Cold trap device and semiconductor process equipment

Abstract

The utility model discloses a cold trap device and semiconductor process equipment, and the cold trap device comprises a housing which is internally provided with an accommodation space and is provided with an air inlet, an air outlet and a maintenance window which are communicated with the accommodation space; the condensation pipe is arranged in the containing space, a first gap is formed between the condensation pipe and the inner wall of the shell, and the top end of the condensation pipe is detachably connected with the top wall of the shell; the maintenance window is used for allowing the condenser pipe to enter and exit the accommodating space; the filtering barrel is arranged in the condensation pipe and fixedly connected with the condensation pipe, the interior of the filtering barrel communicates with the air outlet, and a second gap is formed between the filtering barrel and the inner wall of the condensation pipe; the maintenance cover plate is arranged at the maintenance window and used for closing or opening the maintenance window; the cold trap device is configured to enable gas entering the accommodating space through the gas inlet to enter the filter barrel through the first gap and the second gap in sequence and then to be discharged through the gas outlet. During maintenance, the outer barrel, the butterfly valve, the angle valve and other components do not need to be disassembled, so that the maintenance operation difficulty of the filter barrel can be reduced.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of semiconductor technology, in particular to a cold trap device and a semiconductor process equipment. BACKGROUND

[0002] Silicon carbide (SiC) as the third generation of semiconductor has the characteristics of higher frequency, larger power and lower loss, and is an important starting point for chip field to rapidly respond to new energy low-carbon economy and power electronic revolution. Due to the characteristics of high hardness and high density of SiC, the manufacturing process will involve various ultra-high temperature processes, which also puts forward new requirements for the treatment of tail gas.

[0003] According to the existing working condition, a cold trap needs to be added between the process chamber and the butterfly valve to cool and filter impurity particles, so as to avoid that the impurity particles generated in the process are adsorbed on the valve plate of the butterfly valve, thereby affecting the pressure control capacity of the butterfly valve, and further causing the process chamber pressure to fluctuate too much and affecting the process yield.

[0004] The existing cold trap device is generally composed of a flange, an outer barrel, a condensing pipe and a filter barrel. When the filter barrel is maintained, the outer barrel, the condensing pipe and the filter barrel need to be removed in sequence for replacement, which is relatively cumbersome. CONTENT OF THE INVENTION

[0005] In view of the above technical problems, the present application provides a cold trap device and a semiconductor process equipment, which can improve the problem that the existing cold trap device is relatively cumbersome to disassemble when maintained.

[0006] To solve the above technical problems, in a first aspect, the present application provides a cold trap device, comprising:

[0007] A shell having a containing space in the shell, and the shell having a gas inlet, a gas outlet and a maintenance window communicating with the containing space;

[0008] A condensing pipe arranged in the containing space and having a first gap between the inner wall of the shell, the top end of the condensing pipe being detachably connected with the top wall of the shell; the maintenance window is used for the condensing pipe to enter and exit the containing space;

[0009] A filter barrel arranged in the condensing pipe and fixedly connected with the condensing pipe, the inside of the filter barrel being communicated with the gas outlet, and the filter barrel having a second gap with the inner wall of the condensing pipe;

[0010] A maintenance cover plate arranged at the maintenance window and used for closing or opening the maintenance window;

[0011] The cold trap device is configured to allow the gas entering the accommodation space through the gas inlet port to sequentially pass through the first gap, the second gap, and the filter barrel, and then be discharged through the gas outlet port.

[0012] Optionally, the shell comprises:

[0013] The outer barrel, the gas inlet port and the maintenance window are arranged on the sidewall of the outer barrel, and the first gap is formed between the inner wall of the outer barrel and the condenser tube;

[0014] The first flange is arranged on the top surface of the outer barrel, the gas outlet port is arranged at the center of the first flange, and the bottom of the first flange is provided with a groove;

[0015] The top end of the condenser tube is detachably connected in the groove.

[0016] Optionally, the cold trap device further comprises a first sealing ring arranged between the condenser tube and the sidewall of the groove to form a side-sealed detachable structure.

[0017] Optionally, the condenser tube comprises:

[0018] The condenser tube body;

[0019] The second flange comprises a support portion arranged on the top surface of the condenser tube body, a first flange extending inward from the support portion, and a second flange extending outward from the support portion;

[0020] The filter barrel is connected with the first flange.

[0021] The second flange is detachably connected in the groove.

[0022] Optionally, the filter barrel comprises:

[0023] The barrel body;

[0024] The third flange extends outward from the top surface of the barrel body, and the third flange is connected to the bottom of the first flange.

[0025] Optionally, the bottom surface of the first flange is provided with an annular positioning flange;

[0026] The outer barrel is sleeved outside the positioning flange.

[0027] Optionally, the filter barrel and the bottom wall of the shell have a third gap therebetween;

[0028] The cold trap device further comprises a lifting seat located in the accommodation space and on the bottom wall of the shell, and the lifting seat is used to support the filter barrel after being lifted.

[0029] Optionally, the lifting seat comprises:

[0030] a base arranged on the bottom wall of the shell, a threaded hole being arranged on the top of the base;

[0031] a screw rod, one end of which is fitted in the threaded hole;

[0032] a support plate arranged on the other end of the screw rod, for supporting the filter barrel after being lifted up.

[0033] Optionally, the lifting seat further comprises:

[0034] a locking nut, sleeved on the screw rod, for locking the screw rod on the base after the screw rod is lifted to the target position.

[0035] In a second aspect, the embodiments of the present application further provide a semiconductor process equipment, comprising a reaction chamber, a pressure control device, and the cold trap device as described in the above embodiments;

[0036] an exhaust port of the reaction chamber being in communication with an air inlet of the cold trap device;

[0037] the pressure control device being arranged at an air outlet of the cold trap device.

[0038] As described above, the cold trap device of the present application, gas enters the receiving space of the shell from the air inlet, then enters the first gap between the inner wall of the shell and the condensing pipe, then enters the second gap between the inner wall of the condensing pipe and the filter barrel, and finally enters the filter barrel and is discharged from the air outlet. Since the top end of the condensing pipe is detachably connected with the top wall of the shell, when the filter barrel needs to be maintained, the maintenance cover plate can be opened, the condensing pipe can be detached from the shell from the maintenance window, and the condensing pipe can be taken out from the maintenance window, while the filter barrel is arranged in the condensing pipe and fixedly connected with the condensing pipe, i.e. the filter barrel and the condensing pipe are connected as a whole, when the condensing pipe is taken out, the filter barrel is also taken out, and then the filter barrel can be detached from the condensing pipe. In the whole detaching process, the shell, the butterfly valve, the angle valve and other pressure control devices connected with the shell do not need to be detached, so that the difficulty of the maintenance operation of the filter barrel is greatly reduced. BRIEF DESCRIPTION OF DRAWINGS

[0039] The drawings incorporated into the specification and forming a part thereof, illustrate embodiments consistent with the present application and, together with the description, serve to explain the principles of the application. In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings needed to be used in the embodiment description will be briefly introduced as follows, and obviously, other drawings can also be obtained by those skilled in the art without any creative labor under the premise of these drawings.

[0040] Figure 1is a structural schematic diagram of a cold trap device of the related art;

[0041] Figure 2 is Figure 1 is a partial enlarged structural schematic diagram (without the outer barrel);

[0042] Figure 3 is a structural schematic diagram of a cold trap device provided by an embodiment of the present application;

[0043] Figure 4 is a schematic diagram of disassembling the condenser pipe 30 provided by an embodiment of the present application;

[0044] Figure 5 is a structural schematic diagram of a first flange provided by an embodiment of the present application, wherein (a) is a perspective view and (b) is a sectional view along the line A-A in (a);

[0045] Figure 6 is a structural schematic diagram of a condenser pipe provided by an embodiment of the present application, wherein (a) is a perspective view and (b) is a sectional view;

[0046] Figure 7 is a structural schematic diagram of a filtering barrel provided by an embodiment of the present application, wherein (a) is a perspective view and (b) is a side view;

[0047] Figure 8 is a schematic diagram of a lifting seat in a lowered state provided by an embodiment of the present application;

[0048] Figure 9 is a structural schematic diagram of a lifting seat provided by an embodiment of the present application;

[0049] Figure 10 is a schematic diagram of a lifting seat of a cold trap device after disassembly provided by an embodiment of the present application;

[0050] Figure 11 is a structural schematic diagram of a semiconductor process equipment provided by an embodiment of the present application.

[0051] The implementation, functional features and advantages of the present application will be further described with reference to the embodiments and the accompanying drawings. The above-mentioned drawings have shown the specific embodiments of the present application, and the following will have more detailed description. These drawings and the written description are not intended to limit the scope of the present application concept by any means, but to illustrate the present application concept to those skilled in the art by referring to specific embodiments. DETAILED DESCRIPTION

[0052] The exemplary embodiments will be described in detail herein with reference to the attached drawings. The description below refers to the accompanying drawings, which show, by way of example, specific embodiments with which this application can be practiced. The following description relates to the drawings, wherein like numbers refer to like or similar elements throughout several views of the drawings, and the phraseology and terminology used herein is for the purpose of description and should not be regarded as limiting. The detailed description that follows herein illustrates implementations that are presently best known for putting into practice the application. However, the application is not limited to these implementations alone.

[0053] It should be noted that, as used in this document, the terms "includes," "including," or the like means, including but not limited to, as understood by persons of ordinary skill in the art, such that the processes, methods, articles, or apparatuses that include a list of elements are not limited to those elements but can include other elements not expressly listed, or can include elements that are inherent to such processes, methods, articles, or apparatuses. Without limitation, an element preceded by "comprises a" does not, without more constraints, foreclose the existence of additional identical elements in the process, method, article, or apparatus that comprises the recited element. The same holds true for elements followed by "comprising an" or "comprising the." In the specification, relative terms are used to generally relate to the subject matter at hand. Such terms are used for purposes of explanation only and not of limitation. Unless specifically stated otherwise, the terms "first," "second," "third," etc., are not intended to denote a physical order or priority in time or space, but to denote different categories or instances of a same type. In the specification, the use of the singular includes the plural, the use of "or" means "and / or", and the use of "and" means "and / or" unless explicitly stated otherwise. The use of "comprise", "comprises" or "comprising" are used in the sense of "include", "includes" or "including" and not by way of limitation. The use of "based on" is not intended to mean "based only on" unless explicitly stated otherwise.

[0054] It should be further understood that the terms "comprises", "comprising", "includes", "including" mean that the named element is included, but not "only" to the exclusion of other elements that are not specifically listed. The use of the terms "or", "and / or", "at least one of", and the like is meant to encompass both a and / or B and / or C and / or D and / or E or any permutation of the same. For example, A, B, and / or C include, but are not limited to, A alone, B alone, C alone, A and B, A and C, B and C, and A and B and C. As used herein, the term "another" means "at least a second" or "at least a third", unless otherwise specified.

[0055] It should be understood that, although the terms first, second, third, etc. can be used herein to describe various information, these terms are not intended to denote a physical order or priority in time or space. Rather, these terms are used to distinguish different categories or instances of the same type. For example, a first information can also be referred to as a second information, and similarly, a second information can also be referred to as a first information, without departing from the scope of the present disclosure. Depending on the context, the singular forms "a", "an", and "the" used herein are intended to include the plural forms as well, unless the context clearly indicates otherwise.

[0056] It should be understood that the terms "top", "bottom", "upper", "lower", "vertical", "horizontal" and the like indicate an orientation or positional relationship based on the orientation or positional relationship shown in the drawings, and are used only for the purpose of facilitating the description of the present application and simplifying the description, and do not indicate or imply that the device referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as a limitation of the present application.

[0057] For the convenience of description, in the following embodiments, the orthogonal space determined by the horizontal plane and the vertical direction is taken as an example for description, and this precondition should not be understood as a limitation of the present application.

[0058] Please refer to Figure 1 , Figure 1 is a structural schematic view of a cold trap device of the related art, Figure 2 is Figure 1 is a partial enlarged structural schematic view (without the outer barrel) of the cold trap device, which includes a flange 10a, an outer barrel 20a, a condensing pipe 30a and a filter barrel 40a. The flange 10a is connected at the opening of the outer barrel 20a. The condensing pipe 30a and the filter barrel 40a are connected with the flange 10a through the first screw 31a and the second screw 41a respectively. Specifically, a connecting flange can also be provided on the condensing pipe 30a and the filter barrel 40a respectively. After the tail gas of the process chamber enters the outer barrel 20a, it is cooled by the condensing pipe 30a, and then the impurity particles are filtered by the filter barrel 40a. Finally, the tail gas flows out from the center hole of the flange 10a to the pressure control device such as a butterfly valve, an angle valve, etc. and flows through the path as shown by the arrows in the figure. When the filter barrel 40a is maintained, the pressure control device such as the butterfly valve, the angle valve, etc. needs to be removed first, then the outer barrel 20a is removed, and the combined body of the flange 10a, the condensing pipe 30a and the filter barrel 40a is pulled out upward, the first screw 31a is disassembled to remove the condensing pipe 30a, and finally the second screw 41a is disassembled to remove the filter barrel 40a, and the filter barrel 40a is replaced. When installing, the above-mentioned reverse order is sequentially followed for assembly. The whole assembly and disassembly process involves many parts, and the assembly and disassembly are relatively cumbersome. Based on this, the present application provides a cold trap device and a semiconductor process equipment.

[0059] Please refer to Figure 3 , Figure 3 is a structural schematic view of a cold trap device provided by an embodiment of the present application. The cold trap device can include a shell 100, a condensing pipe 30, a filter barrel 40 and a maintenance cover plate 50.

[0060] The shell 100 has a receiving space, and the shell 100 has a maintenance window 11, an air inlet 12 and an air outlet 13 which communicate with the receiving space. The specific shape and structure of the shell 100 are not particularly limited in the embodiments of the present application. The condensing pipe 30 is arranged in the receiving space and has a first gap G1 between the inner wall of the shell 100, and the top end of the condensing pipe 30 is detachably connected to the top wall of the shell 100. For example, the first gap G1 can refer to the gap between the side wall and the bottom wall of the shell 100 and the condensing pipe 30. The maintenance window 11 is used for the condensing pipe 30 to enter and exit the receiving space, that is, the maintenance window 11 is used to load the condensing pipe 30 into the interior of the shell 100 or take it out from the interior of the shell 100. The maintenance cover plate 50 is arranged at the maintenance window 11 and is used to close or open the maintenance window 11.

[0061] The filter bucket 40 is arranged in the condensing pipe 30 and is fixedly connected to the condensing pipe 30, the interior of the filter bucket 40 communicates with the air outlet 13, and the filter bucket 40 has a second gap G2 between the inner wall of the condensing pipe 30. The cold trap device is configured to allow the gas entering the receiving space of the shell 100 through the air inlet 12 to enter the filter bucket 40 through the first gap G1 and the second gap G2 in sequence and then be discharged through the air outlet 13.

[0062] The cold trap device of the embodiments is configured to allow the gas to enter the receiving space of the shell 100 through the air inlet 12, then enter the first gap G1 between the condensing pipe 30 and the inner wall of the shell 100, then enter the second gap G2 between the filter bucket 40 and the inner wall of the condensing pipe 30, and finally enter the filter bucket 40 and be discharged through the air outlet 13. Since the top end of the condensing pipe 30 is detachably connected to the top wall of the shell 100, when maintenance of the filter bucket 40 is required, please refer to Figure 4 , Figure 4 is a schematic diagram of the embodiments of the present application for disassembling the condensing pipe 30. The maintenance cover plate 50 can be opened, the condensing pipe 30 can be disassembled from the shell 100 through the maintenance window 11, and the condensing pipe 30 can be taken out from the maintenance window 11. The filter bucket 40 is arranged in the condensing pipe 30 and is fixedly connected to the condensing pipe 30, that is, the filter bucket 40 and the condensing pipe 30 are connected as a whole. When the condensing pipe 30 is taken out, the filter bucket 40 is also taken out, and then the filter bucket 40 can be disassembled from the condensing pipe 30. In the whole disassembling process, the shell 100 and the pressure control devices such as the butterfly valve and the angle valve connected to the shell 100 are not disassembled, so that the difficulty of the maintenance operation of the filter bucket 40 is greatly reduced.

[0063] As an example of the shell 100, the shell 100 can include the outer barrel 10 and the first flange 20. The gas inlet 12 and the maintenance window 11 are arranged on the sidewall of the outer barrel 10, and the inner wall of the outer barrel 10 has the first gap G1 with the condensing pipe 30. The first flange 20 is arranged on the top surface of the outer barrel 10, and the gas outlet 13 is arranged at the center of the first flange 20, i.e. the gas inside the cold trap device can finally flow out from the center of the first flange 20. The top end of the condensing pipe 30 is detachably connected with the first flange 20; the maintenance window 11 can be arranged on the sidewall of the outer barrel 10. The filter barrel 40 is arranged in the condensing pipe 30 and connected with the condensing pipe 30, and the second gap G2 is arranged between the filter barrel 40 and the condensing pipe 30. Exemplarily, the first gap G1 and the second gap G2 can be annular gaps. The maintenance cover plate 50 is detachably or reversibly opened at the maintenance window 11 of the outer barrel 10. In addition, the gas inlet 12 can be arranged on the sidewall of the outer barrel 10, or on the bottom wall of the outer barrel 10 or the first flange 20, and the gas can enter the first gap G1.

[0064] The cold trap device of the embodiment is that the gas enters the first gap G1 between the outer barrel 10 and the condensing pipe 30 from the gas inlet 12, enters the second gap G2 between the condensing pipe 30 and the filter barrel 40 from the bottom end of the condensing pipe 30, is filtered by the filter barrel 40, and is discharged from the center of the first flange 20. The impurity particles are all filtered and stay on the outer wall of the filter barrel 40. Since the top end of the condensing pipe 30 is detachably connected with the first flange 20, when the filter barrel 40 needs to be maintained, please refer to Figure 4 , Figure 4 is a schematic diagram of the embodiment provided by the application for disassembling the condensing pipe 30. The maintenance cover plate 50 can be opened, the condensing pipe 30 can be disassembled from the first flange 20 from the maintenance window 11, and the condensing pipe 30 can be taken out from the maintenance window 11. The filter barrel 40 is fixedly connected with the condensing pipe 30 in the condensing pipe 30, i.e. the filter barrel 40 and the condensing pipe 30 are connected as a whole. When the condensing pipe 30 is taken out, the filter barrel 40 is also taken out, and then the filter barrel 40 can be disassembled from the condensing pipe 30. In the whole disassembling process, the outer barrel 10 does not need to be disassembled, and the external butterfly valve, angle valve and other pressure control devices do not need to be disassembled, so that the difficulty of the maintenance operation of the filter barrel 40 is greatly reduced.

[0065] As an example of the top end of the condensing pipe 30 being detachably connected with the first flange 20, please refer to Figure 3 and Figure 5 , Figure 5is a structural schematic diagram of a first flange provided by an embodiment of the present application, wherein (a) is an isometric view, and (b) is a sectional view along line A-A in (a). A groove 21 can be provided at the bottom of the first flange 20, and the top end of the condensing pipe 30 can be detachably connected to the groove 21. For example, the top end of the condensing pipe 30 can be threadedly connected to the side wall of the groove 21. When disassembly is needed, the condensing pipe 30 can be screwed off from the maintenance window 11.

[0066] As another preferred example, please refer to Figure 3 and Figure 5 The top end of the condensing pipe 30 is in clearance fit with the groove 21 at the bottom of the first flange 20, and a first sealing ring 60 is arranged between the condensing pipe 30 and the side wall of the groove 21 to form a detachable structure of side sealing between the condensing pipe 30 and the side wall of the groove 21. That is, the condensing pipe 30 is suspended below the first flange 20 by the frictional force generated in the vertical direction by the extrusion of the first sealing ring 60. When disassembly is needed, the condensing pipe 30 can be pulled out of the groove 21, and when assembly is needed, the condensing pipe 30 can be directly extruded in.

[0067] For example, please refer to Figure 6 , Figure 6 is a structural schematic diagram of a condensing pipe provided by an embodiment of the present application. A side sealing groove 301 can be provided at the side of the top end of the condensing pipe 30, and the first sealing ring 60 is positioned by the side sealing groove 301. In other embodiments, the side sealing groove 301 can also be provided on the side wall of the groove 21, which is not particularly limited in the embodiments of the present application.

[0068] It should be noted that the filter bucket 40 is arranged in the condensing pipe 30, and the two can be connected into one whole in various implementation schemes. For example, a support can be arranged on the inner side wall of the condensing pipe 30, and the filter bucket 40 is arranged on the support. As a preferred example, please refer to Figure 6 The condensing pipe 30 can include a condensing pipe body 31 and a second flange 32. The second flange 32 includes a support portion 321 arranged on the top surface of the condensing pipe body 31, a first flange 322 extending inwardly from the support portion 321, and a second flange 323 extending outwardly from the support portion 321. The filter bucket 40 is connected to the first flange 322, and the second flange 323 is detachably connected to the groove 21. For example, the side sealing groove 301 can be arranged on the side of the second flange 323.

[0069] In this embodiment, the second flange 32 is arranged on the top surface of the condensing pipe 30, and the second flange 32 extends inwardly to form the first flange 322. The filter bucket 40 is connected to the first flange 322, so that the condensing pipe 30 and the filter bucket 40 are connected into one whole, which is convenient for maintenance operation. As an example, please refer to Figure 3 and Figure 7 , Figure 7is a structural schematic diagram of a filtering bucket provided by an embodiment of the present application, wherein (a) is a perspective view and (b) is a side view. The filtering bucket 40 can include a bucket body 41 and a third flange 42 extending outward from the top surface of the bucket body 41, and the third flange 42 is connected to the bottom of the first flange 322. For example, the two can be connected by screws 43, and four groups of screw-hole connecting structures can be uniformly arranged along the circumference of the third flange 42.

[0070] In an embodiment, referring to Figure 3 , the filtering bucket 40 and the bottom wall of the shell 100 have a third gap G3, and the cold trap device can further include a lifting seat 14 located in the accommodation space of the shell 100 and on the bottom wall of the shell 100, and the lifting seat 14 is used to support the filtering bucket 40 after rising. As described above, the condensing pipe 30 can be suspended below the first flange 20 by the frictional force generated in the vertical direction by the extrusion of the first sealing ring 60. In order to improve the connection stability of the condensing pipe 30 and prevent the whole of the condensing pipe 30 and the filtering bucket 40 from shaking due to the influence of air flow, the embodiment increases the lifting seat 14 to form stable support for the filtering bucket 40. When disassembly is required, referring to Figure 4 and Figure 8 , Figure 8 is a schematic diagram of a lifting seat in a lowered state provided by an embodiment of the present application. The lifting seat 14 can be lowered to the lowest position, and then the condensing pipe 30 can be pulled out downward and taken out from the maintenance window 11 in an inclined manner.

[0071] As an example of a lifting seat, referring to Figure 3 , Figure 8 and Figure 9 , the lifting seat 14 can include a base 141, a screw rod 142, and a support plate 143. The base 141 is arranged on the bottom wall of the shell 100, the top of the base 141 is provided with a threaded hole, one end of the screw rod 142 is fitted in the threaded hole, and the other end of the screw rod 142 is connected to the support plate 143. When the screw rod 142 rotates, it can perform lifting movement relative to the base 141, so that the support plate 143 can support the filtering bucket 40. When disassembly is required, the support plate 143 can be lowered to the lowest position, and even the whole lifting seat 14 can be removed from the inner side of the bottom wall of the outer bucket 10, as shown in Figure 10 , Figure 10 is a schematic diagram of the lifting seat of the cold trap device after disassembly provided by an embodiment of the present application.

[0072] In an embodiment, referring to Figure 9 , the lifting seat 14 can further include a locking nut 144 sleeved on the screw rod 142, which is used to lock the screw rod 142 on the base 141 after the screw rod 142 is lifted to the target position, so as to prevent the screw rod 142 from descending a small distance and failing to provide sufficient support.

[0073] In one embodiment, please continue to refer to Figure 5 The bottom surface of the first flange 20 can be provided with an annular positioning flange 22, and the outer barrel 10 is sleeved outside the positioning flange 22, so that the outer barrel 10 and the first flange 20 can be accurately assembled.

[0074] As some examples, please refer to Figure 3 And Figure 8 The second sealing ring 70 can be arranged between the first flange 20 and the outer barrel 10, and the third sealing property 80 can be arranged between the maintenance cover plate 50 and the outer barrel 10 when the maintenance cover plate 50 covers the maintenance window 11 of the outer barrel 10, so as to improve the sealing property of the outer barrel 10.

[0075] The embodiment of the present application also provides a semiconductor process equipment, please refer to Figure 11 , Figure 11 is a structural schematic diagram of a semiconductor process equipment provided by the embodiment of the present application, which can include a reaction chamber 200, a pressure control device 300, and the cold trap device as described in each of the above embodiments. The exhaust port of the reaction chamber 200 is in communication with the gas inlet 12 of the cold trap device, and the pressure control device 300 is arranged at the gas outlet 13 of the cold trap device. The pressure control device 300 can include a butterfly valve 310 and an angle valve 320, which can control the gas flow of the exhaust gas of the reaction chamber 200, so as to control the pressure of the reaction chamber 200.

[0076] For other working principles and processes of the semiconductor process equipment of the embodiment, please refer to the above description of the cold trap device of the embodiment of the present application, which will not be repeated here.

[0077] The above has introduced in detail the cold trap device and the semiconductor process equipment provided by the present application, and the principles and implementation manners of the present application have been described by applying specific examples. It should be noted that the description of each embodiment in the present application is focused on different aspects, and the parts not described or recorded in a certain embodiment can be referred to the related description of other embodiments.

[0078] The above is only the preferred embodiment of the present application, and does not limit the patent scope of the present application, and each technical feature of the technical solution of the present application can be combined arbitrarily. In order to make the description simple, each technical feature in the above embodiment is not described all possible combinations, and any equivalent structure or equivalent flow conversion made by using the content of the specification and the drawings, or directly or indirectly applied in other related technical fields, as long as the combination of these technical features does not exist contradiction, are also included in the patent protection scope of the present application.

Claims

1. A cold trap device, characterized by, The cold trap device comprises: a shell having a containing space inside, and the shell having an air inlet, an air outlet and a maintenance window communicating with the containing space; a condenser pipe arranged in the containing space and having a first gap between the inner wall of the shell, the top end of the condenser pipe being detachably connected with the top wall of the shell; the maintenance window is used for the condenser pipe to enter and exit the containing space; a filter barrel arranged in the condenser pipe and fixedly connected with the condenser pipe, the inside of the filter barrel communicating with the air outlet, and the filter barrel having a second gap between the inner wall of the condenser pipe; a maintenance cover plate arranged at the maintenance window for closing or opening the maintenance window; the cold trap device is configured to make the gas entering the containing space through the air inlet enter the filter barrel through the first gap and the second gap in sequence and then be discharged through the air outlet.

2. The cold trap device of claim 1, wherein, The shell comprises: an outer barrel, the air inlet and the maintenance window being arranged on the side wall of the outer barrel, the first gap being between the inner wall of the outer barrel and the condenser pipe; a first flange arranged on the top surface of the outer barrel, the air outlet being arranged at the center of the first flange, and the bottom of the first flange being provided with a groove; the top end of the condenser pipe is detachably connected in the groove.

3. The cold trap device of claim 2, wherein, Further comprising a first sealing ring arranged between the condenser pipe and the side wall of the groove to form a side sealing detachable structure.

4. The cold trap device of claim 3, wherein, The condenser pipe comprises: a condenser pipe body; a second flange comprising a support portion arranged on the top surface of the condenser pipe body, a first flange extending inwardly from the support portion, and a second flange extending outwardly from the support portion; the filter barrel is connected with the first flange; the second flange is detachably connected in the groove.

5. The cold trap apparatus of claim 4, wherein, The filter barrel comprises: a barrel body; a third flange extending outwardly from the top surface of the barrel body, the third flange being connected with the bottom of the first flange.

6. The cold trap apparatus of claim 2, wherein, The bottom surface of the first flange is provided with an annular positioning flange; the outer barrel is sleeved outside the positioning flange.

7. The cold trap apparatus of claim 1, wherein, The filter barrel has a third gap with the bottom wall of the shell; the cold trap device further comprises a lifting seat located in the containing space and on the bottom wall of the shell, the lifting seat being used for supporting the filter barrel after being lifted.

8. The cold trap device of claim 7, wherein, The lifting seat comprises: a base arranged on the bottom wall of the shell, the top of the base being provided with a threaded hole; a screw rod having one end fitted in the threaded hole; a support plate arranged on the other end of the screw rod for supporting the filter barrel after being lifted.

9. The cold trap device of claim 8, wherein, The lifting seat further comprises: a locking nut sleeved on the screw rod for locking the screw rod on the base after the screw rod is lifted to a target position.

10. A semiconductor process apparatus, characterized by, The cold trap device comprises: a reaction chamber, a pressure control device, and any one of the cold trap devices according to claims 1-9; the air outlet of the reaction chamber communicates with the air inlet of the cold trap device; the pressure control device is arranged at the air outlet of the cold trap device.

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