Connecting device for crucible and external source and evaporation device comprising connecting device
By designing an external source structure and heating pipeline, the problems of frequent cooling and vacuum operation caused by the internal source design were solved, thereby improving equipment operating efficiency and material utilization, and ensuring the uniformity and efficiency of the vapor deposition process.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-03-03
- Publication Date
- 2026-03-27
AI Technical Summary
The built-in source design of existing vapor deposition equipment leads to frequent cooling, vacuuming, and vacuum breaking processes in the heating chamber, which affects production efficiency. Furthermore, uneven heating of raw materials results in material waste and impurity formation.
An external heat source structure is adopted, which connects the crucible and the external heat source through heating pipes to achieve uniform heat distribution. It also avoids cooling of the heating chamber and frequent vacuuming when changing the evaporation source, and is controlled by a combination of insulation layer and vacuum pressure components.
It increased equipment uptime by more than 10%, reduced raw material waste, ensured uniform gas ejection, and improved production efficiency and material utilization.
Smart Images
Figure CN224047495U_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The utility model belongs to the evaporation system technical field relates to a connecting device of crucible and external source and including its evaporation device. BACKGROUND
[0002] The existing evaporation equipment adopts the way of built-in linear source design, places the evaporation raw material in the crucible, and heats in the way of heating all around; the heating is carried out in the way of resistance heating, in order to ensure that the crucible is heated more evenly, the diameter of the resistance wire is designed to be very small; the metal anti-radiation plate is installed on the periphery of the heating wire, which can prevent a large amount of heat generated in the heating process from being taken away by the cooling water channel outside the radiation plate, and can effectively maintain the aggregation of heating energy; the cooling water device is arranged on the periphery of the metal anti-radiation plate, which mainly provides a cold source for evaporation cooling, and provides a cold source during the heating process of the heating wire, thereby effectively realizing the PID regulation function.
[0003] However, the existing technology has the following problems: when the built-in source design needs to increase the raw material, the evaporation vacuum system needs to be broken, and the heating system needs to be cooled to below 100 DEG C before breaking the vacuum operation; under the existing heating evaporation temperature condition, the existing cooling device needs to be cooled for more than 12 hours, because the metal anti-radiation plate blocks the cooling water channel and the heating source, the cooling effect of the cooling water channel on the crucible is poor; the heating wire is designed to be thin and dense, and there is no obvious cooling device design, which may cause deformation of the annular design of the heating wire, resulting in uneven heating.
[0004] In addition, when the evaporation source is replaced, the unevaporated raw material needs to be removed, because part of the material is unevenly heated during the evaporation process of the built-in source, secondary evaporation occurs in the crucible, which forms other discoloration impurities, and when new raw materials are added, the discoloration impurities need to be removed, which will waste 10% to 20% of the raw materials; the built-in source design needs to be frequently opened and closed, vacuumized and broken, cooled and heated, which seriously affects the production process of mass production and greatly reduces the production efficiency.
[0005] Therefore, it is urgent to design a connecting device of crucible and external source and an evaporation device including the same to overcome the defects of the prior art and meet the actual application requirements. Utility model content
[0006] In view of the deficiencies of the prior art, the utility model discloses a connection device of crucible and external source and evaporation device including it, especially relates to a connection device of crucible and external source for perovskite evaporation, in the utility model, change linear built-in source evaporation into external source structure, when replacing evaporation source, do not need to carry out heating cavity cooling, frequent vacuumizing and breaking vacuum process, can improve equipment operation rate by 10% or more, and raw materials are heated evenly in the special external source structure, and the uniformity of gas spraying in the crucible structure is also ensured.
[0007] In order to achieve this purpose, the utility model adopts the following technical scheme:
[0008] First, the utility model provides a kind of connection device of crucible and external source, and the connection device includes crucible structure and external source structure, and the crucible structure is connected by heating pipeline the external source structure;
[0009] The crucible structure includes crucible body, and the crucible body is evenly distributed with several through holes;
[0010] The external source structure includes first cylinder and second cylinder sequentially sleeved from inside to outside, and one end of the second cylinder is provided with sealing flange, one end of the heating pipeline penetrates the sealing flange and is arranged in the first cylinder, and the other end of the heating pipeline is provided with several branch pipelines, and several branch pipelines are arranged corresponding to several through holes, and each branch pipeline is arranged in each through hole;
[0011] The outer wall of the first cylinder is provided with heating assembly for heating evaporation material in the first cylinder.
[0012] In the utility model, linear built-in source evaporation is changed into external source structure, when replacing evaporation source, do not need to carry out heating cavity cooling, frequent vacuumizing and breaking vacuum process, can improve equipment operation rate by 10% or more, and raw materials are heated evenly in the special external source structure, and the uniformity of gas spraying in the crucible structure is also ensured.
[0013] It should be noted that the equipment operation rate in the utility model refers to the percentage of total equipment operation time minus the time required for equipment maintenance to the total equipment operation time. When the time required for equipment maintenance accounts for a large proportion of the total operation time, it directly affects the equipment operation rate.
[0014] Need to explain, generally, the original evaporation source replacement because of uneven heating and bottom raw material secondary evaporation form impurities, replacement of raw materials need to remove the discoloration of raw materials, can not be used normally, material waste rate reaches 20% or more, and the connecting structure in the utility model changes the linear built-in source evaporation into an external source structure, without heating cavity cooling, frequent vacuum and vacuum breaking process when replacing the evaporation source, so as to reduce the waste of materials.
[0015] Need to explain, the specific structure, size, material and shape of the crucible body in the utility model are not specially limited, and the skilled person in the art can make adaptive adjustment according to the actual situation. Among them, the crucible body can be a cylinder or a cube.
[0016] Need to explain, the specific shape, size, number and the like of the through hole in the utility model are not specially limited, and the skilled person in the art can make adaptive adjustment according to the actual situation. Among them, the number can be 1, 2, 3, 4, 5, 6, etc., which is not exhausted here.
[0017] Need to explain, the specific shape, size and the like of the first cylinder and the second cylinder in the utility model are not specially limited, and the skilled person in the art can make adaptive adjustment according to the actual situation. Among them, the size of the first cylinder and the second cylinder can be enlarged or reduced in proportion.
[0018] Need to explain, the specific shape, size and the like of the sealing flange in the utility model are not specially limited, and the skilled person in the art can make adaptive adjustment according to the actual situation.
[0019] Need to explain, the specific shape, length and material and the like of the heating pipeline in the utility model are not specially limited, and the skilled person in the art can make adaptive adjustment according to the actual situation.
[0020] Need to explain, the specific number, length and the like of the branch pipeline in the utility model are not specially limited, and the skilled person in the art can make adaptive adjustment according to the actual situation. Among them, the number can be 1, 2, 3, 4, 5, 6, etc., which is not exhausted here.
[0021] Need to explain, the evaporation material in the utility model can be a metal material, an organic material or an inorganic material.
[0022] Need to explain, the external source structure is connected with the sealing flange through the heating pipeline, the heat source is connected into the crucible structure, the heat source is divided into several equal parts before entering the crucible body (that is, corresponding to the design of several branch pipelines), the connection between the crucible body and the heating pipeline can adopt external thread detachable rotary joint, and the crucible body and the external thread joint can adopt argon arc welding full welding.
[0023] As a preferred technical scheme of the utility model, the outer wall of the crucible body is circumferentially provided with a heat preservation layer.
[0024] It should be noted that the outer wall of the crucible body is circumferentially provided with a heat preservation layer in the utility model, so that the heat transfer of the whole crucible is uniform, and the design of the heat preservation layer can keep the heat source stable.
[0025] Further, the heat preservation layer is a graphite layer.
[0026] Further, the thickness of the heat preservation layer is greater than or equal to 5 mm, for example, it can be 5 mm, 6 mm, 7 mm, 8 mm, 9 mm, 10 mm, etc., which is not exhaustive here.
[0027] It should be noted that the thickness of the graphite layer is greater than or equal to 5 mm in the utility model, which can ensure that the heat preservation layer has the best heat insulation effect, and the graphite layer can effectively make the crucible heat evenly; if it is not within this range, it may cause uneven heat preservation and heating of the crucible, and the thickness of the vapor pressure evaporated on the transverse contact surface is uneven.
[0028] As a preferred technical scheme of the utility model, the outer wall of the crucible body is circumferentially provided with a heat preservation layer.
[0029] It should be noted that the outer wall of the crucible body is circumferentially provided with a heat preservation layer in the utility model, so that the heat transfer of the whole crucible is uniform, and the design of the heat preservation layer can keep the heat source stable.
[0030] As a preferred technical scheme of the utility model, the first cylinder and the second cylinder are coaxially arranged.
[0031] It should be noted that the first cylinder and the second cylinder are coaxially arranged in the utility model, which can further ensure that the external source of the first cylinder is uniformly heat preserved and heated in the second cylinder; at the same time, the second cylinder can play a safety protection role when the external source leaks.
[0032] As a preferred technical scheme of the utility model, the second cylinder is a steel bottle structure.
[0033] It should be noted that the size, material, etc. of the steel bottle structure in the utility model are not specially limited, and those skilled in the art can make adaptive adjustments according to the actual situation. The connection between the steel bottle structure and the sealing flange can be locked by 316L stainless steel screws, and the setting of the hood can prevent leakage on the sealing surface when the steam pressure is too large.
[0034] Further, the connection between the steel bottle structure and the sealing flange is provided with a sealing element, and the sealing element is used to prevent gas leakage.
[0035] Further, the sealing member is a graphite felt.
[0036] As a preferred technical scheme of the utility model, the heating assembly is a boron nitride graphite ring.
[0037] Further, the boron nitride graphite ring is provided with a plurality of boron nitride graphite rings, and the plurality of boron nitride graphite rings are sleeved on the outer wall of the first cylinder.
[0038] It should be noted that the size, number and the like of the plurality of boron nitride graphite rings are not specially limited in the utility model, and a person skilled in the art can make adaptive adjustment according to the actual situation. Among them, the plurality of boron nitride graphite rings can be 1, 2, 3, 4, 5, 6 and the like, which are not exhausted here.
[0039] As a preferred technical scheme of the utility model, the external source structure further comprises an explosion-proof cabinet body sleeved on the outer surface of the second cylinder.
[0040] It should be noted that the specific structure, size and material and the like of the explosion-proof cabinet body in the utility model are not specially limited, and a person skilled in the art can make adaptive adjustment according to the actual situation.
[0041] Further, any side of the explosion-proof cabinet body is provided with a gas alarm assembly for gas leakage alarm.
[0042] It should be noted that the external source structure in the utility model can be placed in the explosion-proof cabinet body, and the side edge of the explosion-proof cabinet body can place the gas alarm assembly corresponding to the evaporation source. When the gas concentration of the evaporation source exceeds a certain effective range, the gas alarm assembly can directly alarm, including but not limited to sound alarm, light alarm or sound and light alarm at the same time, and the electromagnetic valve of the heating and ventilation pipeline is cut off at the same time.
[0043] As a preferred technical scheme of the utility model, the heating pipeline is provided with a first vacuum pressure assembly on the side close to the crucible structure, and a second vacuum pressure assembly on the side close to the external source structure.
[0044] Further, the first vacuum pressure assembly and the second vacuum pressure assembly are the same.
[0045] Further, the first vacuum pressure assembly comprises an electrically connected vacuum pressure gauge and a vacuum regulating valve.
[0046] It should be noted that the specific model of the vacuum pressure gauge and the vacuum regulating valve in the utility model is not specially limited, and a person skilled in the art can make adaptive adjustment according to the actual situation. Among them, the connecting device of the utility model can be monitored under the monitoring of the vacuum pressure assembly, and the effective amount of the evaporation raw material can be monitored in real time.
[0047] Further, the outer surface of the heating pipeline is provided with a heating wire.
[0048] It should be noted that the outer surface of the heating pipeline in the utility model is provided with a heating wire, which can further ensure that the steam in the heating pipeline is uniformly heated and the steam pipeline is not blocked due to temperature gradient difference.
[0049] As a preferred technical scheme of the utility model, the branch pipeline is arranged beyond the through hole at one end away from the heat transfer direction of the heating pipeline, and a heater is arranged on the overhanging branch pipeline.
[0050] Further, the heater is a boron nitride heater.
[0051] It should be noted that the overhanging branch pipeline is provided with a heater in the utility model, which can further ensure that the steam is uniformly heated at the evaporation angle and provide sufficient kinetic energy for the evaporation material to ensure a certain evaporation rate.
[0052] In the second aspect, the utility model provides a kind of evaporation device, and the evaporation device includes crystal vibration structure and the crucible and the connecting device of external source of first aspect, the crystal vibration structure is peripherally arranged at the side of the crucible structure away from the external source structure.
[0053] It should be noted that the crystal vibration structure in the utility model can be a circular disc structure, and the crystal vibration piece can be automatically switched according to the deposition thickness, and the high-frequency oscillation signal is converted into an electrical signal by an optical fiber and then transmitted to the heating system, which is not specially limited here, and those skilled in the art can make adaptive adjustments according to the actual situation, wherein the crystal vibration structure can be arranged on the two sides of the overhanging branch pipeline above the through hole nozzle of the crucible body.
[0054] Compared with the prior art, the utility model has the following beneficial effects:
[0055] In the utility model, the linear built-in source evaporation is changed into an external source structure, and when the evaporation source is replaced, the heating cavity does not need to be cooled, the vacuum is not frequently broken, and the equipment operation efficiency can be improved by more than 10%; and the raw materials are uniformly heated in the special external source structure, and the uniformity of the gas sprayed from the crucible structure is also ensured.
[0056] The connecting device in the utility model can also be used to replace the operation process of evaporation or electron beam evaporation in the LED industry. BRIEF DESCRIPTION OF DRAWINGS
[0057] Figure 1 The structure diagram of the connecting device of the crucible and the external source provided for a specific embodiment of the utility model is shown in the drawings.
[0058] Figure 2 The structure diagram of the evaporation device is provided for one specific embodiment of the present application.
[0059] 1-crucible body; 2-branch pipeline; 3-heating pipeline; 4-first cylinder; 5-second cylinder; 6-boron nitride graphite ring; 7-sealing flange; 8-vacuum pressure gauge; 9-vacuum regulating valve; 10-crystal vibration structure. Specific embodiments
[0060] It should be understood that, in the description of the present application, the orientation or positional relationship indicated by the terms "center", "longitudinal", "transverse", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer" and the like is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the present application and simplifying the description, and therefore cannot be understood as indicating or implying that the devices or elements indicated must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as limiting the present application. In addition, the terms "first", "second" and the like are only for descriptive purposes and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the technical features indicated. Therefore, the features limited by "first", "second" and the like can explicitly or implicitly include one or more of the features. In the description of the present application, unless otherwise specified, the meaning of "a plurality of" is two or more.
[0061] It should be noted that, in the description of the present application, unless otherwise specified and limited, the terms "provided", "connected", "connected" should be understood broadly, for example, it can be fixedly connected, or it can be detachably connected, or integrally connected; it can be mechanically connected, or it can be electrically connected; it can be directly connected, or it can be indirectly connected through an intermediate medium, or it can be connected inside two elements. For ordinary skilled in the art, the specific meaning of the above terms in the present application can be understood through specific circumstances.
[0062] The technical solutions of the present application will be further described below in conjunction with the drawings and through specific embodiments.
[0063] In one specific embodiment, the present application provides a connecting device for a crucible and an external source, as shown in Figure 1 The connecting device includes a crucible structure and an external source structure, and the crucible structure is connected to the external source structure through a heating pipeline 3.
[0064] The crucible structure includes a crucible body 1, and the crucible body 1 is uniformly provided with a plurality of through holes;
[0065] The external source structure comprises a first cylinder 4 and a second cylinder 5 which are sequentially sleeved from inside to outside, one end of the second cylinder 5 is provided with a sealing flange 7, one end of the heating pipeline 3 penetrates through the sealing flange 7 and is arranged in the first cylinder 4, the other end of the heating pipeline 3 is provided with a plurality of branch pipelines 2, the plurality of branch pipelines 2 are arranged in correspondence with a plurality of through holes, and each branch pipeline 2 penetrates through each through hole;
[0066] The outer wall of the first cylinder 4 is circumferentially provided with a heating assembly for heating the evaporative material in the first cylinder 4.
[0067] It should be noted that generally, when the original evaporation source is replaced, impurities are formed due to uneven heating and secondary evaporation of the bottom raw material, the discolored raw material needs to be removed when the raw material is replaced, and the material waste rate reaches more than 20%, and the connecting structure in the utility model changes the linear built-in source evaporation into an external source structure, so that the heating cavity does not need to be cooled, frequent vacuumizing and breaking vacuum are not needed when the evaporation source is replaced, and the waste of materials is reduced.
[0068] It should be noted that the specific structure, size, material and shape of the crucible body 1 are not specially limited in the utility model, and those skilled in the art can make adaptive adjustments according to the actual situation. The crucible body 1 can be a cylinder.
[0069] It should be noted that the specific shape, size and number of the through holes are not specially limited in the utility model, and those skilled in the art can make adaptive adjustments according to the actual situation. The number of the plurality of through holes can be 1, 2, 3, 4, 5, 6, etc., which is not exhausted here.
[0070] It should be noted that the specific shape and size of the first cylinder 4 and the second cylinder 5 are not specially limited in the utility model, and those skilled in the art can make adaptive adjustments according to the actual situation. The size of the first cylinder 4 and the second cylinder 5 can be enlarged or reduced in proportion.
[0071] It should be noted that the specific shape and size of the sealing flange 7 are not specially limited in the utility model, and those skilled in the art can make adaptive adjustments according to the actual situation.
[0072] It should be noted that the specific shape, length and material of the heating pipeline 3 are not specially limited in the utility model, and those skilled in the art can make adaptive adjustments according to the actual situation.
[0073] It should be noted that the specific number and length of the branch pipeline 2 are not specially limited in the utility model, and those skilled in the art can make adaptive adjustments according to the actual situation. The number of the plurality of branch pipelines 2 can be 1, 2, 3, 4, 5, 6, etc., which is not exhausted here.
[0074] It should be noted that the external source structure is connected with the sealing flange 7 through the heating pipeline 3, the heat source is connected into the crucible structure, the heat source is divided into several equal parts before entering the crucible body 1 (that is, corresponding to the design of several branch pipelines 2), the connection between the crucible body 1 and the heating pipeline 3 can adopt external thread detachable rotation connection, and the crucible body 1 and the external thread joint can adopt argon arc welding full welding.
[0075] In one embodiment, the outer wall of the crucible body 1 is circumferentially provided with a heat preservation layer.
[0076] It should be noted that the outer wall of the crucible body 1 in the utility model is circumferentially provided with a heat preservation layer, and the purpose is to make the heat transfer of the whole crucible uniform, and the design of the heat preservation layer can keep the heat source stable.
[0077] In one embodiment, the heat preservation layer is a graphite layer.
[0078] In one embodiment, the thickness of the heat preservation layer is greater than or equal to 5mm, for example, it can be 5mm, 6mm, 7mm, 8mm, 9mm, 10mm, etc., which is not exhaustive here.
[0079] In one embodiment, the outer wall of the crucible body 1 is circumferentially uniformly distributed with a heating wire, and the heating wire is arranged between the crucible body 1 and the heat preservation layer.
[0080] It should be noted that the heating wire circumferentially distributed on the outer wall of the crucible body 1 in the utility model can be embedded on the outer surface of the crucible body 1, and the crucible body 1 is further heated.
[0081] In one embodiment, the first cylinder 4 and the second cylinder 5 are coaxially arranged.
[0082] In one embodiment, the second cylinder 5 is a steel bottle structure.
[0083] It should be noted that the size, material and the like of the steel bottle structure in the utility model are not specially limited, and those skilled in the art can make adaptive adjustment according to the actual situation. The connection between the steel bottle structure and the sealing flange 7 can be locked by 316L stainless steel screws, and the setting of the hood can prevent leakage on the sealing surface when the steam pressure is too large.
[0084] In one embodiment, a sealing element is arranged at the connection between the steel bottle structure and the sealing flange 7, and the sealing element is used to prevent gas leakage.
[0085] In one embodiment, the sealing element is a graphite felt.
[0086] In one embodiment, the heating assembly is a boron nitride graphite ring 6. In one embodiment, the heating assembly is a boron nitride graphite ring 6.
[0087] In one embodiment, the boron nitride graphite ring 6 is provided with several, and the several boron nitride graphite rings 6 are sleeved on the outer wall of the first cylinder body 4.
[0088] It should be noted that the size, number and the like of the several boron nitride graphite rings 6 in the utility model are not specially limited, and a person skilled in the art can make adaptive adjustment according to the actual situation. Among them, the several boron nitride graphite rings 6 can be 1, 2, 3, 4, 5, 6 and the like, which are not exhausted here.
[0089] In one embodiment, the external source structure further comprises an explosion-proof cabinet body sleeved on the outer surface of the second cylinder body 5.
[0090] It should be noted that the specific structure, size and material and the like of the explosion-proof cabinet body in the utility model are not specially limited, and a person skilled in the art can make adaptive adjustment according to the actual situation.
[0091] In one embodiment, any side of the explosion-proof cabinet body is provided with a gas alarm assembly for gas leakage alarm.
[0092] It should be noted that the external source structure in the utility model can be placed in the explosion-proof cabinet body, and the side of the explosion-proof cabinet body can place the gas alarm assembly corresponding to the evaporation source. When the gas concentration of the evaporation source exceeds a certain effective range, the gas alarm assembly can directly alarm, including but not limited to sound alarm, light alarm or sound and light alarm at the same time, and the electromagnetic valve of the heating and ventilation pipeline is cut off at the same time.
[0093] In one embodiment, the heating pipeline 3 is provided with a first vacuum pressure assembly on the side close to the crucible structure, and a second vacuum pressure assembly on the side close to the external source structure.
[0094] In one embodiment, the first vacuum pressure assembly and the second vacuum pressure assembly are the same.
[0095] In one embodiment, the first vacuum pressure assembly comprises an electrically connected vacuum pressure gauge 8 and a vacuum regulating valve 9.
[0096] It should be noted that the specific model of the vacuum pressure gauge 8 and the vacuum regulating valve 9 in the utility model is not specially limited, and a person skilled in the art can make adaptive adjustment according to the actual situation. Among them, the connecting device of the utility model can be monitored under the monitoring of the vacuum pressure assembly, and the effective amount of the evaporation raw material can be monitored in real time.
[0097] In one embodiment, the outer surface of the heating pipeline 3 is provided with a heating wire.
[0098] In one embodiment, the branch pipeline 2 is arranged beyond the through hole at one end in the direction away from the heat transfer of the heating pipeline 3, and the heater is arranged on the branch pipeline 2 beyond the through hole.
[0099] In one embodiment, the heater is a boron nitride heater.
[0100] Exemplarily, the evaporation process of the connecting device of the external source in the utility model specifically includes:
[0101] The external source structure is heated by the heating assembly on the outer surface of the first cylinder 4, and when the heating assembly is heated to the set temperature of the evaporation raw material, a set evaporation gas pressure value is generated, the output power of the heating assembly is adjusted by PID control according to the set requirement of the second vacuum pressure assembly, so as to ensure the steam pressure value required by the vacuum pressure machine in real time.
[0102] When the evaporation material in the crucible body 1 needs to be carried out, the vacuum adjusting valve 9 switch of the first vacuum pressure assembly is opened, and the steam pressure evaporated from the external source structure is delivered to the crucible body 1 through the heating pipeline 3.
[0103] The branch pipeline 2 beyond the crucible body 1 is secondarily heated by the heater, the evaporation rate requirement of the crystal vibration structure 10 is fed back to the boron nitride heater of the branch pipeline 2 nozzle of the crucible body 1, and the output power of the heater is adjusted by PID.
[0104] The heating wire is used outside the heating pipeline 3 to heat the heating pipeline 3, and the heating temperature control is carried out at the same time, and the high-temperature resistant graphite felt is used outside to keep warm.
[0105] In another specific embodiment, the utility model provides a kind of evaporation device, as shown in Figure 2 The evaporation device includes the crystal vibration structure 10 and the above-mentioned crucible and the connecting device of external source, and the crystal vibration structure 10 is circumferentially arranged on the side of the crucible structure away from the external source structure.
[0106] Exemplarily, the process of cooling and replacing evaporation raw material of the evaporation device in the utility model includes:
[0107] Before cooling starts, according to the lowest evaporation value setting of the evaporation source, after the steam pressure is reduced to a reasonable range, the crystal vibration structure 10 is closed, the constant power output setting of the heater at the branch pipeline 2 is directly adjusted to ensure that the nozzle temperature at the branch pipeline 2 remains stable, the heating wire on the outer surface of the first cylinder 4 is closed, the heating pipeline 3 still maintains temperature, nitrogen is introduced into the steel bottle structure for purging, nitrogen is introduced into one side, and the other side is treated for accelerated cooling.
[0108] Close the vacuum pressure valve switch of the second vacuum pressure assembly, open the sealing flange 7, disassemble the connection joint between the heating pipeline 3 and the steel bottle structure, and disassemble the external source structure as a whole to add the evaporated raw materials.
[0109] After the addition of the evaporated raw materials is completed, the steel bottle structure is assembled back, the heating pipeline 3 is connected, the gas pipe in the steel bottle structure is pressurized with nitrogen, and the operation is resumed after the pressure is normally maintained.
[0110] Embodiment 1
[0111] The embodiment provides a connecting device of a crucible and an external source, wherein:
[0112] The connecting device comprises a crucible structure and an external source structure, and the crucible structure is connected to the external source structure through a heating pipeline 3; the crucible structure comprises a crucible body 1, and a plurality of through holes are uniformly distributed on the crucible body 1; the external source structure comprises a first cylinder 4 and a second cylinder 5 which are coaxially sleeved from inside to outside in sequence, and a sealing flange 7 is arranged at one end of the second cylinder 5; one end of the heating pipeline 3 penetrates through the sealing flange 7 and is arranged in the first cylinder 4, and the other end of the heating pipeline 3 is provided with a plurality of branch pipelines 2 which are correspondingly arranged in the plurality of through holes and penetrate through each through hole; a heating wire is arranged on the outer surface of the heating pipeline 3.
[0113] A heat preservation layer is circumferentially arranged on the outer wall of the crucible body 1, and the heat preservation layer is a graphite layer, and the thickness of the heat preservation layer is 5 mm.
[0114] A plurality of heating wires are circumferentially arranged on the outer wall of the crucible body 1, and the heating wires are arranged between the crucible body 1 and the heat preservation layer.
[0115] The second cylinder 5 is a steel bottle structure, and a graphite felt is arranged at the connection position between the steel bottle structure and the sealing flange 7, and a sealing element is arranged to prevent gas leakage.
[0116] A plurality of boron nitride graphite rings 6 are arranged, and the plurality of boron nitride graphite rings 6 are sleeved on the outer wall of the first cylinder 4.
[0117] The external source structure further comprises an explosion-proof cabinet body which is sleeved on the outer surface of the second cylinder 5, and a gas alarm assembly is arranged on any side of the explosion-proof cabinet body to alarm gas leakage.
[0118] A first vacuum pressure assembly is arranged on the side of the heating pipeline 3 close to the crucible structure, a second vacuum pressure assembly is arranged on the side of the heating pipeline 3 close to the external source structure, the first vacuum pressure assembly and the second vacuum pressure assembly are the same, and the first vacuum pressure assembly comprises a vacuum pressure gauge 8 and a vacuum regulating valve 9 which are electrically connected.
[0119] The branch pipeline 2 is arranged beyond the through hole at one end in a direction away from the heat transfer direction of the heating pipeline 3, and a boron nitride heater is arranged on the branch pipeline 2 beyond the through hole.
[0120] In conclusion, the linear built-in source evaporation is changed into an external source structure, so that when the evaporation source is replaced, the process of heating cavity cooling, frequent vacuumizing and vacuum breaking is not needed, the equipment operation availability can be increased by more than 10%, and the raw material is heated uniformly in the special external source structure, and the uniformity of gas spraying in the crucible structure is also ensured.
[0121] The above merely describes the specific implementation of the present application, but the protection scope of the present application is not limited to this, and those skilled in the art should understand that any changes or replacements within the technical range disclosed by the present application, which can be easily thought of by any person skilled in the art, falls within the protection scope and disclosure range of the present application.
Claims
1. A connecting device for a crucible and an external source, characterized in that, The connecting device comprises a crucible structure and an external source structure, and the crucible structure is connected to the external source structure through a heating pipeline; The crucible structure comprises a crucible body, and a plurality of through holes are uniformly distributed on the crucible body; The external source structure comprises a first cylinder and a second cylinder which are sequentially sleeved from inside to outside, and one end of the second cylinder is provided with a sealing flange, one end of the heating pipeline penetrates through the sealing flange and is arranged in the first cylinder, and the other end of the heating pipeline is provided with a plurality of branch pipelines, the plurality of branch pipelines are arranged corresponding to the plurality of through holes, and each branch pipeline penetrates through each through hole; A heating assembly is circumferentially arranged on the outer wall of the first cylinder for heating the evaporated material in the first cylinder.
2. The crucible and ex situ source connection apparatus according to claim 1, characterized in that A heat preservation layer is circumferentially arranged on the outer wall of the crucible body; The heat preservation layer is a graphite layer; The thickness of the heat preservation layer is greater than or equal to 5 mm.
3. The crucible and ex situ source connection apparatus according to claim 2, characterized in that A plurality of heating wires are circumferentially arranged on the outer wall of the crucible body, and the heating wires are arranged between the crucible body and the heat preservation layer.
4. The crucible and ex situ source connection apparatus of claim 1, wherein, The first cylinder and the second cylinder are coaxially arranged.
5. The crucible and ex situ source connection apparatus of claim 1, wherein, The second cylinder is a steel cylinder structure; A sealing element is arranged at the connection between the steel cylinder structure and the sealing flange, and the sealing element is used to prevent gas leakage; The sealing element is a graphite felt.
6. The crucible and ex situ source attachment of claim 1, wherein The heating assembly is a boron nitride graphite ring; A plurality of boron nitride graphite rings are arranged, and the plurality of boron nitride graphite rings are sleeved on the outer wall of the first cylinder.
7. The crucible and ex situ source attachment of claim 1, wherein The external source structure further comprises an explosion-proof cabinet body sleeved on the outer surface of the second cylinder; A gas alarm assembly is arranged on any side of the explosion-proof cabinet body for gas leakage alarm.
8. The crucible and ex situ source attachment of claim 1, wherein, A first vacuum pressure assembly is arranged on one side of the heating pipeline close to the crucible structure, and a second vacuum pressure assembly is arranged on one side of the heating pipeline close to the external source structure; The first vacuum pressure assembly and the second vacuum pressure assembly are the same; The first vacuum pressure assembly comprises an electrically connected vacuum pressure gauge and a vacuum regulating valve; A heating wire is wound on the outer surface of the heating pipeline.
9. The crucible and ex situ source attachment of claim 1, wherein, The branch pipeline is arranged beyond the through hole at one end away from the heat transfer direction of the heating pipeline, and a heater is arranged on the overhanging branch pipeline; The heater is a boron nitride heater.
10. An evaporation device, characterized by The evaporation device comprises a crystal vibration structure and the connecting device of the crucible and the external source according to any one of claims 1-9, and the crystal vibration structure is circumferentially arranged on one side of the crucible structure away from the external source structure.