Testing device for high-frequency high-performance radio frequency probe card

Abstract

The utility model discloses a testing device for a high-frequency and high-performance radio frequency probe card. The testing device comprises a probe card side-looking device body and a side lifting upright post arranged at the rear end of the probe card side-looking device body, the side face insertion connection column is formed by combining a thin rough threaded column and a thick column body, a supporting connection elastic strip is arranged on the side face of the side face connection supporting column, the rotary extrusion rotary knob column is formed by combining a rotary knob and threads, and the tail end of the rotary extrusion rotary knob column is of a rough structure. The side face connecting supporting column can rotate to adjust the angle, then the side face inserting connecting column is rotated and extruded by rotating and extruding a rotary knob column to conduct fixing and limiting, after improvement, the jaw part of a worker can be supported in an auxiliary mode, the fatigue degree of a user is reduced to a certain degree, and the working efficiency is improved. And the use experience can be effectively improved, so that the use practicability of the testing device for the high-frequency and high-performance radio frequency probe card is effectively improved.

Description

TECHNICAL FIELD

[0001] The utility model belongs to the technical field of semiconductor, specifically related to a high frequency high performance radio frequency probe card's testing arrangement. BACKGROUND

[0002] The testing device of the probe card is mainly used for performance testing and verification of the probe card in the wafer testing stage, to ensure its reliability and accuracy in practical application.

[0003] With the continuous progress of semiconductor technology, the integration of chips is getting higher and higher, and the function is getting more and more complex, and the testing requirement of chip is getting more and more strict. As the key component of wafer testing, the performance and quality of probe card directly affect the test result and production efficiency of chip. Therefore, in order to meet the development demand of semiconductor industry, it is necessary to continuously develop and improve the testing device of probe card, so as to improve the testing precision, reliability and efficiency of probe card.

[0004] Through accurate testing of the probe card, good contact between the probe card and the chip can be ensured, test error can be reduced, and the accuracy and reliability of the test result can be improved. This helps to find out the problems and defects of the chip in time, ensures that the quality and performance of the chip meet the requirements, and improves the yield and reliability of the chip.

[0005] However, when the testing device of high frequency high performance radio frequency probe card observes the surface of the probe card, the staff is easy to cause neck sore due to long time observation, and then it is easy to affect the working state of the staff.

[0006] The utility model improves the above problems, and specifically relates to a high frequency high performance radio frequency probe card's testing arrangement with auxiliary support. CONTENT OF UTILITY MODEL

[0007] The utility model aims at providing a kind of high frequency high performance radio frequency probe card's testing arrangement, to solve the problem that the testing device of high frequency high performance radio frequency probe card is observed to the surface of probe card in the background art, staff is easy to cause neck sore due to long time observation, and then it is easy to affect the working state of the staff.

[0008] To achieve the above object, the utility model provides the following technical scheme: a kind of high frequency high performance radio frequency probe card's testing arrangement, including probe card side view device body and the side face lifting stand column of probe card side view device body rear end position place setting;

[0009] The front side position of the side face lifting stand column is provided with lifting movement block;

[0010] The side surface position of the lifting moving block is provided with a side surface plug-in connecting column which is combined by a thin rough thread column and a thick column body, the side surface position of the side surface plug-in connecting column is provided with a side surface connecting support column, the side surface position of the side surface connecting support column is provided with a support connecting elastic strip, the front side close to the side surface position of the lifting moving block is provided with a rotating extrusion knob column which is combined by a knob and a thread, and the end position of the rotating extrusion knob column is a rough structure.

[0011] Preferably, the side surface position of the side surface lifting column is provided with a lifting limiting groove, and the lifting moving block moves up and down along the lifting limiting groove.

[0012] Preferably, the front side position of the lifting moving block is provided with an observation ocular, and the observation ocular is provided with two.

[0013] Preferably, the bottom position of the lifting moving block is provided with a detection objective lens, and the detection objective lens is provided with three and can be used by rotating adjustment.

[0014] Preferably, the middle position of the upper side of the probe card side viewing device body is provided with a placement detection table, the placement detection table is made of transparent tempered glass, and the bottom position of the placement detection table is provided with a light.

[0015] Preferably, the side surface position of the placement detection table is provided with a limiting measurement block, and the limiting measurement block is provided with a sensing and driving structure.

[0016] Preferably, the bottom position of the probe card side viewing device body is provided with a bottom support leg, and the bottom support leg is installed and connected to the bottom corner position of the probe card side viewing device body by a screw.

[0017] Preferably, the front side position of the probe card side viewing device body is provided with a front data display screen, and the side surface position of the front data display screen is provided with an adjustment control button.

[0018] Compared with the prior art, the test device of the high-frequency high-performance radio frequency probe card has the following beneficial effects:

[0019] The side position of the lifting moving block is provided with a side plug-in connecting column, the side plug-in connecting column is combined by a thin rough thread column and a thick column body, the side position of the side plug-in connecting column is provided with a side connecting support column, the side position of the side connecting support column is provided with a support connecting elastic strip, the front side of the lifting moving block is provided with a rotating extrusion knob column close to the side position, the rotating extrusion knob column is combined by a knob and a thread, the end position of the rotating extrusion knob column is a rough structure, the side connecting support column can be rotated to adjust the angle, then the side plug-in connecting column is fixed and limited by rotating and extruding the rotating extrusion knob column, the chin part of the staff can be assisted and supported after the improvement, the user's tiredness degree is reduced to a certain extent, the use experience is effectively improved, and the practicality of the high-frequency high-performance radio frequency probe card testing device is effectively improved. BRIEF DESCRIPTION OF DRAWINGS

[0020] Figure 1 It is a whole structure schematic diagram of the high-frequency high-performance radio frequency probe card testing device.

[0021] Figure 2 It is a structure schematic diagram without improvement of the high-frequency high-performance radio frequency probe card testing device.

[0022] Figure 3 It is an enlarged structure schematic diagram of the high-frequency high-performance radio frequency probe card testing device sequence number A position.

[0023] In the figure: 1, probe card side view device body; 2, lifting limiting groove; 3, lifting moving block; 4, observation ocular; 5, detection objective lens; 6, limiting measurement block; 7, placed detection table; 8, front data display screen; 9, adjustment control button; 10, bottom support leg; 11, support connecting elastic strip; 12, side connecting support column; 13, side plug-in connecting column; 14, rotating extrusion knob column; 15, side lifting stand. DETAILED DESCRIPTION

[0024] The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative labor fall within the scope of protection of the present application.

[0025] The present application provides a Figures 1-3The utility model provides a kind of high-frequency high-performance radio frequency probe card testing device, including probe card side viewing device body 1 and the side face lifting column 15 of probe card side viewing device body 1 rear end position place setting;Lifting column 15 is provided with lifting moving block 3 at the front side position;Lifting moving block 3 is provided with side surface plug-in connection column 13 at the side position, and side surface plug-in connection column 13 is combined by relatively thin rough thread column and relatively thick column, and side surface plug-in connection column 13 is provided with side surface connecting support column 12 at the side position, and side surface connecting support column 12 is provided with support connection elastic strip 11 at the side position, and rotating extrusion knob column 14 is provided with rotating extrusion knob column 14 at the front side close side position of lifting moving block 3, and rotating extrusion knob column 14 is combined by knob and screw thread, and the end position of rotating extrusion knob column 14 is rough structure, and side surface connecting support column 12 can be adjusted angle, then fixed restriction is carried out by rotating extrusion knob column 14 rotating extrusion side surface plug-in connection column 13, and the utility model improves and can be assisted to support the chin part of staff, reduce the degree of user's tiredness to some extent, can effectively improve its use experience, and then effectively improve the practicality of high-frequency high-performance radio frequency probe card testing device.

[0026] As Figure 1 The side position of side face lifting column 15 is provided with lifting limiting groove 2, and lifting moving block 3 moves up and down along lifting limiting groove 2, and lifting limiting groove 2 can limit the movement of lifting moving block 3, effectively avoiding the phenomenon that lifting moving block 3 lifts excessively and separates.

[0027] As Figure 1 The front side position of lifting moving block 3 is provided with observation eyepiece 4, and observation eyepiece 4 is provided with two, and the bottom position of lifting moving block 3 is provided with detection objective lens 5, and detection objective lens 5 is provided with three, and the required detection objective lens 5 can be used by rotating adjustment, and detection objective lens 5 enlarges the observed object, and then the user observes the state of probe card surface by observation eyepiece 4.

[0028] As Figure 1 The upper side intermediate position of probe card side viewing device body 1 is provided with placing detection platform 7, and placing detection platform 7 is transparent tempered glass material, and the bottom position of placing detection platform 7 is provided with light, and the side position of placing detection platform 7 is provided with limiting measurement block 6, and limiting measurement block 6 is provided with sensing and driving structure, and placing detection platform 7 can provide light source for probe card observation, limiting measurement block 6 can be extruded to limit it for observation, and it can sense the size of side viewing probe card through sensor.

[0029] As Figure 1As shown, a bottom support leg 10 is provided at the bottom of the probe card side viewing device body 1. The bottom support leg 10 is installed and connected to the bottom corner of the probe card side viewing device body 1 by screws. The bottom support leg 10 can improve the placement stability of the probe card side viewing device body 1, and the increased distance between it and the placement surface can reduce the erosion of moisture on its bottom.

[0030] like Figure 1 As shown, a front data display screen 8 is provided on the front side of the probe card side viewing device 1, and an adjustment control button 9 is provided on the side of the front data display screen 8. The front data display screen 8 can display data for the user to observe, and the user can adjust the corresponding parameters by adjusting the control button 9 based on the observed data.

[0031] Finally, it should be noted that the above description is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. Although the present utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present utility model should be included within the protection scope of the present utility model.

Claims

1. A high-frequency high-performance RF probe card testing device, comprising a probe card side viewing device body (1) and a side lifting column (15) arranged at the rear end position of the probe card side viewing device body (1); a lifting moving block (3) is arranged at the front side position of the side lifting column (15); a side plug-in connecting column (13) is arranged at the side position of the lifting moving block (3), the side plug-in connecting column (13) is composed of a thin rough thread column and a thick column, a side connecting support column (12) is arranged at the side position of the side plug-in connecting column (13), a support connecting elastic strip (11) is arranged at the side position of the side connecting support column (12), a rotating extrusion knob column (14) is arranged at the front side close position of the lifting moving block (3), the rotating extrusion knob column (14) is composed of a knob and a thread, the end position of the rotating extrusion knob column (14) is a rough structure, the side connecting support column (12) can be adjusted in angle, and then the rotating extrusion knob column (14) is used for rotating extrusion and fixation of the side plug-in connecting column (13). A lifting limiting groove (2) is arranged at the side position of the side lifting column (15), and the lifting moving block (3) moves up and down along the lifting limiting groove (2). characterized in that An observation eyepiece (4) is arranged at the front side position of the lifting moving block (3), and the observation eyepiece (4) is provided with two.

2. The test apparatus for a high-frequency high-performance RF probe card according to claim 1, wherein: A detection objective lens (5) is arranged at the bottom position of the lifting moving block (3), and the detection objective lens (5) is provided with three and can be used by rotating adjustment.

3. The test apparatus for a high-frequency high-performance RF probe card according to Claim 1, wherein: A placement detection table (7) is arranged at the upper middle position of the probe card side viewing device body (1), the placement detection table (7) is made of transparent tempered glass, and a lamp is arranged at the bottom position of the placement detection table (7).

4. The test apparatus for a high-frequency high-performance RF probe card according to Claim 1, wherein: A limiting measurement block (6) is arranged at the side position of the placement detection table (7), and the limiting measurement block (6) is provided with a sensing and driving structure.

5. The test apparatus for a high-frequency high-performance RF probe card according to Claim 1, wherein: A bottom support leg (10) is arranged at the bottom position of the probe card side viewing device body (1), and the bottom support leg (10) is installed and connected to the bottom corner position of the probe card side viewing device body (1) by screws.

6. The test apparatus for a high frequency high performance RF probe card according to claim 5, wherein: A front data display screen (8) is arranged at the front side position of the probe card side viewing device body (1), and an adjustment control button (9) is arranged at the side position of the front data display screen (8).

7. The test apparatus for a high-frequency high-performance RF probe card according to Claim 1, wherein: ​ 8. The test apparatus for a high frequency high performance RF probe card according to claim 1, wherein: ​

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