Appearance defect detection equipment applied to semiconductor packaging base

Abstract

The utility model relates to appearance defect detection equipment applied to a semiconductor packaging base, which comprises a machine table, a working table is arranged in the machine table, and a raw material assembly, a full material assembly, a feeding assembly, a discharging assembly, an eight-station turntable assembly, a twelve-station turntable assembly and an image taking assembly are arranged on the working table. According to the appearance defect detection equipment, the equipment cost is saved, the occupied space is relatively small, the precision is high, the speed is high and stable, meanwhile, the dependence on personnel in the product circulation link and the circulation process is reduced, and manpower is saved; and the defect that defective products flow out due to errors caused by personnel participation is overcome.

Description

TECHNICAL FIELD

[0001] The utility model relates to the field of detection equipment, especially a kind of applied to semiconductor package base appearance defect detection equipment. BACKGROUND

[0002] Semiconductor package base needs to be detected in production process, to prevent damage and flow out, in prior art, generally by artificial detection, detection can be inaccurate, while, also improve labor cost. UTILITY MODEL CONTENTS

[0003] The utility model aims at providing a kind of applied to semiconductor package base appearance defect detection equipment, save equipment cost, relatively smaller space occupation, high precision, and fast and stable, while reducing product circulation link and the dependence on personnel in circulation process, save manpower;It overcomes the defective product flow out caused by personnel participation error.

[0004] To achieve the above object, the utility model provides a kind of applied to semiconductor package base appearance defect detection equipment, including machine table, workbench is arranged in the machine table, raw material component is arranged on the workbench, full material component, feeding component, discharging component, eight-station turntable component, twelve-station turntable component and image taking component.

[0005] Further, the raw material component includes first linear module, feeding driving cylinder mounting frame is connected on the first linear module, feeding driving cylinder mounting frame is installed on the feeding driving cylinder, the output shaft of feeding driving cylinder is connected with feeding mounting plate, while, material disc placing plate is fixedly installed on the workbench, and multiple material disc warehouses are arranged on material disc placing plate.

[0006] Further, the full material component includes second linear module, discharging driving cylinder mounting frame is connected on the second linear module, discharging driving cylinder mounting frame is installed on the discharging driving cylinder, the output shaft of discharging driving cylinder is connected with discharging mounting plate, while, material disc placing plate is fixedly installed on the workbench, and multiple material disc warehouses are arranged on material disc placing plate.

[0007] Further, the feeding component includes third linear module, fourth linear module and material taking small turntable, material taking vacuum suction nozzle is connected on the third linear module, PPU material taking manipulator is installed on the fourth linear module, and vacuum suction nozzle is connected on the PPU material taking manipulator.

[0008] Further, the blanking assembly comprises a fifth linear module, a sixth linear module, a feeding small turntable and a feeding disc, a feeding vacuum nozzle is connected to the fifth linear module, a PPU feeding manipulator is installed on the sixth linear module, and a vacuum nozzle is connected to the PPU feeding manipulator.

[0009] Further, the eight-station turntable assembly comprises an eight-station driving motor and an eight-station turntable driven by the eight-station driving motor, and eight placement grooves for placing materials are arranged on the eight-station turntable.

[0010] Further, the twelve-station turntable assembly comprises a twelve-station driving motor and a twelve-station turntable driven by the twelve-station driving motor, and twelve detection vacuum nozzles are uniformly arranged on the side surface of the twelve-station turntable.

[0011] Further, the image taking assembly comprises a front image taking module arranged beside the eight-station turntable and a side image taking module arranged beside the twelve-station turntable.

[0012] Further, the machine table is provided with a cabinet door connected through a hinge, and the machine table is provided with an LED warning lamp, a display screen and a control console.

[0013] The semiconductor packaging base appearance defect detection equipment provided by the utility model has the advantages of:

[0014] The appearance defect detection equipment saves equipment cost, occupies relatively small space, has high precision, high speed and stability, reduces the dependence on personnel during product circulation and circulation process, saves manpower, and overcomes the problem that personnel participation is prone to errors and causes defective products to flow out. BRIEF DESCRIPTION OF DRAWINGS

[0015] In order to make the content of the utility model more easily understood clearly, the utility model will be further described in detail in combination with the drawings according to the specific embodiments of the utility model.

[0016] Figure 1 is the structure schematic view of the detection equipment described in the utility model.

[0017] Figure 2 is the structure schematic view of the workbench described in the utility model.

[0018] Figure 3 is another angle structure schematic view of the workbench described in the utility model.

[0019] Figure 4 is the structure schematic view of the raw material assembly described in the utility model.

[0020] Figure 5Is another angle structure schematic view of the raw material assembly of the utility model

[0021] Figure 6 Is the structure schematic view of the feeding installation plate of the utility model.

[0022] Figure 7 Is the structure schematic view of the material disc placing plate of the utility model.

[0023] Figure 8 Is the structure schematic view of the material disc of the utility model.

[0024] Figure 9 Is the structure schematic view of the feeding assembly of the utility model.

[0025] Figure 10 Is the local schematic view of the feeding assembly of the utility model.

[0026] Figure 11 Is the structure schematic view of the eight station turntable assembly of the utility model.

[0027] Figure 12 Is the structure schematic view of the twelve station turntable assembly of the utility model.

[0028] Figure 13 Is the structure schematic view of the defective product collecting box of the utility model.

[0029] Figure 14 Is the structure schematic view of the discharging assembly of the utility model.

[0030] Figure 15 Is the structure schematic view of the full material assembly of the utility model.

[0031] In the figure: 1, LED warning light, 2, display screen, 3, console, 4, machine table, 5, raw material assembly, 6, feeding assembly, 7, tray bin, 8, eight-station rotary table assembly, 9, twelve-station rotary table assembly, 10, tray holding cylinder, 11, tray holding plate, 12, tray holding device, 13, tray holding rotating plate, 14, full material assembly, 15, discharging assembly, 16, image taking assembly, 17, workbench, 18, feeding hole, 19, discharging hole, 20, first linear module mounting frame, 21, first linear module, 22, feeding driving cylinder mounting frame, 23, feeding driving cylinder, 24, feeding mounting plate, 25, feeding clamping cylinder, 26, feeding clamping connecting plate, 27, feeding clamping plate, 28, tray lug, 29, tray placing plate, 30, tray, 31, third linear module, 32, fourth linear module, 33, vacuum nozzle frame, 34, linear cylinder, 35, material taking vacuum nozzle, 36, PPU material taking manipulator, 37, material taking square tray, 38, eight-station rotary table, 39, placing groove, 40, front camera support, 41, front camera, 42, twelve-station rotary table, 43, vacuum electromagnetic valve, 44, detection vacuum nozzle, 45, side camera support, 46, side camera, 47, defective product collection box, 48, material taking disc, 49, disc driving motor. DETAILED DESCRIPTION

[0032] The utility model will be further explained in connection with the drawings and specific embodiments, so that the person skilled in the art can better understand the utility model and can be implemented, but the embodiment is not as the limitation of the utility model.

[0033] In connection with Figures 1-15 , the application provides a kind of applied to semiconductor package base appearance defect detection equipment, for detecting semiconductor package base (hereinafter referred to as package base), including machine table 4, the hinge connection cabinet door is provided on the machine table 4, and LED warning light 1 is installed on the machine table 4, display screen 2 and console 3.

[0034] The machine table 4 is provided with workbench 17, and the workbench 17 is provided with raw material assembly 5, full material assembly 14, feeding assembly 6, discharging assembly 15, eight-station rotary table assembly 8, twelve-station rotary table assembly 9 and image taking assembly 16.

[0035] Specifically, the raw material assembly 5 includes a first linear module mounting frame 20 fixedly installed in the machine table 4, a first linear module 21 fixedly installed on the first linear module mounting frame 20, an upper material driving cylinder mounting frame 22 connected to the first linear module 21, an upper material driving cylinder 23 installed on the upper material driving cylinder mounting frame, and the lower surface of an upper material mounting plate 24 connected to the output shaft of the upper material driving cylinder 23. Meanwhile, the surface of the workbench 17 is provided with an upper material hole 18 through which the upper material mounting plate 24 can extend.

[0036] Both sides of the upper surface of the upper material mounting plate are fixedly installed with an upper material clamping cylinder 25, the output shaft of the upper material clamping cylinder 25 is connected with an upper material clamping connecting plate 26, both ends of the upper material clamping connecting plate 26 are fixedly connected with an upper material clamping plate 27, and the lower surface of the upper material clamping plate 27 is provided with a sliding block capable of sliding on the slide.

[0037] Meanwhile, in the embodiment, the middle position of the tray is provided with a material groove for placing a semiconductor package base, the upper surface of the tray is provided with a tray lug 28 protruding from the tray and cooperating with the clamping groove, and the lower surface of the tray is provided with a tray groove (not shown in the figure) corresponding to the tray lug 28 for cooperation. Thus, the tray lugs 28 are placed in the tray grooves to form the stacking of two trays.

[0038] Meanwhile, the workbench 17 is fixedly installed with a tray placing plate 29 through bolts, the length of the tray placing plate 29 is less than the length of the upper material hole 18, and the length of the upper material hole 18 is less than the length of the first linear module 21.

[0039] The tray placing plate 29 is provided with a plurality of tray bins 7. In the embodiment, four tray bins 7 are provided. Specifically, the tray bin 7 is a rectangular space surrounded by four tray rods, and the tray placing plate 29 is provided with a material taking and placing hole at the middle position of the tray bin 7. The area of the material taking and placing hole is greater than the area of the upper material mounting plate 24, so that the upper material mounting plate can freely pass through the material taking and placing hole.

[0040] In the embodiment, the first and third tray bins 7 are un-inspected tray bins 7 for storing trays containing package bases, and the fourth and second tray bins 7 are empty tray bins 7 for storing trays without bases.

[0041] In the embodiment, the two sides of the empty tray bin 7 are provided with a tray stopping cylinder 10 on the tray placing plate 29, the output shaft of the tray stopping cylinder 10 is connected with a tray stopping plate 11, meanwhile, the two sides of the empty tray bin 7 are fixedly provided with a tray stopping device 12 on the tray placing plate 29, the two ends of the tray stopping device 12 are rotatably connected with a tray stopping rotating plate 13 through a torsion spring, meanwhile, the tray stopping device 12 is provided with a limiting device, so that the tray stopping rotating plate can only rotate away from the loading mounting plate 24 relative to the tray stopping device 12, in the initial position, the tray stopping rotating plate 13 is parallel to the loading mounting plate 24, meanwhile, it can be reset to the initial position through the torsion spring.

[0042] In the embodiment, the full tray assembly 14 comprises a loading hole 19 provided in the surface of the workbench 17, meanwhile, the full tray assembly 14 comprises a second linear module mounting frame fixedly installed in the machine table 4, a second linear module fixedly installed on the second linear module mounting frame, a loading driving cylinder mounting frame connected with the second linear module, a loading driving cylinder installed on the loading driving cylinder mounting frame, the output shaft of the loading driving cylinder is connected with the lower surface of the loading mounting plate,

[0043] The two sides of the upper surface of the loading mounting plate are fixedly installed with a loading clamping cylinder, the output shaft of the loading clamping cylinder is connected with a loading clamping connecting plate, the two ends of the loading clamping connecting plate are fixedly connected with a loading clamping plate which can slide on the loading mounting plate, the end of the loading clamping plate away from the loading clamping connecting plate is provided with a clamping groove.

[0044] Meanwhile, the workbench 17 is fixedly installed with a tray placing plate 29 through bolts, the tray placing plate 29 is provided with a plurality of tray bins 7, in the embodiment, four tray bins 7 are provided,

[0045] In the embodiment, the first and third tray bins 7 are empty tray bins 7 for storing trays without placing package substrates, the fourth and second tray bins 7 are checked tray bins 7 for storing trays with placing package substrates.

[0046] In the embodiment, the two sides of the empty tray bin 7 are provided with a tray stopping cylinder 10 on the tray placing plate 29, the output shaft of the tray stopping cylinder 10 is connected with a tray stopping plate 11, meanwhile, the two sides of the checked tray bin 7 are fixedly provided with a tray stopping device 12 on the tray placing plate 29, the two ends of the tray stopping device 12 are rotatably connected with a tray stopping rotating plate 13 through a torsion spring, meanwhile, the tray stopping device 12 is provided with a limiting device, so that the tray stopping rotating plate can only rotate away from the loading mounting plate relative to the tray stopping device 12.

[0047] In the embodiment, the feeding assembly 6 comprises a third linear module 31, a fourth linear module 32 and a small material taking turntable. The third linear module 31 is connected with a linear cylinder 34 frame. The linear cylinder 34 frame is fixedly provided with a linear cylinder 34. The output shaft of the linear cylinder 34 is connected with a vacuum nozzle frame 33. The vacuum nozzle frame 33 is installed with a plurality of material taking vacuum nozzles 35. The material taking vacuum nozzles 35 are communicated with a vacuum generator (not shown in the figure) through pipelines.

[0048] The fourth linear module 32 is installed with a PPU material taking manipulator 36. The PPU material taking manipulator 36 is connected with a vacuum nozzle. The vacuum nozzle is also communicated with the vacuum generator through the pipeline. The small material taking turntable is arranged between the PPU material taking manipulator 36 and the vacuum nozzle frame 33. The PPU material taking manipulator 36 is arranged towards the direction away from the vacuum nozzle frame 33.

[0049] The small material taking turntable comprises a driving motor and a material taking square plate 37 driven to rotate by the driving motor. A plurality of placing grooves 39 for placing the packaging substrates are formed in the material taking square plate 37. The driving motor is a stepping motor. The stepping motor is arranged to drive the material taking square plate 37 to rotate by 90° for each input pulse signal.

[0050] Similarly, the discharging assembly 15 comprises a linear cylinder 34 frame driven by a fifth linear module, a linear cylinder 34 frame fixedly provided with a linear cylinder 34, an output shaft of the linear cylinder 34 connected with a vacuum nozzle frame 33, the vacuum nozzle frame 33 installed with a plurality of material taking vacuum nozzles 35, the material taking vacuum nozzles 35 communicated with a vacuum generator through pipelines,

[0051] The discharging assembly 15 further comprises a PPU material taking manipulator 36 and a small material taking turntable driven by a sixth linear module. The PPU material taking manipulator 36 is connected with a vacuum nozzle. The vacuum nozzle is also communicated with the vacuum generator through the pipeline. The small material taking turntable is arranged between the PPU material taking manipulator 36 and the vacuum nozzle frame 33. The PPU material taking manipulator 36 is arranged towards the direction close to the vacuum nozzle frame 33.

[0052] The small material taking turntable comprises a driving motor and a material taking square plate 37 driven to rotate by the driving motor. A plurality of placing grooves 39 for placing the packaging substrates are formed in the material taking square plate 37. The driving motor is a stepping motor. The stepping motor is arranged to drive the material taking square plate 37 to rotate by 90° for each input pulse signal.

[0053] Meanwhile, the blanking assembly 15 further comprises a feeding disc, which is arranged between the material taking small turntable and the twelve-station turntable, and comprises a disc driving motor and a material taking disc driven to rotate by the disc driving motor, and four placing grooves 39 for placing the packaging bases are formed in the material taking disc 37.

[0054] The eight-station turntable assembly 8 comprises an eight-station driving motor and an eight-station turntable driven by the eight-station driving motor, and eight placing grooves 39 for placing the materials are arranged on the eight-station turntable 8. Meanwhile, the eight-station driving motor is also a stepping motor.

[0055] Meanwhile, the twelve-station turntable assembly 9 comprises a twelve-station driving motor and a twelve-station turntable driven by the twelve-station driving motor, and the twelve-station driving motor is also a stepping motor.

[0056] The side surface of the twelve-station turntable is uniformly provided with twelve detection vacuum nozzles 44, and the twelve-station turntable is provided with twelve vacuum electromagnetic valves 43, one end of the vacuum electromagnetic valve 43 is communicated with the detection vacuum nozzle 44 through a pipeline, and the other end is communicated with a vacuum generator. Meanwhile, at least one defective product collecting box is arranged on the side surface of the twelve-station turntable, and two defective product collecting boxes are arranged in the embodiment, the defective product collecting box is a hollow structure, and a feeding port is formed on the surface, and the feeding port is located directly below the detection vacuum nozzle 44.

[0057] The image taking assembly 16 comprises a front surface image taking module arranged beside the eight-station turntable and a side surface image taking module arranged beside the twelve-station turntable, the front surface image taking module comprises a plurality of front surface image taking cameras, specifically, the front surface image taking camera comprises a front surface camera support 40, the front surface camera support 40 is provided with a front surface camera 41 and a front surface light source, and the front surface camera 41 is arranged to shoot the eight-station turntable from top to bottom.

[0058] The side surface image taking module comprises a plurality of side surface image taking cameras, specifically, the side surface image taking camera comprises a side surface camera support, the side surface camera support is provided with a side surface camera and a side surface light source, and the side surface camera is arranged to shoot the twelve-station turntable from the side.

[0059] Specific work, in the untested tray bin 7 placed tray, tray placed in the non-detection of the package base, in the empty tray bin 7 placed empty tray. Then through the first linear module 21 movement, drive feeding cylinder 23 movement to one of the untested tray bin 7 below, feeding cylinder 23 rises, drive feeding mounting plate rises, at the same time, the tray against the cylinder 10 contraction, so that the tray against the plate 11 not against the lowermost tray, the lowermost tray drop to the feeding mounting plate above, then the feeding mounting plate above the feeding clamping cylinder 25 drive feeding clamping plate 27 clamping tray, then feeding cylinder 23 contraction, and through the first linear module 21 drive to the edge, then feeding cylinder 23 extends, so that the tray from the feeding hole 18 from the workbench 17, at this time, the third linear module 31 drive linear cylinder 34 frame to the edge, through the linear cylinder 34 drive vacuum nozzle frame 33 down, through the pick vacuum nozzle 35 adsorption tray in the package base, then linear cylinder 34 contraction, at the same time, the third linear module 31 drive linear cylinder 34 frame moves to the pick small turntable above, linear cylinder 34 extension, pick vacuum nozzle 35 will be placed in the pick tray 37 on the package base, pick tray 37 90 degree rotation, and through the PPU pick mechanical hand suction pick tray 37 on the package base, then the fourth linear module 32 drive PPU pick mechanical hand sliding, PPU pick mechanical hand on the package base is placed on the eight station turntable assembly 8, eight station turntable through the stepping motor drive each time rotation angle, through the front camera 41 detection, front camera 41 detection, through the twelve station turntable detection vacuum nozzle 44 will be placed in the eight station turntable package base suction, then the angle of rotation, rotation, through the side camera detection, when the detection of defective products, will be thrown to the defective product collection box, when the detection of good products, will be dropped to the discharge disc, discharge disc rotation, then through the PPU pick mechanical hand 36 of the discharge assembly 15 will be placed on the pick disc after the pick, then through the pick vacuum nozzle 35 of the discharge assembly 15 adsorption, and, full assembly 14 will move an empty tray to the edge, pick vacuum nozzle 35 of the discharge assembly 15 will be placed in the empty tray after the package base is checked and good, the process cycle, until a disk measure. Then the first linear module 21 will move the tray to the empty tray bin 7 of the raw material assembly 5, the second linear module will move the tray with package base to the tested tray bin 7 (even if not full), then the next disk test. So on and so forth, until all the package base is detected.

[0060] In the description of the embodiments of the utility model, still need to explain, unless another explicit provision and limitation, if appear the term "arrangement", "connection" should do the broad sense understanding, for example, can be fixed connection, also can be detachable connection, or integrally connected;Can be mechanical connection, also can be electrical connection;Can be directly connected, also can be indirectly connected through the intermediate medium, can be two elements inside the communication. For ordinary skilled in the art, the specific meaning of the above terms in the utility model can be understood according to specific circumstances.

[0061] Obviously, the above embodiments are only examples for clearly illustrating, and not limited to the embodiments. For ordinary skilled in the art, other different forms of changes or variations can be made on the basis of the above description. Here, all the embodiments need not and cannot be exhausted. The obvious changes or variations derived therefrom are still within the protection scope of the utility model creation.

Claims

1. A device for detecting appearance defects in semiconductor packaging substrates, characterized in that: Including machine platform, workbench is arranged in the machine platform, raw material assembly, full material assembly, feeding assembly, discharging assembly, eight-station turntable assembly, twelve-station turntable assembly and image taking assembly are arranged on the workbench; The raw material assembly includes a first linear module, a feeding drive cylinder mounting frame is connected to the first linear module, a feeding drive cylinder is installed on the feeding drive cylinder mounting frame, a feeding mounting plate is connected to the output shaft of the feeding drive cylinder, and a plurality of material disc warehouses are arranged on the material disc placing plate fixedly installed on the workbench; The full material assembly includes a second linear module, a discharging drive cylinder mounting frame is connected to the second linear module, a discharging drive cylinder is installed on the discharging drive cylinder mounting frame, a discharging mounting plate is connected to the output shaft of the discharging drive cylinder, and a plurality of material disc warehouses are arranged on the material disc placing plate fixedly installed on the workbench; The feeding assembly includes a third linear module, a fourth linear module and a material taking small turntable, a material taking vacuum suction nozzle is connected to the third linear module, a PPU material taking manipulator is installed on the fourth linear module, and a vacuum suction nozzle is connected to the PPU material taking manipulator; The discharging assembly includes a fifth linear module, a sixth linear module, a material discharging small turntable and a material discharging disc, a material taking vacuum suction nozzle is connected to the fifth linear module, a PPU material taking manipulator is installed on the sixth linear module, and a vacuum suction nozzle is connected to the PPU material taking manipulator; The eight-station turntable assembly includes an eight-station drive motor and an eight-station turntable driven by the eight-station drive motor, and eight placing grooves for placing materials are arranged on the eight-station turntable; The twelve-station turntable assembly includes a twelve-station drive motor and a twelve-station turntable driven by the twelve-station drive motor, and twelve detection vacuum suction nozzles are uniformly arranged on the side surface of the twelve-station turntable; The image taking assembly includes a front image taking module arranged beside the eight-station turntable and a side image taking module arranged beside the twelve-station turntable.

2. The semiconductor package substrate appearance defect inspection apparatus according to claim 1, wherein: The machine platform is provided with a cabinet door connected by a hinge, and the machine platform is provided with an LED warning light, a display screen and a control console.

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