Coating cavity cooling system of vacuum coating machine

Abstract

The utility model discloses a coating cavity cooling system of a vacuum coating machine, which relates to the technical field of vacuum coating machines and comprises a vacuum coating machine body, a heat conducting ring is sleeved on the outer side of the vacuum coating machine body, a cooling water channel is arranged inside the heat conducting ring, and the cooling water channel is communicated with the vacuum coating machine body. The two ends of the cooling water channel are connected with a first water pipe and a third water pipe correspondingly, a heat exchange mechanism is arranged at one end of the third water pipe, a plurality of heat dissipation fins are connected to the outer side of a heat conduction ring, the heat conduction ring can rapidly conduct heat generated by the coating cavity to the cooling water channel, and then a circulating pump is started. The circulating pump drives cooling liquid to circularly flow in the cooling water channel, the cooling liquid continuously absorbs heat transmitted by the heat conduction ring, the heat is taken away from the heat conduction ring in a forced convection mode, the cooling water channel is distributed in a spiral shape, it is ensured that all parts of the coating cavity can be effectively cooled, the local overheating condition is avoided, and the service life of the coating cavity is prolonged. Therefore, the uniformity of the overall temperature of the equipment is improved.

Description

TECHNICAL FIELD

[0001] The utility model relates to vacuum coating machine technical field especially relates to a kind of coating cavity cooling system of vacuum coating machine. BACKGROUND

[0002] The coating cavity of vacuum coating machine is the space where coating process occurs, and is one of the core components of the vacuum coating machine. It is usually a sealed metal chamber. Various components are equipped in the coating cavity, including a workpiece holder for placing workpieces to be coated, an evaporation source or a sputtering source, an ion source, a vacuum measuring device, a baffle, etc. During the coating process, the evaporation source or the sputtering source and other components generate a large amount of heat. In order to prevent overheating of the components, a cooling system is needed.

[0003] A Chinese patent discloses a vacuum coating machine cavity with good cooling effect (publication number CN211227300U). The patent technology sets up a water tank, an atomizing nozzle, bristles and a connecting rod, which can effectively cool the vacuum coating machine. The atomizing nozzle atomizes water, and the bristles apply the atomized water mist to the surface of the vacuum coating machine cavity. The rapid evaporation of the water mist reduces the temperature and effectively cools the vacuum coating machine. However, applying the atomized water mist to the surface of the cavity with bristles cannot ensure that the water mist uniformly covers the entire surface of the cavity. There may be some areas with more water mist and better cooling effect, while other areas have less water mist and poor cooling effect. SUMMARY

[0004] To overcome the shortcomings of the prior art, the utility model provides a coating cavity cooling system of vacuum coating machine, which solves the problems raised in the background art.

[0005] To achieve the above purpose, the utility model realizes the following technical scheme: a coating cavity cooling system of vacuum coating machine, comprising:

[0006] A vacuum coating machine body is provided with a heat-conducting ring on the outside. A cooling water channel is formed in the inside of the heat-conducting ring. A first water pipe and a third water pipe are connected to the two ends of the cooling water channel respectively. A heat exchange mechanism is arranged at one end of the third water pipe. A plurality of heat dissipation fins are connected to the outside of the heat-conducting ring. Heat dissipation mechanisms are arranged on the outside of the heat dissipation fins in a ring shape.

[0007] As a further technical scheme of the utility model, the heat exchange mechanism includes a heat exchanger. The top of the heat exchanger is fixedly connected with the third water pipe. A fourth water pipe is connected to one side of the heat exchanger. A cooling liquid storage tank is connected to one end of the fourth water pipe. A circulating pump is connected to the top of the cooling liquid storage tank. A second water pipe is connected to one side of the circulating pump. One end of the second water pipe penetrates through the top of the cooling liquid storage tank. The other side of the circulating pump is fixedly connected with the first water pipe.

[0008] As a further technical scheme of the utility model, the cooling water channel is distributed spirally from left to right.

[0009] As a further technical scheme of the utility model, the heat dissipation mechanism comprises a pair of shells, both sides of the shell are connected with fixing rods, one end of the fixing rod is fixedly connected with the vacuum coating machine body, the outside of the shell is connected with a frame, the inside of the frame is connected with a fan, and a plurality of air outlet grooves are formed in the inside of the shell.

[0010] As a further technical scheme of the utility model, the positions of the air outlet grooves and the heat dissipation fins are staggered.

[0011] As a further technical scheme of the utility model, the air outlet grooves are distributed in a semi-ring shape.

[0012] The utility model provides a kind of coating cavity cooling system of vacuum coating machine, with the following beneficial effects compared with prior art:

[0013] 1, the coating cavity cooling system of vacuum coating machine of the design, by the outside of coating cavity is equipped with heat conduction ring, heat conduction ring can quickly conduct the heat generated by coating cavity to cooling water channel, then start circulating pump, circulating pump drives cooling liquid to circulate in cooling water channel, cooling liquid constantly absorbs the heat transferred by heat conduction ring, heat is taken away from heat conduction ring by forced convection, cooling water channel is distributed spirally, ensure that each part of coating cavity can be effectively cooled, avoid the situation that local overheating occurs, to improve the uniformity of the overall temperature of equipment.

[0014] 2, the coating cavity cooling system of vacuum coating machine of the design, by the outside of heat conduction ring is provided with a plurality of heat dissipation fins, heat dissipation fin can quickly dissipate the heat transferred by heat conduction ring to surrounding air, simultaneously, a pair of shells are equipped with the outside of heat dissipation fin, start the fan of the outside of shell, it is convenient to blow cold air to heat dissipation fin in the air outlet groove of the inside of shell, forced air flows in the space between shell and heat dissipation fin, to speed up the update speed of air to effectively improve the heat dissipation efficiency, further reduce the temperature of heat dissipation fin and heat conduction ring. DRAWINGS

[0015] Figure 1 It is the overall structure schematic view of the coating cavity cooling system of vacuum coating machine;

[0016] Figure 2 It is the structure schematic view of heat dissipation fin, heat conduction ring and cooling liquid storage box in the coating cavity cooling system of vacuum coating machine;

[0017] Figure 3It is a side view of a heat dissipation fin and a heat conduction ring in a coating cavity cooling system of a vacuum coating machine.

[0018] Figure 4 It is a side view of a heat dissipation fin and a heat conduction ring in a coating cavity cooling system of a vacuum coating machine.

[0019] In the figure: 1, heat dissipation fin; 2, heat conduction ring; 3, vacuum coating machine body; 4, fixed rod; 5, first water pipe; 6, circulating pump; 7, second water pipe; 8, cooling liquid storage box; 9, shell; 10, frame; 11, fan; 12, third water pipe; 13, heat exchanger; 14, fourth water pipe; 15, cooling water channel; 16, air outlet groove. DETAILED DESCRIPTION

[0020] The technical scheme in the embodiments of the present application will be described clearly and completely below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all the embodiments of the present application. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative labor fall within the scope of protection of the present application.

[0021] Please refer to Figures 1 to 4 The present application provides a coating cavity cooling system of a vacuum coating machine: including a vacuum coating machine body 3, a heat conduction ring 2 is sleeved outside the vacuum coating machine body 3, a cooling water channel 15 is arranged inside the heat conduction ring 2, a first water pipe 5 and a third water pipe 12 are connected to both ends of the cooling water channel 15 respectively, a heat exchange mechanism is arranged at one end of the third water pipe 12, a plurality of heat dissipation fins 1 are connected to the outside of the heat conduction ring 2, and a heat dissipation mechanism is arranged outside the heat dissipation fins 1 in a ring shape.

[0022] As shown in Figure 1 and Figure 2 The heat exchange mechanism includes a heat exchanger 13, the top of the heat exchanger 13 is fixedly connected with the third water pipe 12, a fourth water pipe 14 is connected to one side of the heat exchanger 13, one end of the fourth water pipe 14 is connected with a cooling liquid storage box 8, the top of the cooling liquid storage box 8 is connected with a circulating pump 6, one side of the circulating pump 6 is connected with a second water pipe 7, one end of the second water pipe 7 penetrates through the top of the cooling liquid storage box 8, the other side of the circulating pump 6 is fixedly connected with the first water pipe 5, the circulating pump 6 is opened, the circulating pump 6 drives the cooling liquid to circulate in the cooling water channel 15, the cooling liquid continuously absorbs the heat transferred by the heat conduction ring 2, and the heat is taken away from the heat conduction ring 2 by forced convection.

[0023] As shown in Figure 3As shown, the cooling water channel 15 is distributed in a spiral from left to right, and the spiral distribution of the cooling water channel 15 ensures that each part of the plating cavity can be effectively cooled, avoiding local overheating, thereby improving the uniformity of the overall temperature of the equipment.

[0024] As shown in Figure 1 and Figure 4 , the heat dissipation mechanism includes a pair of housings 9, both sides of the housing 9 are connected with the fixed rod 4, one end of the fixed rod 4 is fixedly connected with the vacuum plating machine body 3, the outer side of the housing 9 is connected with the frame 10, the inside of the frame 10 is connected with the fan 11, the inside of the housing 9 is provided with a plurality of air outlet grooves 16, the fan 11 on the outside of the housing 9 is opened, the cold air is blown into the heat dissipation fin 1 through the air outlet groove 16 on the inside of the housing 9, the air is forced to flow between the housing 9 and the heat dissipation fin 1, the air update speed is accelerated, thereby effectively improving the heat dissipation efficiency, further reducing the temperature of the heat dissipation fin 1 and the heat conduction ring 2.

[0025] As shown in Figure 3 and Figure 4 , the position of the air outlet groove 16 and the position of the heat dissipation fin 1 are staggered, which is conducive to guiding the airflow generated by the fan 11 to flow more uniformly through the heat dissipation fin 1, avoiding the airflow disorder or local airflow shortage, and the directional and uniform airflow can fully contact the surface of the heat dissipation fin 1, ensuring that the heat dissipation effect of each part is enhanced, reducing the heat dissipation blind area, and making the heat dissipation more balanced.

[0026] As shown in Figure 4 , the air outlet groove 16 is distributed in a semi-ring shape, which is conducive to the semi-ring shape of the air outlet groove 16 being sleeved on the outside of the heat dissipation fin 1.

[0027] The working principle of the utility model is: by sleeving the heat conduction ring 2 on the outside of the plating cavity, the heat conduction ring 2 can quickly conduct the heat generated by the plating cavity to the cooling water channel 15, then the circulating pump 6 is opened, the circulating pump 6 drives the cooling liquid to circulate in the cooling water channel 15, the cooling liquid continuously absorbs the heat transferred by the heat conduction ring 2, and the heat is taken away from the heat conduction ring 2 by forced convection, the cooling water channel 15 is distributed in a spiral, ensuring that each part of the plating cavity can be effectively cooled, avoiding local overheating, thereby improving the uniformity of the overall temperature of the equipment, and a plurality of heat dissipation fins 1 are arranged on the outside of the heat conduction ring 2, the heat dissipation fins 1 can quickly dissipate the heat conducted by the heat conduction ring 2 to the surrounding air, and a pair of housings 9 are sleeved on the outside of the heat dissipation fin 1, the fan 11 on the outside of the housing 9 is opened, the cold air is blown into the heat dissipation fin 1 through the air outlet groove 16 on the inside of the housing 9, the air is forced to flow between the housing 9 and the heat dissipation fin 1, the air update speed is accelerated, thereby effectively improving the heat dissipation efficiency, further reducing the temperature of the heat dissipation fin 1 and the heat conduction ring 2.

[0028] The above description is only the preferred embodiment of the present utility, it should be pointed out that for ordinary skilled in the art, without departing from the principles of the present utility, can also make a number of improvements and refinements, these improvements and refinements should also be considered the protection scope of the present utility. The structure, device and operation method not specifically described and explained in the present utility, such as no special description and limitation, according to the conventional means of the art.

Claims

1. A coating cavity cooling system of a vacuum coater, characterized in that, Include: Vacuum coating machine body (3), the outer side of the vacuum coating machine body (3) is sleeved with a heat conducting ring (2), the inside of the heat conducting ring (2) is provided with a cooling water channel (15), the both ends of the cooling water channel (15) are respectively connected with a first water pipe (5) and a third water pipe (12), one end of the third water pipe (12) is provided with a heat exchange mechanism, the outside of the heat conducting ring (2) is connected with a plurality of heat dissipation fins (1), the outside of the heat dissipation fin (1) is circumferentially provided with a heat dissipation mechanism; The heat exchange mechanism comprises a heat exchanger (13), the top of the heat exchanger (13) is fixedly connected with the third water pipe (12), one side of the heat exchanger (13) is connected with a fourth water pipe (14), one end of the fourth water pipe (14) is connected with a cooling liquid storage tank (8), the top of the cooling liquid storage tank (8) is connected with a circulating pump (6), one side of the circulating pump (6) is connected with a second water pipe (7), one end of the second water pipe (7) penetrates through the top of the cooling liquid storage tank (8), the other side of the circulating pump (6) is fixedly connected with the first water pipe (5).

2. The coating cavity cooling system of a vacuum coating machine according to claim 1, wherein, The cooling water channel (15) is distributed in a spiral shape from left to right.

3. The coating cavity cooling system of a vacuum coating machine according to claim 1, wherein, The heat dissipation mechanism comprises a pair of housings (9), the both sides of the housing (9) are connected with a fixing rod (4), one end of the fixing rod (4) is fixedly connected with the vacuum coating machine body (3), the outside of the housing (9) is connected with a frame (10), the inside of the frame (10) is connected with a fan (11), the inside of the housing (9) is provided with a plurality of air outlet grooves (16).

4. The coating cavity cooling system of claim 3, wherein, The positions of the air outlet grooves (16) and the heat dissipation fins (1) are staggered.

5. The coating cavity cooling system of claim 3, wherein, The air outlet grooves (16) are distributed in a semi-ring shape.

Images