Photomask box with detachable pressing block

Abstract

The utility model discloses a photomask box with a detachable pressing block. The photomask box comprises a base, a box cover and a pressing block assembly, the base comprises a bottom plate and a limiting column. The pressing block assembly comprises a connecting clamping block and a fixing pressing block. Each connecting clamping block comprises a main body part, an abutting part, a limiting protruding block and an abutting protruding block. And each fixed pressing block comprises a pressing block main body, a pressing block connecting part, a pressing block buckling part and an abutting arm. Compared with the prior art, the limiting column and the pressing block assembly are arranged and used for clamping the product, the abutting arm is arranged to abut against the product, and therefore the product can be effectively prevented from being damaged by vibration or collision. And meanwhile, the pressing block assembly is arranged, so that the pressing block assembly has a protection limit on the abutting effect of the product. Meanwhile, the pressing block assembly is detachably connected with the connecting clamping block in a buckled mode, so that no gap exists between the abutting arm and the product in abutting, and the product can be more effectively protected.

Description

TECHNICAL FIELD

[0001] The utility model relates to a semiconductor carrier technical field, especially a mask box with detachable pressing block. BACKGROUND

[0002] The mask box, also known as a photomask box or a photolithography plate box, is a special container used to store and protect photomasks in semiconductor manufacturing and photolithography processes. Photomasks are the core components in photolithography technology, with micro-patterns engraved on them for manufacturing integrated circuits. Therefore, the integrity and cleanliness of photomasks are crucial for the success of the entire manufacturing process. The mask box provides a closed and clean environment to prevent dust, particles, and other contaminants from damaging the photomask, ensuring the safety of the photomask during storage and transportation. During transportation within the semiconductor factory and between factories, photomasks may be subjected to vibrations and impacts. The mask box, through its structural and material design, can effectively absorb these external forces and prevent physical damage to the photomask.

[0003] However, when the photomask is carried in the mask box, the accompanying inertial motion will also become more and more serious. During handling or conveying, the photomask is more likely to shake, impact, or even cause the entire photomask container to tip over due to insufficient transportation precision, leading to damage to the photomask. The clamping method of the photomask box on the market now has the problem of loose clamping, which may cause the photomask to vibrate or shift in the mask box during transportation. At this time, the abutting piece may impact the photomask when fixing and abutting the photomask, causing damage to the photomask. SUMMARY

[0004] Therefore, the utility model provides a mask box with detachable pressing block to solve the above technical problems.

[0005] A mask box with detachable pressing block, comprising a base, a box cover buckled on the base, and a pressing block assembly arranged in the box cover. The base is used for loading a product, and comprises a rectangular box-shaped bottom plate and four limiting columns arranged on the bottom plate. The box cover is a single-side opening rectangular box, and an accommodating cavity for placing the product is arranged inside. The pressing block assembly comprises four connecting blocks arranged in the box cover and four fixed pressing blocks respectively clamped on the connecting blocks. The four connecting blocks are arranged in the accommodating cavity, each of the connecting blocks comprises a main body arranged perpendicularly to the box cover, a top abutting portion arranged perpendicularly to the box cover and the main body, a limiting protrusion arranged on the main body away from the box cover, and a top abutting protrusion arranged on the top abutting portion away from the main body. Each of the fixed pressing blocks comprises two spaced pressing block bodies, a pressing block connecting portion connected between the pressing block bodies, a pressing block buckle portion connecting the two pressing block bodies, and two abutting arms arranged on the two pressing block bodies respectively. The pressing block connecting portion is connected perpendicularly to the two pressing block bodies and can abut against the top abutting protrusion. The pressing block buckle portion is connected to the top of the two pressing block bodies away from the box cover, has a U-shaped structure with two ends connected to the pressing block bodies respectively, and can abut against the limiting protrusion. The abutting arms are elastic extension arms arranged perpendicularly to the pressing block bodies, and the two abutting arms are arranged symmetrically with the pressing block connecting portion as the axis of symmetry. The free ends of the two abutting arms are bent towards each other, and two inclined surfaces are arranged on the free ends away from the box cover, and the two inclined surfaces are arranged perpendicularly to each other.

[0006] Further, all the limiting columns are columnar structures arranged perpendicularly to the bottom plate, and the four limiting columns are arranged in a rectangular array. The free ends of the limiting columns away from the bottom plate are provided with inclined surfaces clamping the product, and the four limiting columns cooperate to clamp the four corners of the product.

[0007] Further, a sealing gasket is arranged on the edge of the box cover in contact with the bottom plate, or on the bottom plate.

[0008] Further, the main body and the top abutting portion are rectangular block structures arranged perpendicularly to the top surface of the accommodating cavity away from the bottom plate, and are arranged perpendicularly to each other. The main body and the top abutting portion form a T-shaped structure, and the end of the main body is connected to the midpoint of the top abutting portion.

[0009] Further, the limiting protrusion is a protrusion with a straight-angled trapezoidal cross section, the lower base of which is connected to the main body, the upper base is a free end away from the box cover, and the oblique edge is towards the abutting protrusion.

[0010] Further, the abutting protrusion is arranged on the top of the abutting portion away from the box cover, is a protrusion with a straight-angled trapezoidal cross section, the lower base of which is connected to the abutting portion, the upper base is a free end away from the main body, and the oblique edge is towards the side away from the box cover.

[0011] Further, the fixing pressing block is a plastic piece formed integrally and has elasticity.

[0012] Further, the two pressing block bodies are arranged in parallel and are provided with a supporting leg vertically extending from the pressing block body at the bottom near the abutting arm.

[0013] Further, the elastic coefficient of the abutting arm is less than the structural strength of the product.

[0014] Compared with the prior art, the photomask box with detachable pressing blocks provided by the utility model can clamp the product by arranging the limiting column and the pressing block assembly and abut against the product by arranging the abutting arm, so that the damage of the product caused by vibration or collision in the transportation process can be effectively prevented. Meanwhile, the abutting effect of the pressing block assembly on the product has a protection limit, and when the force of the pressing block assembly on the product exceeds the strength of the abutting arm, the abutting arm will be deformed and move away from each other, so that the rigid abutting damage to the product can be prevented, and the product can be effectively protected from being damaged in the transportation process. Meanwhile, the detachable buckle connection of the pressing block assembly and the connecting clamping block can replace the connecting clamping block of different models according to the size of the loaded product, so that the abutting arm abuts against the product without gap, the product can be prevented from moving or vibrating relative to the connecting clamping block, and the product can be more effectively protected. BRIEF DESCRIPTION OF DRAWINGS

[0015] Figure 1 FIG. 1 is a structural schematic view of a photomask box with detachable pressing blocks provided by the utility model.

[0016] Figure 2 FIG. 2 is a partial structural schematic view of the photomask box with detachable pressing blocks. Figure 1

[0017] FIG. 3 is an enlarged schematic view of the photomask box with detachable pressing blocks at A. Figure 3 Figure 2

[0018] ​​Figure 4 for Figure 1 A partial structural diagram of a photomask box with a removable pressure block.

[0019] Figure 5 for Figure 4 An enlarged schematic diagram of the photomask box with a removable pressure block at point B.

[0020] Figure 6 for Figure 1 A schematic diagram of the fixed pressure block 32 of the photomask box with a detachable pressure block. Detailed Implementation

[0021] The specific embodiments of this utility model are described in further detail below. It should be understood that the description of the embodiments of this utility model herein is not intended to limit the scope of protection of this utility model.

[0022] like Figures 1 to 6 The diagram shows a schematic of the photomask box with a detachable pressure block provided by this utility model. The photomask box with a detachable pressure block includes a base 10, a cover 20 fastened to the base 10, and a pressure block assembly 30 disposed within the cover 20. It is conceivable that the photomask box with a detachable pressure block also includes other functional modules such as valves on the air inlet, locking assemblies for locking the cover, etc., which are technologies known to those skilled in the art and will not be described in detail here.

[0023] It should be noted that the base 10 is used to load a product 40, which can be a rectangular plate-shaped photomask. The product 40 is placed on the base 10, fastened by the box cover 20, and positioned and fixed by the pressure block assembly 30, thus being sealed in a closed environment for easy transportation.

[0024] The base 10 includes a rectangular box-shaped base plate 11 and four limiting posts 12 disposed on the base plate 11.

[0025] The base plate 11 is a rectangular plate structure, which can be integrally molded by injection molding. One side is fastened to the box cover 20 and used to place the product 40.

[0026] All the limiting posts 12 are columnar structures vertically arranged on the bottom plate 11, and four of the limiting posts 12 are arranged in a rectangular array for matching the pressing block assembly 30 and supporting the bottom of the product 40. The free end of the limiting post 12 away from the bottom plate 11 is provided with a slope for clamping the product 40, and four of the limiting posts 12 are matched with each other to clamp four corners of the product 40, so that the product 40 is placed on the base 10. The slope structure is a common technology in the field of reticle boxes, such as the support column with the same top structure used in a reticle pressing device and a reticle box disclosed in the Utility Model Patent with the authorization number TWI865389B of Taiwan, China, and the structure of the support column is not the main content of the present application, so it is only briefly described here.

[0027] The box cover 20 is a single-sided opening rectangular box, and an accommodation cavity 21 for placing the product 40 is arranged inside. The opening of the box cover 20 is clamped on the base 10 to form a closed rectangular box, so that the reticle placed in the wafer storage box 20 will not be contaminated by dust or other substances during transportation. Accordingly, a sealing gasket is arranged on the edge of the box cover 20 in contact with the base 10, or on the base 10, to ensure the sealing performance of the interior formed by the box cover 20 and the base 10 after they are in contact.

[0028] The accommodation cavity 21 is used to accommodate the product 40 when the box cover 20 is clamped on the base 10, and can be filled with inert gas to improve cleanliness and prevent harmful gas from damaging the product 40.

[0029] The pressing block assembly 30 includes four connecting clamping blocks 31 arranged in the box cover 20, and four fixed pressing blocks 32 respectively clamped on the connecting clamping blocks 31.

[0030] The four connecting clamping blocks 31 are arranged in the accommodation cavity 21, and are protrusions vertically extending from the top surface of the accommodation cavity 21 away from the bottom plate 11 toward the bottom plate 11 for fixing the fixed pressing blocks 32. The four connecting clamping blocks 31 are arranged in a rectangular array with each other to facilitate cooperation with the limiting posts 12 to fix the product 40. The connecting clamping blocks 31 can be integrally formed with the box cover 20 by an injection molding process. Each of the connecting clamping blocks 31 includes a main body portion 311 arranged perpendicularly to the box cover 20, a stop portion 312 arranged perpendicularly to the box cover 20 and the main body portion 311, a limiting protrusion 313 arranged on the side of the main body portion 311 away from the box cover 20, and a stop protrusion 314 arranged on the side of the stop portion 312 away from the main body portion 311.

[0031] The main body part 311 and the abutting part 312 are both rectangular block structures perpendicular to the top surface of the accommodating cavity 21 away from the bottom plate 11, and specifically, the main body part 311 and the abutting part 312 present a T-shaped structure, with the end of the main body part 311 connected to the midpoint of the abutting part 312.

[0032] The limiting protrusion 313 is a protrusion with a straight trapezoidal cross section, with the lower base connected to the main body part 311 and the upper base being the free end away from the box cover 20, and the oblique edge waist being towards the abutting protrusion 314, so that when the fixing pressing block 32 is buckled on the connecting clamping block 31, the fixing pressing block 32 can be abutted on the high straight angle waist of the limiting protrusion 313, which will be described in detail below in combination with the corresponding structure of the fixing pressing block 32.

[0033] The abutting protrusion 314 is provided at the top of the abutting part 312 away from the box cover 20, and is a protrusion with a straight trapezoidal cross section, with the lower base connected to the abutting part 312 and the upper base being the free end away from the main body part 311, and the oblique edge waist being towards the side away from the box cover 20, so that when the fixing pressing block 32 is buckled on the connecting clamping block 31, the fixing pressing block 32 can be abutted on the high straight angle waist of the abutting protrusion 314, which will be described in detail below in combination with the corresponding structure of the fixing pressing block 32.

[0034] The fixing pressing block 32 can be a plastic piece formed integrally and has a certain elasticity, so as to facilitate buckling of the fixing pressing block 32 on the connecting clamping block 31, and at the same time, when the fixing pressing block 32 cooperates with the limiting column 12 to fix the product 40, it can buffer the product to avoid damage caused by rigid contact. Each fixing pressing block 32 includes two spaced pressing block bodies 321, a pressing block connecting part 322 connected between the pressing block bodies 321, a pressing block clamping part 323 connecting the two pressing block bodies 321, and two abutting arms 324 respectively provided on the two pressing block bodies 321.

[0035] The two pressing block bodies 321 are spaced and parallel, and each has a leg extending perpendicularly from the pressing block body 321 at the bottom near the abutting arm 324, so as to support the force transmitted by the fixing pressing block 32 when the abutting arm 324 is deformed by the force from the product 40.

[0036] The pressing block connecting part 322 is vertically connected to the two pressing block bodies 321, and plays a connecting role. When the fixed pressing block 32 is buckled on the connecting buckle 31, the pressing block connecting part 322 can abut against the right-angle waist where the height of the abutting convex block 314 is located, so that the connection between the fixed pressing block 32 and the connecting buckle 31 is stable.

[0037] The pressing block buckling part 323 connects the top of the two pressing block bodies 321 away from the box cover 20, and has a U-shaped structure with two ends connected to the pressing block bodies 321. The pressing block buckling part 323 plays a connecting role. When the fixed pressing block 32 is buckled on the connecting buckle 31, the pressing block buckling part 323 can abut against the right-angle waist where the height of the limiting convex block 313 is located, so that the connection between the fixed pressing block 32 and the connecting buckle 31 is stable. The pressing block buckling part 323 is elastic, and the distance between the pressing block buckling part 323 and the pressing block connecting part 322 is tightly fitted with the distance between the limiting convex block 313 and the abutting convex block 314, so that the fixed pressing block 32 can be buckled between the pressing block buckling part 323 and the pressing block connecting part 322 by the reaction force generated by elastic deformation, and is convenient to disassemble and replace the fixed pressing block 32 of different sizes.

[0038] The abutting arm 324 is an elastic extension arm perpendicular to the pressing block body 321 from the side away from the pressing block buckling part 323, and the two abutting arms 324 are symmetrically arranged with the pressing block connecting part 322 as the axis of symmetry. The free ends of the two abutting arms 324 are curved, and two inclined slopes are arranged on the side away from the box cover 20, and the two slopes are perpendicular to each other, so that the angle of the product 40 can be buckled between the two abutting arms 324 and abut against the slopes of the two abutting arms 324.

[0039] It is conceivable that due to the different transportation methods, such as using the crown block to transport the mask box, the mask box will inevitably shake, so the product 40 will impact the pressing block assembly 30, generating a resisting force, and adopting a completely rigid resisting part can ensure that the product 40 will not be displaced, but there is a risk of damaging the product 40, so the pressing block assembly 30 must have a certain buffer elasticity, so two elastic abutting arms 324 are adopted, and when the product 40 is subjected to an external force, the two abutting arms 324 will be elastically deformed and spread, providing more space for the mask.

[0040] In addition, since the pressing block assembly 30 and the box cover 20 are buckled, the pressing block assembly 30 can be disassembled, and the pressing block assembly 30 with different lengths of the abutting arm 324 can be selected according to the size of the product 40, which has stronger adaptability.

[0041] In use, the pressing block assembly 30 corresponding to the size of the product 40 is buckled on the connecting block 31, then the product 40 is placed on the limiting column 12, and the box cover 20 is buckled on the base 10, at this time the pressing block assembly 30 is resisted on the four corners of the product 40.

[0042] Compared with the prior art, the mask box with a detachable pressing block provided by the utility model can effectively prevent damage to the product 40 due to vibration or collision during transportation by setting the limiting column 12 and the pressing block assembly 30 for clamping the product 40 and setting the abutting arm 324 for resisting the product 40. At the same time, by setting the pressing block assembly 30, the resisting effect of the pressing block assembly 30 on the product 40 has a protection limit, and when the force of the pressing block assembly 30 on the product 40 exceeds the strength of the abutting arm 324, the abutting arm 324 will deform and move away from each other, thereby preventing rigid resistance from damaging the product 40, and effectively protecting the product 40 from being damaged during transportation. At the same time, by setting the detachable buckle connection between the pressing block assembly 30 and the connecting block 31, different models of the connecting block 31 can be replaced according to the size of the loaded product 40, so that the abutting arm 324 has no gap with the product 40, preventing the product 40 from being displaced or vibrated relative to the connecting block 31, and more effectively protecting the product 40.

[0043] The above merely is the preferred embodiment of the present application, and is not used for limiting the protection scope of the present application, and any modification, equivalent replacement or improvement etc. within the spirit of the present application are all covered in the claim scope of the present application.

Claims

1. A photomask box with a detachable pressure block, characterized in that: The mask box with detachable pressing block comprises a base, a cover combined with the base, and a pressing block assembly arranged in the cover, the base is used for loading a product, the base comprises a rectangular box-shaped bottom plate and four limiting columns arranged on the bottom plate, the cover is a single-side opening rectangular box, and an accommodating cavity for placing the product is arranged in the cover, the pressing block assembly comprises four connecting blocks arranged in the cover and four fixed pressing blocks respectively clamped on the connecting blocks, the four connecting blocks are arranged in the accommodating cavity, each connecting block comprises a main body part arranged perpendicularly to the cover, a top abutting part arranged perpendicularly to the cover and the main body part, a limiting protrusion arranged on the main body part away from the cover, and a top abutting protrusion arranged on the top abutting part away from the main body part, each fixed pressing block comprises two spaced pressing block bodies, a pressing block connecting part connected between the pressing block bodies, a pressing block buckle part connecting the two pressing block bodies, and two abutting arms arranged on the two pressing block bodies respectively, the pressing block connecting part is connected perpendicularly to the two pressing block bodies and can abut against the top abutting protrusion, the pressing block buckle part is connected to the top of the two pressing block bodies away from the cover and has a U-shaped structure with two ends connected to the pressing block bodies, and can abut against the limiting protrusion, the abutting arms are elastic extension arms arranged perpendicularly to the pressing block bodies, the two abutting arms are arranged symmetrically with the pressing block connecting part as the axis of symmetry, the free ends of the two abutting arms are bent towards each other, and two inclined surfaces are arranged on the free ends of the abutting arms away from the cover, and the two inclined surfaces are arranged perpendicularly to each other.

2. The reticle pod with detachable puck of claim 1, wherein: All the limiting columns are columnar structures arranged perpendicularly to the bottom plate, and the four limiting columns are arranged in a rectangular array, the free ends of the limiting columns away from the bottom plate are provided with inclined surfaces for clamping the product, and the four limiting columns cooperate with each other to clamp four corners of the product.

3. The photomask box with a detachable pressure block as described in claim 1, characterized in that: A sealing gasket is arranged on the edge of the cover in contact with the bottom plate or on the bottom plate.

4. The photomask box with a detachable pressure block as described in claim 1, characterized in that: The main body part and the top abutting part are rectangular blocks arranged perpendicularly to the top surface of the accommodating cavity away from the bottom plate, and are arranged perpendicularly to each other, the main body part and the top abutting part form a T-shaped structure, and the end of the main body part is connected to the midpoint of the top abutting part.

5. The photomask box with a detachable pressure block as described in claim 1, characterized in that: The limiting protrusion is a protrusion with a straight-angled trapezoidal cross section, the lower base is connected to the main body part, the upper base is the free end away from the cover, and the oblique edge is directed towards the top abutting protrusion.

6. The photomask box with a detachable pressure block as described in claim 1, characterized in that: The top abutting protrusion is a protrusion with a straight-angled trapezoidal cross section arranged on the top of the top abutting part away from the cover, the lower base is connected to the top abutting part, the upper base is the free end away from the main body part, and the oblique edge is directed towards the side away from the cover.

7. The photomask box with a detachable pressure block as described in claim 1, characterized in that: The fixed pressing block is an integrally formed plastic part and has elasticity.

8. The photomask box with a detachable pressure block as described in claim 1, characterized in that: Two said pressing block bodies are spaced and parallel arranged, and each is provided with a supporting leg vertically extended from the pressing block body at the bottom near the side of the abutting arm.

9. The photomask box with a detachable pressure block as described in claim 7, characterized in that: The elastic coefficient of the abutting arm is less than the structural strength of the product.

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