Furnace body heating structure for vertical furnace and vertical furnace
By combining the inner and outer furnace heating structures and auxiliary heating components, the problem of uneven temperature field in vertical furnaces is solved, thereby improving the uniformity of heating of the carrier and the efficiency of the process, and adapting to the needs of increasing number of carriers.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-03-03
- Publication Date
- 2026-03-24
AI Technical Summary
The temperature field inhomogeneity of existing vertical furnaces leads to poor process efficiency and effectiveness. In particular, when the number of carriers increases, the temperature difference significantly affects process uniformity and economic benefits.
The furnace adopts a heating structure with both inner and outer furnace bodies, combining main heating components and auxiliary heating components. Through the auxiliary heating components of the inner and outer furnace bodies and the fixed furnace door, radial and axial uniformity compensation of the temperature field inside the vertical furnace is achieved. The heating components are adjusted in position by telescopic components to adapt to the temperature requirements of different temperature zones.
It improves the uniformity of the temperature field inside the vertical furnace, shortens the process time, enhances the process effect and the uniformity of heating of the carrier, adapts to the needs of increasing number of carriers, and ensures process quality and efficiency.
Smart Images
Figure CN224034332U_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The utility model belongs to the field of solar cell manufacturing, more specifically, relate to a kind of furnace body heating structure and vertical furnace for vertical furnace. BACKGROUND
[0002] The current photovoltaic industry diffusion, oxidation, annealing, doping, PECVD (low pressure chemical vapor deposition method), LPCVD (plasma enhanced chemical vapor deposition method) and other process production has vertical furnace and horizontal furnace two types, the structure of the two types of furnace needs to be loaded in the specific carrier Silicon wafer or wafer is transmitted into a reaction chamber of furnace, furnace door is closed after heating process. By passing into specific reaction gas to a reaction chamber, thereby realizing specific film coating, diffusion, oxidation and thin film deposition process to silicon wafer or wafer.
[0003] The heating furnace design in the related art adopts the heating furnace wire that is uniformly arranged outside the furnace body with reaction chamber, and the heating rate is controlled by controlling the current size passing per unit area of the heating furnace wire. But with the development of industry, cost reduction and efficiency improvement have become the theme pursued in the industry, and the loading capacity of the carrier is also continuously improved, and the length, width and height of the carrier are improved, and the number of carriers placed gradually changes from single to two or more, which puts forward higher requirements on how to ensure the uniformity of heating rate and temperature.
[0004] Therefore, how to improve the uniformity of furnace body temperature has become a problem to be solved. UTILITY MODEL CONTENTS
[0005] The utility model aims at providing a kind of furnace body heating structure and vertical furnace for vertical furnace, to solve the problem that temperature field of vertical furnace in the related art is not uniform, resulting in affecting process efficiency and effect.
[0006] To achieve the above-mentioned purpose, the technical scheme adopted by the utility model is:
[0007] The utility model provides a kind of furnace body heating structure for vertical furnace, vertical furnace includes the furnace cover and fixed furnace door that are oppositely arranged, the outer furnace body connected between furnace cover and fixed furnace door, and the inner furnace body located in outer furnace body and with outer furnace body to form reaction chamber together;Furnace body heating structure includes main heating component and auxiliary heating component, main heating component is arranged on the body of outer furnace body and inner furnace body, auxiliary heating component is arranged at the end of outer furnace body and / or inner furnace body close to fixed furnace door, and / or, auxiliary heating component is arranged on fixed furnace door.
[0008] Further, auxiliary heating component is connected with telescopic component, and auxiliary heating component moves towards the direction close to or away from fixed furnace door through telescopic component.
[0009] Further, the auxiliary heating component is arranged on the fixed furnace door and located in the reaction chamber.
[0010] Further, the fixed furnace door is provided with two furnace openings corresponding to the two movable furnace doors, and the auxiliary heating component comprises two auxiliary heating modules symmetrically arranged and located between the two furnace openings.
[0011] Further, the auxiliary heating module is composed of a plurality of auxiliary heating pipes arranged at intervals.
[0012] Further, the auxiliary heating module is composed of a plurality of auxiliary heating blocks connected in sequence.
[0013] Further, the auxiliary heating module is composed of a plurality of auxiliary heating blocks connected in sequence and a plurality of auxiliary heating pipes arranged at intervals on the plurality of auxiliary heating blocks.
[0014] Further, the auxiliary heating module is composed of a plurality of auxiliary heating plates arranged in layers.
[0015] Further, the auxiliary heating component comprises a plurality of auxiliary heating units arranged at intervals along the circumference of the outer furnace body and arranged on the outer furnace body, and the auxiliary heating unit adopts any one or more of the auxiliary heating pipe, the auxiliary heating block and the auxiliary heating plate.
[0016] The utility model also provides a vertical furnace, including the furnace body heating structure for vertical furnace as mentioned in preceding.
[0017] The furnace body heating structure for vertical furnace and the vertical furnace have the beneficial effects that the vertical furnace comprises an outer furnace body and an inner furnace body that jointly form a reaction chamber, the outer furnace body is provided with a main heating component on the body to form an outer heating furnace body, and the inner furnace body is provided with a main heating component on the body to form an inner heating furnace body, so that the outer heating furnace body and the inner heating furnace body jointly realize rapid heating of a single or multiple carriers, the temperature field in the vertical furnace is more uniform in the radial direction, the heating uniformity of the carrier is improved, the process time is reduced, and the process effect is improved. BRIEF DESCRIPTION OF DRAWINGS
[0018] In order to make the technical problems, technical schemes and beneficial effects of the embodiments of the present application more clear, the drawings needed in the embodiments or related technical description will be briefly introduced as follows. Obviously, the drawings in the following description are only some embodiments of the present application, and other drawings can be obtained by those skilled in the art without creative labor on the premise of not deviating from the concept of the present application.
[0019] Figure 1 It is a three-dimensional structure schematic diagram of the vertical furnace in the present application.
[0020] Figure 2 It is a sectional structure schematic diagram of the vertical furnace in the present application.
[0021] Figure 3 It is a three-dimensional structure schematic diagram when the auxiliary heating component is arranged on the fixed furnace door in the present application.
[0022] In the drawings, the main marks are as follows:
[0023] 1, furnace cover; 2, fixed furnace door; 4, outer furnace body; 5, inner furnace body;
[0024] 32, furnace mouth;
[0025] 41, auxiliary heating pipe; 42, auxiliary heating block;
[0026] 51, first temperature zone; 52, second temperature zone; 53, third temperature zone; 54, fourth temperature zone. DETAILED DESCRIPTION
[0027] In order to make the technical problems, technical schemes and beneficial effects of the embodiments of the present application more clear, the drawings needed in the embodiments or related technical description will be briefly introduced as follows. Obviously, the drawings in the following description are only some embodiments of the present application, and other drawings can be obtained by those skilled in the art without creative labor on the premise of not deviating from the concept of the present application.
[0028] In the related art, the vertical furnace and the heating system thereof are adopted to uniformly arrange a plurality of carriers in the furnace body, the carriers are arranged along the axial direction of the vertical furnace, and the vertical furnace usually adopts a single heating furnace body structure. However, due to the placement mode of the carriers of the vertical furnace, the temperature field is higher as it goes upward along the Z-axis direction, that is, the longitudinal distribution characteristics of the temperature field of the vertical furnace is that each temperature zone presents differences along the Z-axis direction. The equipment can be divided into a plurality of temperature zones along the Z-axis direction of the vertical furnace at a certain length. In the case of requiring the same process temperature, the temperature of the upper part of the Z-axis is more likely to meet the requirements, and the heating time is shorter. In order to make the temperature of each temperature zone reach a uniform state, the main implementation mode is to prolong the heating time to achieve temperature saturation. Due to the need for more heating time in the low-temperature zone of the Z-axis direction, only in the aspect of heating, the overall process time will be greatly prolonged. With the increase of the carrier loading capacity and the number of carriers, the heat requirement of the entire equipment is also increasing, which will also lead to the continuous prolongation of the process time of the entire equipment, affecting the process efficiency.
[0029] In addition, with the increase of the carriers, the volume of the reaction chamber in the furnace body also needs to be increased continuously, which can be achieved by increasing the pipe diameter of the furnace body to increase the volume of the reaction chamber. Still relying on the heating mode of the heating furnace wire on the single furnace body, with the increase of the pipe diameter of the furnace body, the uniformity of the temperature field will be adversely affected, thereby affecting the overall process effect; especially the heating effect of the area close to the center direction of the vertical furnace is poorer, and the uneven heating of the carriers will affect the overall process uniformity, and further affect the overall process yield and economic benefit.
[0030] To this end, the utility model provides a kind of inside and outside furnace body compensation heating structure, realize fast heating and compensation temperature control, guarantee the heating uniformity of carrier in reaction chamber, to improve process effect, reduce process time.
[0031] Please see Figure 1 、 Figure 2 And Figure 3 The utility model provides a kind of furnace body heating structure and vertical furnace for vertical furnace. Among them, the vertical furnace includes oppositely arranged furnace cover 1 and fixed furnace door 2, the outer furnace body 4 connected between furnace cover 1 and fixed furnace door 2, and the inner furnace body 5 located in outer furnace body 4 and surrounded with outer furnace body 4 to form reaction chamber;Furnace body heating structure includes main heating component and auxiliary heating component, main heating component is arranged on the body of outer furnace body 4 and inner furnace body 5, auxiliary heating component is arranged at one end of outer furnace body 4 and / or inner furnace body 5 close to fixed furnace door 2, and / or, auxiliary heating component is arranged on fixed furnace door 2.
[0032] The utility model discloses a vertical furnace contains the outer furnace body 4 and the inner furnace body 5 of the reaction chamber of common enclosure, is provided with main heating component through the body of outer furnace body 4 to form the outer heating furnace body, and is provided with main heating component through the body of inner furnace body 5 to form the inner heating furnace body, then under the common action of outer heating furnace body and inner heating furnace body, realize the quick heating of single or multiple carriers, make the temperature field in vertical furnace along the radial direction better uniformity simultaneously, improve the carrier heating uniformity, thereby reduce the process time, improve the process effect. And this kind of inner and outer furnace body heating mode will not be limited along with the continuous improvement of production capacity and the continuous increase of carrier quantity.
[0033] At the same time, at least one of the three is provided with auxiliary heating component for outer furnace body 4 close to one end of fixed furnace door 2, inner furnace body 5 close to one end of fixed furnace door 2 and fixed furnace door 2, utilize auxiliary heating component to compensate heating to the low temperature zone of temperature field in vertical furnace along the axial direction, avoid the problem of temperature field unevenness caused by the local temperature difference of vertical furnace axial direction, further improve the carrier heating uniformity, thereby better guarantee the process effect.
[0034] It should be noted that the specific way of arranging main heating component on the body of outer furnace body 4 can be that resistance heating wire is wound on the body of outer furnace body 4 along the axial direction, thereby forming the outer heating furnace body. Similarly, the specific way of arranging main heating component on the body of inner furnace body 5 can be that resistance heating wire is wound on the body of inner furnace body 5 along the axial direction, thereby forming the inner heating furnace body. In addition, one or more inner heating furnace bodies can be arranged along the radial direction in the outer heating furnace body, and more number of heating furnace bodies can realize more rapid heating. The specific setting form of auxiliary heating component is described in detail later.
[0035] Further, the auxiliary heating component is connected with the telescopic component, and the auxiliary heating component moves towards the direction close to or away from the fixed furnace door 2 through the telescopic component.
[0036] It should be noted that in actual application, the carrier placed in the vertical furnace is vertically or approximately vertically arranged, and the whole temperature zone corresponding to the carrier in the vertical furnace can be divided into four temperature zones along the Z-axis direction with a certain length, which are one temperature zone 51, two temperature zones 52, three temperature zones 53 and four temperature zones 54. Usually, three temperature zones 53 and four temperature zones 54 belong to medium temperature zone or high temperature zone, and one temperature zone 51 and two temperature zones 52 belong to low temperature zone.
[0037] The auxiliary heating component is connected with the telescopic component, so that the auxiliary heating component can assist in heating the specific part of the carrier. For example, when the temperatures of the three-temperature zone 53 and the four-temperature zone 54 have reached the required temperature for carrier processing, and the temperatures of the one-temperature zone 51 and the two-temperature zone 52 are lower than the required temperature for carrier processing, the auxiliary heating component can move to the one-temperature zone 51 or the two-temperature zone 52 through the telescopic component for auxiliary heating, so that the temperatures of the four temperature zones (i.e. the one-temperature zone 51, the two-temperature zone 52, the three-temperature zone 53 and the four-temperature zone 54) are more uniform, the uniformity of the carrier heating is improved, and better process effect is achieved.
[0038] It should be noted that there are various installation positions of the auxiliary heating component, and the auxiliary heating component is installed on the fixed furnace door 2 in this case.
[0039] In a preferred embodiment, the auxiliary heating component is arranged on the fixed furnace door 2 and located in the reaction chamber.
[0040] The auxiliary heating component arranged on the side of the fixed furnace door 2 facing the reaction chamber is used for compensating heating of the bottom temperature zone in the vertical furnace, which can further control the uniformity of the temperature on the basis of overall heating control.
[0041] In other optional embodiments, the auxiliary heating component can also be arranged on the side of the fixed furnace door 2 away from the reaction chamber, which is used for preheating the carrier before entering the reaction chamber. The auxiliary heating component at this position can be composed of multiple infrared heating pipes or spiral wire-shaped resistance heating wires.
[0042] Further, the fixed furnace door 2 is provided with two furnace openings 32 arranged symmetrically and corresponding to the two movable furnace doors, and the auxiliary heating component includes two auxiliary heating modules arranged symmetrically and between the two furnace openings 32.
[0043] It should be noted that the side of the fixed furnace door 2 away from the reaction chamber is rotatably provided with multiple movable furnace doors, and the number of the movable furnace doors is preferably two, and the movable furnace doors are arranged one by one corresponding to the furnace openings 32. After the movable furnace door is opened, the carrier can enter or exit the reaction chamber.
[0044] By arranging the two auxiliary heating modules between the two furnace openings 32 on the fixed furnace door 2, the space of the fixed furnace door 2 can be fully utilized, and the auxiliary heating modules are placed in a position that does not affect the entry and exit of the carrier.
[0045] Further, in an optional embodiment, the auxiliary heating module is composed of a plurality of auxiliary heating pipes 41 arranged at intervals. In another optional embodiment, the auxiliary heating module is composed of a plurality of auxiliary heating blocks 42 connected in sequence. In yet another optional embodiment, the auxiliary heating module is composed of a plurality of auxiliary heating plates arranged in layers. In a preferred embodiment, the auxiliary heating module is composed of a plurality of auxiliary heating blocks 42 connected in sequence and a plurality of auxiliary heating pipes 41 arranged at intervals on the plurality of auxiliary heating blocks 42.
[0046] The auxiliary heating pipes 41, the auxiliary heating blocks 42 and the auxiliary heating plates can be heated by infrared radiation or by resistance wire heating.
[0047] Now taking the auxiliary heating module containing the auxiliary heating blocks 42 as an example, the auxiliary heating blocks 42 can be arranged in the shape of a ring. In this case, the outer arc side of the auxiliary heating blocks 42 is arranged close to the bottom end of the outer furnace body 4, and the inner arc side is arranged close to the bottom end of the inner furnace body 5. Such an arrangement makes the heating area of the auxiliary heating blocks 42 larger and more concentrated. When the temperature of the bottom temperature zone in the vertical furnace is low, the auxiliary heating blocks 42 can quickly heat up and provide sufficient heat to the bottom temperature zone, so that the bottom temperature zone quickly heats up to the same temperature as other temperature zones.
[0048] In addition, the number of auxiliary heating blocks 42 in the auxiliary heating module can be set to 3 or 4, etc., which is not limited here. Each auxiliary heating block 42 can be independently temperature-controlled. Such an arrangement makes the auxiliary heating of multiple carriers more uniform and improves the auxiliary heating speed of multiple carriers. When the auxiliary heating module contains multiple auxiliary heating blocks 42, the shapes and sizes of different auxiliary heating blocks 42 can be the same or different, and adjacent auxiliary heating blocks can be tightly fitted or have gaps.
[0049] In addition, the auxiliary heating blocks 42 can be connected to a telescopic component. For example, the entire temperature zone corresponding to the carriers in the vertical furnace is divided into four temperature zones along the Z-axis direction at a certain length, namely, a temperature zone 51, a second temperature zone 52, a third temperature zone 53 and a fourth temperature zone 54. The telescopic component can move the auxiliary heating blocks 42 to different temperature zones, so that the auxiliary heating blocks 42 can perform auxiliary heating on multiple temperature zones, improving the applicability of the auxiliary heating blocks 42 and making the temperatures between the temperature zones 51, 52, 53 and 54 in the vertical furnace more uniform.
[0050] Now taking the auxiliary heating module containing auxiliary heating pipes 41 as an example, one end of the auxiliary heating pipe 41 is arranged on the fixed furnace door 2, and the other end extends into the reaction chamber. The structure of the auxiliary heating pipe 41 is relatively simple, and the manufacturing cost is relatively low. The number of auxiliary heating blocks 42 in the auxiliary heating module can be set to 4, 6, or 8, etc., which is not limited here. When the auxiliary heating module contains multiple auxiliary heating pipes 41, the multiple auxiliary heating pipes 41 can be uniformly distributed between the two furnace openings 32 to make the auxiliary heating more uniform, or they can be concentratedly distributed in a certain area between the two furnace openings 32 for targeted heating.
[0051] In addition, the auxiliary heating pipe 41 can adopt a telescopic tubular structure. For example, the vertical furnace is divided into four temperature zones, i.e., a temperature zone 51, a second temperature zone 52, a third temperature zone 53, and a fourth temperature zone 54, along the Z-axis direction corresponding to the entire temperature zone of the carrier. By setting the auxiliary heating pipe 41 to be telescopic, the auxiliary heating pipe 41 can assist in heating multiple temperature zones, improving the applicability of the auxiliary heating pipe 41, and making the temperature between the temperature zones 51, 52, 53, and 54 more uniform.
[0052] In addition, the fixed furnace door 2 is provided with a mounting hole, and the auxiliary heating pipe 41 can pass through the mounting hole of the fixed furnace door 2. The fixed furnace door 2 can be made of corrosion-resistant material, such as stainless steel, to avoid damage to the fixed furnace door 2 caused by corrosive gas. In this way, when the auxiliary heating pipe 41 needs to be unloaded and maintained due to damage, the damaged auxiliary heating pipe 41 can be replaced directly at the mounting hole of the fixed furnace door 2, without the need to lower the entire vertical furnace to room temperature for replacement of the damaged auxiliary heating pipe 41, thereby improving the installation convenience of the auxiliary heating pipe 41 and avoiding heat loss during replacement.
[0053] Now taking the auxiliary heating module containing auxiliary heating blocks 42 and auxiliary heating pipes 41 as an example, the specific structure and number of the auxiliary heating blocks 42 and the auxiliary heating pipes 41 have been described in detail above, and will not be repeated here. It should be noted that the auxiliary heating block 42 is provided with a clearance hole, and the auxiliary heating pipe 41 passes through the clearance hole of the auxiliary heating block 42. The combination of the auxiliary heating block 42 and the auxiliary heating pipe 41 can quickly assist in heating the temperature zone with lower temperature in the vertical furnace, quickly raise the temperature zone with lower temperature in the vertical furnace to the same temperature as other temperature zones, and shorten the entire processing time.
[0054] It should be noted that there are multiple installation positions for the auxiliary heating component, and now the case of installing the auxiliary heating component on the outer furnace body 4 is described.
[0055] The auxiliary heating component includes multiple auxiliary heating units arranged on the outer furnace body 4 along the circumference of the outer furnace body 4. The auxiliary heating unit can adopt any one or more of the auxiliary heating pipe 41, the auxiliary heating block 42, and the auxiliary heating plate.
[0056] Preferably, the vertical furnace is divided into four temperature zones, i.e., a first temperature zone 51, a second temperature zone 52, a third temperature zone 53 and a fourth temperature zone 54, along the Z-axis direction corresponding to the whole section of the carrier. A plurality of reserved holes are formed on the furnace wall of the outer furnace body 4 corresponding to the first temperature zone 51 and the second temperature zone 52. A plurality of auxiliary heating pipes 41 can be arranged in the reserved holes according to the actual process needs to perform compensation heating from the bottom side of the outer furnace body 4, thereby better ensuring the process effect.
[0057] The heating mode of the inner and outer furnace bodies can adapt to different carrier size specifications and simultaneously quickly heat a plurality of carriers, thereby ensuring uniform heating of the carriers, improving the process effect of the equipment, reducing the heating time, and thus improving the efficiency of the whole process. The compensation auxiliary heating mode can more accurately control the uniformity of the whole temperature field.
[0058] The above only describes preferred embodiments of the present application and is not intended to limit the present application. Any modification, equivalent replacement and improvement within the spirit and principle of the present application shall be included in the protection scope of the present application.
Claims
1. A furnace body heating structure for a vertical furnace, characterized by, The vertical furnace comprises a furnace cover and a fixed furnace door arranged oppositely, an outer furnace body connected between the furnace cover and the fixed furnace door, and an inner furnace body located in the outer furnace body and jointly forming a reaction chamber with the outer furnace body; the furnace body heating structure comprises a main heating component arranged on the body of the outer furnace body and the inner furnace body, and an auxiliary heating component arranged at an end of the outer furnace body and / or the inner furnace body close to the fixed furnace door, and / or arranged on the fixed furnace door.
2. The furnace body heating structure for a vertical furnace according to claim 1, wherein The auxiliary heating component is connected with a telescopic component, and moves towards or away from the fixed furnace door through the telescopic component.
3. The furnace body heating structure for a vertical furnace according to claim 1 or 2, characterized in that, The auxiliary heating component is arranged on the fixed furnace door and located in the reaction chamber.
4. The furnace body heating structure for a vertical furnace according to claim 3, wherein The fixed furnace door is provided with two furnace openings corresponding to the two movable furnace doors, and the auxiliary heating component comprises two auxiliary heating modules arranged symmetrically and located between the two furnace openings.
5. The furnace body heating structure for a vertical furnace according to claim 4, wherein The auxiliary heating module is composed of multiple auxiliary heating pipes arranged at intervals.
6. The furnace body heating structure for a vertical furnace according to claim 4, wherein The auxiliary heating module is composed of multiple auxiliary heating blocks connected in sequence.
7. The furnace body heating structure for a vertical furnace according to claim 4, wherein The auxiliary heating module is composed of multiple auxiliary heating blocks connected in sequence and multiple auxiliary heating pipes arranged at intervals on the multiple auxiliary heating blocks.
8. The furnace body heating structure for a vertical furnace according to claim 4, wherein The auxiliary heating module is composed of multiple auxiliary heating plates arranged in layers.
9. The furnace body heating structure for a vertical furnace according to claim 1 or 2, characterized in that, The auxiliary heating component comprises multiple auxiliary heating units arranged at intervals along the circumference of the outer furnace body and on the outer furnace body, and the auxiliary heating units adopt any one or more of auxiliary heating pipes, auxiliary heating blocks and auxiliary heating plates.
10. A vertical furnace characterized by A furnace body heating structure for a vertical furnace as claimed in any one of claims 1 to 9 is provided.