Sheet carrier and sheet conveying apparatus
By designing a sheet carrier with cavities and supports, the problem that existing carriers cannot passivate double-section silicon wafers was solved, achieving effective passivation of the double-section silicon wafers and improving the passivation effect.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-03-21
- Publication Date
- 2026-03-20
AI Technical Summary
Existing carriers cannot effectively passivate silicon wafers with two cross sections simultaneously, and are not suitable for passivation processes of silicon wafers with two cross sections.
A sheet material carrier is designed, comprising a cavity and a support. The cavity has a communicating receiving space and an opening. The support is disposed at the bottom of the receiving space to support the sheet material and form first and second gaps for the passage of passivation gas, ensuring that both cross-sections can be passivated.
This technology enables dual-section passivation of sheet materials, improving the passivation effect, reducing the obstructed area, and ensuring the passivation quality.
Smart Images
Figure CN224022215U_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The present disclosure relates to the field of photovoltaic and semiconductor technology, and in particular to a sheet carrier and a sheet conveying device. BACKGROUND
[0002] At present, in the photovoltaic and semiconductor industry, a silicon wafer is usually cut into two or even more pieces to improve the conversion efficiency of a product made of the silicon wafer as a base material, so as to achieve the purpose of cost reduction and efficiency improvement. After the silicon wafer is cut, a fracture surface is formed. In order to ensure the conversion efficiency of the product, an Edge Passivation Deposition (EPD) device is usually used in the industry, and an Atomic Layer Deposition (ALD) technology is adopted to passivate the fracture surface of the silicon wafer.
[0003] At present, when the silicon wafer is subjected to a passivation process, a carrier is usually used to hold the silicon wafer. However, the carrier in the related art can only expose one fracture surface of the silicon wafer after holding the silicon wafer. Therefore, the carrier in the related art is only suitable for the passivation process of the silicon wafer with one fracture surface, and cannot be applied to the passivation process of the silicon wafer with two fracture surfaces. CONTENT OF THE UTILITY MODEL
[0004] Therefore, the embodiments of the present disclosure provide a sheet carrier and a sheet conveying device, which can realize the passivation of two fracture surfaces of a sheet-shaped material.
[0005] In a first aspect, the embodiments of the present disclosure provide a sheet carrier applied to a passivation process of a sheet-shaped material, the sheet-shaped material including a first fracture surface and a second fracture surface arranged opposite to each other in a thickness direction of the sheet-shaped material, wherein the sheet carrier includes: a cavity having a containing space and an opening in communication with each other, the containing space being configured to contain the sheet-shaped material, the cavity being detachable or having an access passage for the sheet-shaped material to access the containing space, the opening being configured to allow a passivation gas to flow into and / or out of the containing space; and a support arranged at a bottom of the containing space and configured to support the sheet-shaped material in the containing space, wherein, when the containing space contains the sheet-shaped material, a top of the containing space is configured to be close to the first fracture surface and form a first gap, and a bottom of the containing space is configured to be close to the second fracture surface by isolation of the support and form a second gap, and the first gap and the second gap are both configured to allow the passivation gas to flow therethrough.
[0006] In some embodiments, the support is in point contact or line contact with the second fracture surface.
[0007] In some embodiments, a top of the support has an arc-shaped surface, and the arc-shaped surface is curved towards the bottom of the containing space.
[0008] In some embodiments, the number of the supports is two, and the two supports are respectively located at two sides of the bottom of the accommodating space, so that the two supports can respectively support two ends of the second section.
[0009] In some embodiments, when the cavity is detachable, the top of the cavity is detachable, so that the sheet material can enter or exit the accommodating space when the top of the cavity is in a detached state; or the cavity comprises: a bottom plate connected with the supports and configured to support the supports, wherein, when the accommodating space contains the sheet material, the second section faces the bottom plate and has the second gap with the bottom plate; a top plate oppositely arranged with the bottom plate, wherein, when the accommodating space contains the sheet material, the first section faces the top plate and has the first gap with the top plate; a first side plate connecting the bottom plate and the top plate; a second side plate oppositely arranged with the first side plate and connecting the bottom plate and the top plate, wherein the bottom plate, the top plate, the first side plate and the second side plate form the access channel; a third side plate oppositely arranged with the access channel, connecting the first side plate and the second side plate, and connecting with the bottom plate, the bottom of the third side plate has a first opening, the first opening is close to the bottom of the accommodating space and communicates with the second gap, the passivation gas can flow into the second gap from the first opening and flow out of the access channel.
[0010] In some embodiments, the third side plate and the top plate form a second opening, the second opening is close to the top of the accommodating space and communicates with the first gap, the passivation gas can flow into the first gap from the second opening and flow out of the access channel; or the top plate has a plurality of gas inlets, the gas inlets communicate the accommodating space and outside of the cavity, the passivation gas can flow into the first gap from the gas inlets and flow out of the access channel.
[0011] In some embodiments, the sheet carrier further comprises: a first backing plate, which is separate from the cavity and is capable of being placed in the accommodation space, wherein the support is further configured to support the first backing plate; and / or a second backing plate, which is separate from the cavity and is capable of being placed in the accommodation space, wherein the support is further configured to support the second backing plate; wherein, when the first backing plate and the sheet material are in the accommodation space, a first surface of the first backing plate is in contact with the third side plate, and a second surface of the first backing plate is in contact with a surface of the sheet material, the first surface of the first backing plate being opposite to the second surface of the first backing plate; and / or, when the second backing plate and the sheet material are in the accommodation space, a first surface of the second backing plate is in contact with a surface of the outermost sheet material.
[0012] In some embodiments, when the sheet material is in the accommodation space, a vertical distance between the first side plate and the second side plate is less than 2 mm and greater than 1 mm, and the difference between the vertical distance and a size of the sheet material in a first direction is less than 2 mm and greater than 1 mm, wherein the first direction is a direction perpendicular from the first side plate to the second side plate.
[0013] In some embodiments, the bottom plate comprises: a first sub-bottom plate connected to the first side plate and the third side plate, respectively; and a second sub-bottom plate connected to the second side plate and the third side plate, respectively; wherein a first avoiding opening is formed between the first sub-bottom plate and the second sub-bottom plate, and the third side plate has a second avoiding opening, the second avoiding opening being in communication with the first avoiding opening.
[0014] In a second aspect, embodiments of the present disclosure provide a sheet carrying device, comprising: the sheet carrier of the first aspect, which is configured to contain sheet material; a sheet taking and placing assembly, which is configured to take and place the sheet material in the sheet carrier; and a carrier carrying assembly, which is configured to compress the sheet material contained in the sheet carrier and carry the sheet carrier.
[0015] The sheet carrier provided by the embodiments of the present disclosure comprises a cavity and a support. The cavity has an accommodation space and an opening in communication with each other, and the accommodation space is used to accommodate sheet material. The cavity is detachable or has an access channel for the sheet material to access the accommodation space. The support is arranged at the bottom of the accommodation space of the cavity and is capable of supporting the sheet material. The sheet material has a first cross section and a second cross section arranged opposite to each other, and when the support supports the sheet material, a first gap is formed between the first cross section and the top of the accommodation space, and a second gap is formed between the second cross section and the bottom of the accommodation space. A passivation gas can flow into the accommodation space through the opening, flow through the first gap and the second gap, and passivate the first cross section and the second cross section of the sheet material. BRIEF DESCRIPTION OF DRAWINGS
[0016] Figure 1 Fig. 1 shows a perspective view of a sheet carrier and a sheet material according to an embodiment of the present disclosure.
[0017] Figure 2 Fig. 2 shows a front view of a sheet carrier and a sheet material according to an embodiment of the present disclosure.
[0018] Figure 3 Fig. 3 shows a rear view of a sheet carrier and a sheet material according to an embodiment of the present disclosure.
[0019] Figure 4 Fig. 4 shows a perspective view of a sheet carrier according to an embodiment of the present disclosure.
[0020] Figure 5 Fig. 5 shows a perspective view of a top plate according to an embodiment of the present disclosure.
[0021] Figure 6 Fig. 6 shows a rear view of a sheet carrier according to another embodiment of the present disclosure.
[0022] Figure 7 Fig. 7 shows a perspective view of a sheet carrier according to another embodiment of the present disclosure.
[0023] Figure 8 Fig. 8 shows a perspective view of a first spacer, a second spacer and a sheet material according to an embodiment of the present disclosure.
[0024] Figure 9 Fig. 9 shows an application scenario of a sheet handling device according to an embodiment of the present disclosure.
[0025] Reference Signs:
[0026] 1, sheet handling device; 10, sheet carrier; 100, cavity; 101, access passage; 102, second opening; 103, first opening; 1001, accommodation space; 1011, first gap; 1021, second gap; 110, bottom plate; 1110, first sub-bottom plate; 1120, second sub-bottom plate; 1002, first escape opening; 1003, second escape opening; 120, top plate; 1201, air inlet hole; 130, first side plate; 140, second side plate; 150, third side plate; 200, support; 201, arc surface; 300, first spacer; 301, first surface of the first spacer; 302, second surface of the first spacer; 400, second spacer; 401, first surface of the second spacer; 402, second surface of the second spacer; 500, handle; 20, sheet taking and placing assembly; 30, carrier handling assembly; 2, sheet material; 21, first cross section; 22, second cross section; 2001, first surface of the sheet material; 2002, second surface of the sheet material. DETAILED DESCRIPTION
[0027] The technical solutions of the embodiments of this disclosure will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this disclosure, and not all embodiments. Based on the embodiments of this disclosure, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this disclosure.
[0028] Figure 1 The diagram shown is a structural schematic of a sheet carrier and sheet material provided in an embodiment of this disclosure. Figure 2 The image shown is a front view of a sheet carrier and sheet material provided in an embodiment of this disclosure. Figure 3 The image shown is a rear view of a sheet carrier and sheet material provided in an embodiment of this disclosure. Figure 4 The diagram shown is a structural schematic of a sheet carrier provided in one embodiment of this disclosure. Figures 1 to 4 As shown, the sheet carrier 10 is used in the passivation process of the sheet material 2, which includes a first cross-section 21 and a second cross-section 22 parallel to and opposite to the thickness direction of the sheet material 2. The sheet carrier 10 includes a cavity 100 and a support member 200. The cavity 100 has an interconnected receiving space 1001 and an opening. The receiving space 1001 is used to receive the sheet material 2. The cavity 100 is detachable or has an inlet / outlet channel 101 for the sheet material 2 to enter and exit the receiving space 1001. The opening is used for the passivation gas to flow into or out of the receiving space 1001, or for the passivation gas to flow into and out of the receiving space 1001. The support member 200 is disposed at the bottom of the receiving space 1001 for supporting the sheet material 2 located within the receiving space 1001. When the accommodating space 1001 accommodates the sheet material 2, the top of the accommodating space 1001 can approach the first section 21 and form a first gap 1011, and the bottom of the accommodating space 1001 can approach the second section 22 through the isolation of the support member 200 and form a second gap 1021. Both the first gap 1011 and the second gap 1021 are used for the passage of passivation gas.
[0029] The sheet carrier 10 provided by the embodiments of the present disclosure comprises a cavity 100 and a support 200. The cavity 100 has a containing space 1001 and an opening which are in communication with each other, and the containing space 1001 is used for containing a sheet material 2. The cavity 100 is detachable or has an access passage 101 for the sheet material 2 to access the containing space 1001. The support 200 is arranged at the bottom of the containing space 1001 of the cavity 100 and is capable of supporting the sheet material 2. The sheet material 2 has a first section 21 and a second section 22 which are arranged oppositely. In the case that the support 200 supports the sheet material 2, a first gap 1011 is formed between the first section 21 and the top of the containing space 1001, and a second gap 1021 is formed between the second section 22 and the bottom of the containing space 1001. A passivation gas can flow into the containing space 1001 through the opening, flow through the first gap 1011 and the second gap 1021, and passivate the first section 21 and the second section 22 of the sheet material 2.
[0030] Exemplarily, the support 200 is in a long rod shape, and the support 200 extends into the containing space 1001 from the access passage 101, so that the support 200 can support a plurality of sheet materials 2 which are stacked and placed.
[0031] Exemplarily, the sheet material 2 can be a silicon wafer, a battery plate, a glass substrate, etc.
[0032] Exemplarily, the cross-sectional shape of the cavity 100 can be a rectangle, a parallelogram, or other polygons or irregular shapes. Exemplarily, the cross-sectional shape of the access passage 101 can be a rectangle, a trapezoid, or other polygons or irregular shapes. Exemplarily, the cross-sectional shape of the first opening 103 can be a rectangle, a trapezoid, or other polygons or irregular shapes.
[0033] In some embodiments, the support 200 is in point contact or line contact with the second section 22.
[0034] The contact mode of point contact or line contact can reduce the contact area of the support 200 with the second section 22 as much as possible, so as to reduce the shielding of the support 200 to the second section 22 as much as possible, so that the second section 22 can be exposed as much as possible, thereby ensuring the passivation quality of the second section 22.
[0035] In some embodiments, the top of the support 200 has an arc surface 201 which is curved towards the bottom of the containing space 1001.
[0036] The support 200 is in line contact with the second section 22 through the arc surface 201, so as to reduce the shielding of the support 200 to the second section 22 as much as possible, while ensuring that the support 200 can stably support the sheet material 2.
[0037] In some embodiments, the number of the supports 200 is two, and the two supports 200 are respectively located at two sides of the bottom of the accommodating space 1001, so that the two supports 200 can respectively support two ends of the second section 21, and the stability of the placement state of the sheet material 2 is further improved.
[0038] In some embodiments, when the cavity 100 is detachable, the top of the cavity 100 is detachable, so that when the top of the cavity 100 is in a detached state, the sheet material 2 can enter and exit the accommodating space 1001.
[0039] In some embodiments, as shown in Figures 2 to 4 The cavity 100 includes a bottom plate 110, a top plate 120, a first side plate 130, a second side plate 140, and a third side plate 150. The bottom plate 110 is connected with the support 200 and is configured to support the support 200. When the sheet material 2 is accommodated in the accommodating space 1001, the second section 22 faces the bottom plate 110 and has a second gap 1021 with the bottom plate 110. The top plate 120 is arranged opposite to the bottom plate 110, and when the sheet material 2 is accommodated in the accommodating space 1001, the first section 21 faces the top plate 120 and has a first gap 1011 with the top plate 120, and the first gap 1011 and the second gap 1021 form a gas flow space. The first side plate 130 connects the bottom plate 110 and the top plate 120. The second side plate 140 is arranged opposite to the first side plate 130 and connects the bottom plate 110 and the top plate 120. The bottom plate 110, the top plate 120, the first side plate 130, and the second side plate 140 form an access channel 101. The third side plate 150 is arranged opposite to the access channel 101, connects the first side plate 130 and the second side plate 140, and is connected with the bottom plate 110. The bottom of the third side plate 150 has a first opening 103. The first opening 103 is close to the bottom of the accommodating space 1001 and communicates with the second gap 1021, and the passivation gas can flow into the second gap 1021 through the first opening 103 and flow out through the access channel 101.
[0040] The structure of the cavity 100 is simple. In addition, the above-mentioned way of introducing the passivation gas into the second gap 1021 through the first opening 103 is simple, reliable, and facilitates the circulation of the passivation gas in the second gap 1021, which can not only ensure that there is enough passivation gas in the second gap 1021, but also facilitate the flow of excess passivation gas out of the access channel 101.
[0041] Exemplarily, the connection between the mutually connected plates adopts a detachable connection mode, so as to facilitate the replacement and maintenance of each plate.
[0042] In some embodiments, as shown in Figure 3As shown, the third side plate 150 and the top plate 120 form a second opening 102, which is close to the top of the accommodating space 1001 and communicates with the first gap 1011. The passivation gas can flow into the first gap 1011 through the second opening 102 and flow out through the access passage 101.
[0043] The above-mentioned way of passing the passivation gas into the first gap 1011 through the second opening 102 is simple, reliable, and facilitates the circulation of the passivation gas in the first gap 1011, which can ensure that there is sufficient passivation gas in the first gap 1011 and facilitate the flow of excess passivation gas out of the access passage 101.
[0044] In some embodiments, the top plate 120 has a plurality of gas inlet holes 1201, which communicate the accommodating space 1001 and the outside of the cavity 100. The passivation gas can flow into the first gap 1011 through the gas inlet holes 1201 and flow out through the access passage 101.
[0045] For example, as shown in Figure 5 The plurality of gas inlet holes 1201 are uniformly arranged to further improve the uniformity of gas intake.
[0046] In the case where the top plate 120 has a plurality of gas inlet holes 1201, the third side plate 150 is sealingly connected to the top plate 120, which can control the amount of passivation gas flowing into the first gap 1011 and save energy.
[0047] For example, the cross-sectional shape of the second opening 102 can be rectangular, trapezoidal, or other polygonal or irregular shape.
[0048] In some embodiments, as shown in Figure 6 and Figure 8 The sheet material carrier 10 further includes a first backing plate 300. The first backing plate 300 is separately provided from the cavity 100 and can be placed in the accommodating space 1001. The support 200 is further configured to support the first backing plate 300. In the case where the first backing plate 300 and the sheet material 2 are located in the accommodating space 1001, the first surface 301 of the first backing plate is in contact with the third side plate 150, the second surface 302 of the first backing plate is in contact with the surface of the sheet material 2, and the first surface 301 of the first backing plate is oppositely arranged to the second surface 302 of the first backing plate.
[0049] The first backing plate 300 is used to shield the surface of the sheet material 2 to reduce the phenomenon of around-plating of the surface of the sheet material 2.
[0050] For example, the second surface 302 of the first backing plate is in contact with the first surface 2001 of the sheet material.
[0051] In addition, when the first pad plate 300 and the sheet material 2 are simultaneously taken out of the accommodating space 1001, the sheet taking and placing assembly 20 is in contact with the first surface 301 of the first pad plate, so as to avoid the sheet taking and placing assembly 20 directly contacting the first surface 2001 of the sheet material 2, thereby avoiding the first surface 2001 of the sheet material 2 being marked or even the sheet material 2 being broken due to the sheet taking and placing assembly 20 applying too large force to the sheet material 2.
[0052] In some embodiments, as shown in Figs. 1 and 2, the sheet material carrier 10 further comprises a first pad plate 300. The first pad plate 300 is separate from the cavity 100 and is capable of being placed in the accommodating space 1001. The support 200 is further configured to support the first pad plate 300. When the accommodating space 1001 contains at least one sheet material 2, a first surface 301 of the first pad plate 300 is in contact with a surface of the outermost sheet material 2. Figure 7 Figure 8 In some embodiments, as shown in Figs. 1 and 2, the sheet material carrier 10 further comprises a first pad plate 300. The first pad plate 300 is separate from the cavity 100 and is capable of being placed in the accommodating space 1001. The support 200 is further configured to support the first pad plate 300. When the accommodating space 1001 contains at least one sheet material 2, a first surface 301 of the first pad plate 300 is in contact with a surface of the outermost sheet material 2.
[0053] Exemplarily, the first surface 301 of the first pad plate 300 is in contact with the first surface 2001 of the outermost sheet material 2.
[0054] The first surface 301 of the first pad plate 300 shields the first surface 2001 of the outermost sheet material 2, so as to reduce the edge plating phenomenon of the first surface 2001 of the outermost sheet material 2.
[0055] In addition, when the first pad plate 300 and the sheet material 2 are simultaneously taken out of the accommodating space 1001, the sheet taking and placing assembly 20 is in contact with the first surface 301 of the first pad plate, so as to avoid the sheet taking and placing assembly 20 directly contacting the first surface 2001 of the sheet material 2, thereby avoiding the first surface 2001 of the sheet material 2 being marked or even the sheet material 2 being broken due to the sheet taking and placing assembly 20 applying too large force to the sheet material 2.
[0056] In some embodiments, when the accommodating space 1001 contains the sheet material 2, a vertical distance between the first side plate 130 and the second side plate 140 is less than 2 mm and greater than 1 mm than a size of the sheet material 2 in the first direction X1, the first direction X1 being a direction perpendicular to the second side plate 140 from the first side plate 130.
[0057] By reasonably setting the size of the accommodating space 1001 in the first direction X1, the sheet material 2 is facilitated to be placed in or taken out of the accommodating space 1001, and the accommodating space 1001 is facilitated to shield the non-cross section of the sheet material 2, so as to reduce the edge plating phenomenon of the non-cross section of the sheet material 2.
[0058] In some embodiments, as shown in Figure 4 and Figure 6 The bottom plate 110 includes a first sub-bottom plate 1110 and a second sub-bottom plate 1120. The first sub-bottom plate 1110 is connected with the first side plate 130 and the third side plate 150 respectively. The second sub-bottom plate 1120 is connected with the second side plate 140 and the third side plate 150 respectively. The first sub-bottom plate 1110 and the second sub-bottom plate 1120 form a first avoiding opening 1002. The third side plate 150 has a second avoiding opening 1003, which is in communication with the first avoiding opening 1002.
[0059] By setting the first avoiding opening 1002 and the second avoiding opening 1003, the sheet taking and placing assembly 20 is avoided so as to facilitate the sheet taking and placing assembly 20 to take and place the first backing plate 300, the second backing plate 400 and the sheet material 2.
[0060] Exemplarily, the two supports 200 are detachably connected with the first sub-bottom plate 1110 and the second sub-bottom plate 1120 respectively, so as to facilitate the replacement and maintenance of the supports 200.
[0061] Figure 9 The application scenario of the sheet conveying device provided by an embodiment of the present disclosure is shown. As shown in Figure 9 The sheet conveying device 1 includes the sheet carrier 10, the sheet taking and placing assembly 20 and the carrier conveying assembly 30 mentioned in the above embodiments. The sheet carrier 10 is configured to contain the sheet material 2, and the sheet taking and placing assembly 20 is configured to take and place the sheet material 2 in the sheet carrier 10. The carrier conveying assembly 30 is configured to compress the sheet material 2 contained in the sheet carrier 10 and convey the sheet carrier 10.
[0062] Exemplarily, as shown in Figure 4 The sheet carrier 10 further includes two handles 500, which are arranged at opposite edge regions of the top plate 120 and extend in the direction indicated by the access passage 101 to the third side plate 150. The carrier conveying assembly 30 conveys the sheet carrier 10 by grabbing the two handles 500. In addition, by reasonably setting the number and position of the handles 500, the conveying stability of the carrier conveying assembly 30 to the sheet carrier 10 is improved.
[0063] Since the sheet conveying device 1 includes the sheet carrier 10, the sheet conveying device 1 includes all the technical features and technical effects of the sheet carrier 10, which will not be described here.
[0064] In the embodiments of the present disclosure, if not specifically limited, the form of connection can be detachable connection through bolt and nut, screw, buckle, magnetic attraction and the like. In some connections, if there is no special requirement for the form of detachable connection, it can be non-detachable connection through welding, bonding and the like.
[0065] In the description, "one embodiment", "an embodiment", or the like means that the described embodiment can include a particular feature, structure, or characteristic, but every embodiment can not necessarily include the particular feature, structure, or characteristic. In addition, such phrases are not necessarily referring to the same embodiment. Further, when a particular feature, structure, or characteristic is described in connection with an embodiment, it is within the knowledge of those skilled in the art to effect such feature, structure, or characteristic in connection with an alternative or further embodiment.
[0066] It should be understood that "on", "above", and "over" in the present disclosure should be interpreted in the broadest possible way, so that "on" means not only "directly on", but also includes the meaning of "on" with intermediate features or layers therebetween, and "above" or "over" includes not only the meaning of "above" or "over", but also the meaning of "above" or "over" without intermediate features or layers therebetween (i.e., directly on).
[0067] In addition, spatial relative terms, such as "under", "below", "lower", "on", "above", "upper" and the like, can be used herein for ease of description to describe one component or feature's relationship to another component or feature as illustrated in the figures. The spatial relative terms are intended to encompass different orientations of the components in use or operation in addition to the orientations depicted in the figures. The devices can have other orientations (rotated 90 degrees or otherwise) and the spatial relative descriptors used herein can be interpreted accordingly.
[0068] It should be noted that, in this document, the terms "comprising", "including", or any other variant thereof are intended to cover non-exclusive inclusions, so that a process, method, article, or device including a series of elements not only includes those elements, but also includes other elements not explicitly listed, or further includes elements inherent to such a process, method, article, or device. Without more limitations, the element defined by the statement "including a" does not exclude the presence of additional identical elements in the process, method, article, or device including the element.
[0069] The above description is only the preferred embodiment of the present disclosure and is not intended to limit the present disclosure. Any modification, equivalent replacement, etc. made within the spirit and principle of the present disclosure shall be included in the protection scope of the present disclosure.
Claims
1. A sheet carrier, characterized in that, A passivation process applied to sheet materials, the sheet material comprising a first cross-section and a second cross-section parallel to the thickness direction of the sheet material and disposed opposite to each other, wherein the sheet carrier comprises: A cavity having interconnected receiving spaces and openings, the receiving spaces for receiving the sheet material, the cavity being detachable or having access channels for the sheet material to enter and exit the receiving spaces, and the openings for the inflow and / or outflow of passivating gas from the receiving spaces; A support member is disposed at the bottom of the receiving space to support the sheet material located within the receiving space; When the accommodating space accommodates the sheet material, the top of the accommodating space can approach the first cross-section and form a first gap, and the bottom of the accommodating space can approach the second cross-section through the isolation of the support member and form a second gap. Both the first gap and the second gap are used to allow the passivating gas to flow.
2. The sheet carrier according to claim 1, characterized in that, The support member is in point contact or line contact with the second cross-section.
3. The sheet carrier according to claim 2, characterized in that, The top of the support has an arcuate surface that curves toward the bottom of the receiving space.
4. The sheet carrier according to claim 2, characterized in that, The number of the support members is two, and the two support members are respectively located on both sides of the bottom of the accommodating space, so that the two support members can support the two ends of the second section.
5. The sheet carrier according to any one of claims 1 to 4, characterized in that, When the cavity is detachable, the top of the cavity is also detachable, so that the sheet material can enter and exit the receiving space when the top of the cavity is in the detached state; Alternatively, the cavity may include: A base plate, connected to the support member, is configured to support the support member, wherein, when the receiving space contains the sheet material, the second cross-section faces the base plate and has the second gap with the base plate; A top plate is disposed opposite to the bottom plate, wherein, when the receiving space contains the sheet material, the first cross-section faces the top plate and has the first gap between it and the top plate; The first side plate connects the bottom plate and the top plate; The second side plate is disposed opposite to the first side plate and connects the bottom plate and the top plate, wherein the bottom plate, the top plate, the first side plate and the second side plate form the access channel; The third side plate is disposed opposite to the inlet / outlet channel and connects the first side plate and the second side plate, and is connected to the bottom plate. The bottom of the third side plate has a first opening, which is close to the bottom of the accommodating space and communicates with the second gap. The passivating gas can flow into the second gap through the first opening and out through the inlet / outlet channel.
6. The sheet carrier according to claim 5, characterized in that, A second opening is formed between the third side plate and the top plate. The second opening is close to the top of the accommodating space and communicates with the first gap. The passivating gas can flow into the first gap through the second opening and flow out through the inlet / outlet channel. or, The top plate has multiple air inlets, which connect the accommodating space and the outside of the cavity. The passivating gas can flow into the first gap through the air inlets and flow out through the inlet / outlet channel.
7. The sheet carrier according to claim 6, characterized in that, Also includes: A first pad, separately disposed from the cavity, is capable of being placed in the receiving space, wherein the support member is further configured to support the first pad; wherein, when the first pad and the sheet material are located in the receiving space, the first surface of the first pad contacts the third side plate, the second surface of the first pad contacts the surface of the sheet material, and the first surface of the first pad and the second surface of the first pad are disposed opposite to each other. And / or, The second pad, which is separate from the cavity, can be placed in the receiving space, wherein the support member is further configured to support the second pad; wherein, when the receiving space contains at least one sheet of the sheet material, the first surface of the second pad is in contact with the surface of the outermost sheet material.
8. The sheet carrier according to claim 6, characterized in that, When the accommodating space accommodates the sheet material, the difference between the vertical distance between the first side plate and the second side plate and the size of the sheet material in the first direction is less than 2 mm and greater than 1 mm, wherein the first direction is the direction perpendicular to the second side plate from the first side plate.
9. The sheet carrier according to claim 6, characterized in that, The base plate includes: The first sub-base plate is connected to the first side plate and the third side plate respectively; The second sub-base plate is connected to the second side plate and the third side plate respectively; A first clearance opening is formed between the first sub-base plate and the second sub-base plate, and the third side plate has a second clearance opening, which is connected to the first clearance opening.
10. A sheet material handling device, characterized in that, include: The sheet carrier according to any one of claims 1 to 9 is configured to hold sheet material; The sheet pick-and-place assembly is configured to pick up and place the sheet material into the sheet carrier; A carrier transport assembly is configured to press the sheet material contained in the sheet carrier and transport the sheet carrier.