Device for preparing quartz tube with inner coating

Abstract

The utility model relates to the technical field of quartz tube preparation, in particular to a device for preparing a quartz tube with an inner coating, which comprises a reaction box, the reaction box comprises a shell and a reaction chamber, a heating component is arranged between the shell and the reaction chamber, a movable loading trolley is arranged in the reaction chamber, and a plurality of loading cavities for quartz tubes are arranged in the loading trolley. A guide rail assembly used for guiding the loading trolley to move is arranged on the bottom wall of the reaction chamber, a trolley inlet and a trolley outlet for the loading trolley to enter and exit are formed in the two ends of the reaction chamber respectively, sealing door bodies are arranged at the trolley inlet and the trolley outlet respectively, a vacuumizing assembly is arranged on the lower portion of the reaction chamber, and an inert gas pipeline and an organic gas pipeline are further arranged on the reaction chamber. The quartz tubes are fixed in the reaction chamber in batches by the loading trolley and are heated to a specified temperature by the heating assembly, the generation of coatings on the inner walls of the plurality of quartz tubes is synchronously completed, and the loading trolley loads and unloads the quartz tubes in batches, so that energy is saved, and batch coating of the quartz tubes is realized.

Description

TECHNICAL FIELD

[0001] The utility model relates to quartz tube preparation technical field, concretely to a quartz tube preparation device with internal coating. BACKGROUND

[0002] In the production process of high-purity materials, in order to ensure the purity of raw materials, high-purity quartz tube is generally used as a reaction container or a bearing container. The quartz tube inevitably contacts the raw materials during use. Some raw materials will chemically react with the quartz tube under high temperature conditions. This situation not only causes difficulty in discharging the product after the reaction ends, but also greatly reduces the service life of the quartz tube. Therefore, it is necessary to provide a loading cavity with several quartz tubes in the quartz tube loading trolley, the inner tube of the quartz tube is in communication with the indoor environment of the reaction chamber, and the coating film is plated in a manner, which isolates the contact between the production raw materials and the quartz tube, thereby protecting the quartz tube and prolonging the service life of the quartz tube.

[0003] The existing quartz tube loading trolley is provided with a loading cavity with several quartz tubes, and the inner tube of the quartz tube is in communication with the indoor environment of the reaction chamber. The coating film is plated in a manner, which is mostly hot evaporation or chemical plating. The device structure is complex, the coating film uniformity is poor, the quartz tube and the device have high cooperation precision, only a single quartz tube can be plated each time, only the quartz tubes with the same diameter can be plated, the production energy consumption is high, and the device cannot meet the needs of large-scale industrial production and has low production efficiency. SUMMARY

[0004] In view of the deficiencies of the prior art and to solve the problems in the background art, the technical problem to be solved by the utility model is to provide a quartz tube preparation device with internal coating, which can batch coat and uniformly and efficiently coat.

[0005] The technical problem to be solved by the utility model is solved by the following technical scheme. A quartz tube preparation device with internal coating includes a reaction box, the reaction box includes a shell and a reaction chamber, a heating assembly is arranged between the shell and the reaction chamber, a movable loading trolley is arranged in the reaction chamber, a loading cavity with several quartz tubes is arranged in the loading trolley, a guide rail assembly for guiding the movement of the loading trolley is arranged on the bottom wall of the reaction chamber, a cart inlet and a cart outlet for the loading trolley to enter and exit are arranged at the two ends of the reaction chamber, a sealing door body is arranged at the cart inlet and the cart outlet, a vacuum pumping assembly is arranged at the lower part of the reaction chamber, and an inert gas pipeline and an organic gas pipeline are further arranged on the reaction chamber. The quartz tubes are fixed in the reaction chamber by the loading trolley, the generation of the coating on the inner walls of the plurality of quartz tubes is completed synchronously, the loading trolley loads and unloads the quartz tubes in batches, energy is saved, and batch coating of the quartz tubes is realized.

[0006] As a further embodiment of this utility model, the loading trolley includes a loading box with an open top. The loading box has a lid, which is hinged to one edge of the box body. The lid and the box body are locked and sealed. The loading chamber inside the loading box is divided into independent loading chambers by longitudinal and transverse partitions. The box body plate and the lid of the loading box are both perforated plates with several through holes. The through holes on the box body plate are vertically aligned. An installation ring is installed in each through hole. The installation ring is interference-fitted with the end of the quartz tube, and both ends of the quartz tube are flush with the ring surface of the installation ring, so that the indoor environment is connected to the inner tube of the quartz tube. The installation ring is made of flexible rubber. The quartz tube is fixed vertically and circumferentially by the mounting ring, ensuring a sealed fixation. This stable installation guarantees communication between the inner wall of the quartz tube and the reaction chamber environment, while simultaneously isolating the outer wall of the quartz tube from the reaction chamber environment. This allows for the formation of a coating on the inner wall of the quartz tube, resulting in a uniform coating under consistent heating temperatures and gas environments. Quartz tubes of different diameters can be loaded by varying the space of the independent loading chamber and the diameter of the mounting ring.

[0007] As a further embodiment of this invention, the bottom of the loading box is provided with several supporting beams along the width direction, and each end of the supporting beams is provided with casters. Both rows of casters are slidably engaged with the guide rail assembly. The loading trolley slides along the guide rail assembly, which facilitates transportation, saves labor and time, and at the same time restricts the displacement of the loading trolley in the width direction.

[0008] As a further embodiment of this invention, the guide rail assembly includes two guide rails arranged parallel to each other along the trolley inlet and outlet of the reaction chamber, with two rows of casters sliding along the inner sides of the corresponding guide rails. The guide rails guide the movement of the loading trolley, facilitating its pushing in and pushing out.

[0009] As a further embodiment of this invention, the vacuum assembly includes a vacuum pump, a vacuum pipeline between the vacuum pump and the reaction chamber, and a vacuum valve on the vacuum pipeline. The vacuum pump rapidly extracts gas or liquid from the reaction chamber, creating a vacuum environment for gas or liquid intake, thereby improving reaction purity and efficiency, and resulting in a more uniform coating inside the quartz tube.

[0010] As a further embodiment of this invention, an inert gas inlet valve is provided on the inert gas pipeline, and an organic gas valve is provided on the organic gas pipeline. The organic gas is carbonized at high temperature, providing a mobile carbon source for continuous film formation. The quality and thickness of the film are controlled by adjusting the coating temperature and time, thus completing the coating of the inner wall of the quartz tube. The high-temperature carbonization temperature of the organic gas is relatively low, thereby ensuring the quality of the film layer on the inner wall of the quartz tube. The inner wall film layer is a carbon film layer, which meets the performance requirements of the quartz tube, resulting in good film quality. The coating process is simple and easy to operate, with low requirements for equipment assembly precision. The amount of reaction reagents used in the coating is relatively small, effectively controlling the cost of the coating.

[0011] As a further scheme of the utility model, the upper portion of the reaction chamber is further provided with a thermometer pipe opening, a thermometer horizontally arranged in the thermometer pipe opening, and the thermometer is arranged in parallel between the loading trolley and the top wall of the reaction chamber; the thermometer can monitor the reaction temperature in real time, and the reaction temperature can be adjusted in time to realize high-quality coating.

[0012] A plurality of liquid discharge openings are arranged on the bottom plate of the reaction chamber, a liquid discharge branch pipe is arranged at each liquid discharge opening, the lower portion of each liquid discharge branch pipe is connected with a liquid discharge main pipe, and a liquid discharge valve is arranged at the liquid outlet end of the liquid discharge main pipe; according to the need of the reaction, the liquid discharge valve can be opened in time to discharge liquid.

[0013] As a further scheme of the utility model, the heating assembly comprises a graphene heating rod arranged between the shell and the reaction chamber, and the graphene heating rod is connected with an external power supply; the graphene heating rod has good electric conductivity and heat conductivity, can be rapidly heated, and energy can be saved.

[0014] As a further scheme of the utility model, the sealing door body comprises a sealing door frame, the sealing door frame is arranged at the entrance and exit of the trolley respectively, a door plate is hingedly arranged at one side of the sealing door frame, the sealing door frame is provided with a sealing groove, the sealing groove is provided with a sealing winding pad, and a locking member is arranged between the sealing door frame and the door plate on the opposite side; the sealing door bodies on the two sides form a stable reaction environment in the reaction chamber, and the uniformity of the coating on the inner wall of the quartz tube is ensured.

[0015] As a further scheme of the utility model, the reaction box is provided below with a supporting base, the supporting base comprises two rectangular supports arranged in parallel along the length direction of the reaction box, and the liquid discharge main pipe is arranged between the two rectangular supports.

[0016] Compared with the prior art, the utility model has the beneficial effects that: the device comprises a reaction box, the reaction box comprises a shell and a reaction chamber, a heating assembly is arranged between the shell and the reaction chamber, a movable loading trolley is arranged in the reaction chamber, a plurality of loading cavities for quartz tubes are arranged in the loading trolley, a guide rail assembly for guiding the movement of the loading trolley is arranged on the bottom wall of the reaction chamber, a trolley entrance and a trolley exit are arranged at the two ends of the reaction chamber respectively, the trolley entrance and the trolley exit are both provided with a sealing door body, a vacuumizing assembly is arranged below the reaction chamber, and an inert gas pipeline and an organic gas pipeline are further arranged above the reaction chamber; the quartz tubes are fixed in the reaction chamber in batches by the loading trolley, the quartz tubes are heated to a specified temperature by the heating assembly, the generation of the coating on the inner wall of the plurality of quartz tubes is completed synchronously, the loading trolley loads and unloads the quartz tubes in batches, energy is saved, and batch coating of the quartz tubes is realized.

[0017] The quartz tube is fixed and sealed in the vertical and circumferential direction by the mounting ring, the glass tube is stably mounted, and the inner wall of the quartz tube is communicated with the environment in the reaction chamber and the outer wall of the quartz tube is isolated from the environment in the reaction chamber, so that the coating is formed on the inner wall of the quartz tube, and the generated coating is uniform in the environment with the same heating temperature and the same contact gas environment. By changing the space of the independent loading cavity and the diameter of the mounting ring, the quartz tube with different diameters is loaded, and the quartz tube forms a uniform and high-quality inner coating. BRIEF DESCRIPTION OF DRAWINGS

[0018] Figure 1 The whole structure of the utility model is shown Figure 1 ;

[0019] Figure 2 The whole structure of the utility model is shown Figure 2 ;

[0020] Figure 3 The whole structure of the utility model is shown Figure 3 ;

[0021] Figure 4 The loading trolley structure of the utility model is shown

[0022] Figure 5 The loading box structure of the loading trolley of the utility model is shown.

[0023] In the figure: 1-reaction chamber, 101-door plate, 102-sealing door frame, 121-sealing groove, 122-sealing winding pad, 103-inert gas pipeline, 131-inert gas inlet valve, 105-outer shell, 104-organic gas pipeline, 141-organic gas valve, 106-thermometer pipe opening, 107-vacuum pumping assembly, 171-vacuum valve, 172-vacuum pipeline, 173-vacuum pump, 2-guide rail assembly, 3-supporting base, 4-loading trolley, 401-loading box, 402-mounting ring, 403-supporting cross beam, 404-universal wheel, 405-box cover, 451-through hole, 406-transverse partition plate, 407-longitudinal partition plate, 408-loading cavity, 5-drainage main pipe, 501-drainage branch pipe, 502-drainage valve, 6-graphene heating rod. DETAILED DESCRIPTION

[0024] In order to make the purpose, technical scheme and advantages of the utility model more clear and obvious, the following will be further described in detail by combining the drawings. It should be understood that the specific embodiments described herein are only used to explain the utility model, and are not used to limit the utility model.

[0025] The serial numbers of components in the present application, such as "first", "second", etc., are only used to distinguish the described objects, and do not have any sequence or technical meaning. The "connection" and "coupling" in the present application include direct and indirect connection (coupling) unless otherwise specified. In the description of the present application, it should be understood that the orientation or positional relationship indicated by the terms "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise" and the like is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the present application and simplifying the description, and does not indicate or imply that the devices or elements referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as a limitation on the present application.

[0026] In the present application, unless otherwise explicitly specified and limited, the "upper" or "lower" of the first feature to the second feature means that the first and second features are in direct contact, or the first and second features are in indirect contact through an intermediate medium. Moreover, the "over", "above" and "on" of the first feature to the second feature can be that the first feature is directly above or obliquely above the second feature, or only means that the horizontal height of the first feature is higher than that of the second feature. The "under", "below" and "under" of the first feature to the second feature means that the first feature is directly below or obliquely below the second feature, or only means that the horizontal height of the first feature is less than that of the second feature.

[0027] Embodiment 1

[0028] As shown in the accompanying drawings, Figure 1 - the accompanying drawings Figure 3 As shown in the accompanying drawings, a quartz tube preparation device with an inner coating comprises a reaction box, a support base 3 is arranged below the reaction box, the support base comprises two rectangular supports arranged in parallel along the length direction of the reaction box, and a drain main pipe is arranged between the two rectangular supports. The support height of the rectangular support is higher than the installation height of the drain main pipe, and the liquid in the drain main pipe can be smoothly drained.

[0029] The reaction box comprises an outer shell 105 and a reaction chamber 1, a heating assembly is arranged between the outer shell and the reaction chamber, and a heat preservation layer is arranged between the outer shell and the heating assembly. The heat preservation layer can heat preserve the reaction chamber on one hand, and prevent high temperature from being transmitted outward on the other hand, so as to prevent the temperature of the outer shell from being too high and causing scalding.

[0030] The heating assembly comprises a graphene heating rod 6 arranged between the outer shell and the reaction chamber. The graphene heating rod is connected with an external power supply. When heating is needed, the external power supply supplies power to the graphene heating rod, and the graphene heating rod heats and warms up;

[0031] The upper part of the reaction chamber is also provided with a thermometer port 106, and a thermometer is arranged horizontally in the thermometer port. The thermometer is arranged parallel to the loading trolley and the top wall of the reaction chamber. The thermometer monitors the temperature in the reaction chamber in real time, and the heating temperature of the graphene heating rod is controlled after feedback.

[0032] A movable loading trolley 4 is arranged in the reaction chamber. A guide rail assembly 2 for guiding the movement of the loading trolley is arranged on the bottom wall of the reaction chamber. The guide rail assembly includes two guide rails arranged in the direction from the trolley inlet to the trolley outlet of the reaction chamber. The two guide rails are arranged in parallel, and two rows of universal wheels slide along the inner sides of the corresponding guide rails. The wheels of the loading trolley are clamped between the inner sides of the guide rails and can reciprocally slide along the two guide rails. The bottom of the loading box is provided with a plurality of support beams 403 in the width direction. The two ends of each support beam are provided with universal wheels 404. The two rows of universal wheels are in sliding cooperation with the guide rail assembly.

[0033] Trolley inlets and trolley outlets are arranged at the two ends of the reaction chamber for the loading trolley 4 to enter and exit. Sloping plates are arranged at the trolley inlets and trolley outlets. The loading trolley is pushed into or out of the reaction chamber along the sloping plates.

[0034] Sealing door bodies are arranged at the trolley inlets and trolley outlets. The sealing door body includes a sealing door frame 102 arranged at the trolley inlet and the trolley outlet, respectively. A door plate 101 is hingedly arranged on one side of the sealing door frame. The sealing door frame is provided with a sealing groove 121. A sealing winding pad 122 is arranged in the sealing groove. A locking member is arranged between the hingedly arranged opposite side of the sealing door frame and the door plate.

[0035] In use, the locking member is opened, the door plate at the trolley inlet end is rotated and opened, the sloping plate is arranged, the loading trolley is pushed in along the sloping plate, and the loading trolley enters the reaction chamber 1 along the two guide rails. Until the loading trolley is tightly pressed against the door plate at the trolley outlet end, the door plate at the trolley inlet end is rotated and closed, the sealing winding pad is arranged between the door plate and the sealing door frame for sealing, and then the locking member is locked.

[0036] A plurality of loading cavities for quartz tubes are arranged in the loading trolley 4. The loading trolley 4 includes a loading box 401. The upper opening of the loading box is arranged in an open manner. A box cover 405 is arranged at the upper opening of the loading box. One edge of the box cover and the box body is hingedly arranged. The box cover and the box body are locked and sealed after locking. A sealing ring is arranged around the upper opening of the box body. The box cover and the box body are closed, and the sealing ring is sealed and locked. The loading cavities in the loading box are separated into independent loading cavities 408 by longitudinally arranged longitudinal partitions 407 and transversely arranged transverse partitions 406. The box plate of the loading box and the box cover are both arranged as perforated plates. Eight through holes 451 are arranged on the perforated plate. The through holes on the box plate of the loading box are arranged in a vertical direction. An installation ring 402 is arranged in the through hole. The installation ring 402 is in interference fit with the tube head of the quartz tube. The tube heads at both ends of the quartz tube are arranged flush with the ring surface of the installation ring.

[0037] When loading, the quartz tube is inserted into the through hole along the through hole, the mounting ring is made of flexible rubber, the lower end of the quartz tube is in flexible interference fit with the mounting ring, the upper end of the quartz tube is in flexible fit with the mounting ring, and the two ends of the quartz tube are flush with the ring surface of the mounting ring. After the quartz tube is installed with the through hole, the space in the loading box and the reaction chamber form two independent spaces. The environment in the reaction chamber is communicated with the tube in the quartz tube.

[0038] The loaded quartz tube is subjected to a treatment process, and the quartz tube is first soaked in a low-concentration acid solution for 10-30 s, wherein the low-concentration acid solution is selected from hydrofluoric acid, hydrochloric acid and aqua regia, and the concentration of the low-concentration acid solution is 3%-6%.

[0039] Then the quartz tube is taken out and washed with pure water, and the inner wall is washed with deionized water for more than twice; then the quartz tube is filled with a silane coupling agent solution, and the composition of the silane coupling agent solution is an amino silane coupling agent. The silane coupling agent solution is prepared by hydrolyzing the amino silane coupling agent with a 40% acetic acid aqueous solution.

[0040] The amino silane coupling agent is selected from γ-aminopropyl triethoxysilane, γ-methacryloyloxypropyl trimethoxysilane, N-(β-aminoethyl)-γ-aminopropyl trimethoxysilane and γ-mercaptopropyl trimethoxysilane. The coating step of the silane coupling agent on the inner wall of the quartz tube is repeated more than twice, and the interval time of each coating is 30-40 min. The amino silane coupling agent is hydrolyzed by the acid aqueous solution. After the amino silane coupling agent stays for 10-15 min, it is shaken and poured out to realize the coating of the silane coupling agent on the inner wall of the quartz tube. Then the quartz tube is placed in an oven for high-temperature drying;

[0041] The quartz tube is filled with an organic reagent solution, and the organic reagent solution is selected from anhydrous ethanol, polyethylene glycol and formaldehyde. After standing for 6-8 h, the inner wall of the quartz tube is organically obtained by pouring out. Finally, the quartz tube is loaded into the loading trolley in batches.

[0042] Example 2

[0043] The quartz tube is loaded into the reaction chamber through the loading trolley, and the reaction chamber is sealed by the sealing doors on both sides to form a sealed reaction space.

[0044] The lower part of the reaction chamber is provided with a vacuum pumping assembly 107, and the vacuum pumping assembly includes a vacuum pump 173. A vacuum pipeline 172 is arranged between the vacuum pump and the reaction chamber, and a vacuum valve 171 is arranged on the vacuum pipeline.

[0045] The vacuum valve is opened, and the vacuum pump 173 is started to pump the reaction chamber to form a vacuum chamber in the reaction chamber.

[0046] The reaction chamber is further provided with an inert gas pipeline and an organic gas pipeline. The inert gas pipeline 103 is provided with an inert gas inlet valve 131. When the inert gas inlet valve 131 is opened, the inert gas fills the reaction chamber. The inert gas is one of nitrogen and argon. The opening degree of the inert gas inlet valve is adjusted in real time, and the supply rate of the inert gas is 50-80 mL / min.

[0047] The organic gas pipeline 104 is provided with an organic gas valve 141. When the organic gas valve is opened, the organic gas is introduced into the reaction chamber. The organic gas is selected from methane, ethylene and acetylene. According to the actual volume of the reaction chamber, the time for introducing the organic gas is adjusted, and the inner wall of the quartz tube is fully contacted with the organic gas for 10-15 min.

[0048] An external power supply supplies power to the graphene heating rod, and the graphene heating rod is heated and warmed up. A thermometer monitors the temperature in the reaction chamber in real time, and the heating temperature of the graphene heating rod is controlled after feedback. Until the temperature in the reaction chamber is heated to 1000-1200℃, the quartz tube is cooled to room temperature in the reaction chamber with the equipment, and the coating is completed.

[0049] The organic reagent is dehydrated and carbonized at high temperature to form an in-situ carbon film on the inner wall of the quartz tube. The organic gas is carbonized at high temperature to provide a mobile carbon source for continuous film formation. The quality and thickness of the film are controlled by controlling the coating temperature and time, thereby completing the coating of the inner wall of the quartz tube.

[0050] After the coating is completed, the quartz tube is cooled to room temperature, the locking part is opened, the door plate at the exit end of the trolley is rotated and opened, the ramp plate is set up, the loading trolley is pushed out along the ramp plate, and the trolley is pushed out of the reaction chamber along the two guide rails. The quality of the film layer is checked, and it is qualified.

[0051] Example 3

[0052] The reaction chamber bottom plate is provided with a row of liquid discharge ports. Each liquid discharge port is provided with a liquid discharge branch pipe 501. The lower part of the liquid discharge branch pipe is connected with a liquid discharge main pipe 5. The liquid discharge main pipe is provided with a liquid discharge valve 502. The liquid produced in the whole reaction process flows into the liquid discharge main pipe through the liquid discharge branch pipe, and is discharged by opening the liquid discharge valve.

[0053] In the description of the present application, the terms "connection", "installation", "fixation", "arrangement" and the like are broadly understood, for example, "connection" is fixed connection or indirectly through intermediate components on the basis of not affecting the relationship between components and technical effects, is also integrated connection or partial connection, as the case for the person skilled in the art, the specific meaning of the above terms in the utility model or utility model can be understood according to the specific circumstances. The above is only the preferred specific embodiment of the present application, but the protection scope of the present application is not limited to this, any person skilled in the art in the technical field disclosed by the present application within the scope of the technical range, according to the technical scheme and the utility model concept of the present application, equivalent replacement or change, should be covered within the protection scope of the present application.

Claims

1. A quartz tube preparation apparatus with an inner coating, characterized by: The reaction box comprises a shell (105) and a reaction chamber (1), a heating assembly is arranged between the shell and the reaction chamber, a movable loading trolley (4) is arranged in the reaction chamber, a plurality of loading cavities of quartz tubes are arranged in the loading trolley, a guide rail assembly (2) for guiding the movement of the loading trolley is arranged on the bottom wall of the reaction chamber, a trolley inlet and a trolley outlet for the loading trolley to enter and exit are arranged at two ends of the reaction chamber, a sealing door body is arranged at the trolley inlet and the trolley outlet, a vacuum pumping assembly (107) is arranged at the lower part of the reaction chamber, and an inert gas pipeline (103) and an organic gas pipeline (104) are further arranged on the reaction chamber.

2. A quartz tube preparation apparatus with an inner coating according to claim 1, characterized in that: The loading trolley (4) comprises a loading box (401), the upper opening of the loading box is open, a box cover (405) is arranged on the upper opening of the loading box, one of the box cover and the box body is hingedly arranged, and the box cover and the box body are locked and sealed after being locked. The loading cavities in the loading box are separated into independent loading cavities (408) by longitudinal partitions (407) and transverse partitions (406) arranged vertically and horizontally. The box body plate of the loading box and the box cover are both provided as perforated plates, a plurality of through holes are arranged on the perforated plates, the through holes (451) on the box body plate are arranged in vertical correspondence, mounting rings (402) are arranged in the through holes, the mounting rings are in interference fit with the tube heads of the quartz tubes, and the tube heads at two ends of the quartz tubes are flush with the ring faces of the mounting rings. The environment in the reaction chamber is communicated with the tubes in the quartz tubes. The mounting rings (402) are made of flexible rubber.

3. A quartz tube preparation apparatus with an inner coating according to claim 2, characterized in that: A plurality of support cross beams (403) are arranged on the bottom of the loading box (401) in the width direction, universal wheels (404) are arranged at two ends of each support cross beam, and the two rows of universal wheels are in sliding fit with the guide rail assembly (2).

4. A quartz tube preparation apparatus with an inner coating according to claim 3, characterized in that: The guide rail assembly (2) comprises two guide rails arranged in the direction from the trolley inlet to the trolley outlet of the reaction chamber, the two guide rails are arranged in parallel, and the two rows of universal wheels slide along the inner sides of the corresponding guide rails.

5. A quartz tube preparation apparatus having an inner coating according to claim 1, characterized by: The vacuum pumping assembly (107) comprises a vacuum pump (173), a vacuum pipeline (172) is arranged between the vacuum pump and the reaction chamber, and a vacuum valve (171) is arranged on the vacuum pipeline.

6. A quartz tube preparation apparatus with an inner coating according to claim 1, characterized in that: An inert gas inlet valve (131) is arranged on the inert gas pipeline (103), and an organic gas valve (141) is arranged on the organic gas pipeline (104).

7. A quartz tube preparation apparatus having an inner coating according to claim 1, characterized by: A thermometer pipe opening (106) is further arranged on the upper part of the reaction chamber, a thermometer arranged horizontally is arranged in the thermometer pipe opening, and the thermometer is arranged in parallel between the loading trolley and the top wall of the reaction chamber. A plurality of liquid discharge openings are arranged on the bottom plate of the reaction chamber, a liquid discharge branch pipe (501) is arranged at each liquid discharge opening, the lower parts of the liquid discharge branch pipes are connected with a liquid discharge main pipe (5), and a liquid discharge valve (502) is arranged at the liquid outlet end of the liquid discharge main pipe.

8. A quartz tube preparation apparatus with an inner coating according to claim 1, characterized by: The heating assembly comprises a graphene heating rod (6) arranged between the shell and the reaction chamber, and the graphene heating rod is connected with an external power supply.

9. A quartz tube preparation apparatus having an inner coating according to claim 1, characterized by: The sealing door body comprises a sealing door frame (102), the sealing door frame is arranged at the trolley inlet and the trolley outlet, a door plate (101) is hingedly arranged on one side of the sealing door frame, the sealing door frame is provided with a sealing groove (121), the sealing groove is provided with a sealing winding pad (122), and a locking member is arranged between the sealing door frame and the door plate on the opposite side.

10. A quartz tube preparation apparatus with an inner coating according to claim 1, characterized by: The reaction box is provided below with a supporting base (3) comprising two rectangular supports arranged in parallel along the length direction of the reaction box, and the liquid discharge main pipe is arranged between the two rectangular supports.

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