Xenon purification equipment

Abstract

The utility model relates to the technical field of xenon purification, in particular to xenon purification equipment, which not only filters out impurities, oxygen and moisture in xenon through pretreatment and improves the purification rate of the xenon through follow-up matching with purification membrane separation, but also accelerates the passing of the xenon through a purification membrane through dispersion of the xenon and extraction of the xenon so as to improve the purification rate. Comprising a cooling mechanism; the device further comprises a filtering mechanism, a heat exchange mechanism, a purifying mechanism, a dispersing mechanism and a collecting mechanism, the filtering mechanism is installed on the cooling mechanism and filters xenon, the heat exchange mechanism is installed on the cooling mechanism and condenses moisture in the xenon, and the purifying mechanism is installed on the cooling mechanism and purifies and filters the xenon. The dispersing mechanism is mounted on the purifying mechanism and enables xenon to be uniformly dispersed in the purifying mechanism, and the collecting mechanism is mounted on the purifying mechanism and collects the xenon.

Description

TECHNICAL FIELD

[0001] The utility model relates to the technical field of xenon gas purification, in particular to a kind of xenon gas purification equipment. BACKGROUND

[0002] Ultra-pure xenon is widely used in the fields of semiconductor manufacturing, optical coating and laser technology, and its purity has a key influence on equipment performance and product quality.

[0003] The existing xenon gas purification equipment, for example, the ultra-pure xenon gas purification system disclosed in the utility model patent with application number 202420982087.6, mainly includes a xenon gas purification filter tank and an end cover arranged at the top of the xenon gas purification filter tank. A placing ring is fixed on the inner wall of the lower side of the center of the xenon gas purification filter tank. A purification filter core is fixed on the upper end of the placing ring. A rubber pad is used to seal between the purification filter core and the placing ring. In use, xenon gas leaks upward through the gap between the purification filter core and the placing ring. A new purification efficiency increasing device is added inside the xenon gas purification filter tank near the top of the ultra-pure xenon gas purification system. The purification efficiency increasing device can play a role in secondary filtration and purification after the xenon gas is filtered and purified by the purification filter core.

[0004] However, most of the existing purification devices rely on the natural flow of gas, and the purification efficiency is slow. Moreover, most of the existing purification devices only use membrane separation treatment, and the purification rate is low, which makes it difficult to adapt to the purification of xenon gas with more impurities. UTILITY MODEL CONTENT

[0005] To solve the above technical problems, the utility model provides a xenon gas purification equipment which not only filters out impurities, oxygen and moisture in xenon gas through pretreatment, but also improves the purification rate of xenon gas by cooperating with the purification membrane separation in the subsequent process. Moreover, the xenon gas is dispersed and the air is extracted to accelerate the passage of xenon gas through the purification membrane, thereby improving the purification rate.

[0006] The utility model discloses a kind of xenon purification equipment, including cooling mechanism;Still including filtering mechanism, heat exchange mechanism, purification mechanism, dispersing mechanism and collection mechanism, filtering mechanism is installed on cooling mechanism and is filtered to xenon, heat exchange mechanism is installed on cooling mechanism and is condensed to moisture in xenon, purification mechanism is installed on cooling mechanism and is purified and filtered to xenon, dispersing mechanism is installed on purification mechanism and makes xenon evenly disperse in purification mechanism, collection mechanism is installed on purification mechanism and is collected to xenon;Cooling mechanism is communicated with xenon production equipment, xenon enters into cooling mechanism, filtering mechanism is catalyzed and is primarily filtered to xenon, impurity in xenon is filtered out, hydrogen is injected in heat exchange mechanism and reacts oxygen in xenon to generate water under the action of catalyst, moisture in xenon is cooled and condensed in heat exchange mechanism, xenon enters into purification mechanism, starts dispersing mechanism and disperses, so that it is evenly filtered and purified, purified xenon is collected in collection mechanism.

[0007] Preferably, the cooling mechanism includes an air inlet pipe, a cooling water tank, a water inlet pipe, a linkage valve, a drain pipe and a temperature control valve, the bottom end of the air inlet pipe is communicated with the production equipment, the cooling water tank is communicated with the inside of the air inlet pipe, the inside of the cooling water tank is provided with a cavity, the bottom end of the water inlet pipe is communicated with the inside of the top end of the cooling water tank, the linkage valve is installed on the water inlet pipe, the top end of the drain pipe is communicated with the inside of the bottom end of the cooling water tank, and the temperature control valve is installed on the drain pipe; the water inlet pipe is communicated with the inside of a water source, the xenon produced by the production equipment is transported into the filtering mechanism through the air inlet pipe, and after being filtered by the filtering mechanism, the xenon enters into the heat exchange mechanism, the cooling water in the cavity of the cooling water tank exchanges heat with the xenon, so that the moisture in the xenon is condensed, when the temperature control valve detects that the temperature rises, it is automatically opened, at the same time, the linkage valve is opened, the cooling water enters into the cavity of the cooling water tank through the water inlet pipe, and the original cooling water is discharged through the drain pipe, so that the cooling water in the cavity of the cooling water tank is cooled.

[0008] Preferably, the filtering mechanism includes a modified molecular sieve plate, a pull ring, a catalyst tank and a handle, the modified molecular sieve plate is slidingly installed in the cavity of the cooling water tank, the pull ring is installed on the modified molecular sieve plate, the catalyst tank is slidingly installed in the cavity of the cooling water tank, and the handle is installed on the catalyst tank; the catalyst tank is provided with catalyst, the xenon passes through the modified molecular sieve plate and the catalyst tank in sequence, the modified molecular sieve plate filters out krypton and nitrogen in the xenon, hydrogen is injected into the catalyst tank, and under the action of the catalyst, the hydrogen and the oxygen in the xenon react to generate water, when the pull ring needs to be cleaned, the modified molecular sieve plate is pulled out, and when the catalyst needs to be replaced, the handle can be operated to pull out the catalyst tank for replacement.

[0009] Preferably, the heat exchange mechanism comprises a gas collecting funnel, a heat exchange elbow, a condensing pipe and a drain valve, the gas collecting funnel is installed in the cavity of the cooling water tank and divides the cavity of the cooling water tank, the modified molecular sieve plate and the catalyst tank are located at the front side of the gas collecting funnel, the cavity at the rear side of the gas collecting funnel contains cooling water, the heat exchange elbow is installed in the cavity of the cooling water tank and located at the rear side of the gas collecting funnel, the top end of the condensing pipe is in internal communication with the bottom end of the heat exchange elbow, and the drain valve is installed on the condensing pipe; the xenon gas enters the heat exchange elbow through the gas collecting funnel, the heat exchange elbow exchanges heat with the cooling water, so that the moisture in the xenon gas is condensed, the drain valve is opened after long-term use, and the condensed water in the heat exchange elbow is discharged through the condensing pipe.

[0010] Preferably, the purification mechanism comprises a purification filter tank, a blowdown pipe, a plurality of partitions and a plurality of purification filter cores, the purification filter tank is in internal communication with the heat exchange elbow, the inside of the purification filter tank is provided with an inner cavity, the top end of the blowdown pipe is in internal communication with the bottom end of the purification filter tank, the plurality of partitions are all installed in the inner cavity of the purification filter tank, and the plurality of purification filter cores are respectively installed on the plurality of partitions; the dehydrated xenon gas enters the inner cavity of the purification filter tank, the xenon gas diffuses upwards and filters out other impurities through the plurality of purification filter cores, and the impurities are discharged through the blowdown pipe when the purification is completed.

[0011] Preferably, the dispersion mechanism comprises a motor, a speed reducer, a transmission shaft, stirring blades and an exhaust fan, the bottom end of the motor is connected with the top end of the purification filter tank, the bottom end of the speed reducer is connected with the top end of the purification filter tank, the transmission shaft is rotatably installed in the inner cavity of the purification filter tank and is longitudinally connected with the speed reducer, the stirring blades are installed on the transmission shaft and located below the purification filter core, and the exhaust fan is installed on the transmission shaft and located above the purification filter core; the motor is started, the motor drives the transmission shaft to rotate through the speed reducer, the transmission shaft drives the stirring blades to rotate and disperses the xenon gas, so that the xenon gas uniformly passes through the plurality of purification filter cores, the transmission shaft drives the exhaust fan to rotate, and the exhaust fan accelerates the discharge of the purified xenon gas.

[0012] Preferably, the collection mechanism comprises a gas conveying pipe, a collection tank and a check valve, the gas conveying pipe is in internal communication with the top end of the purification filter tank, the collection tank is installed in the gas conveying pipe, and the check valve is installed on the gas conveying pipe; the purified xenon gas is conveyed to the check valve through the gas conveying pipe and stored therein, the collection tank is arranged to avoid gas backflow, the purified xenon gas is separated in time, and the subsequent purification efficiency is ensured.

[0013] Compared with the prior art, the cooling mechanism is in communication with the xenon gas production equipment, the xenon gas enters the cooling mechanism, the filtering mechanism preliminarily filters and catalyzes the xenon gas, filters out the impurities in the xenon gas, the hydrogen gas is injected into the heat exchange mechanism, reacts with the oxygen in the xenon gas under the action of the catalyst to generate water, the moisture in the xenon gas is condensed by the cooling water in the heat exchange mechanism, the xenon gas enters the purification mechanism, the dispersion mechanism is started to disperse the xenon gas, so that the xenon gas is uniformly filtered and purified, and the purified xenon gas enters the collection mechanism and is collected. Attached Figure Description

[0014] Fig. 1 This is a cross-sectional axonometric structural schematic diagram of this utility model;

[0015] Fig. 2 This is a front view structural diagram of the cooling mechanism and the filtration mechanism of this utility model;

[0016] Fig. 3 This is a partially enlarged cross-sectional isometric structural diagram of the filtration mechanism and heat exchange mechanism of this utility model;

[0017] Fig. 4 This is a partially enlarged cross-sectional isometric structural diagram of the purification mechanism, dispersion mechanism, and collection mechanism of this utility model.

[0018] The attached diagram is labeled as follows: 01, Cooling mechanism; 11, Air inlet pipe; 12, Cooling water tank; 13, Water inlet pipe; 14, Linkage valve; 15, Drain pipe; 16, Temperature control valve; 02, Filtration mechanism; 21, Modified molecular sieve plate; 22, Pull ring; 23, Catalyst box; 24, Handle; 03, Heat exchange mechanism; 31, Gas collection hopper; 32, Heat exchange bend; 33, Condenser; 34, Drain valve; 04, Purification mechanism; 41, Purification filter tank; 42, Sewage pipe; 43, Baffle plate; 44, Purification filter element; 05, Dispersion mechanism; 51, Electric motor; 52, Reducer; 53, Drive shaft; 54, Stirring blade; 55, Exhaust fan; 06, Collection mechanism; 61, Gas delivery pipe; 62, Collection tank; 63, Check valve. Detailed Implementation

[0019] To facilitate understanding of this utility model, a more complete description will be given below with reference to the accompanying drawings. This utility model can be implemented in many different forms and is not limited to the embodiments described herein. Rather, these embodiments are provided to make the disclosure of this utility model more thorough and complete.

[0020] Example 1

[0021] The utility model relates to a kind of xenon purification equipment, including cooling mechanism 01;Still including filtering mechanism 02, heat exchange mechanism 03, purification mechanism 04, dispersion mechanism 05 and collection mechanism 06, filtering mechanism 02 is installed on cooling mechanism 01 and is filtered to xenon, heat exchange mechanism 03 is installed on cooling mechanism 01 and is condensed to moisture in xenon, purification mechanism 04 is installed on cooling mechanism 01 and is purified to xenon filtering, dispersion mechanism 05 is installed on purification mechanism 04 and makes xenon evenly dispersed in purification mechanism 04, collection mechanism 06 is installed on purification mechanism 04 and is collected to xenon;Cooling mechanism 01 includes air inlet pipe 11, cooling water tank 12, water inlet pipe 13, linkage valve 14, drain pipe 15 and temperature control valve 16, the bottom end of air inlet pipe 11 is communicated with production equipment, cooling water tank 12 is communicated with air inlet pipe 11 inside, the inside of cooling water tank 12 is provided with cavity, the bottom end of water inlet pipe 13 is communicated with the top end inside of cooling water tank 12, linkage valve 14 is installed on water inlet pipe 13, the top end of drain pipe 15 is communicated with the bottom end inside of cooling water tank 12, temperature control valve 16 is installed on drain pipe 15;Filtering mechanism 02 includes modified molecular sieve plate 21, pull ring 22, catalyst tank 23 and handle 24, modified molecular sieve plate 21 is slidably installed in the cavity of cooling water tank 12, pull ring 22 is installed on modified molecular sieve plate 21, catalyst tank 23 is slidably installed in the cavity of cooling water tank 12, handle 24 is installed on catalyst tank 23;Heat exchange mechanism 03 includes gas collecting hopper 31, heat exchange elbow pipe 32, condenser pipe 33 and drain valve 34, gas collecting hopper 31 is installed in the cavity of cooling water tank 12 and divides the cavity of cooling water tank 12, modified molecular sieve plate 21 and catalyst tank 23 are located before the side of gas collecting hopper 31, cavity in the rear side of gas collecting hopper 31 contains cooling water, heat exchange elbow pipe 32 is installed in the cavity of cooling water tank 12 and is located in the rear side of gas collecting hopper 31, the top end of condenser pipe 33 is communicated with the bottom end inside of heat exchange elbow pipe 32, drain valve 34 is installed on condenser pipe 33;Purification mechanism 04 includes purification filter tank 41, blowdown pipe 42, multiple sets of partition 43 and multiple sets of purification filter core 44, purification filter tank 41 is communicated with heat exchange elbow pipe 32 inside, the inside of purification filter tank 41 is provided with inner chamber, the top end of blowdown pipe 42 is communicated with the bottom end inside of purification filter tank 41, multiple sets of partition 43 are all installed in the inner chamber of purification filter tank 41, multiple sets of purification filter core 44 are installed on multiple sets of partition 43 respectively.In its work, first, the water inlet pipe 13 is communicated with the water source, the xenon gas produced by the production equipment is transported into the cavity of the cooling water tank 12 through the air inlet pipe 11, the catalyst tank 23 is provided with a catalyst, the xenon gas passes through the modified molecular sieve plate 21 and the catalyst tank 23 in sequence, the modified molecular sieve plate 21 filters out the krypton and nitrogen in the xenon gas, the hydrogen gas is injected into the catalyst tank 23, and the hydrogen gas and the oxygen in the xenon gas react to generate water under the action of the catalyst, the modified molecular sieve plate 21 is pulled out when the pull ring 22 is pulled to clean, the catalyst tank 23 is pulled out and replaced when the catalyst needs to be replaced, the xenon gas enters into the heat exchange elbow pipe 32 through the gas collecting hopper 31, the heat exchange elbow pipe 32 exchanges heat with the cooling water, so that the moisture in the xenon gas is condensed, the condensed water in the heat exchange elbow pipe 32 is discharged through the condensing pipe 33 after a long time of use, the temperature control valve 16 is automatically opened when the temperature is detected to be increased, and the linkage valve 14 is also opened, the cooling water enters into the cavity of the cooling water tank 12 through the water inlet pipe 13, and the original cooling water is discharged through the drain pipe 15, so that the cooling water in the cavity of the cooling water tank 12 is cooled, and the xenon gas after water removal enters into the inner cavity of the purification filter tank 41, the xenon gas diffuses upwards and passes through multiple groups of purification filter cores 44 to filter out other impurities, and the impurities are discharged through the blowdown pipe 42 when the purification is completed.

[0022] Example 2

[0023] As Figs. 1 to 4As shown, the xenon gas purification equipment is based on the embodiment 1; the dispersion mechanism 05 includes the motor 51, the speed reducer 52, the transmission shaft 53, the stirring blade 54 and the exhaust fan 55, the bottom end of the motor 51 is connected with the top end of the purification filter tank 41, the bottom end of the speed reducer 52 is connected with the top end of the purification filter tank 41, the transmission shaft 53 is rotatably installed in the inner cavity of the purification filter tank 41 and is longitudinally connected with the speed reducer 52, the stirring blade 54 is installed on the transmission shaft 53 and is located below the purification filter core 44, and the exhaust fan 55 is installed on the transmission shaft 53 and is located above the purification filter core 44; the collecting mechanism 06 includes the gas conveying pipe 61, the collecting tank 62 and the check valve 63, the gas conveying pipe 61 is communicated with the inside of the top end of the purification filter tank 41, the collecting tank 62 is installed in the inside of the gas conveying pipe 61, and the check valve 63 is installed on the gas conveying pipe 61; when working, firstly, the water inlet pipe 13 is communicated with the inside of the water source, the xenon gas produced by the production equipment is conveyed into the cavity of the cooling water tank 12 through the air inlet pipe 11, the catalyst tank 23 is provided with catalyst, the xenon gas sequentially passes through the modified molecular sieve plate 21 and the catalyst tank 23, the modified molecular sieve plate 21 filters out the krypton and nitrogen in the xenon gas, hydrogen is injected into the catalyst tank 23, the hydrogen and oxygen in the xenon gas react to generate water under the action of the catalyst, when the pull ring 22 needs to be cleaned, the pull ring 22 is pulled to draw out the modified molecular sieve plate 21, when the catalyst needs to be replaced, the catalyst tank 23 is drawn out and replaced through the operation handle 24, the xenon gas enters the heat exchange elbow pipe 32 through the gas collecting hopper 31, the heat exchange elbow pipe 32 exchanges heat with the cooling water, so that the moisture in the xenon gas is condensed, the drain valve 34 is opened after long-time use, the condensed water in the heat exchange elbow pipe 32 is discharged through the condensing pipe 33, when the temperature control valve 16 detects that the temperature rises, the temperature control valve 16 is automatically opened, and the linkage valve 14 is also opened, the cooling water enters the cavity of the cooling water tank 12 through the water inlet pipe 13, and the original cooling water is discharged through the drain pipe 15, so that the cooling water in the cavity of the cooling water tank 12 is cooled, and the xenon gas after water removal enters the inner cavity of the purification filter tank 41, the xenon gas diffuses upwards and passes through the multiple purification filter cores 44 to filter out other impurities, the motor 51 is started, the motor 51 drives the transmission shaft 53 to rotate through the speed reducer 52, the transmission shaft 53 drives the stirring blade 54 to rotate to scatter the xenon gas, so that the xenon gas uniformly passes through the multiple purification filter cores 44, the transmission shaft 53 drives the exhaust fan 55 to rotate, the exhaust fan 55 accelerates the xenon gas after purification to be discharged, the xenon gas after purification is conveyed into the check valve 63 through the gas conveying pipe 61 and is stored, the collecting tank 62 is arranged to avoid gas backflow, the purified xenon gas is separated in time, the subsequent purification efficiency is guaranteed, and the impurities are discharged through the blowdown pipe 42 when the purification is completed.

[0024] The motor 51 and the speed reducer 52 of the utility model are purchased on the market, and the technical personnel in the industry only needs to install and operate according to the attached instruction manual, without the technical personnel in the field creating labor.

[0025] The above merely is the preferred implementation manner of the present application, and it should be noted that, for the ordinary skilled in the art, without departing from the technical principles of the present application, a number of improvements and modifications can be made, and these improvements and modifications should also be considered as the protection scope of the present application.

Claims

1. A xenon purification device, comprising a cooling mechanism (01); characterized in that, It also includes a filtration mechanism (02), a heat exchange mechanism (03), a purification mechanism (04), a dispersion mechanism (05), and a collection mechanism (06). The filtration mechanism (02) is installed on the cooling mechanism (01) and filters the xenon gas. The heat exchange mechanism (03) is installed on the cooling mechanism (01) and condenses the moisture in the xenon gas. The purification mechanism (04) is installed on the cooling mechanism (01) and purifies and filters the xenon gas. The dispersion mechanism (05) is installed on the purification mechanism (04) and disperses the xenon gas evenly within the purification mechanism (04). The collection mechanism (06) is installed on the purification mechanism (04) and collects the xenon gas.

2. The xenon purification device as described in claim 1, characterized in that, The cooling mechanism (01) includes an air inlet pipe (11), a cooling water tank (12), a water inlet pipe (13), a linkage valve (14), a drain pipe (15), and a temperature control valve (16). The bottom end of the air inlet pipe (11) is connected to the production equipment. The cooling water tank (12) is connected to the inside of the air inlet pipe (11). The inside of the cooling water tank (12) is provided with a cavity. The bottom end of the water inlet pipe (13) is connected to the inside of the top of the cooling water tank (12). The linkage valve (14) is installed on the water inlet pipe (13). The top end of the drain pipe (15) is connected to the inside of the bottom end of the cooling water tank (12). The temperature control valve (16) is installed on the drain pipe (15).

3. The xenon purification device as described in claim 2, characterized in that, The filtration mechanism (02) includes a modified molecular sieve plate (21), a pull ring (22), a catalyst box (23), and a handle (24). The modified molecular sieve plate (21) is slidably installed in the cavity of the cooling water tank (12), the pull ring (22) is installed on the modified molecular sieve plate (21), the catalyst box (23) is slidably installed in the cavity of the cooling water tank (12), and the handle (24) is installed on the catalyst box (23).

4. The xenon purification device as described in claim 3, characterized in that, The heat exchange mechanism (03) includes a gas collecting hopper (31), a heat exchange bend (32), a condenser tube (33), and a drain valve (34). The gas collecting hopper (31) is installed in the cavity of the cooling water tank (12) and divides the cavity of the cooling water tank (12). The modified molecular sieve plate (21) and the catalyst box (23) are both located in front of the gas collecting hopper (31). The cavity behind the gas collecting hopper (31) is filled with cooling water. The heat exchange bend (32) is installed in the cavity of the cooling water tank (12) and is located behind the gas collecting hopper (31). The top end of the condenser tube (33) is connected to the bottom end of the heat exchange bend (32). The drain valve (34) is installed on the condenser tube (33).

5. The xenon purification device as described in claim 4, characterized in that, The purification mechanism (04) includes a purification filter tank (41), a drain pipe (42), multiple sets of baffles (43) and multiple sets of purification filter elements (44). The purification filter tank (41) is internally connected to the heat exchange bend (32). The purification filter tank (41) has an internal cavity. The top of the drain pipe (42) is internally connected to the bottom of the purification filter tank (41). Multiple sets of baffles (43) are installed inside the internal cavity of the purification filter tank (41). Multiple sets of purification filter elements (44) are installed on the multiple sets of baffles (43).

6. The xenon purification device as described in claim 5, characterized in that, The dispersion mechanism (05) includes a motor (51), a reducer (52), a drive shaft (53), a stirring blade (54), and an exhaust fan (55). The bottom end of the motor (51) is connected to the top end of the purification filter tank (41), the bottom end of the reducer (52) is connected to the top end of the purification filter tank (41), the drive shaft (53) is rotatably installed in the inner cavity of the purification filter tank (41) and longitudinally connected to the reducer (52), the stirring blade (54) is installed on the drive shaft (53) and located below the purification filter element (44), and the exhaust fan (55) is installed on the drive shaft (53) and located above the purification filter element (44).

7. A xenon purification device as described in claim 5, characterized in that, The collection mechanism (06) includes a gas supply pipe (61), a collection tank (62), and a check valve (63). The gas supply pipe (61) is connected to the top of the purification filter tank (41). The collection tank (62) is installed inside the gas supply pipe (61) and connected to it. The check valve (63) is installed on the gas supply pipe (61).

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