Ball support type graphene bubbling method transfer device

Abstract

The utility model discloses a ball support type graphene bubbling method transfer device, which comprises a solution container with a conductive solution, an electrode slice inserted into the conductive solution, a power supply connected with the electrode slice and a pressing module, the pressing module comprises a non-conductive base and a conductive cantilever, one end of the conductive cantilever is fixed on the non-conductive base, and the other end of the conductive cantilever is fixed on the solution container. The other end of the conductive cantilever is a free end, the conductive cantilever has the capability of recovering to the original position after the free end is lifted, and the side surface, close to the non-conductive base, of the free end is provided with a pressing part; the pressing part acts on the metal substrate, and the non-conductive base is used for supporting a target base; and the conductive cantilever is connected with the other electrode of the power supply through a wire. According to the utility model, the pressing module is designed to provide stable and uniform pressure for the metal substrate and the target base body, so that the attaching force is uniform and moderate, and the conductive cantilever in the pressing module can realize a conductive effect and plays a role of an interface connected with an external power supply.

Description

TECHNICAL FIELD

[0001] The utility model relates to the technical field of graphene transfer, in particular to a ball support type graphene bubble method transfer device. BACKGROUND

[0002] Graphene has a wide application prospect in the microelectronic field due to its excellent physical and chemical properties. At present, most of the high-performance graphene is obtained by chemical vapor deposition on a metal substrate. Graphene needs to be transferred from the metal substrate to the target substrate to prepare various sensing elements or electronic devices. Among the many transfer methods, the bubble method produces O2 and H2 bubbles through an electrochemical reaction, and graphene on the metal substrate acts as one of the electrodes (cathode or anode). The peeling force generated by the bubbles eventually separates the graphene from the growth substrate. Compared with the traditional chemical etching of the metal substrate wet transfer, the bubble method not only realizes the clean peeling of graphene, but also recycles the metal substrate, reducing the cost of preparation. At the same time, due to the substantial reduction of the use of etchants and cleaning agents, this method has good environmental friendliness.

[0003] The bubble method transfer device needs to paste the metal substrate of graphene and the target substrate face to face and place them in the conductive solution, then connect the metal substrate and the solution through the cable to generate bubbles through the electrochemical reaction to peel off the graphene, and realize the purpose of transferring the graphene from the metal substrate to the target substrate. The core key problem solved by the device is to control the uniform and moderate pressing force of the metal substrate and the target substrate, and to provide an interface for connecting external electrodes. CONTENT OF THE UTILITY MODEL

[0004] Therefore, in order to solve the above problems, the utility model provides a ball support type graphene bubble method transfer device, which provides stable and uniform pressure for the metal substrate and the target substrate through the design of the pressing module, so that the pressing force is uniform and moderate. The conductive cantilever in the pressing module can realize the function of conducting electricity and serve as an interface for connecting external power supply.

[0005] Specifically, a ball support type graphene bubble method transfer device includes a solution container containing a conductive solution, an electrode sheet inserted into the conductive solution, a power supply connected to the electrode sheet, and a pressing module. The pressing module includes a non-conductive base and a conductive cantilever. One end of the conductive cantilever is fixed to the non-conductive base, and the other end is a free end. The conductive cantilever has the ability to return to the original position after being lifted at the free end (i.e. after the conductive cantilever is separated from the non-conductive base, the conductive cantilever can provide downward pressure). The side of the free end close to the non-conductive base has a pressing part;

[0006] The pressing part acts on the metal substrate, and the non-conductive base is used to support the target substrate.

[0007] The conductive cantilever is connected with another electrode of the power supply through a wire.

[0008] Optionally, the pressing part comprises a conductive pressing plate and a conductive force block, one side of the conductive force block is pressed to the conductive cantilever, and the other side is pressed to the conductive pressing plate, and the conductive pressing plate is pressed to the metal substrate.

[0009] Optionally, the conductive force block is a metal ball, and the conductive pressing plate and the conductive cantilever have grooves matched with the metal ball.

[0010] Optionally, the conductive cantilever is connected with the non-conductive base through a metal screw.

[0011] Optionally, the wire connected with the conductive cantilever can be connected and fixed through the metal screw.

[0012] Optionally, the conductive cantilever is connected with the non-conductive base through at least one screw, and the screw is arranged along the length direction of the conductive cantilever together with the metal screw, wherein the screw close to the pressing part is used for adjusting the restoring force of the conductive cantilever to return to the original position (i.e. adjusting the pressure of the conductive cantilever to the metal substrate).

[0013] The utility model has the advantages of the following:

[0014] The utility model discloses a ball support type graphene bubble method transfer device, and through the design of the non-conductive base and the conductive cantilever, stable and uniform pressure is provided for the metal substrate and the target base body, so that the close contact force is uniform and moderate, and the conductive cantilever can realize the conductive effect, plays the interface effect of connection with the external power supply, reduces the additional wiring demand, and improves the practicability and reliability of the device.

[0015] Meanwhile, through the metal ball and the conductive pressing plate, the conductive effect can be realized, and the pressure provided by the conductive cantilever is more uniform, so that the close contact force of the metal substrate and the target base body is uniform.

[0016] Through the arrangement of the two screws on the conductive cantilever, and the arrangement of the two screws along the length direction of the conductive cantilever, one screw can realize the connection of the wire, and the screw close to the pressing part can realize the adjustment of the pressing force, so that the close contact force of the metal substrate and the target base body is moderate. DRAWINGS

[0017] Figure 1 is the structure schematic view of the ball support type graphene bubble method transfer device of the utility model;

[0018] Figure 2 is the overhead schematic view of the ball support type graphene bubble method transfer device of the utility model;

[0019] In the figure: 1, conductive cantilever; 2, conductive force block; 3, electrode sheet; 4, conductive solution; 5, solution container; 6, metal substrate; 7, target base; 8, non-conductive base; 9, wire; 10, power supply; 11, metal screw; 12, conductive pressure plate. DETAILED DESCRIPTION

[0020] Embodiments of the present application are described below in detail, examples of which are shown in the drawings, wherein the same or similar reference numbers represent the same or similar elements or elements having the same or similar functions throughout. The embodiments described below by referring to the drawings are exemplary and are intended to explain the present application, and cannot be understood as a limitation of the present application.

[0021] In this document, relational terms such as first and second and the like can be used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Moreover, the terms "comprises", "comprising", or any other variations thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but can include other elements not expressly listed or inherent to such process, method, article, or apparatus.

[0022] As described in the background, the bubble method transfer device needs to place the metal substrate of graphene face to face with the target substrate and into the conductive solution, and then connect the metal substrate and the solution through a cable to generate bubbles by electrochemical reaction to achieve the purpose of graphene transfer from the metal substrate to the target substrate. The core problem solved by the device is to control the uniform and moderate pressing force of the metal substrate and the target substrate, and to provide an interface for connecting external electrodes.

[0023] Based on the above reasons, the utility model provides a ball support type graphene bubble method transfer device, as shown in Figure 1 and Figure 2 The device includes a solution container 5 with a conductive solution 4, an electrode sheet 3 inserted into the conductive solution, a power supply 10 (the positive electrode of the power supply is connected to the electrode) connected to the electrode sheet 3 through a wire 9, and a pressing module, the pressing module includes a non-conductive base 8 and a conductive cantilever 1, one end of the conductive cantilever 1 is fixed to the non-conductive base, the other end is a free end, the conductive cantilever has the ability to restore to the original position after being lifted at the free end, and the side of the free end close to the non-conductive base has a pressing part;

[0024] The pressing part acts on the metal substrate 6, and the non-conductive base is used to support the target base 7;

[0025] The conductive cantilever is connected to the other electrode (negative electrode) of the power supply through a wire.

[0026] The above technical features can realize the graphene bubble method transfer after the metal substrate and the target substrate are closely attached, provide support force for the target substrate through the non-conductive base, realize conduction and provide compression force for the metal substrate through the conductive cantilever; in use, the free end of the conductive cantilever is lifted, and then the metal substrate (copper foil with graphene grown thereon) and the target substrate (which can be a silicon wafer, and the smooth surface of the target substrate faces upward) after being attached are placed on the non-conductive base, the target substrate is attached to the non-conductive base, the free end is then released, the compression part of the free end provides pressure for the metal substrate during the process of the conductive cantilever returning to the original position, and then the cathode of the power supply is connected to the conductive cantilever; after assembly, the metal substrate and part of the target substrate are immersed in a conductive solution (which can be a 0.1M Na2SO4 solution), so that the graphene bubble method experiment is performed, and after the graphene is completely peeled off, the device is taken out and naturally dried.

[0027] In order to uniformly transmit the pressure provided by the conductive cantilever to the metal gasket, in an embodiment, the compression part includes a conductive pressure plate 12 and a conductive force block 2, one side of the conductive force block is compressed to the conductive cantilever, and the other side is compressed to the conductive pressure plate, and the conductive pressure plate is compressed to the metal substrate.

[0028] For example, the conductive force block is a metal ball, the conductive pressure plate and the conductive cantilever have grooves matched with the metal ball, and preferably, the grooves are spherical grooves. The metal ball is limited by the grooves, thereby reducing the risk of falling.

[0029] The above technical features can realize that the conductive cantilever provides stable and uniform pressure for the metal substrate and the target substrate, and the metal ball and the conductive pressure plate can realize conduction while uniformly transmitting force.

[0030] In order to realize the connection and conduction of the wire and the conductive cantilever, in an embodiment, the conductive cantilever is connected to the non-conductive base through a metal screw 11, and the wire connected to the conductive cantilever can be connected and fixed through the metal screw. The wire can be connected to the conductive cantilever through the metal screw, and the wire can be fixed.

[0031] In order to adjust the compression force provided by the conductive cantilever, in an embodiment, the conductive cantilever is further connected to the non-conductive base through at least one screw, and the screw and the metal screw are arranged along the length direction of the conductive cantilever, wherein the screw close to the compression part is used to adjust the restoring force of the conductive cantilever returning to the original position. By rotating the screw close to the compression part, the compression force provided by the conductive cantilever can be adjusted, the pressure of the conductive cantilever to the metal gasket can be adjusted, and appropriate close contact force can be provided for the metal substrate and the target substrate.

[0032] The above description of disclosed embodiments enables one of ordinary skill in the art to make or use the application. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the generic principles defined herein can be applied to other embodiments without departing from the spirit or scope of the application. Thus, the present application is not intended to be limited to the embodiments shown herein but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. A graphene bubble method transfer device of ball support type, comprising a solution container having a conductive solution, an electrode sheet inserted into the conductive solution, and a power source connected to the electrode sheet; characterized in that: The pressing module comprises a non-conductive base and a conductive cantilever, one end of the conductive cantilever is fixed to the non-conductive base, and the other end is a free end, the conductive cantilever has the ability to restore to the original position after being lifted at the free end, and has a pressing part on the side close to the non-conductive base at the free end; The pressing part acts on the metal substrate, and the non-conductive base is used to support the target base; The conductive cantilever is connected to another electrode of the power supply through a wire.

2. The graphene bubble transfer device of claim 1, wherein: The pressing part comprises a conductive pressing plate and a conductive force block, one side of the conductive force block is pressed against the conductive cantilever, and the other side is pressed against the conductive pressing plate, and the conductive pressing plate is pressed against the metal substrate.

3. The graphene bubble transfer device of claim 2, wherein: The conductive force block is a metal ball, and the conductive pressing plate and the conductive cantilever have grooves adapted to the metal ball.

4. The graphene bubble transfer device of claim 1, wherein: The conductive cantilever is connected to the non-conductive base through a metal screw.

5. The graphene bubble transfer device of claim 4, wherein: The wire connected to the conductive cantilever is connected and fixed through the metal screw.

6. The graphene bubble transfer device of claim 5, wherein: The conductive cantilever is connected to the non-conductive base through at least one screw, and the screw is arranged along the length direction of the conductive cantilever together with the metal screw, wherein the screw close to the pressing part is used to adjust the restoring force of the conductive cantilever to restore to the original position.

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