Furnace body heating device
By using electromagnetic heating components and a double-shell structure in the heating furnace, the problems of uneven temperature and heat loss in traditional heating furnaces are solved, achieving efficient heating and low-cost production.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-01-16
- Publication Date
- 2026-03-24
AI Technical Summary
Traditional heating furnaces suffer from uneven temperature distribution, low heating efficiency, short lifespan of resistance wires, and severe heat loss, leading to increased production costs and reduced efficiency.
It adopts an electromagnetic heating component and a double-layer shell structure. It uses a magnetic induction coil to generate an alternating magnetic field for heating. The heating element cuts the magnetic lines of force to generate eddy currents. Combined with a double-layer insulation layer, it can improve temperature uniformity and insulation effect.
It achieves uniform heating temperature and high heating efficiency, reducing production costs and improving production efficiency.
Smart Images
Figure CN224034394U_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The utility model relates to heating furnace technical field, concretely relates to a furnace body heating device. BACKGROUND
[0002] The heating furnace is mainly applied to the heat treatment field, and the traditional heating furnace generally adopts the resistance heating mode. The resistance heating is that resistance wires are installed in sections in the furnace body, and the temperature of the thermal field is controlled through the resistance heating principle during heating. The resistance heating is easy to produce local high temperature due to the thermal resistance and thermal inertia existing in itself, leads to uneven temperature distribution in the furnace body, and the heating efficiency is low. Meanwhile, the service life of the resistance wire is short, and the resistance wire needs to be replaced regularly, leads to the increase of equipment operation cost, and influences production progress. In addition, the existing heating furnace only has a single shell structure, heat is easy to lose, leads to the further reduction of heating efficiency.
[0003] Based on the above, it is necessary to provide a furnace body heating device which has uniform heating temperature, high heating efficiency, can improve production efficiency and reduce production cost. UTILITY MODEL CONTENT
[0004] In order to solve at least one problem mentioned in the background art, the utility model provides a furnace body heating device which has uniform heating temperature, high heating efficiency, can improve production efficiency and reduce production cost.
[0005] The specific technical scheme provided by the utility model is as follows:
[0006] A furnace body heating device is provided, which comprises a furnace body and an electromagnetic heating assembly. The furnace body comprises a cavity, and the electromagnetic heating assembly is arranged in the cavity. The electromagnetic heating assembly comprises a heating piece with magnetic conductivity and a magnetic induction coil. The heating piece is provided with an inner cavity for accommodating materials to be heated. The magnetic induction coil is arranged on the outer wall of the heating piece.
[0007] As a preferred embodiment of the above scheme, the furnace body heating device further comprises a first heat preservation layer arranged on the inner wall of the cavity of the furnace body.
[0008] As a preferred embodiment of the above scheme, the furnace body heating device further comprises a second heat preservation layer arranged on the outer wall of the heating piece.
[0009] As a preferred embodiment of the above scheme, the electromagnetic heating assembly further comprises an electric wire, a controller and a temperature detection piece. One end of the electric wire is connected to the magnetic induction coil, and the other end of the electric wire extends out of the furnace body and is connected to the controller. The controller is connected to the temperature detection piece. The temperature detection piece is used for detecting the heating temperature of the materials to be heated.
[0010] As a preferred embodiment of the above scheme, the heating piece is arranged on the inner wall of the cavity of the furnace body through a support.
[0011] As a preferred form of the above solution, the support is provided with a plurality of supports, the plurality of supports are distributed at intervals, the furnace body is a tubular furnace body, and the plurality of supports are distributed along the axial direction of the furnace body.
[0012] As a preferred form of the above solution, the heating member is a heating cylinder, and the magnetic induction coil is distributed along the axial direction of the heating member.
[0013] As a preferred form of the above solution, the furnace body heating device further comprises an isolation member, the isolation member is arranged in the inner cavity of the heating member, the isolation member is provided with a heating inner cavity, the material to be heated is arranged in the heating inner cavity, and the isolation member is used for isolating external metal ions from entering the heating inner cavity.
[0014] As a preferred form of the above solution, the furnace body heating device further comprises a buffer member, the buffer member is arranged between the isolation member and the heating member.
[0015] As a preferred form of the above solution, the material to be heated comprises a silicon wafer carrier, a silicon wafer and a gas containing film component atoms, the silicon wafer is arranged on the silicon wafer carrier, the silicon wafer carrier is arranged in the heating inner cavity, and the gas containing film component atoms is filled in the heating inner cavity.
[0016] As a preferred form of the above solution, the cavity of the furnace body, the inner cavity of the heating member and the heating inner cavity of the isolation member are all closed. By means of the above technical solution, the electromagnetic heating assembly is arranged in the furnace body, the magnetic induction coil generates an alternating magnetic field after being supplied with alternating current, the heating member cutting the alternating magnetic force line generates alternating current, i.e. eddy current, the eddy current makes the atoms on the heating member move at high speed in a random manner, the atoms collide and rub with each other to generate heat energy, the inner cavity of the heating member is heated to heat the material to be heated. Compared with the resistance heating mode, the electromagnetic heating mode has the advantages of high heating speed, high heating efficiency, uniform heat field of the inner cavity of the heating member, long service life of the magnetic induction coil itself, low maintenance cost, improved production efficiency and reduced production cost. In addition, the double-shell structure of the furnace body and the heating member is adopted, the material to be heated is arranged in the inner cavity of the heating member, and heat loss can be greatly reduced, and the heating efficiency is further improved. BRIEF DESCRIPTION OF DRAWINGS
[0017] In order to more clearly illustrate the technical solutions in the embodiments of the present application, the drawings needed in the embodiment description will be briefly introduced. Obviously, the drawings in the following description are only some embodiments of the present application, and other drawings can be obtained by those skilled in the art without creative labor.
[0018] Figure 1 The structure of the present application is shown in the figure. DETAILED DESCRIPTION
[0019] In order to make the purpose, technical scheme and advantages of the utility model clearer, the technical scheme in the utility model embodiment will be described clearly and completely in combination with the drawings in the utility model embodiment below. Obviously, the described embodiments are only part of the embodiments of the utility model, rather than all the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by those skilled in the art without creative labor belong to the protection scope of the utility model.
[0020] It should be noted that when an element is described as "fixed" to another element, it can be directly on the other element or one or more intermediate elements can be present therebetween. When an element is described as "connected" to another element, it can be directly connected to the other element or one or more intermediate elements can be present therebetween. The terms "vertical", "horizontal", "left", "right", "up", "down", "inner", "outer", "bottom", etc. used in the specification indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the utility model and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as a limitation on the utility model. In addition, the terms "first", "second", etc. are only for the purpose of description and cannot be understood as indicating or implying relative importance.
[0021] As described in the background, the heating furnace is mainly applied to the field of heat treatment, and the traditional heating furnace generally adopts the resistance heating mode. Resistance heating is to install resistance wires in sections inside the furnace body, and to control the temperature of the heat field through resistance heating principle during heating. Resistance heating is prone to local high temperature due to the thermal resistance and thermal inertia existing therein, resulting in uneven temperature distribution in the furnace body and low heating efficiency. At the same time, the service life of the resistance wire is relatively short, and it needs to be replaced regularly, resulting in increased equipment operation cost and affecting production progress. In addition, the existing heating furnace only has a single shell structure, and heat is easily lost, resulting in further reduction of heating efficiency.
[0022] PECVD (Plasma Enhanced Chemical Vapor Deposition), that is, plasma enhanced chemical vapor deposition technology. At present, the photovoltaic industry still mainly uses crystalline silicon solar cells. The preparation process of the solar cell is: cleaning, diffusion, etching, PECVD, screen printing, sintering, testing, sorting and packaging. The purpose of the PECVD process is to deposit a layer of silicon nitride film on the surface of the silicon wafer. The silicon nitride film can reduce the reflectivity of the cell, enhance the absorption of light, and thus improve the conversion efficiency of the cell. If the film is not uniform, it will lead to rework pieces, which need to be reworked, increasing the cost. Therefore, it is very important to improve the uniformity of the film. PECVD film deposition includes tube type film deposition and plate type film deposition. Tube type film deposition is mainly used. The silicon wafer carrier used in tube type film deposition is a graphite boat. The graphite boat is placed in a circular furnace tube. The silicon and ammonia gas are ionized by a high-frequency power source to form a plasma. After the reaction, the silicon wafer is deposited on the surface of the silicon wafer.
[0023] The existing tube furnace film deposition first uses the furnace tube resistance wire to heat, and then transfers the heat to the reaction cavity. The temperature and the intensity of the heat radiation inside the cavity are not uniform due to the difference in distance. The temperature and the intensity of the heat radiation near the tube wall are high, and the temperature and the intensity of the heat radiation far from the tube wall are low. This will cause the temperature and the energy of the heat radiation of the inner and outer boat pages of the graphite boat to be different, thereby affecting the deposition rate and causing the film thickness and the refractive index to be different, that is, the film deposition is not uniform. In addition, the existing tube furnace film deposition generally only has a single-layer shell heat preservation structure, and the heat is easily lost, resulting in low film deposition efficiency.
[0024] The utility model discloses a double-layer shell heat preservation structure by using electromagnetic heating principle, and the heating temperature is uniform and the heating efficiency is high. The production efficiency is improved and the production cost is reduced. The embodiments of the utility model are explained in detail below.
[0025] Referring to Figure 1The utility model discloses a furnace body heating device, including furnace body 1 and electromagnetic heating component 2, furnace body 1 includes cavity 11, and electromagnetic heating component 2 sets up in cavity 11, and electromagnetic heating component 2 includes the heating piece 21 of magnetic conduction and magnetic induction coil 22, and the heating piece 21 is equipped with the inner chamber of containing the material to be heated, and the magnetic induction coil 22 evenly sets up on the outer wall of heating piece 21, and the material to be heated includes silicon wafer carrier 100, silicon wafer (not shown) and the gas (not shown) containing film component atom, and the silicon wafer is placed on the silicon wafer carrier 100, in the embodiment, furnace body 1 is the tubular furnace body, and heating piece 21 is heating cylinder, and heating piece 21 sets up in the cavity 11 of furnace body 1, and the axis of heating piece 21 is parallel with the axis of furnace body 1 and sets up, and the outer wall of heating piece 21 is spaced apart with the inner wall of furnace body 1, and the magnetic induction coil 22 is along the axial distribution of heating piece 21, and the magnetic induction coil 22 is evenly wound on the outer wall of heating piece 21, and is used to pass through the alternating magnetic field of alternating current, and the number of magnetic induction coil 22 can be adapted according to the heating need, and furnace body 1 and heating piece 21 are all metal material, and preferably are stainless steel material, wherein, heating piece 21 is strong magnetic material, to cooperate with magnetic induction coil 22 and realize electromagnetic heating, and the silicon wafer carrier 100 is graphite boat, and graphite boat is equipped with a plurality of clamping slots (not shown), and the silicon wafer is placed in the clamping slot.
[0026] Referring to Figure 1 The furnace body heating device further includes a first heat preservation layer 31, and the first heat preservation layer 31 is arranged on the inner wall of the cavity 11 of the furnace body 1. The first heat preservation layer 31 enhances the heat preservation effect of the furnace body 1. The furnace body heating device further includes a second heat preservation layer 32, and the second heat preservation layer 32 is arranged on the outer wall of the heating piece 21. The second heat preservation layer 32 and the first heat preservation layer 31 form a double-layer heat preservation structure, and further enhance the heat preservation effect during heating. In the embodiment, the first heat preservation layer 31 is fixed on the inner wall of the cavity 11 of the furnace body 1, and the second heat preservation layer 32 is fixed on the outer wall of the heating piece 21. The magnetic induction coil 22 is evenly wound on the outer wall of the second heat preservation layer 32. The heating piece 21 is arranged on the inner wall of the cavity 11 of the furnace body 1 through a support 4. The support 4 is made of a high-temperature-resistant material, and is preferably made of a high-temperature-resistant ceramic material. The support 4 is used for supporting the heating piece 21, so as to ensure the stability of the heating piece 21. The support 4 is provided with a plurality of supports 4, and the plurality of supports 4 are distributed at intervals. The plurality of supports 4 are distributed along the axial direction of the furnace body 1. The distribution interval and the number of the plurality of supports 4 can be adjusted according to the weight distribution of each component on the heating piece 21. The plurality of supports 4 improve the support stability of the heating piece 21. In the embodiment, one end of the support 4 is fixed on the second heat preservation layer 32, and the other end of the support 4 is fixed on the first heat preservation layer 31.
[0027] Referring to Figure 1The furnace body heating device further comprises an insulation piece 5 arranged in the inner cavity of the heating piece 21, the insulation piece 5 is provided with a heating inner cavity 51, the silicon wafer carrier 100 is arranged in the heating inner cavity 51, and a gas containing film component atoms (mainly referred to as process gas hereinafter) is filled in the heating inner cavity 51. The insulation piece 5 is used for isolating external metal ions from entering the heating inner cavity 51. In the embodiment, the insulation piece 5 is a quartz tube, the insulation piece 5 can isolate external metal ion doping, create a clean reaction environment for the process gas, and ensure that there is no metal ion pollution in the film plating process. Meanwhile, the heat conduction between the heating piece 21 and the insulation piece 5 is solid to solid, and the heat conduction effect is better than that of gas conduction when resistance heating.
[0028] The cavity 11 of the furnace body 1, the inner cavity of the heating piece 21 and the heating inner cavity 51 of the insulation piece 5 are all closed, and one side is a flange seal. When the silicon wafer carrier 100 carrying the silicon wafer is sent into the heating inner cavity 51, the cavity 11 of the furnace body 1, the inner cavity of the heating piece 21 and the heating inner cavity 51 of the insulation piece 5 are all closed to form a sealed environment, and the process gas is introduced into the heating inner cavity 51. The furnace body 1 and the heating piece 21 form a closed double-shell structure, improve the heat preservation effect, and effectively bear the pressure during the film plating of the silicon wafer.
[0029] Referring to Figure 1The electromagnetic heating assembly further comprises an electric wire 7, a controller 8 and a temperature detecting member (not shown), one end of the electric wire 7 is connected with the magnetic induction coil 22, the other end of the electric wire 7 extends out of the furnace body 1 and is connected with the controller 8, the controller 8 is connected with the temperature detecting member, and the temperature detecting member is used for detecting the thermal field temperature of the heating inner cavity 51. The temperature detecting member is arranged in the heating inner cavity 51 of the insulation member 5, the electric wire 7 is further connected with a power supply (not shown), the power supply is arranged outside the furnace body 1, the power supply is connected with the controller 8, when the coating needs to be heated, the controller 8 controls the power supply to be turned on, the electric wire 7 supplies power to the magnetic induction coil 22, the magnetic induction coil 22 generates an alternating magnetic field after being supplied with alternating current, the heating element 21 cuts the magnetic lines to generate eddy current, thereby generating uniform heat in the heating inner cavity 51 of the insulation member 5, the process gas is ionized to form plasma by the radio frequency power supply, is deposited on the surface of the silicon wafer after reaction, and uniform coating is formed. The temperature detecting member can detect the temperature of the heating inner cavity 51 and transmit the temperature signal to the controller 8, so that the main control system or the production personnel can intelligently adjust the temperature in time according to the feedback, the size of the alternating magnetic field is adjusted by adjusting the current size of the electric wire 7 through the controller 8, and the reaction temperature of the heating inner cavity 51 is accurately adjusted. The temperature control is accurate and flexible when coating, and the coating efficiency is improved.
[0030] The electromagnetic heating assembly further comprises an electric wire 7, a controller 8 and a temperature detecting member (not shown), one end of the electric wire 7 is connected with the magnetic induction coil 22, the other end of the electric wire 7 extends out of the furnace body 1 and is connected with the controller 8, the controller 8 is connected with the temperature detecting member, and the temperature detecting member is used for detecting the thermal field temperature of the heating inner cavity 51. The temperature detecting member is arranged in the heating inner cavity 51 of the insulation member 5, the electric wire 7 is further connected with a power supply (not shown), the power supply is arranged outside the furnace body 1, the power supply is connected with the controller 8, when the coating needs to be heated, the controller 8 controls the power supply to be turned on, the electric wire 7 supplies power to the magnetic induction coil 22, the magnetic induction coil 22 generates an alternating magnetic field after being supplied with alternating current, the heating element 21 cuts the magnetic lines to generate eddy current, thereby generating uniform heat in the heating inner cavity 51 of the insulation member 5, the process gas is ionized to form plasma by the radio frequency power supply, is deposited on the surface of the silicon wafer after reaction, and uniform coating is formed. The temperature detecting member can detect the temperature of the heating inner cavity 51 and transmit the temperature signal to the controller 8, so that the main control system or the production personnel can intelligently adjust the temperature in time according to the feedback, the size of the alternating magnetic field is adjusted by adjusting the current size of the electric wire 7 through the controller 8, and the reaction temperature of the heating inner cavity 51 is accurately adjusted. The temperature control is accurate and flexible when coating, and the coating efficiency is improved.
[0031] Although the preferred embodiments in the embodiments of the utility model have been described, the person skilled in the art can make additional changes and modifications to these embodiments once the basic creative concept is known. Therefore, the appended claims are intended to explain the preferred embodiments and all changes and modifications falling within the scope of the embodiments of the utility model.
[0032] Obviously, those skilled in the art can make various modifications and variations to the present application without departing from the spirit and scope of the present application. Thus, if these modifications and variations of the present application fall within the scope of the claims of the present application and their equivalents, the present application also intends to include these modifications and variations.
Claims
1. A furnace body heating apparatus, characterized by comprising: The furnace body (1) comprises a cavity (11), the electromagnetic heating assembly (2) is arranged in the cavity (11), the electromagnetic heating assembly (2) comprises a magnetically conductive heating element (21) and a magnetic induction coil (22), the heating element (21) is provided with an inner cavity for accommodating a material to be heated, and the magnetic induction coil (22) is arranged on the outer wall of the heating element (21). The insulating element (5) is arranged in the inner cavity of the heating element (21), the insulating element (5) is provided with a heating inner cavity (51), the material to be heated is arranged in the heating inner cavity (51), and the insulating element (5) is used for insulating external metal ions from entering the heating inner cavity (51).
2. The furnace heating apparatus according to claim 1, characterized by The first heat preservation layer (31) is arranged on the inner wall of the cavity (11) of the furnace body (1).
3. The furnace heating device according to claim 1 or 2, characterized in that, The second heat preservation layer (32) is arranged on the outer wall of the heating element (21).
4. The furnace heating apparatus according to claim 1, characterized by The electromagnetic heating assembly (2) further comprises an electric wire (7), a controller (8) and a temperature detection element, one end of the electric wire (7) is connected to the magnetic induction coil (22), the other end of the electric wire (7) extends out of the furnace body (1) and is connected to the controller (8), the controller (8) is connected to the temperature detection element, and the temperature detection element is used for detecting the heating temperature of the material to be heated.
5. The furnace heating apparatus according to claim 1, wherein The heating element (21) is arranged on the inner wall of the cavity (11) of the furnace body (1) through a support (4).
6. The furnace heating apparatus according to claim 1, wherein The heating element (21) is a heating cylinder, and the magnetic induction coil (22) is distributed along the axial direction of the heating element (21).
7. The furnace heating apparatus according to claim 1, wherein The buffer element (6) is arranged between the insulating element (5) and the heating element (21).
8. The furnace heating device according to claim 1 or 7, characterized by The material to be heated comprises a silicon wafer carrier (100), a silicon wafer and a gas containing film component atoms, the silicon wafer is arranged on the silicon wafer carrier (100), the silicon wafer carrier (100) is arranged in the heating inner cavity (51), and the gas containing film component atoms is filled in the heating inner cavity (51).
9. The furnace heating apparatus according to claim 1, wherein The cavity (11) of the furnace body (1), the inner cavity of the heating element (21) and the heating inner cavity (51) of the insulating element (5) are all closed.