Electrostatic adsorption type ion beam collimation assembly for implanter

Abstract

The utility model relates to the technical field of implanters, and discloses an electrostatic adsorption type ion beam collimation assembly for an implanter, which comprises a processing box, a movable cover is attached to the top end of the processing box, a fixing assembly convenient to replace is arranged in the processing box, and the fixing assembly comprises a first adsorption pad and a second adsorption pad. Built-in grooves are formed in the tops and the bottoms of the two sides of the inner wall of the treatment box. The electrostatic adsorption type ion beam collimation assembly for the implanter is provided with a first adsorption pad, a second adsorption pad, a mounting outer plate, a built-in groove, a fixed seat and a bonding layer, so that the connection part is prevented from loosening during use, the fixity of the whole structure is enhanced, the adsorption force is prevented from being reduced due to displacement, and the service life is prolonged. The problems that an electrostatic adsorption ion treatment structure cannot limit and fix an adsorption layer, when the adsorption layer displaces, adsorption force is greatly reduced, the machining effect is affected, the transmission track of an ion beam is changed, and focusing of the ion beam cannot be achieved are solved.

Description

TECHNICAL FIELD

[0001] The utility model relates to injection machine technical field, concretely is a kind of electrostatic adsorption type ion beam collimation subassembly for injection machine. BACKGROUND

[0002] The main role of injection machine is to carry out ion implantation in chip manufacturing process to change the electrical properties of materials, and ion implantation machine accelerates different kinds of elements to predetermined energy in the form of charged ions and implants into specific semiconductor materials, so as to realize the replacement or addition of atoms, and further regulate material properties.

[0003] At present, the electrostatic adsorption ion processing structure cannot limit and fix the adsorption layer, and when the adsorption layer is displaced, the adsorption force is greatly reduced, which affects the processing effect, causes the transmission trajectory of ion beam to change, and cannot realize the focusing of ion beam.

[0004] Therefore, a new type of electrostatic adsorption type ion beam collimation subassembly for injection machine is proposed to solve the above problems. UTILITY MODEL CONTENTS

[0005] The utility model aims at providing an electrostatic adsorption type ion beam collimation subassembly for injection machine to solve the problem that the electrostatic adsorption ion processing structure cannot limit and fix the adsorption layer in the background art, and when the adsorption layer is displaced, the adsorption force is greatly reduced, which affects the processing effect, causes the transmission trajectory of ion beam to change, and cannot realize the focusing of ion beam.

[0006] To achieve the above-mentioned purpose, the utility model provides the following technical scheme: an electrostatic adsorption type ion beam collimation subassembly for injection machine, comprising a processing box, an activity cover is attached to the top end of the processing box, a fixed assembly convenient for replacement is arranged inside the processing box;

[0007] The fixed assembly comprises a first adsorption pad and a second adsorption pad, built-in grooves are formed in the top and bottom of the two sides of the inner wall of the processing box, the first adsorption pad is located on the left side of the inside of the processing box, the second adsorption pad is located on the right side of the inside of the processing box, mounting outer plates are fixedly connected to the top and bottom of the outside of the first adsorption pad and the second adsorption pad, fixed seats are fixedly connected to the outside of the built-in grooves, the mounting outer plates are inserted into the built-in grooves and connected to the inside of the fixed seats in a plug-in manner.

[0008] As a further technical scheme of the utility model, the inner wall of the processing box is fixedly connected with an external plate, and the outer end of the first adsorption pad and the second adsorption pad is attached to the inner end of the external plate.

[0009] As a further technical scheme of the utility model, the front end and the rear end of the inner side of the first adsorption pad and the second adsorption pad are fixedly connected with a sticking layer, and the first adsorption pad and the second adsorption pad are connected by the sticking layer.

[0010] As a further technical scheme of the utility model, the top end and the bottom end of the processing box are sleeved and fixed with mounting collars, and the rear end of the two groups of mounting collars is fixedly connected with an upper connecting frame and a lower connecting frame on the two sides respectively.

[0011] As a further technical scheme of the utility model, the top and the bottom of the upper connecting frame and the lower connecting frame are provided with a positioning hole, and the inside of the positioning hole is provided with a mounting bolt in a threaded manner.

[0012] As a further technical scheme of the utility model, the upper connecting frame and the lower connecting frame are symmetrically distributed about the vertical center line of the mounting collar, and the inner end of the mounting collar is fixedly connected with an anti-skid inner pad.

[0013] As a further technical scheme of the utility model, the front end and the rear end of the top of the processing box and the front end and the rear end of the movable cover are fixedly connected with a positioning plate, and the front end and the rear end of the movable cover are provided with a limiting socket.

[0014] As a further technical scheme of the utility model, the top of the inner end of the limiting socket is provided with a second connecting groove in a transverse manner, the bottom of the inner end of the limiting socket is provided with a first connecting groove in a transverse manner, and the two groups of positioning plates are inserted and connected in the inside of the first connecting groove and the second connecting groove.

[0015] Compared with the prior art, the utility model has the advantages that the electrostatic adsorption type ion beam collimation assembly for the injection machine not only realizes the precise positioning function, realizes the installation and fixing function, but also realizes the convenient opening and closing function.

[0016] (1) through being provided with the first adsorption pad, the second adsorption pad, the mounting outer plate, the built-in groove, the fixed seat and the sticking layer, the first adsorption pad and the second adsorption pad are located in the processing box, the firmness between the two is strengthened through the sticking layer, the connection part is avoided from loosening during use, the mounting outer plate is inserted into the built-in groove, the mounting outer plate is limitedly installed in the inside of the fixed seat by using the insertion and connection mode, the first adsorption pad and the second adsorption pad can be fixed in all directions, the firmness of the overall structure is strengthened, and the displacement is avoided to reduce the adsorption force.

[0017] (2) Through the installation of the mounting ring, the upper connecting frame, the lower connecting frame, the positioning hole and the mounting bolt, two groups of mounting rings are respectively sleeved and fixed at the top and bottom of the processing box outside, the anti-skid performance of the contact surface is enhanced by the anti-skid inner pad, the mounting ring is prevented from sliding downward to reduce the fixing force, the processing box can be hung and fixed for use by rotating and moving a plurality of mounting bolts through the inside of the upper connecting frame and the lower connecting frame, the structure use range is expanded, the positioning hole is added to guide the movement of the mounting bolt, and the installation convenience is optimized;

[0018] (3) Through the installation of the movable cover, the positioning plate, the limiting socket, the first connecting groove and the second connecting groove, the movable cover is placed at the top of the processing box, the two groups of limiting sockets are sleeved outside the corresponding positioning plates to enhance the firmness and stability between the movable cover and the processing box, and the positioning plate is respectively inserted and fixed in the inside of the first connecting groove and the second connecting groove to improve the limiting and fixing performance. BRIEF DESCRIPTION OF DRAWINGS

[0019] Figure 1 It is a front view cross-sectional structure schematic view of the utility model;

[0020] Figure 2 It is a top view structure schematic view of the utility model's external plate;

[0021] Figure 3 It is a front view structure schematic view of the utility model's lower connecting frame;

[0022] Figure 4 It is a rear view structure schematic view of the utility model's limiting socket.

[0023] In the drawing: 1, processing box; 2, lower connecting frame; 3, mounting ring; 4, built-in groove; 5, first adsorption pad; 6, mounting bolt; 7, movable cover; 8, limiting socket; 9, positioning plate; 10, upper connecting frame; 11, second adsorption pad; 12, mounting outer plate; 13, fixed seat; 14, external plate; 15, adhesive layer; 16, anti-skid inner pad; 17, positioning hole; 18, first connecting groove; 19, second connecting groove. DETAILED DESCRIPTION

[0024] The technical solutions in the embodiments of the utility model will be clearly and completely described below with reference to the drawings in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by those skilled in the art without creative labor belong to the protection scope of the utility model.

[0025] Please refer to Figures 1-4The utility model provides an electrostatic adsorption type ion beam collimation assembly for injection machine, including processing box 1, the top of processing box 1 is attached with movable cover 7, the inside of processing box 1 is provided with fixed assembly convenient to replace,

[0026] Fixed assembly includes first adsorption pad 5 and second adsorption pad 11, and the top and bottom of both sides in the inner wall of processing box 1 are provided with built-in groove 4, first adsorption pad 5 is located at the left side in the inside of processing box 1, second adsorption pad 11 is located at the right side in the inside of processing box 1, and the top and bottom of the outside of first adsorption pad 5 and second adsorption pad 11 are fixedly connected with installation outer plate 12, the outside in the built-in groove 4 is fixedly connected with fixed seat 13, and installation outer plate 12 is inserted into built-in groove 4 and is connected in the inside of fixed seat 13,

[0027] The inner wall of processing box 1 is fixedly connected with external connection plate 14, and the outer end of first adsorption pad 5 and second adsorption pad 11 is attached with the inner end of external connection plate 14,

[0028] The front end and rear end of the inside of first adsorption pad 5 and second adsorption pad 11 are fixedly connected with adhesive layer 15, and first adsorption pad 5 and second adsorption pad 11 are connected by adhesive layer 15,

[0029] Specifically, as shown in Figure 1 And Figure 2 When using, first adsorption pad 5 and second adsorption pad 11 are placed in processing box 1, a plurality of installation outer plates 12 are inserted into corresponding built-in grooves 4 until installation outer plates 12 are limitedly installed in fixed seats 13, first adsorption pad 5 and second adsorption pad 11 are fixed at the current position, and the connecting force of the connecting portion of first adsorption pad 5 and second adsorption pad 11 is strengthened by adhesive layer 15.

[0030] The top and bottom of the outside of processing box 1 are fixedly sleeved with mounting sleeve rings 3, and the two sides of the rear end of the two mounting sleeve rings 3 are fixedly connected with upper connecting frames 10 and lower connecting frames 2 respectively,

[0031] The top and bottom of upper connecting frame 10 and lower connecting frame 2 are provided with positioning holes 17, and installation bolts 6 are screwed into the inside of positioning holes 17,

[0032] Upper connecting frame 10 and lower connecting frame 2 are symmetrically distributed about the vertical center line of mounting sleeve ring 3, and a circle of anti-skid inner pads 16 are fixedly connected to the inner end of mounting sleeve ring 3,

[0033] Specifically, as shown in Figure 1 And Figure 3 When using, the two mounting sleeve rings 3 are fixedly sleeved at the top and bottom of the outside of processing box 1 respectively, a plurality of installation bolts 6 are rotated and moved to penetrate the inside of upper connecting frame 10 and lower connecting frame 2 according to the thread direction of the inner wall of positioning hole 17, and processing box 1 can be fixedly used.

[0034] The front end and the rear end of the top of the processing box 1, the front end and the rear end of the movable cover 7 are fixedly connected with the positioning plates 9, and the front end and the rear end of the movable cover 7 are provided with the limiting sockets 8;

[0035] The top of the inner end of the limiting socket 8 is transversely provided with the second connecting groove 19, and the bottom of the inner end of the limiting socket 8 is transversely provided with the first connecting groove 18, and the two groups of positioning plates 9 are respectively inserted and connected in the interiors of the first connecting groove 18 and the second connecting groove 19;

[0036] Specifically, as shown in Figure 1 and Figure 4 , in use, the movable cover 7 is placed on the top of the processing box 1 in a close manner, the positioning plates 9 are placed in alignment, the two groups of limiting sockets 8 are sleeved outside the positioning plates 9, and then are inserted and fixed in the interiors of the first connecting groove 18 and the second connecting groove 19, so that the movable cover 7 is fixed in all directions.

[0037] Working principle: in use, the first adsorbing pad 5 and the second adsorbing pad 11 are placed in the processing box 1, a plurality of installation outer plates 12 are inserted into the corresponding built-in grooves 4, until the installation outer plates 12 are limitingly installed in the fixed seats 13, the first adsorbing pad 5 and the second adsorbing pad 11 are fixed at the current positions, the connecting force of the connecting portion of the first adsorbing pad 5 and the second adsorbing pad 11 is strengthened through the adhesive layer 15, and two groups of installation sleeve rings 3 are respectively sleeved and fixed at the top and the bottom of the outside of the processing box 1, according to the thread direction of the inner wall of the positioning hole 17, a plurality of installation bolts 6 are rotationally moved and penetrate the interiors of the upper connecting frame 10 and the lower connecting frame 2, so that the processing box 1 can be fixed and used.

[0038] For those skilled in the art, it is obvious that the utility model is not limited to the details of the above-mentioned exemplary embodiments, and the utility model can be realized in other specific forms without departing from the spirit or basic characteristics of the utility model. Therefore, from any point of view, the embodiments should be regarded as exemplary and non-limiting, the scope of the utility model is defined by the appended claims rather than the above description, and therefore all changes falling within the meaning and scope of the equivalent elements of the claims are intended to be included in the utility model. Any reference signs in the claims should not be regarded as limiting the involved claims.

Claims

1. An electrostatically clamped ion beam collimating assembly for an implanter comprising a process chamber (1), characterized in that: The top end of the processing box (1) is provided with a movable cover (7), and the inside of the processing box (1) is provided with a fixed assembly facilitating replacement; The fixed assembly comprises a first adsorption pad (5) and a second adsorption pad (11), the top and bottom of the two sides of the inner wall of the processing box (1) are provided with built-in grooves (4), the first adsorption pad (5) is located on the left side of the inside of the processing box (1), the second adsorption pad (11) is located on the right side of the inside of the processing box (1), the top and bottom of the outer side of the first adsorption pad (5) and the second adsorption pad (11) are fixedly connected with mounting outer plates (12), the outer side of the inside of the built-in groove (4) is fixedly connected with a fixing seat (13), the mounting outer plate (12) is inserted into the built-in groove (4) and is connected in the inside of the fixing seat (13).

2. The electrostatic chucking type ion beam collimating assembly for an ion implanter according to claim 1, wherein: The inner wall of the processing box (1) is fixedly connected with an external plate (14), and the outer end of the first adsorption pad (5) and the second adsorption pad (11) is fitted with the inner end of the external plate (14).

3. The electrostatic chucking type ion beam collimating assembly for an ion implanter according to claim 1, wherein: The front end and the rear end of the inner side of the first adsorption pad (5) and the second adsorption pad (11) are fixedly connected with a sticking layer (15), and the first adsorption pad (5) and the second adsorption pad (11) are connected by the sticking layer (15).

4. The electrostatic chucking type ion beam collimating assembly for an ion implanter according to claim 1, wherein: The top end and the bottom end of the outside of the processing box (1) are fixedly sleeved with mounting sleeve rings (3), and the two sides of the rear end of the two groups of mounting sleeve rings (3) are fixedly connected with upper connecting frames (10) and lower connecting frames (2).

5. The electrostatic chucking type ion beam collimating assembly for an implanter according to claim 4, wherein: The top and bottom of the upper connecting frame (10) and the lower connecting frame (2) are provided with a positioning hole (17), and the inside of the positioning hole (17) is provided with a mounting bolt (6) in screw thread.

6. The electrostatic chucking type ion beam collimating assembly for an implanter according to claim 4, wherein: The upper connecting frame (10) and the lower connecting frame (2) are symmetrically distributed about the vertical center line of the mounting sleeve ring (3), and the inner end of the mounting sleeve ring (3) is fixedly connected with a circle of anti-skid inner pads (16).

7. The electrostatic chucking type ion beam collimating assembly for an ion implanter according to claim 1, wherein: The front end and the rear end of the top of the processing box (1) and the front end and the rear end of the movable cover (7) are fixedly connected with positioning plates (9), and the front end and the rear end of the movable cover (7) are provided with limiting sockets (8).

8. The electrostatic chucking type ion beam collimating assembly for an implanter according to claim 7, wherein: The top of the inner end of the limiting socket (8) is provided with a second connecting groove (19) in transverse direction, the bottom of the inner end of the limiting socket (8) is provided with a first connecting groove (18) in transverse direction, and the two groups of positioning plates (9) are respectively inserted and connected in the inside of the first connecting groove (18) and the second connecting groove (19).

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