Novel heater
The heater, with its irregular structural design and chamfered transitions between the boss and positioning parts, solves the problems of difficult loading and unloading and slippage by the robotic arm, ensuring heating effect and structural stability, and extending service life.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-03-31
- Publication Date
- 2026-03-24
AI Technical Summary
The regular shape of existing heaters makes it difficult for robotic arms to pick up and place wafers. The wafers are difficult to center when sliding on the plane, which affects the heating effect and makes them prone to delamination at high temperatures.
It adopts an irregular structural design, including a boss part and a positioning part. The boss part and the positioning part have a chamfer, which is designed as a bevel or arc chamfer to ensure the positioning of the heated object and the convenient handling of the robot arm.
It achieves stable positioning of the heated object, avoids slippage, improves heating effect, enhances structural strength, and extends the service life of the heater.
Smart Images
Figure CN224037520U_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The utility model relates to the technical field of heater, especially a novel heater. BACKGROUND
[0002] In the process of chemical vapor deposition, physical vapor deposition, oxidation, nitridation and so on, the PBN+PG+PBN heater is used to form a heater element composed of conductive material such as pyrolytic graphite (PG) on the PBN substrate in a given pattern. It is used to heat the wafer in the manufacturing process of semiconductor, wafer epitaxy, liquid crystal. The existing heater is mostly regular circular or rectangular shape. In the automatic production, the regular shape of the heater has the problem that the mechanical hand has difficulty in picking and placing the wafer. Moreover, the wafer is directly placed on the pure flat heater surface, which is easy to slip and difficult to center, affecting the heating effect. SUMMARY
[0003] In view of the above defects or deficiencies in the prior art, it is desirable to provide a novel heater with a special-shaped structure design, which facilitates the mechanical hand to pick and place the heating object, has a boss part and a positioning part, can position the heating object, ensures the heating effect, and has a chamfer between the boss part and the positioning part, so that the heater is not easy to delaminate.
[0004] The utility model provides a novel heater, including the heater body, the width of the heater body along the first direction is greater than the width of the heating object in the same direction, the boss part is formed to the heating object on both sides of the heater body in the first direction, and the positioning part is formed between the boss part on both sides of the heater body.
[0005] Further, the width of the heater body along the second direction is less than the width of the heating object in the same direction, and the second direction forms a preset angle with the first direction.
[0006] Further, the boss part is 0.2-1.0mm higher than the positioning part.
[0007] Further, the boss part and the positioning part form an inclined chamfer or an arc chamfer.
[0008] Further, the boss part and the positioning part form an inclined chamfer, and the slope of the inclined chamfer is 100°-150°.
[0009] Further, the boss part and the positioning part form an arc chamfer, and the radius of the arc chamfer is 0.1-0.5mm.
[0010] Further, the boss part is provided with an electrode part, and the electrode part is provided with an electrode hole. Further, the boss part is provided with an electrode part, and the electrode part is provided with an electrode hole.
[0011] Further, the electrode part is in the same level with the boss part; or the electrode part is sunken to the same plane with the positioning part.
[0012] Compared with the prior art, the utility model has the beneficial effects that:
[0013] (1) the width of the heater in the first direction is greater than the heating object, and the boss part and the positioning part are formed, so that the heating object is positioned, the heating object is prevented from slipping on the heater, the heating object is ensured to be heated in the center, and the heating effect is good;
[0014] (2) the heater of the utility model adopts a special-shaped structure design, the width of the heater in the second direction is smaller than the heating object, the two sides of the heating object are extended out of the heater, and the taking and placing of the mechanical hand are facilitated;
[0015] (3) the boss part and the positioning part are chamfered in an inclined surface or an arc, the structural strength of the part is improved, the problem of delamination of the boss part under high temperature is effectively avoided, and the service life of the heater is effectively improved.
[0016] It should be understood that the content described in the utility model content part is not intended to limit the key or important features of the embodiments of the utility model, nor is it intended to limit the scope of the utility model. Other features of the utility model will become apparent through the following description. BRIEF DESCRIPTION OF DRAWINGS
[0017] Other features, objects and advantages of the utility model will become more apparent through reading the detailed description of the non-limiting embodiments made by referring to the following drawings:
[0018] Figure 1 It is a structural schematic view of the heater of an embodiment;
[0019] Figure 2 It is a partial enlarged structural schematic view of Figure 1
[0020] Figure 3 It is a structural schematic view of the heater of another embodiment;
[0021] Figure 4 It is a partial enlarged structural schematic view of Figure 3
[0022] Reference signs in the drawings: 1, heater body; 2, boss part; 3, positioning part;
[0023] 21, positioning hole; 22, electrode part; 23, electrode hole. DETAILED DESCRIPTION
[0024] The utility model will be further explained in detail below in combination with the drawings and embodiments. It can be understood that the specific embodiments described herein are only used to explain the related utility model, and not limited to the utility model. In addition, it should be noted that only the parts related to the utility model are shown in the drawings for ease of description.
[0025] It should be noted that the embodiments in the utility model and the features in the embodiments can be combined with each other without conflict. The utility model will be explained in detail below in combination with the drawings and embodiments.
[0026] Please refer to Figures 1-4 The embodiment of the utility model provides a novel heater, including heater body 1;The width of heater body 1 along the first direction is greater than the width of heating object in the same direction;Heater body 1 is located on both sides in the first direction and forms the boss part 2, and the positioning part 3 is formed between the boss part 2 on both sides of heater body 1.
[0027] In this embodiment, when heating the heating object, for example, the wafer is placed on the heater body 1, the wafer is embedded in the positioning part 3, and the boss part 2 on both sides is positioned to avoid the wafer slipping on the heater body 1, ensuring that the wafer is heated in the middle, and the heating effect is good.
[0028] In a preferred embodiment, as shown in Figure 1 And Figure 3 The width of heater body 1 along the second direction is less than the width of heating object in the same direction, and the second direction forms a preset angle with the first direction.
[0029] In this embodiment, when heating the heating object, for example, the wafer is placed on the heater body 1, the wafer is embedded in the positioning part 3, and the boss part 2 on both sides is positioned to avoid the wafer slipping on the heater body 1, ensuring that the wafer is heated in the middle, and the heating effect is good.
[0030] In a preferred embodiment, the boss part 2 is 0.2-1.0mm higher than the positioning part 3, to ensure better positioning effect, and avoid high height leading to unstable structure.
[0031] In a preferred embodiment, as shown in Figure 2 And Figure 4 The boss part 2 and the positioning part 3 form an inclined chamfer or an arc chamfer.
[0032] In this embodiment, the inclined chamfer or the arc chamfer between the boss part 2 and the positioning part 3 improves the structural strength of the part, avoids the problem of delamination of the boss part 2 under high temperature, and effectively improves the service life of the heater.
[0033] In a preferred embodiment, the boss part (2) and the positioning part (3) are chamfered with an inclined surface, the slope of the inclined surface is 100-150 degrees, to realize the transition between the boss part 2 and the positioning part 3, ensure the structural strength, and avoid the problem of delamination of the boss part 2.
[0034] In a preferred embodiment, the boss part 2 and the positioning part 3 are chamfered with an arc, the radius of the arc is 0.1-0.5mm, to realize the transition between the boss part 2 and the positioning part 3, ensure the structural strength, and avoid the problem of delamination of the boss part 2.
[0035] In a preferred embodiment, as shown in Figure 2 and Figure 4 , a positioning hole 21 is formed on the boss part 2; an electrode part 22 is arranged on the boss part 2, an electrode hole 23 is formed on the electrode part 22, and an electrode column is electrically connected to the electrode hole 23.
[0036] In the embodiment, the positioning hole 21 is used for positioning and installing the heater; a conductive layer is arranged in the heater, one end of the conductive layer is connected to the positive electrode of the power supply through the electrode column, and the other end is connected to the negative electrode of the power supply through the electrode column; the current passes through the conductive layer to generate Joule heat, thereby heating the heating object above it.
[0037] In a preferred embodiment, as shown in Figure 2 and Figure 4 , the electrode part 22 is at the same height as the boss part 2, the heater is easy to process and form, and the processing cost is low; or the electrode part 22 is sunken to the same plane as the positioning part 3, to avoid the problem of the conductive layer in the heater being separated due to the difference in thermal expansion and height difference, and to improve the reliability.
[0038] In the description of the present specification, the terms "connection", "installation", "fixation" and the like should be understood in a broad sense, for example, "connection" can be fixed connection, or detachable connection, or integrally connected; it can be directly connected, or indirectly connected through an intermediate medium. For those skilled in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances.
[0039] In the description of the present specification, the terms "one embodiment", "some embodiments" and the like mean that the specific features, structures, materials or characteristics described in connection with the embodiment or example are included in at least one embodiment or example of the present application. In the present specification, the illustrative description of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner.
[0040] The above merely provides preferred embodiments of the present application, and is not used to limit the present application. For those skilled in the art, the present application can have various modifications and changes. Any modifications, equivalent replacements, improvements, etc. made within the principles and technical scope of the present application shall fall into the scope of the present application.
Claims
1. A novel heater, characterized in that, It includes a heater body (1); the width of the heater body (1) along the first direction is greater than the width of the object being heated in the same direction; the heater body (1) extends out of the object being heated on both sides in the first direction and forms a boss (2), and a positioning part (3) is formed between the bosses (2) on both sides of the heater body (1).
2. The novel heater according to claim 1, characterized in that, The width of the heater body (1) along the second direction is smaller than the width of the object being heated in the same direction, and the second direction forms a preset angle with the first direction.
3. The novel heater according to claim 1, characterized in that, The boss (2) is 0.2-1.0 mm higher than the positioning part (3).
4. The novel heater according to claim 1, characterized in that, The protrusion (2) and the positioning part (3) are chamfered or curved.
5. The novel heater according to claim 4, characterized in that, The boss (2) and the positioning part (3) are chamfered, and the slope of the chamfer is 100°-150°.
6. The novel heater according to claim 4, characterized in that, The boss (2) and the positioning part (3) are connected by an arc-shaped chamfer, the radius of which is 0.1-0.5mm.
7. The novel heater according to claim 1, characterized in that, The boss (2) is provided with a positioning hole (21); the boss (2) is provided with an electrode part (22), the electrode part (22) is provided with an electrode hole (23), and the electrode hole (23) is electrically connected to an electrode post.
8. The novel heater according to claim 7, characterized in that, The electrode part (22) is at the same height as the boss part (2); or the electrode part (22) is lowered to be on the same plane as the positioning part (3).