Vacuumizing valve device with cleaning function

Abstract

The utility model relates to the technical field of vacuum valves, and discloses a vacuumizing valve device with a cleaning function, which comprises a vacuum valve body, the vacuum valve body comprises an air channel pipeline, an air inlet is arranged on the rear side of the air channel pipeline, a first threaded surface is arranged at the inner diameter of the air inlet, and a cleaning component can be mounted on the first threaded surface. The cleaning assembly comprises a filter element for shielding the air inlet, a brush plate for wiping the rear side surface of the filter element is arranged on the rear side of the filter element, a driving part for driving the brush plate to rotate is arranged on the rear side of the brush plate, the driving part comprises a fan impeller capable of rotating, and the fan impeller and the brush plate are relatively fixed. The air impeller is driven to rotate through flowing of air in the vacuum valve body, the effect that the brush plate wipes the surface of the filter element is achieved, the surface of the filter element is cleaned, the cleanliness of the filter element is maintained, the cleanliness of the internal structure of the vacuum valve body is maintained through the filter element, the filter element can be unobstructed for a long time through the cleaning assembly, and the replacement frequency is reduced.

Description

Technical Field

[0001] This utility model relates to the field of vacuum valve technology, and in particular to a vacuum valve device with a cleaning function. Background Technology

[0002] A vacuum valve is a key component used to control gas flow in a vacuum system. Its main functions include isolating, regulating, or maintaining a vacuum environment. It typically consists of a valve body, seals, and a drive mechanism. Depending on the application, it can be classified into shut-off valves, regulating valves, and solenoid valves, and is suitable for different vacuum levels. This valve has excellent sealing performance, corrosion resistance, and rapid response capabilities, and is widely used in fields that require precise vacuum control, such as semiconductor manufacturing, vacuum coating, medical equipment, and aerospace experiments.

[0003] In the long-term process of gas flow, vacuum valve devices in the prior art inevitably become contaminated with dust and particulate matter. Long-term blockage of the vacuum valve by dust and particulate matter will prevent the vacuum valve from working properly and greatly affect its working efficiency. Using filter media to block dust and particulate matter can effectively reduce the entry of dust and particulate matter into the vacuum valve. However, it is difficult to keep the filter media clear for a long time and it needs to be replaced frequently. Utility Model Content

[0004] To overcome the problem that existing vacuum valve devices are prone to clogging when faced with dust and particulate matter entrained in the gas, and that filter media need to be replaced frequently.

[0005] The technical solution of this utility model is as follows: a vacuum valve device with cleaning function, including a vacuum valve body, the vacuum valve body including an air passage pipe, an air inlet provided on the rear side of the air passage pipe, a threaded surface provided on the inner diameter of the air inlet, a cleaning component can be installed on the threaded surface, the cleaning component including a filter element that blocks the air inlet, a brush plate provided on the rear side of the filter element that can wipe the rear surface of the filter element, a driving part provided on the rear side of the brush plate that drives the brush plate to rotate, the driving part including a fan impeller that can rotate, the fan impeller and the brush plate being fixed relative to each other.

[0006] Preferably, a second circular tube is provided at one of the threaded surfaces, and the outer diameter of the second circular tube is provided with a second threaded surface that engages with the first threaded surface. The distance between the second circular tube on the front and rear sides is less than the length of the first threaded surface on the front and rear sides, and the second threaded surface can engage in the front area of ​​the first threaded surface.

[0007] Preferably, a first circular tube is provided on the front side of the second circular tube, the outer diameter of the first circular tube is smaller than the outer diameter of the second circular tube, and a filter element is bonded to the right side of the first circular tube.

[0008] Preferably, the brush plate includes bristles on the front side, the filter element includes a ring, a filter cloth is attached to the rear side of the ring, the filter cloth covers the inner diameter of the ring, and the bristles can slide against the surface of the filter element.

[0009] Preferably, a support plate is provided on the rear side of the circular tube, with the bottom of the support plate adhering to the surface where the outer diameter of the circular tube is located and the top of the support plate adhering to the surface where the inner diameter of the circular tube is located. A bracket can be installed on the rear side of the support plate, and the impeller is rotatably connected to the rear side of the bracket.

[0010] Preferably, the outer diameter of the filter element is smaller than the outer diameter of the circular tube, and the top of the support plate is provided with a mounting groove that can fit the radial outer wall of the filter element.

[0011] Preferably, the top of the tray has a dust leakage hole corresponding to the rear side of the mounting groove.

[0012] Preferably, the bracket includes a mounting plate that fits against the rear side of the support plate. The rear side of the mounting plate is provided with mounting screws that engage with the support plate. A vertical post is provided on the rear side of the mounting plate. A rotating shaft made of polyoxymethylene passes through the upper rear side of the vertical post. The axis of the rotating shaft coincides with the axis of the circular tube. An integrally formed retaining ring is provided at the outer diameter of the rotating shaft. The front side of the retaining ring can fit against the rear side of the vertical post. The impeller includes a sleeve. Blades are arranged in a ring at the outer diameter of the sleeve. A through hole is provided at the axis of the sleeve. The through hole is interference-fitted with the outer diameter of the rotating shaft. A brush plate is fitted against the front side of the rotating shaft. A fixing screw is provided on the front side of the brush plate. The fixing screw can pass through the brush plate and engage with the rotating shaft. Thread adhesive is applied to the threads of the fixing screw.

[0013] The beneficial effects of this utility model are as follows: the flow of gas inside the vacuum valve body drives the impeller to rotate, thereby achieving the effect of the brush plate wiping the surface of the filter element, cleaning the surface of the filter element, maintaining the cleanliness of the internal structure of the vacuum valve body, and the cleaning component enables the filter element to remain unobstructed for a long time. Attached Figure Description

[0014] Figure 1 This is a schematic diagram of the overall structure of this utility model;

[0015] Figure 2 This is a schematic diagram of the brush plate structure of this utility model;

[0016] Figure 3 This is a schematic diagram of the rotating shaft structure of this utility model;

[0017] Figure 4 This is a schematic diagram of the support structure of this utility model;

[0018] Figure 5 This is a schematic diagram of the retaining ring structure of this utility model.

[0019] Explanation of reference numerals in the attached drawings: 1. Vacuum valve body; 11. Air passage pipe; 111. Air inlet; 1111. Threaded surface one; 2. Round tube one; 21. Support plate; 211. Mounting groove; 212. Dust leakage hole; 22. Round tube two; 221. Threaded surface two; 31. Fan impeller; 311. Sleeve; 3111. Sleeve hole; 312. Blade; 32. Brush plate; 321. Brush bristles; 322. Fixing screw; 4. Rotating shaft; 41. Retaining ring; 6. Filter element; 61. Filter cloth; 62. Circular ring; 7. Bracket; 71. Upright pole; 72. Mounting plate; 721. Mounting screw. Detailed Implementation

[0020] The present invention will be further described below with reference to the accompanying drawings and embodiments.

[0021] Please see Figure 1 - Figure 5This utility model provides an embodiment of a vacuum valve device with a cleaning function, comprising a vacuum valve body 1, the vacuum valve body 1 including an air passage pipe 11, an air inlet 111 on the rear side of the air passage pipe 11, a threaded surface 1111 on the inner diameter of the air inlet 111, a cleaning component that can be installed on the threaded surface 1111, the cleaning component including a filter element 6 that blocks the air inlet 111, a brush plate 32 on the rear side of the filter element 6 for wiping the rear surface of the filter element 6, and a drive brush plate 32 for rotating the brush plate 32 on the rear side. The drive unit includes a rotating impeller 31, which is fixed relative to the brush plate 32. The impeller 31 is driven to rotate by the flow of gas inside the vacuum valve body 1, thereby achieving the effect of wiping the surface of the filter element 6 by the brush plate 32. This cleans the surface of the filter element 6 and maintains the cleanliness of the internal structure of the vacuum valve body 1. The cleaning component ensures that the filter element 6 can be kept clear for a long time. A second round tube 22 is provided at the threaded surface 1111, and the outer diameter of the second round tube 22 is provided with a threaded surface 22 that engages with the threaded surface 1111. 1. The distance between the front and rear sides of the second circular tube 22 is less than the length of the front and rear sides of the first threaded surface 1111. The second threaded surface 221 can engage with the front area of ​​the first threaded surface 1111. By avoiding the rear area of ​​the first threaded surface 1111, after the second circular tube 22 is installed on the first threaded surface 1111, a tube can still be installed, so that the air passage where the vacuum valve body 1 is located is connected. The front side of the second circular tube 22 is provided with a first circular tube 2. The outer diameter of the first circular tube 2 is smaller than the outer diameter of the second circular tube 22. The filter element 6 is bonded to the right side of the first circular tube 2. The diameter is smaller than the outer diameter of the second round tube 22, so that the first round tube 2 can avoid the tube connected to the air inlet 111, avoiding interference and installation problems. The brush plate 32 includes brush bristles 321 on the front side. The filter element 6 includes a ring 62. A filter cloth 61 is attached to the back side of the ring 62. The filter cloth 61 covers the inner diameter of the ring 62. The brush bristles 321 can slide against the surface of the filter element 6 and wipe the filter cloth 61 to remove dust, reducing the dust adhesion on the surface of the filter cloth 61 and affecting the working efficiency of the vacuum valve body 1.

[0022] Please see Figure 2 - Figure 5In this embodiment, a support plate 21 is provided on the rear side of the circular tube 2. The bottom of the support plate 21 is attached to the surface where the outer diameter of the circular tube 2 is located, and the top of the support plate 21 is attached to the surface where the inner diameter of the circular tube 2 is located. A bracket 7 can be installed on the rear side of the support plate 21. The impeller 31 is rotatably connected to the rear side of the bracket 7. The support plate 21 facilitates the installation of the bracket 7, allowing the bracket 7 to limit the position of the impeller 31. The outer diameter of the filter element 6 is smaller than the outer diameter of the circular tube 2. The top of the support plate 21 is provided with a radially outward-facing surface that can be attached to the filter element 6. The mounting groove 211 on the wall limits the filter element 6, increasing the firmness of the filter element 6 installation. A dust leakage hole 212 is provided on the top of the support plate 21 corresponding to the rear side of the mounting groove 211. This allows dust particles wiped from the surface of the filter element 6 to fall through the hole, preventing them from accumulating at the lower rear edge of the filter element 6 and affecting the working efficiency of the vacuum valve body 1. The bracket 7 includes a mounting plate 72 that fits against the rear side of the support plate 21. The rear side of the mounting plate 72 is provided with... Mounting screws 721 engage with the mounting plate 21. A vertical rod 71 is located on the rear side of the mounting plate 72. A rotating shaft 4 made of polyoxymethylene passes through the upper rear side of the vertical rod 71. The axis of the rotating shaft 4 coincides with the axis of the circular tube 2. An integrally formed retaining ring 41 is located at the outer diameter of the rotating shaft 4. The front side of the retaining ring 41 can fit against the rear side of the vertical rod 71. The impeller 31 includes a sleeve 311. Blades 312 are arranged in a ring at the outer diameter of the sleeve 311. A through hole 3 is located at the axis of the sleeve 311. 111, the sleeve hole 3111 is interference-fitted with the outer diameter of the rotating shaft 4. The front side of the rotating shaft 4 is fitted with a brush plate 32. The front side of the brush plate 32 is provided with a fixing screw 322. The fixing screw 322 can pass through the brush plate 32 and mesh with the rotating shaft 4. The threads of the fixing screw 322 are coated with thread glue. The rotating shaft 4, which is made of polyoxymethylene, makes it self-lubricating, reducing the use of bearings in confined spaces. The interference fit between the sleeve hole 3111 and the rotating shaft 4 facilitates the installation of the impeller 31.

[0023] During operation, the vacuum valve body 1 is connected to the air circuit system as a working component. When gas flows in the air circuit pipe 11, the gas drives the impeller 31 to rotate, which in turn drives the rotating shaft 4 to rotate. The rotating shaft 4 then drives the brush plate 32 to rotate. The bristles 321 on the front side of the brush plate 32 wipe the dust and particles adhering to the rear surface of the filter element 6, causing the dust and particles to fall off. Thanks to the arc-shaped structure of the support plate 21, the dust and particles will gather in one direction, and this gathering direction is located above the dust leakage hole 212, so the dust and particles will fall through the dust leakage hole 212. Reduce obstruction of filter element 6 to enable it to work for a long time. When filter element 6 reaches the end of its service life, remove vacuum valve body 1 from the air circuit system. Use pliers to clamp the tray 21 and rotate the cleaning component around the axis of the round tube 22. This allows it to be removed from the threaded surface 1111 of vacuum valve body 1. The rotation here refers to removal by rotation. The method of removal by rotation is common knowledge for those skilled in the art. Then replace it with a new one and reconnect vacuum valve body 1 to the air circuit system. It is recommended to replace it every six months. The old cleaning component can be sent to the manufacturer for repair and maintenance. The repair and maintenance methods here are known to those skilled in the art.

[0024] Through the above steps, the flow of gas inside the vacuum valve body 1 drives the impeller 31 to rotate, thereby achieving the effect of brush plate 32 wiping the surface of filter element 6, cleaning the surface of filter element 6, maintaining the cleanliness of the internal structure of vacuum valve body 1, and the cleaning component ensures that filter element 6 can remain unobstructed for a long time. This solves the problem that vacuum valve devices in the prior art are prone to clogging when faced with dust and particulate matter entrained in the gas, and that filter media need to be replaced frequently.

Claims

1. A vacuum valve device with a cleaning function, comprising a vacuum valve body (1), characterized in that: The vacuum valve body (1) includes an air passage pipe (11), an air inlet (111) is provided on the rear side of the air passage pipe (11), a threaded surface (1111) is provided on the inner diameter of the air inlet (111), a cleaning component can be installed on the threaded surface (1111), the cleaning component includes a filter element (6) that blocks the air inlet (111), a brush plate (32) that can wipe the rear surface of the filter element (6) is provided on the rear side of the filter element (6), a drive unit that drives the brush plate (32) to rotate is provided on the rear side of the brush plate (32), the drive unit includes a fan impeller (31) that can rotate, and the fan impeller (31) and the brush plate (32) are fixed relative to each other.

2. The vacuum valve device with cleaning function according to claim 1, characterized in that: A circular tube (22) is provided at the threaded surface (1111). The outer diameter of the circular tube (22) is provided with a threaded surface (221) that meshes with the threaded surface (1111). The distance between the circular tube (22) on the front and rear sides is less than the length of the threaded surface (1111) on the front and rear sides. The threaded surface (221) can mesh with the front area of ​​the threaded surface (1111).

3. The vacuum valve device with cleaning function according to claim 2, characterized in that: A circular tube (2) is provided on the front side of the second circular tube (22). The outer diameter of the first circular tube (2) is smaller than the outer diameter of the second circular tube (22). The filter element (6) is bonded to the right side of the first circular tube (2).

4. The vacuum valve device with cleaning function according to claim 3, characterized in that: The brush plate (32) includes bristles (321) on the front side, and the filter element (6) includes a ring (62). A filter cloth (61) is attached to the rear side of the ring (62). The filter cloth (61) covers the inner diameter of the ring (62), and the bristles (321) can slide against the surface of the filter element (6).

5. The vacuum valve device with cleaning function according to claim 4, characterized in that: A support plate (21) is provided on the rear side of the circular tube (2). The bottom of the support plate (21) is attached to the surface where the outer diameter of the circular tube (2) is located, and the top of the support plate (21) is attached to the surface where the inner diameter of the circular tube (2) is located. A bracket (7) can be installed on the rear side of the support plate (21), and the impeller (31) is rotatably connected to the rear side of the bracket (7).

6. The vacuum valve device with cleaning function according to claim 5, characterized in that: The outer diameter of the filter element (6) is smaller than the outer diameter of the circular tube (2), and the top of the support plate (21) is provided with a mounting groove (211) that can fit the radial outer wall of the filter element (6).

7. The vacuum valve device with cleaning function according to claim 6, characterized in that: The top of the tray (21) is provided with a dust leakage hole (212) corresponding to the rear side of the mounting groove (211).

8. The vacuum valve device with cleaning function according to claim 7, characterized in that: The bracket (7) includes a mounting plate (72) that fits against the rear side of the support plate (21). The rear side of the mounting plate (72) is provided with mounting screws (721) that engage with the support plate (21). A vertical rod (71) is provided on the rear side of the mounting plate (72). A rotating shaft (4) made of polyoxymethylene passes through the upper rear side of the vertical rod (71). The axis of the rotating shaft (4) coincides with the axis of the circular tube (2). An integrally formed retaining ring (41) is provided at the outer diameter of the rotating shaft (4). The front side of the retaining ring (41) can fit against the rear side of the vertical rod (71). The fan blades... The wheel (31) includes a sleeve (311), with blades (312) arranged in annular array on the outer diameter of the sleeve (311). A through hole (3111) is provided on the axis of the sleeve (311). The through hole (3111) is interference-fitted with the outer diameter of the rotating shaft (4). A brush plate (32) is attached to the front side of the rotating shaft (4). A fixing screw (322) is provided on the front side of the brush plate (32). The fixing screw (322) can pass through the brush plate (32) and mesh with the rotating shaft (4). Thread glue is applied to the threads of the fixing screw (322).

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