Wafer box transfer blanking elevator

Abstract

The utility model relates to the technical field of wafer processing production lines, in particular to a wafer box transfer blanking elevator which comprises a sliding rail, a driving part and a lifting platform, the lifting platform is arranged on the sliding rail through a sliding seat, the driving part comprises a power part and a transmission part, the sliding seat is connected with the transmission part, and the lifting platform is arranged on the sliding rail. The lifting platform comprises a supporting arm and a platform, the platform is fixed to the top of the supporting arm, and protruding limiting strips corresponding to grooves in the bottom of the wafer box are arranged on the upper surface of the platform in a bilateral symmetry mode. Stop blocks are arranged on the left side and the right side of the upper surface of the platform; a detection sensor is arranged on one side of the upper surface of the platform, and when a wafer box is located on the platform, the detection sensor detects the wafer box. An inclined face is arranged on the outer side face of the check block. A pressure sensor is arranged on the bottom face of the check block. According to the utility model, the wafer box can be buffered and fixed accurately, and the deviation between the wafer box and the platform can be detected when the wafer box is put down.

Description

TECHNICAL FIELD

[0001] The utility model relates to wafer processing production line technical field, specifically a wafer box transfer unloading elevator. BACKGROUND

[0002] In the wafer processing production line, the transfer of wafers involves multiple links, among which the up-down transfer elevator is relatively common. For example, the Chinese utility model patent with the publication number CN219873449U discloses a feeding and discharging mechanism for wafer boxes and a full-automatic wet single wafer cleaning device, which comprises a platform and a limiting assembly. The limiting assembly is arranged on the top surface of the platform and is adapted to limit the wafer box when it is placed on the platform. The limiting block encloses an area that is compatible with the wafer box. The limiting assembly further comprises a pressure sensor. The four corners of the platform are provided with limiting blocks, and the four corners of the wafer box are connected to the limiting blocks. However, this structure has the following problems: 1. When the wafer box is lowered, there is no buffer positioning. If it is used in conjunction with a conveyor belt type clamp jaw, the conveyor belt type clamp jaw may occasionally deviate from the stroke, resulting in inaccurate placement of the wafer box on the platform; 2. The running deviation of the conveyor belt type clamp jaw cannot be detected in time. SUMMARY

[0003] In view of the above-mentioned deficiencies of the prior art, the utility model provides a wafer box transfer unloading elevator that can buffer and position the wafer box and detect the deviation of the wafer box from the platform when it is lowered.

[0004] The utility model solves the technical problems by adopting the following technical scheme:

[0005] A wafer box transfer unloading elevator comprises a sliding rail, a driving component, and a lifting platform. The lifting platform is arranged on the sliding rail through a sliding seat. The driving component comprises a power part and a transmission part. The sliding seat is connected to the transmission part. The lifting platform comprises a support arm and a platform. The platform is fixed to the top of the support arm. The upper surface of the platform is symmetrically provided with a convex limiting strip corresponding to the bottom groove of the wafer box. The upper surface of the platform is provided with a stop block on both sides. A detection sensor is arranged on one side of the upper surface of the platform. When the wafer box is located on the platform, the detection sensor detects the wafer box.

[0006] Further, the stop block is provided with three blocks, which are located on the three corners of the platform, respectively. A detection sensor is arranged on the remaining corner of the platform.

[0007] Further, the stop block is located on the inner side of the convex limiting strip. Further, the outer side of the stop block is provided with an inclined surface.

[0008] Further, a pressure sensor is arranged on the bottom surface of the stopper.

[0009] Further, an elastic pad is arranged on the bottom surface of the stopper.

[0010] Further, the detection sensor is a press sensor; when the wafer box is arranged on the platform, the lower edge of the wafer box is pressed on the detection sensor.

[0011] Further, the upper end of the convex limiting strip is narrow and the lower end is wide.

[0012] The wafer box fixing device has the advantages that:

[0013] The convex limiting strip can cooperate with the groove at the bottom of the wafer box to correct the wafer box with a slight deviation when the wafer box is lowered; meanwhile, the inclined surface on the outer side of the stopper can also correct the wafer box, and the wafer box is stably fixed on the platform through the action of the convex limiting strip and the stopper. BRIEF DESCRIPTION OF DRAWINGS

[0014] Figure 1 It is a schematic diagram of the overall structure of the utility model;

[0015] Figure 2 It is a schematic diagram of the platform structure of the utility model;

[0016] Figure 3 It is a schematic diagram of the cooperation of the stopper and the pressure sensor of the utility model;

[0017] Figure 4 It is a schematic diagram of the overall structure of the utility model after the wafer box is placed;

[0018] Figure 5 It is a schematic diagram of the convex limiting strip structure of the utility model;

[0019] In the figure, the slide rail 1, the driving part 2, the lifting platform 3, the sliding seat 301, the support arm 302, the platform 303, the convex limiting strip 304, the base 3041, the semicircle 3042, the narrow head 3043, the stopper 305, the inclined surface 3051, the extension 3052, the detection sensor 306, the elastic pad 307, the wafer box 4, and the pressure sensor 5. DETAILED DESCRIPTION

[0020] For better understanding of the present application, the following will be combined with Figures 1-5 The technical solutions in the embodiments of the present application are clearly and completely described. Obviously, the described embodiments are only some of the embodiments of the present application, but not all the embodiments. Based on the embodiments in the present application, all the other embodiments obtained by those skilled in the art without creative work belong to the scope of protection of the present application.

[0021] The wafer box transfer downer elevator of the present application comprises a slide rail 1, a driving component 2 and a lifting platform 3. The lifting platform 3 is arranged on the slide rail 1 through a sliding seat 301. The driving component 2 comprises a power part (motor) and a transmission part (transmission belt or transmission chain, etc.). The slide rail 1 is vertically arranged, and the lifting platform 3 moves up and down along the slide rail 1. The structure of the driving component 2 and the slide rail 1 belongs to the prior art, and will not be described here. The sliding seat 301 is connected with the transmission part (for example, if a transmission belt is used, the sliding seat 301 is fixedly connected with the transmission belt through a connecting plate). The lifting platform 3 further comprises a supporting arm 302 and a platform 303. The platform 303 is fixed on the top of the supporting arm 302. The structure of the supporting arm 302 is preferably as shown in Figure 1 The platform 303 is provided with a convex limiting strip 304 corresponding to the bottom groove of the wafer box 4 on the upper surface thereof, and the upper end of the convex limiting strip 304 is narrow and the lower end is wide. As shown in Figure 1 Part of the slide rail 1 is drawn for view convenience.

[0022] The platform 303 is provided with a convex limiting strip 304 corresponding to the bottom groove of the wafer box 4 on the upper surface thereof, and the upper end of the convex limiting strip 304 is narrow and the lower end is wide. As shown in Figure 5As shown in the figure, the protruding limiting strip 304 preferably adopts the following structure: the protruding limiting strip 304 comprises a base 3041 and a protruding strip on the base 3041, the cross section of the protruding strip is a semicircle 3042 at the bottom, a protruding narrow head 3043 is arranged at the top of the semicircle 3042, and the base 3041 is fixed on the platform 303 by bolts. The protruding limiting strip is in the left-right direction, which can limit the up-down movement of the wafer box 4, and the stop block 305 can limit the left-right movement of the wafer box 4. The upper surface of the platform 303 is provided with stop blocks 305 on the left and right sides. One side of the upper surface of the platform 303 is provided with a detection sensor 306, which detects the wafer box 4 when the wafer box 4 is located on the platform 303. Preferably, the detection sensor 306 is a push sensor, which is a push touch switch (also known as a touch switch, a travel switch, etc.) using existing products. When the wafer box 4 is located on the platform 303, the lower edge of the wafer box 4 presses on the detection sensor 306, and the detection sensor 306 is connected with the upper computer to send a signal to the upper computer that the wafer box 4 is placed on the platform 303.

[0023] As shown in the figure, Figure 2 Preferably, the stop block 305 is provided with three blocks, which are respectively located on the three corners of the platform 303, i.e. one block is arranged on the upper and lower right sides of the platform, and one block is arranged on the lower left corner of the platform symmetrically with the lower right corner, and the detection sensor 306 is arranged on the remaining corner (upper left corner) of the platform 303.

[0024] As shown in the figure, Figure 2 The stop block 305 is located on the inner side of the protruding limiting strip 304, and when the wafer box 4 is placed on the platform 303, the stop block 305 is located on the inner side of the bottom edge of the wafer box 4. Of course, the stop block can also be arranged on the outer edge of the platform 303, and when the wafer box 4 is placed on the platform 303, the stop block 305 is located on the outer side of the wafer box. When the wafer box is conveyed by the transmission belt type clamping jaw, the transmission belt occasionally has a displacement deviation, and the wafer box and the stop block 305 are difficult to align. In order to automatically correct the deviation of the wafer box when it falls, the outer side of the stop block 305 is provided with an inclined surface 3051, and the bottom edge of the wafer box 4 with deviation will fall on the inclined surface 3051, and the wafer box 4 will be aligned with the stop block 305 through the action of the inclined surface 3051.

[0025] In order to early discover the running deviation of the transmission belt type clamp jaw, the utility model discloses a detection device for detecting this deviation behavior. Specifically, a pressure sensor 5 is arranged on the bottom surface of the stopper 305, and the pressure sensor 5 is in communication connection with the upper computer. The stopper 305 can be made of elastic plastic. Preferably, the outer side of the stopper 305 is provided with an extension 3052 extending outward, and the pressure sensor 5 is located below the extension 3052. The inclined surface 3051 is located on the outer side of the extension 3052. When the bottom of the wafer box touches the inclined surface on the extension 3052, it indicates that the transmission belt type clamp jaw has a running deviation, the pressure sensor 5 detects the pressure value, the pressure value information is transmitted to the upper computer, and the operator can discover the running deviation, so as to correct it. Since the stopper is made of plastic material, the inclined surface 3051 is easy to wear, therefore, metal material is preferably used, and after the metal material is used, its deformation is not obvious, therefore, when the wafer box touches the inclined surface 3051, in order to more easily produce deformation, the bottom surface of the stopper 305 is provided with an elastic pad 307 when the stopper is made of metal material, and the elastic pad 307 is preferably made of a rubber pad. The stopper 305 is fixedly connected with the platform 303 through bolts, and the bolts pass through the stopper 305, the elastic pad 307 and the platform 303 in sequence.

[0026] It should be noted that, in order to facilitate the description, spatial relative terms can be used, such as "below", "under", "beneath", "above", "on", and the like, to describe a relationship of one element or feature to another element or feature as shown in the drawings. The spatial relative terms are intended to include different orientations of the device in use or operation in addition to the orientations depicted in the drawings. The device can have other orientations (rotated 90 degrees or otherwise oriented), and the spatial relative terms used herein can be interpreted accordingly.

[0027] Finally, it should be noted that: the above embodiments are only used to illustrate the technical solutions of the present application, and not to limit them; although the present application has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that: it can still modify the technical solutions recorded in the foregoing embodiments, or make equivalent replacement to part or all of the technical features; and these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the scope of the technical solutions of the embodiments of the present application.

Claims

1. A wafer box transfer unloading elevator, comprising a slide rail, a driving part and a lifting platform, the lifting platform is arranged on the slide rail through a sliding seat, the driving part comprises a power part and a transmission part, the sliding seat is connected with the transmission part, characterized in that: The lifting platform comprises a support arm and a platform, the platform is fixed on the top of the support arm, the upper surface of the platform is symmetrically provided with a convex limiting strip corresponding to the bottom groove of the wafer box; the upper surface of the platform is provided with a stop block on the left and right sides; the upper surface of the platform is provided with a detection sensor on one side, and the detection sensor detects the wafer box when the wafer box is located on the platform.

2. The in-process pod lift of claim 1, wherein: The stop block is provided with three blocks, which are located on the three corners of the platform, and the detection sensor is arranged on the remaining corner of the platform.

3. A transfer destage elevator for a wafer cassette as recited in claim 2, wherein: The stop block is located on the inner side of the convex limiting strip.

4. The in-process pod lift of claim 3, wherein: The outer side surface of the stop block is provided with an inclined surface.

5. A transfer destage elevator for a wafer cassette as recited in claim 4, wherein: A pressure sensor is arranged on the bottom surface of the stop block.

6. A transfer destage elevator for a wafer cassette as recited in claim 5, wherein: The outer side of the stop block is provided with an extension part extending outward, and the pressure sensor is located below the extension part; the inclined surface is located on the outer side surface of the extension part.

7. A transfer destage elevator for a wafer cassette as recited in claim 6, wherein: The bottom surface of the stop block is provided with an elastic pad.

8. The transfer destage elevator of claim 1, wherein: The detection sensor is a press sensor; when the wafer box is located on the platform, the lower edge of the wafer box presses on the detection sensor.

9. The in-process pod lift of claim 1 wherein: The upper end of the convex limiting strip is narrow, and the lower end is wide.

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