Extension tensioning device and coating equipment
By slotting the support and using counterweights, gravity is used to tension the metal film vertically, solving the problems of large space occupation and poor stability of existing tensioning mechanisms, and achieving a highly efficient metal coating effect.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-03-21
- Publication Date
- 2026-03-27
AI Technical Summary
In the prior art, the tensioning mechanism of metal coating equipment occupies a large space, has poor stability and short service life, which affects the coating efficiency and the area that can be coated.
An extension tensioning device is adopted, which uses gravity to tension the metal membrane in the vertical direction by slotting the support and using counterweights, thereby reducing space occupation and improving stability.
It achieves effective tensioning of metal films in high temperature and low pressure environments, reduces obstruction to airflow, has a simple structure and long service life, and improves coating efficiency and the area that can be coated.
Smart Images
Figure CN224047493U_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The present application relates to the field of photovoltaic and semiconductor technology, in particular to a stretching tensioning device and a coating equipment. BACKGROUND
[0002] Metal coating is often carried out in a low-pressure high-temperature environment, and the metal film will be stretched in high temperature. The stretched metal film will sag under gravity. Since there are strict requirements for the discharge spacing of plasma coating, the metal film in high temperature needs to be tensioned. The airflow in the process of the metal film in a high-temperature low-pressure environment also has strict requirements, so the tensioning mechanism cannot hinder the airflow.
[0003] In the related art, the tensioning mechanism usually tightens the metal film by a spring or leaves a stretching space for the metal film around the metal film by a plate. The spring is used to tension the metal film, the mechanism is relatively complex and has poor stability, and the service life of the spring in high temperature is low. In order to prevent the metal film from being warped by high temperature, a large area needs to be pressed in the way of leaving a stretching space for the metal film around the metal film by a plate, which leads to a significant reduction of the coating area of the film and affects the coating efficiency.
[0004] Therefore, the technical problem to be solved at present is to provide a tensioning device with small space occupation, high stability and long service life. CONTENT OF THE INVENTION
[0005] Therefore, the technical problem to be solved at present is to provide a tensioning device with small space occupation, high stability and long service life.
[0006] According to the inventive concept of one aspect of the present application, a stretching tensioning device is provided, which comprises a base, a first support, a second support and a counterweight. The first support and the second support are respectively arranged at two ends of the base, and are suitable for fixing two ends of a metal film to be coated respectively. An upper surface of the first support and / or the second support is provided with a clamping groove. The counterweight is shaped to match the clamping groove, and is configured to abut against the metal film and be clamped in the clamping groove.
[0007] According to some embodiments of the present application, one of the inner bottom surface of the clamping groove and the surface of the counterweight abutting against the metal film is provided with a protrusion, and the other is provided with a groove matched with the protrusion.
[0008] According to some embodiments of the present application, the number of the protrusions is multiple, and the multiple protrusions are continuously arranged in the direction from the first support to the second support.
[0009] According to some embodiments of the present application, the inner bottom surface of the card slot is continuously and alternately provided with a plurality of protrusions and a plurality of grooves, and the surface of the counterweight against the metal film is continuously and alternately provided with a corresponding plurality of grooves and a plurality of protrusions.
[0010] According to some embodiments of the present application, on the inner bottom surface of the card slot and the surface of the counterweight against the metal film, a transition surface parallel to the tensioning direction is arranged between adjacent grooves and protrusions.
[0011] According to some embodiments of the present application, the protrusions have a cross-sectional shape of a tooth, a rectangle, a semicircle, an arc, or a trapezoid.
[0012] According to some embodiments of the present application, the extension tensioning device further comprises a locking assembly arranged on the first support and the second support, and the locking assembly is configured to fix the two ends of the metal film to be plated, so that the plating area of the metal film remains horizontal.
[0013] According to some embodiments of the present application, the locking assembly comprises a rotating rod and a locking member. At least one rotating rod is rotatably mounted on the first support and / or the second support, and one end of the metal film is wound around the rotating rod. The locking member is configured to limit the rotation of the rotating rod around an axis.
[0014] According to some embodiments of the present application, the number of the first supports and the second supports is multiple groups, and the multiple groups of the first supports and the second supports are arranged in a stacked manner in the height direction.
[0015] According to another aspect of the present application, a plating device is also provided, which comprises a reaction chamber and the extension tensioning device as described in the foregoing embodiments, and the extension tensioning device is located in the reaction chamber.
[0016] According to the extension tensioning device and the plating device provided by the embodiments of the present application, the slot is opened on the support, and the counterweight is used to press the metal film in the vertical direction by gravity to achieve tensioning, which occupies a small space, has little obstruction to airflow, has a simple structure, has no loss, and has a long service life. BRIEF DESCRIPTION OF DRAWINGS
[0017] The above and other objects, features and advantages of the present application will become more apparent from the following detailed description when taken in conjunction with the accompanying drawings. The drawings provided in the specification and the contents of the specification are adopted to provide further understanding of the embodiments of the present application, and constitute a part of the specification, which are used to explain the present application, and do not constitute a limitation to the present application. In the drawings, the same reference numerals generally represent the same components or steps.
[0018] Figure 1 Fig. 1 shows a front view of a tensioning device according to an embodiment of the present application.
[0019] Figure 2 Fig. 2 shows a schematic view of a partial structure of the tensioning device according to an embodiment of the present application.
[0020] Figure 3 Fig. 3 shows a schematic view of a partial structure of the tensioning device according to an embodiment of the present application in another state.
[0021] Figure 4 Fig. 4 shows a schematic view of a structure of a clamping groove and a counterweight of the tensioning device according to an embodiment of the present application.
[0022] Figure 5 Fig. 5 shows a front view of a tensioning device according to another embodiment of the present application.
[0023] Figure 6 Fig. 6 shows a schematic view of a partial structure of the tensioning device according to another embodiment of the present application. Figure 5 Fig. 7 shows an enlarged schematic view of the tensioning device according to another embodiment of the present application.
[0024] Figure 7 Fig. 8 shows a perspective view of a locking assembly of the tensioning device according to an embodiment of the present application.
[0025] Figure 8 Fig. 9 shows a perspective view of a locking assembly of the tensioning device according to another embodiment of the present application.
[0026] Figure 9 Fig. 10 shows a block diagram of a mechanism of a coating equipment according to an embodiment of the present application.
[0027] Reference signs:
[0028] 1, base; 2, first support; 3, second support; 4, clamping groove; 5, counterweight; 6, protrusion; 7, groove; 8, transition surface; 9, rotating rod; 10, metal film; 11, A electrode; 12, B electrode; 13, ratchet; 14, pawl; 15, U-shaped frame; 16, rotating shaft; 17, threaded hole; 18, screw knob; 19, reaction cavity; 20, air outlet. DETAILED DESCRIPTION
[0029] The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all the embodiments of the present application. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative work fall within the scope of protection of the present application.
[0030] In the field of photovoltaics and semiconductors, metal plating is a very important processing technology. In the field of photovoltaics, metal plating can enhance light absorption, for example, it can optimize the angle of light incidence, reduce surface reflection, and make more light enter the cell and be absorbed; it can improve the stability of the cell, for example, it can resist oxidation and moisture corrosion in the environment, thereby protecting the stability of the cell. For example, corrosion-resistant plating can prevent the panel from being eroded by acid and alkali substances, maintaining its structural stability; control optical performance, for example, by adjusting the material, thickness and process conditions of the plating, the absorption and reflection of light by the cell can be precisely controlled, making the cell more suitable for specific application requirements. In the field of semiconductors, it can improve the reliability and stability of electronic components, metal plating can form a protective film to prevent device oxidation, corrosion and contamination, thereby improving its reliability and stability; reduce resistance and heat generation, improve device performance and lifespan; it can enhance the ability of semiconductors to absorb light and improve photoelectric conversion efficiency.
[0031] In related technologies, when plating a metal film, especially for plasma plating, due to the characteristics of the metal film itself, relative elongation occurs at high temperatures, and the elongated metal film is subject to gravity and sagging. The discharge spacing of the plasma plating has strict requirements, and the sagging metal film does not meet the processing requirements of the plasma plating, so the metal film in high temperature needs to be tensioned. In related technologies, springs or pressure plates are used to tension the metal film, both of which have significant technical defects.
[0032] Figure 1 Fig. 1 shows a front view of an elongation tensioning device provided by an embodiment of the present application, Figure 2 Fig. 2 shows a partial structure schematic diagram of an elongation tensioning device provided by an embodiment of the present application, Figure 3 Fig. 3 shows a partial structure schematic diagram of an elongation tensioning device in another state provided by an embodiment of the present application.
[0033] To solve the above technical problems, an embodiment of the present application provides an elongation tensioning device, such as Figures 1 to 3 As shown, the elongation tensioning device includes a base 1, a first support 2, a second support 3, and a counterweight 5. The first support 2 and the second support 3 are respectively arranged at both ends of the base 1, and the first support 2 and the second support 3 are suitable for fixing the two ends of the metal film 10 to be plated respectively. The upper surface of the first support 2 and / or the second support 3 is provided with a clamping groove 4. The counterweight 5 is shaped to fit the clamping groove 4, and the counterweight 5 is configured to abut against the metal film 10 and be clamped in the clamping groove 4.
[0034] In this embodiment, by opening a slot on the support and cooperating with the counterweight 5, the metal film 10 is compressed in the vertical direction by gravity to achieve tensioning, which occupies less space, has a simple structure and no loss, and has a long service life.
[0035] According to some embodiments of the present application, the base 1 is a support structure of the tensioning device, which is arranged in a vacuum (low pressure) reaction chamber, and is used to provide support for other components, and also provides a certain height in the air, so as to support the metal film 10 to be plated in a proper position and height in the reaction chamber.
[0036] According to some embodiments of the present application, the first support 2 and the second support 3 are respectively arranged on the two sides of the base 1, and optionally, the first support 2 and the second support 3 are arranged on the two sides of the upper surface of the base 1. The heights of the first support 2 and the second support 3 are both higher than the upper surface of the base 1. The metal film 10 to be plated is fixed on the first support 2 and the second support 3 at two ends respectively, and is in a tensioned state. The upper surfaces of the first support 2 and the second support 3 are both provided with a clamping groove 4, and the metal film 10 to be plated is located above the clamping groove 4. A counterweight 5 is located above the clamping groove 4 (metal film 10), and the counterweight 5 is pressed above the metal film 10. Based on gravity, the counterweight 5 presses at least part of the metal film 10 into the clamping groove.
[0037] In the embodiment, when the temperature in the reaction chamber is low, the counterweight 5 presses a small part of the metal film 10 into the clamping groove 4. When the temperature in the reaction chamber rises to a certain degree, the metal film 10 is relatively extended, and is no longer in a tensioned state, at this time, the counterweight 5 presses more of the metal film 10 into the clamping groove, for example, the counterweight 5 on the first support 2; wherein, Figure 3 Figure 3 The second support 3 in the figure indicates a state when the counterweight 5 does not press the metal film 10 into the clamping groove 4, at this time, the metal film 10 is kept horizontal along the upper surface of the second support 3, that is, in a tensioned state.
[0038] According to some embodiments of the present application, the first support 2 and the second support 3 can be fixedly arranged on the base 1, for example, welded, bonded or integrally formed; or can be detachably connected to the base 1, for example, buckling connection, concave-convex matching clamping, bolt connection, etc., which will not be described in detail here.
[0039] According to some embodiments of the present application, the clamping groove 4 can be arranged on the first support 2, or the clamping groove 4 can be arranged on the second support 3, or the clamping groove 4 can be arranged on both the first support 2 and the second support 3, which can be adjusted and set according to the shape of the plating equipment or actual needs.
[0040] According to some embodiments of the present application, one of the inner bottom surface of the clamping groove 4 and the surface of the counterweight 5 abutting against the metal film 10 is provided with a protrusion 6, and the other is provided with a groove 7 matching the protrusion 6.
[0041] In the embodiment, the more metal film 10 can be pressed into the card slot 4 by the cooperation of the protrusions 6 and the grooves 7, and the space occupied by the counterweight 5 can be reduced. Alternatively, the protrusions 6 are arranged on the counterweight 5, and the grooves 7 are arranged in the card slot 4 correspondingly; or the protrusions 6 are arranged in the card slot 4, and the grooves 7 are arranged on the counterweight 5 correspondingly.
[0042] According to some embodiments of the present application, as shown in (a)-(d) of FIG. 1, the protrusions 6 are arranged in a plurality of numbers, and the plurality of protrusions 6 are arranged continuously in the direction from the first support 2 to the second support 3, i.e. in the direction parallel to the tension direction of the metal film 10. Figure 4
[0043] In the embodiment, the plurality of continuously arranged protrusions 6 and grooves 7 can press the more metal film 10 into the card slot 4, and the size of the counterweight 5 and the card slot 4 in the direction perpendicular to the tension direction can be effectively reduced, i.e. the depth of the card slot 4 and the thickness of the counterweight 5 can be reduced, thereby reducing the space occupied by the counterweight 5.
[0044] According to some embodiments of the present application, a transition surface 8 parallel to the tension direction is arranged between the adjacent protrusions 6 and grooves 7 on the inner bottom surface of the card slot 4 and the surface of the counterweight 5 abutting against the metal film 10. Preferably, the transition surface 8 is uniformly and arcuately arranged between the groove 7 and the protrusion 6.
[0045] In the embodiment, the transition surface 8 arranged between the plurality of grooves 7 and the plurality of protrusions 6 can effectively protect the metal film 10 from being damaged by the sharp corners formed by the contact surfaces.
[0046] According to some embodiments of the present application, the inner bottom surface F of the card slot 4 is continuously and alternately provided with a plurality of protrusions 6 and a plurality of grooves 7, and the surface of the counterweight 5 abutting against the metal film 10 is continuously and alternately provided with a plurality of corresponding grooves 7 and a plurality of corresponding protrusions 6.
[0047] In the embodiment, as shown in (a)-(d) of FIG. 1, the inner bottom surface F of the card slot 4 is alternately provided with a groove-protrusion-groove-protrusion, and the counterweight 5 is alternately provided with a protrusion-groove-protrusion-groove correspondingly. Figure 3 In the embodiment, the more metal film 10 can be pressed into the card slot 4 by the cooperation of the protrusions 6 and the grooves 7, and the space occupied by the counterweight 5 can be reduced. Alternatively, the protrusions 6 are arranged on the counterweight 5, and the grooves 7 are arranged in the card slot 4 correspondingly; or the protrusions 6 are arranged in the card slot 4, and the grooves 7 are arranged on the counterweight 5 correspondingly.
[0048] According to some embodiments of the present application, as shown in (a)-(d) of FIG. 1, the protrusions 6 are arranged in a plurality of numbers, and the plurality of protrusions 6 are arranged continuously in the direction from the first support 2 to the second support 3, i.e. in the direction parallel to the tension direction of the metal film 10. Figure 4 (a)-(d) of FIG. 1, the cross-sectional shape of the protrusion 6 is tooth-shaped, rectangular, semicircular, arc-shaped or trapezoidal.
[0049] In the embodiment, the shape of the protrusion 6 and the groove 7 can be designed and processed according to actual requirements and processing requirements.
[0050] Figure 5 Fig. 1 shows a front view of a tensioning device according to another embodiment of the present application, Figure 6 Fig. 2 shows a front view of a tensioning device according to another embodiment of the present application, Figure 5 Fig. 3 shows an enlarged schematic view of a tensioning device according to another embodiment of the present application.
[0051] According to some embodiments of the present application, as shown in Figure 5 and Figure 6 According to some embodiments of the present application, the number of the first support 2 and the second support 3 is multiple groups, and the multiple groups of the first support 2 and the second support 3 are arranged in a stacked manner in the height direction.
[0052] In the embodiment, in the reaction cavity of the coating equipment, by arranging multiple groups of the first support 2 and the second support 3 in a stacked manner in the direction perpendicular to the tensioning direction, i.e., the vertical direction, the coating of multiple groups of the metal film 10 can be simultaneously performed. Optionally, in the vertical direction, a spacer is arranged between two adjacent first supports 2 and between two adjacent second supports 3, so as to ensure that there is enough space between the two adjacent metal films 10, thereby ensuring the quality of the coating.
[0053] According to some optional embodiments of the present application, the spacer is a graphite spacer.
[0054] According to some embodiments of the present application, a positioning device is arranged between the spacer and the upper and lower first support 2 or second support 3, so as to prevent the first support 2 and the second support 3 from moving in the transverse direction (parallel to the tensioning direction of the metal film 10), thereby keeping the metal film 10 in a tensioned state. The positioning device can be, for example, a concave-convex matching structure, a pin key structure, a bolt connection, etc., which are all common mechanical structures and will not be described in detail herein. Those skilled in the art can understand, implement and reproduce the above disclosure.
[0055] According to some embodiments of the present application, the size of the counterweight 5 in the direction perpendicular to the tensioning direction of the metal film 10 is smaller than the depth of the clamping groove 4, i.e., the thickness of the counterweight 5 is smaller than the depth of the clamping groove 4. Preferably, at room temperature, after the counterweight 5 presses part of the metal film 10 into the clamping groove 4, the upper surface of the counterweight 5 is flush with the upper surface of the first support 2 or the second support 3.
[0056] In the embodiment, by optimizing the size of the counterweight 5 and the clamping groove 4, the space occupied by the counterweight 5 in the direction perpendicular to the tensioning direction can be reduced as much as possible under the premise of ensuring the tensioning effect, so that more groups of the first support 2, the second support 3 and the metal film 10 to be coated can be arranged in the direction perpendicular to the tensioning direction, thereby improving the production capacity.
[0057] According to some embodiments of the present application, the coating equipment further comprises an electrode plate, for example, as shown in Figure 6 The electrode plate comprises an A electrode 11 and a B electrode 12, and the two ends of one metal film 10 are connected to the A electrode 11, and the two ends of the other metal film 10 are connected to the B electrode 12, so as to form an electric field in the reaction chamber by sequentially and spacedly arranging the A electrode 11 and the B electrode 12, thereby realizing plasma coating.
[0058] Figure 7 As shown in FIG. 1, the locking assembly of the extension tensioning device provided in an embodiment of the present application is a perspective view, Figure 8 As shown in FIG. 2, the locking assembly of the extension tensioning device provided in another embodiment of the present application is a perspective view.
[0059] According to some embodiments of the present application, as shown in Figure 7 and Figure 8 The extension tensioning device further comprises a locking assembly arranged on the first support 2 and / or the second support 3, and the locking assembly is configured to fix the two ends of the metal film 10 to be coated, so as to keep the coating area of the metal film 10 horizontal.
[0060] According to some embodiments of the present application, the locking assemblies on the first support 2 and the second support 3 can be the same or different. For example, the locking assembly can be a fixed locking assembly, such as a clamp, a shelf, a fastening bolt, etc. The locking assembly can also be an adjustable locking assembly.
[0061] According to some embodiments of the present application, one of the locking assemblies on the first support 2 and the second support 3 can be a fixed locking assembly, and the other can be an adjustable locking assembly. Both of them can also be adjustable locking assemblies.
[0062] According to some embodiments of the present application, the locking assembly comprises a rotating rod 9 and a locking piece. Two rotating rods 9 are respectively rotatably installed on the first support 2 and the second support 3, and the two ends of the metal film 10 are wound around the two rotating rods 9, respectively. The locking piece is configured to limit the rotation of the rotating rod 9 around the axis.
[0063] In the present embodiment, one end of the metal film 10 is wound around the rotating rod 9, and the tensioning degree of the metal film 10 is adjusted by rotating the rotating rod 9. After the metal film 10 is adjusted to a preset tensioning force, the rotating rod 9 is fixed by the locking piece to prevent it from rotating in the opposite direction of the tensioning direction.
[0064] According to some optional embodiments of the present application, as shown in Figure 7As shown, the locking assembly includes a U-shaped frame, which can be a separate structure arranged on the first support 2 and the second support 3, or can be integrally formed with the first support 2 and the second support 3, for example, can be a groove 7 formed by recessing the end of the first support 2 and the second support 3 inward (tensioning direction of the metal film 10). The two ends of the rotating rod 9 are drivingly connected to the two ends of the U-shaped frame, and a ratchet 13 and a pawl 14 are arranged outside one end of the U-shaped frame, the ratchet 13 is connected to the rotating rod 9 through the U-shaped frame, wherein the ratchet 13 and the rotating rod 9 are coaxial and synchronous; the pawl 14 is configured to prohibit the ratchet 13 from rotating in the direction opposite to the tensioning direction.
[0065] According to some alternative embodiments of the present application, as shown in Figure 8 As shown, the locking assembly includes a U-shaped frame, which can be a separate structure arranged on the first support 2 and the second support 3, or can be integrally formed with the first support 2 and the second support 3, for example, can be a groove 7 formed by recessing the end of the first support 2 and the second support 3 inward (tensioning direction of the metal film 10). One end of the rotating rod 9 is rotatably connected to one end of the U-shaped frame through a rotating shaft 16, the other end of the rotating rod 9 is provided with a threaded hole 17 along the axial direction, and the other end of the U-shaped frame is provided with a through hole, and the locking of the rotating rod 9 is realized by cooperating the threaded hole 17 with a screw knob 18 with a screw rod.
[0066] Figure 9 As shown in the mechanism block diagram of the coating equipment provided by an embodiment of the present application.
[0067] According to the inventive concept of another aspect of the present application, a coating equipment is also provided, which includes the extension tensioning device as described in the foregoing embodiments.
[0068] According to some embodiments of the present application, as shown in Figure 9 As shown, the coating equipment has a reaction cavity 19, the reaction cavity 19 is provided with a gas outlet 20 for vacuumizing, the extension tensioning device is arranged in the reaction cavity 19, and an evaporation boat is also arranged in the reaction cavity. Optionally, an electrode plate is also arranged in the reaction cavity 19, for forming an electric shovel, so as to realize plasma coating.
[0069] In the embodiments of the present disclosure, if not specifically limited, the form of connection can be detachable connection through bolts, nuts, screws, buckles, magnetic attraction and the like. In some connections, if there is no special requirement for the form of detachable cooperation, the connection can be non-detachable connection through welding, bonding and the like.
[0070] The above describes the basic principles of the present application in combination with specific embodiments, but it needs to be pointed out that the advantages, benefits, effects and the like mentioned in the present application are only examples and are not limiting, and these advantages, benefits, effects and the like cannot be considered as necessary for each embodiment of the present application. In addition, the above specific details disclosed are only for the purpose of example and understanding, and are not limiting, and the above details do not limit the present application to be necessarily implemented with the above specific details.
[0071] The block diagrams of the devices, apparatuses, equipment, systems involved in the present application are only illustrative examples and are not intended to require or imply the connection, arrangement, configuration shown in the block diagrams. As those skilled in the art will recognize, these devices, apparatuses, equipment, systems can be connected, arranged, configured in any manner. Words such as "include", "contain", "have" and the like are open-ended words, mean "including but not limited to", and can be used interchangeably. The words "or" and "and" used herein mean the word "and / or", and can be used interchangeably unless the context clearly indicates otherwise. The word "such as" used herein means the phrase "such as but not limited to", and can be used interchangeably.
[0072] It also needs to be pointed out that in the devices, equipment and methods of the present application, each component or each step can be decomposed and / or recombined. These decompositions and / or recombinations should be considered as equivalent solutions of the present application.
[0073] The above description of the disclosed aspects is provided so that any person skilled in the art can make or use the present application. Various modifications to these aspects will be apparent to those skilled in the art, and the general principles defined herein can be applied to other aspects without departing from the scope of the present application. Therefore, the present application is not intended to be limited to the aspects shown herein, but is intended to be accorded the widest scope consistent with the principles and novel features disclosed herein.
[0074] The above description has been given for the purpose of illustration and description. Furthermore, this description is not intended to limit the embodiments of the present application to the forms disclosed herein. Although a number of example aspects and embodiments have been discussed above, those skilled in the art will recognize certain variations, modifications, changes, additions and sub-combinations thereof.
Claims
1. A spread tensioning device, characterized in that The extension tensioning device comprises: a base; a first support and a second support, respectively arranged at two ends of the base, the first support and the second support being suitable for fixing two ends of a metal film to be coated, respectively, an upper surface of the first support and / or the second support being provided with a clamping groove; a counterweight, the shape of which is matched with the clamping groove, the counterweight being configured to abut against the metal film and be clamped in the clamping groove.
2. The extension tensioning device of claim 1, wherein, One of the inner bottom surface of the clamping groove and the surface of the counterweight abutting against the metal film is provided with a protrusion, and the other is provided with a groove matched with the protrusion in concave-convex.
3. The extension tensioning device of claim 2, wherein, The number of the protrusions is multiple, and the multiple protrusions are continuously arranged in a direction from the first support to the second support.
4. The extension tensioning device of claim 2, wherein, The inner bottom surface of the clamping groove is continuously and alternately provided with multiple protrusions and multiple grooves, and the surface of the counterweight abutting against the metal film is continuously and alternately provided with corresponding multiple grooves and multiple protrusions.
5. The extension tensioning device of claim 4, wherein, On the inner bottom surface of the clamping groove and the surface of the counterweight abutting against the metal film, a transition surface parallel to the tensioning direction is arranged between adjacent grooves and protrusions.
6. A stretch tension device according to any one of claims 2 to 5, wherein The cross-sectional shape of the protrusion is tooth-shaped, rectangular, semicircular, arc-shaped, or trapezoidal.
7. The extension tensioning device of claim 3, wherein, The extension tensioning device further comprises a locking assembly arranged on the first support and the second support, the locking assembly being configured to fix two ends of the metal film to be coated, so that a coating area of the metal film remains horizontal.
8. The extension tensioning device of claim 7, wherein, The locking assembly comprises: at least one rotating rod rotatably mounted on the first support and / or the second support, wherein one end of the metal film is wound around the rotating rod; a locking member configured to limit rotation of the rotating rod around an axis.
9. The extension tensioning device of claim 1, wherein, The number of the first supports and the second supports is multiple, and multiple sets of the first supports and the second supports are arranged in a stacking manner in a height direction.
10. A coating apparatus, characterized by, The extension tensioning device comprises: a base; a first support and a second support, respectively arranged at two ends of the base, the first support and the second support being suitable for fixing two ends of a metal film to be coated, respectively, an upper surface of the first support and / or the second support being provided with a clamping groove; a counterweight, the shape of which is matched with the clamping groove, the counterweight being configured to abut against the metal film and be clamped in the clamping groove. One of the inner bottom surface of the clamping groove and the surface of the counterweight abutting against the metal film is provided with a protrusion, and the other is provided with a groove matched with the protrusion in concave-convex. The number of the protrusions is multiple, and the multiple protrusions are continuously arranged in a direction from the first support to the second support. The inner bottom surface of the clamping groove is continuously and alternately provided with multiple protrusions and multiple grooves, and the surface of the counterweight abutting against the metal film is continuously and alternately provided with corresponding multiple grooves and multiple protrusions. On the inner bottom surface of the clamping groove and the surface of the counterweight abutting against the metal film, a transition surface parallel to the tensioning direction is arranged between adjacent grooves and protrusions. The cross-sectional shape of the protrusion is tooth-shaped, rectangular, semicircular, arc-shaped, or trapezoidal. The extension tensioning device further comprises a locking assembly arranged on the first support and the second support, the locking assembly being configured to fix two ends of the metal film to be coated, so that a coating area of the metal film remains horizontal. The locking assembly comprises: at least one rotating rod rotatably mounted on the first support and / or the second support, wherein one end of the metal film is wound around the rotating rod; a locking member configured to limit rotation of the rotating rod around an axis. The number of the first supports and the second supports is multiple, and multiple sets of the first supports and the second supports are arranged in a stacking manner in a height direction.