Target material sintering device

Abstract

The utility model relates to the technical field of target material sintering, in particular to a target material sintering device which comprises a sintering furnace, a heater is arranged on the inner side wall of the sintering furnace, a setter plate is arranged in the sintering furnace, an isolation frame is arranged on the setter plate, the isolation frame comprises a plurality of grid spaces used for containing target materials, and the grid spaces are arranged on the inner side wall of the sintering furnace. Partition plates arranged on the isolation frame are arranged on the four sides of each grid space, a liquid inlet pipe is arranged on one side in the side wall of each partition plate, a cooling pipe located in the side wall of the corresponding partition plate is arranged on one side of each liquid inlet pipe, and the upper end of each cooling pipe is communicated with the upper end of the corresponding liquid inlet pipe. A vertical through hole located in one side of the cooling pipe is formed in the side wall of the partition plate, a circulation hole communicated with the vertical through hole is formed in the partition plate, and the target material yield is improved.

Description

TECHNICAL FIELD

[0001] The utility model relates to target material sintering technical field especially relates to a target material sintering device. BACKGROUND

[0002] In the preparation process of the target material, sintering is a key step, and when sintering the target material, the traditional atmospheric sintering furnace is prone to uneven density and uneven shrinkage of the target material in the sintering process due to a large temperature difference between different temperature zones.

[0003] For example, on September 7, 2021, a patent with publication number CN113357925A and the name of a single-section long-rotation IT0 target material sintering preparation process was published, which placed ring-type blanking rings on the supporting plate in the sintering furnace, each ring-type blanking ring had ball-type quartz sand on both sides, formed a ring-type pad, and placed the IT0 target cylinder blank for sintering; but the applicant found that in the link that needs to be rapidly cooled, the outermost target material is close to the heating block, and the temperature difference between different temperature zones is large, which is easy to cause damage to the target material and reduce the yield of the target material. SUMMARY

[0004] Therefore, the utility model aims at providing a target material sintering device to solve the problem of reducing the yield of the target material.

[0005] To achieve the above purpose, the utility model provides a target material sintering device, which comprises a sintering furnace, a supporting plate is arranged in the sintering furnace, an isolation frame is arranged on the supporting plate, the isolation frame comprises a plurality of grid spaces for placing target materials, a partition plate arranged on the isolation frame is arranged on four sides of the grid space, a liquid inlet pipe is arranged on one side of the side wall of each partition plate, a cooling pipe located in the side wall of the partition plate is arranged on one side of the liquid inlet pipe, the upper end of the cooling pipe is in communication with the upper end of the liquid inlet pipe, a vertical through hole located on one side of the cooling pipe is arranged in the side wall of the partition plate, and a flow-through hole in communication with the vertical through hole is formed in the partition plate.

[0006] Optionally, the lower end of the isolation frame is provided with a liquid inlet in communication with the lower end of the liquid inlet pipe.

[0007] Optionally, a placing groove is arranged on the supporting plate, and a clamping block matched with the placing groove is arranged below the isolation frame.

[0008] Optionally, the isolation frame and the partition plate are integrally formed.

[0009] Optionally, the material of the isolation frame and the partition plate is silicon carbide.

[0010] Optionally, the cooling pipe is installed in the side wall of the partition plate in an S shape.

[0011] Optionally, the supporting plate is uniformly provided with a plurality of spacers for supporting the target material, and the spacer is provided with a circular hole in the middle.

[0012] Optionally, the upper end of the circular hole is communicated with a rounded table hole provided on the spacer, the lower end diameter of the rounded table hole is smaller than the upper end diameter of the rounded table hole, and a circular gasket ring for supporting the target material is placed on the rounded table hole.

[0013] The target material sintering device has the advantages that the heat storage and temperature equalization are realized by placing the isolation frame outside the target material, the temperature difference between different temperature zones is small, the target material is not easily damaged, and the yield of the target material is improved; when rapid cooling is needed, the cooling liquid is input into the cooling pipe through the liquid inlet pipe to rapidly cool the target material, thereby effectively improving the problems of uneven density and uneven shrinkage in the target material sintering process, and improving the yield of the target material. BRIEF DESCRIPTION OF DRAWINGS

[0014] In order to more clearly illustrate the technical solutions of the embodiments of the present application or the prior art, the following will briefly introduce the drawings needed to be used in the embodiment or the prior art description. Obviously, the drawings in the following description are only the embodiments of the present application, and for those skilled in the art, other drawings can also be obtained without creative labor.

[0015] Figure 1 It is a structural schematic diagram of the present application;

[0016] Figure 2 It is a structural schematic diagram of the internal structure of the sintering furnace of the present application;

[0017] Figure 3 It is Figure 2 It is an enlarged structural schematic diagram of position A in the middle;

[0018] Figure 4 It is a structural schematic diagram of the internal structure of the partition plate of the present application;

[0019] Figure 5 It is a structural schematic diagram of the side view of the partition plate of the present application.

[0020] In the figure: 1, sintering furnace; 2, supporting plate; 3, spacer; 4, circular hole; 5, rounded table hole; 6, circular gasket ring; 7, isolation frame; 8, partition plate; 9, lattice space; 10, cooling pipe; 11, liquid inlet pipe; 12, vertical through hole; 13, flow-through hole. DETAILED DESCRIPTION

[0021] In order to make the purpose, technical scheme and advantages of the present application more clear, the following will further describe the present application in combination with specific embodiments and with reference to the drawings.

[0022] It should be noted that, unless otherwise defined, the technical or scientific terms used in the embodiments of this utility model should have the ordinary meaning understood by one of ordinary skill in the art to which this utility model pertains. The terms "first," "second," and similar terms used in this utility model do not indicate any order, quantity, or importance, but are merely used to distinguish different components. Terms such as "comprising" or "including" mean that the element or object preceding the word encompasses the elements or objects listed following the word and their equivalents, without excluding other elements or objects. Terms such as "connected" or "linked" are not limited to physical or mechanical connections, but can include electrical connections, whether direct or indirect. Terms such as "upper," "lower," "left," and "right" are only used to indicate relative positional relationships; when the absolute position of the described object changes, the relative positional relationship may also change accordingly.

[0023] like Figures 1 to 5 As shown, a target sintering apparatus includes a sintering furnace 1, a heater is provided on the inner wall of the sintering furnace 1, a firing plate 2 is provided inside the sintering furnace 1, and an isolation frame 7 is provided on the firing plate 2. The isolation frame 7 includes a plurality of grid spaces 9 for placing the target material. Each grid space 9 has a partition plate 8 on its four sides. Each partition plate 8 has a liquid inlet pipe 11 on one side of its side wall. A cooling pipe 10 is provided on one side of the liquid inlet pipe 11 and is connected to the upper end of the liquid inlet pipe 11. A vertical through hole 12 is provided on one side of the cooling pipe 10 in the side wall of the partition plate 8. A flow hole 13 communicating with the vertical through hole 12 is provided on the partition plate 8.

[0024] By placing an isolation frame 7 on the outside of the target material for heat storage and temperature equalization, the temperature difference between different temperature zones is small, the target material is not easily damaged, and the target material yield is improved. When rapid cooling is required, the coolant is introduced into the cooling pipe 10 through the liquid inlet pipe 11 to rapidly cool the target material, thereby effectively improving the problems of uneven density and uneven shrinkage during the sintering process of the target material, and protecting the target material and the furnace heater when rapid cooling is required.

[0025] The lower end of the isolation frame 7 is provided with a liquid inlet that communicates with the lower end of the liquid inlet pipe 11. A liquid delivery port that communicates with the liquid inlet is provided on the sintering furnace 1. When rapid cooling is required, the coolant enters the cooling pipe 10 through the liquid delivery port to dissipate heat from the target material, thereby effectively improving the problems of uneven density and uneven shrinkage during the sintering process of the target material, and protecting the target material and the furnace heater when rapid cooling is required.

[0026] To facilitate the placement of the isolation frame 7, a placement groove is provided on the firing plate 2, and a locking block that cooperates with the placement groove is provided under the isolation frame 7.

[0027] The isolation frame 7 and the partition plate 8 are integrally formed. The isolation frame 7 and the partition plate 8 are made of silicon carbide. Silicon carbide has high thermal conductivity, high thermal stability and good chemical stability, and can effectively store heat and equalize temperature.

[0028] The cooling pipe 10 is installed in an S-shape inside the side wall of the partition plate 8 to facilitate more uniform heat dissipation.

[0029] The firing plate 2 is uniformly provided with a plurality of pads 3 for supporting the target material. Each pad 3 has a round hole 4 in the center. The pads 3 are made of aluminum oxide. The pads 3 are arranged in the grid space 9. The number of pads 3 corresponds one-to-one with the number of grid spaces 9.

[0030] The upper end of the circular hole 4 is connected to an inverted frustum hole 5 provided on the gasket 3. The lower diameter of the inverted frustum hole 5 is smaller than the upper diameter of the inverted frustum hole 5. A step is provided on the inner side wall of the inverted frustum hole 5. A circular gasket ring 6 for supporting the target material is placed on the inverted frustum hole 5. The circular gasket ring 6 is made of alumina, which facilitates the shrinkage and shaping of the target material during high-temperature sintering and reduces the possibility of the target material developing a flared mouth due to its own weight.

[0031] Those skilled in the art should understand that the discussion of any of the above embodiments is merely exemplary and is not intended to imply that the scope of the present invention is limited to these examples; within the framework of the present invention, the technical features of the above embodiments or different embodiments can also be combined, the steps can be implemented in any order, and there are many other variations of the different aspects of the present invention as described above, which are not provided in the details for the sake of brevity.

[0032] The embodiments of this utility model are intended to cover all such substitutions, modifications, and variations that fall within the broad scope of the appended claims. Therefore, any omissions, modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this utility model should be included within the protection scope of this utility model.

Claims

1. A target sintering apparatus, comprising a sintering furnace, wherein a sintering support plate is disposed within the sintering furnace, characterized in that, The firing plate is provided with an isolation frame, which includes multiple grid spaces for placing target materials. Each grid space has a partition on its four sides. Each partition has a liquid inlet pipe on one side of its sidewall. A cooling pipe is located inside the sidewall of the partition and its upper end is connected to the upper end of the liquid inlet pipe. A vertical through hole is provided inside the sidewall of the partition and located on one side of the cooling pipe. A flow hole communicating with the vertical through hole is provided on the partition.

2. The target sintering apparatus according to claim 1, characterized in that, The lower end of the isolation frame is provided with an inlet that communicates with the lower end of the inlet pipe.

3. The target sintering apparatus according to claim 1, characterized in that, The firing plate is provided with a placement groove, and the isolation frame is provided with a locking block that cooperates with the placement groove.

4. The target sintering apparatus according to claim 1, characterized in that, The isolation frame and partition are integrally formed.

5. The target sintering apparatus according to claim 4, characterized in that, The isolation frame and partition are made of silicon carbide.

6. The target sintering apparatus according to claim 1, characterized in that, The cooling pipe is S-shaped and installed inside the side wall of the partition.

7. The target sintering apparatus according to claim 1, characterized in that, The firing plate is uniformly provided with a plurality of pads for supporting the target material, each pad having a round hole in the center and the pads being disposed within the grid space.

8. The target sintering apparatus according to claim 7, characterized in that, The upper end of the circular hole is connected to an inverted frustum hole provided on the gasket. The lower diameter of the inverted frustum hole is smaller than the upper diameter of the inverted frustum hole. A circular gasket ring for supporting the target material is placed on the inverted frustum hole.

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