the receiving groove and the through hole are connected. Two bearings 37 are arranged in the receiving groove along the first direction, and the transmission shaft 31 and the inner ring of the bearing 37 are fixedly connected.

[0037] Furthermore, a bearing spacer 38 is provided between the two bearings 37. The bearing 37 near the first end has an inner retaining ring 310 and an outer retaining ring 39 on the side near the vacuum chamber 4. The inner retaining ring 310 and the outer retaining ring 39 are respectively provided for the inner ring and the outer ring of the bearing 37.

[0038] Therefore, the bearing 37 can be effectively limited by the inner retaining ring 310 and the outer retaining ring 39.

[0039] It also includes a sealing unit, which is sleeved on the drive shaft 31 and located inside the through hole, and on the side of the bearing 37 away from the vacuum chamber 4. The sealing unit is used to ensure the sealing between the drive housing 34 and the drive shaft 31.

[0040] Specifically, the sealing unit includes multiple second seals 35 and multiple sealing rings 36, all of which are sleeved on the drive shaft 31, and are arranged sequentially at intervals in the first direction; the type of the second seals 35 is, for example, a rubber sealing ring.

[0041] Therefore, by using multiple second seals 35 and multiple sealing rings 36 spaced apart, multiple sealing spaces can be formed on the drive shaft 31 to block gas molecules layer by layer, achieve efficient sealing, effectively isolate the internal and external environments of the vacuum chamber 4, ensure the vacuum level inside the chamber, and meet the requirements of high vacuum scenarios.

[0042] It also includes a clamping unit, which is installed on the transmission housing 34 and is used to clamp the sealing unit to ensure the airtightness of the transmission housing 34;

[0043] Specifically, the end of the transmission housing 34 furthest from the vacuum chamber 4 is the second end. The inner wall of the second end is threaded, and a fastening hole is formed on the circumferential side wall of the transmission housing 34 along a second direction. The fastening hole and the through hole are connected, and the inner wall of the fastening hole is threaded. The second direction is... Figure 3 The first direction is vertical, and the second direction is perpendicular to the first direction;

[0044] The clamping unit includes a clamping nut 32, which is sleeved on the drive shaft 31. One end of the nut 32 has a thread on its outer wall and extends from the second end into the through hole and is screwed to the drive housing 34 for clamping the sealing unit.

[0045] Furthermore, the clamping unit also includes a fastener 33, the outer wall of which is provided with threads, the threads of which are disposed in the fastening hole, one end of which abuts against the outer wall of the clamping nut 32 for limiting the clamping nut 32.

[0046] Working principle: First, one end of the drive shaft 31 is accurately connected to the moving device inside the vacuum chamber 4 via a coupling. Professional tools and measuring equipment are used to ensure the concentricity and tightness of the connection, ensuring smooth power transmission. The first seal 311 is placed in the sealing groove, and two bearings 37 are installed in the receiving groove. Correspondingly, a bearing spacer 38 is placed between the two bearings 37. An inner retaining ring 310 and an outer retaining ring 39 are installed on the side of the bearing 37 near the first end to ensure accurate installation position and tight fit between the components. The drive housing 34 is placed in the predetermined installation position on the side wall of the vacuum chamber 4. Then, multiple installation parts are tightened in sequence with tools according to the specified tightening torque to firmly fix the drive housing 34 on the side wall of the vacuum chamber 4. At the same time, the first seal 311 is evenly pressurized to achieve initial sealing.

[0047] Multiple second seals 35 and multiple sealing rings 36 are installed sequentially and at intervals in the corresponding positions inside the transmission housing 34 according to the design requirements. Special attention should be paid to ensuring that the second seals 35 and sealing rings 36 are placed flat and without twisting or wrinkling, so as not to affect the sealing effect.

[0048] Screw the clamping nut 32 into the transmission housing 34 and initially adjust it to a suitable position. Then, use the fastener 33 to tighten the clamping nut 32 through the fastening hole of the transmission housing 34 to ensure that it will not loosen.

[0049] Finally, the end of the drive shaft 31 away from the vacuum chamber 4 is connected to the drive shaft of the drive unit 1 through the shaft connector 2. The installation of the entire device is checked again to ensure that there are no errors before debugging and operation.

[0050] When the equipment is started, the drive unit 1 drives the moving device inside the vacuum chamber 4 through the transmission shaft 31. If the vacuum level inside the vacuum chamber 4 is found to be decreasing, the operator can use professional tools to fine-tune the screwing depth of the clamping nut 32 according to the actual situation to further enhance the sealing effect and ensure that the vacuum level inside the vacuum chamber 4 is always kept within the specified range.

[0051] After the equipment has been running for a period of time, the second seal 35 will inevitably age due to the long-term stress and working environment. At this time, the operator can readjust the sealing performance of the entire sealing device 3 by adjusting the screw depth of the tightening nut 32. When the second seal 35 is severely aged and loses its sealing effect, the operator can use a tool to unscrew the tightening nut 32, and then take the entire sealing unit out of the transmission housing 34 and replace it with a new sealing unit. After the replacement is completed, the position of the tightening nut 32 should be readjusted according to the prescribed steps to ensure that the device can work normally.

[0052] The above description is merely a preferred embodiment of this application and an explanation of the technical principles employed. Those skilled in the art should understand that the scope of the invention involved in this application is not limited to technical solutions formed by specific combinations of the above-described technical features, but should also cover other technical solutions formed by arbitrary combinations of the above-described technical features or their equivalents without departing from the inventive concept. For example, technical solutions formed by substituting the above features with (but not limited to) technical features with similar functions disclosed in this application.

Claims

1. A vacuum chamber sealing device, which is installed on a vacuum chamber (4) for connecting a driving shaft and a moving device inside the vacuum chamber (4), characterized in that, The sealing device (3) comprises: a transmission housing (34) mounted on the side wall of the vacuum chamber (4), the axis of which extends in a first direction; a transmission shaft (31) extending in the first direction, one end of which extends through the transmission housing (34) to the inside of the vacuum chamber (4) and is connected with the moving device; a sealing unit arranged on the transmission shaft (31) and located inside the transmission housing (34), for ensuring the sealing between the transmission housing (34) and the transmission shaft (31); a pressing unit arranged on the transmission housing (34) for pressing the sealing unit and capable of adjusting the pressing strength on the sealing unit to ensure the sealing of the transmission housing (34).

2. A vacuum chamber sealing device according to claim 1, wherein The transmission housing (34) is provided with a through hole extending through the axis direction thereof, and the transmission shaft (31) is movably arranged inside the through hole, one end of the transmission shaft (31) extending through the inside of the vacuum chamber (4) and being connected with the moving device, and the other end extending to the outside of the transmission housing (34) and being connected with the driving shaft of the driving member (1) through the shaft connecting member (2).

3. A vacuum chamber sealing device according to claim 2, wherein The first end of the transmission housing (34) close to the vacuum chamber (4) is a first end, the first end is mounted on the side wall of the vacuum chamber (4) through a mounting member, and a sealing groove is arranged on the side wall of the first end, and a first sealing member (311) is arranged in the sealing groove.

4. A vacuum chamber sealing device according to claim 3, wherein The first end is provided with a containing groove, and the containing groove is communicated with the through hole, at least two bearings (37) are arranged in the containing groove in the first direction, a bearing spacer (38) is arranged between the bearings (37), an inner retainer (310) and an outer retainer (39) are arranged on the bearing (37) close to the first end, and the inner retainer (310) and the outer retainer (39) are respectively arranged corresponding to the inner ring and the outer ring of the bearing (37); the transmission shaft (31) is fixedly connected with the inner ring of the bearing (37).

5. A vacuum chamber sealing device according to claim 4, wherein The sealing unit is arranged in the through hole and located on the side of the bearing (37) away from the vacuum chamber (4), the sealing unit comprises a plurality of second sealing members (35) and a plurality of sealing press rings (36), the plurality of second sealing members (35) and the plurality of sealing press rings (36) are arranged on the transmission shaft (31), and the plurality of second sealing members (35) and the plurality of sealing press rings (36) are arranged in sequence and at intervals.

6. A vacuum chamber sealing device according to claim 5, wherein The second end of the transmission housing (34) away from the vacuum chamber (4) is a second end, the inner wall of the second end is provided with threads, and the circumferential side wall of the transmission housing (34) is provided with a fastening hole in a second direction, the fastening hole is communicated with the through hole, and the inner wall of the fastening hole is provided with threads; the second direction is perpendicular to the first direction.

7. A vacuum chamber sealing device according to claim 6, wherein The compression unit comprises a compression nut (32) sleeved on the transmission shaft (31), an outer wall of one end of the compression nut (32) is provided with a thread, the thread extends into the through hole from the second end, and the compression nut (32) is screwed with the transmission shell (34) to compress the sealing unit. The compression unit further comprises a fastener (33), an outer wall of the fastener (33) is provided with a thread, the fastener (33) is screwed in the fastening hole, and one end of the fastener (33) abuts against the outer wall of the compression nut (32) to limit the compression nut (32).

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