Door opening and closing anti-pinch protection structure of wafer loading platform

Abstract

The utility model relates to the technical field of wafer loading equipment, in particular to a wafer loading platform door opening and closing anti-pinch protection structure which comprises a mounting frame, a lifting driving unit, a lifting frame, a loading platform, a front-back moving unit and an opening and closing unit. The opening and closing unit and the loading platform are located at openings in the two ends of the loading space respectively, the loading space is provided with an anti-pinch protection area, and the mounting frame is provided with an anti-pinch detection assembly used for detecting whether foreign matter stretches into the anti-pinch protection area or not. According to the utility model, the wafer box can be smoothly installed or uninstalled, wafers in the wafer box can be conveniently transferred or detected, personnel are prevented from entering the wafer box by mistake, the personnel are prevented from being extruded, shutdown caused by clamping of the personnel is avoided, and the production efficiency is improved.

Description

TECHNICAL FIELD

[0001] The utility model relates to wafer loading equipment technical field especially is a kind of round crystal loading platform switch door anti-pinch protection structure. BACKGROUND

[0002] Wafer box is used to store wafer in wafer transfer process, and maintain its closed state. Wafer box usually includes side opening box body, box cover that can close cover side opening and bottom plate arranged at the bottom of box body, and box cover can completely separate from box body. Currently commonly used wafer box is front opening unified pods. Usually, loading opening unit for wafer box is arranged in front of wafer process equipment, and cooperates with wafer box transmission mechanical arm, to realize wafer taking and placing.

[0003] In the loading and unloading process of wafer box, loading opening and closing unit and wafer box transmission mechanical arm are frequently active at wafer box opening end. However, as it is inconvenient to prevent personnel from entering wafer box interior, when personnel stretch into wafer box, there is the risk of being squeezed by loading opening and closing unit and / or wafer box transmission mechanical arm, wafer loading can be stopped due to personnel being pinched, affecting production efficiency. UTILITY MODEL CONTENTS

[0004] The utility model provides a kind of round crystal loading platform switch door anti-pinch protection structure for the deficiency of prior art, meet the smooth installation or unloading of wafer box, it is convenient to transfer or detect wafer in wafer box interior, prevent personnel from entering wafer box interior, avoid being squeezed by personnel, avoid due to personnel being pinched and stop, improve production efficiency.

[0005] To solve the above technical problems, the utility model adopts the following technical solutions:

[0006] The utility model provides a kind of round crystal loading platform switch door anti-pinch protection structure, including mounting bracket, lift drive unit, lifting frame and loading platform installed in the same side of mounting bracket, and front and rear moving unit installed in lifting frame, the lifting frame is driven connection with lift drive unit, the loading platform is used to install wafer box, the front and rear moving unit is driven connection with the opening and closing unit for clamping the box cover on wafer box, the opening and closing unit is opposite to the opening side of wafer box on loading platform, the mounting bracket is provided with loading space, the opening and closing unit and loading platform are respectively located at the both ends of loading space opening, the loading space is provided with anti-pinch protection area, the mounting bracket is installed with the anti-pinch detection component for detecting whether foreign matter enters anti-pinch protection area;

[0007] When the box cover on the wafer box needs to be taken away, the wafer box is installed on the loading platform, the lifting driving unit drives the lifting frame to move upward to the required position, the front and rear moving unit drives the opening and closing unit to move to the required position after passing through the loading space, the opening and closing unit clamps the box cover on the wafer box, and the front and rear moving unit drives the opening and closing unit away from the wafer box.

[0008] When the anti-pinch detection assembly detects that a foreign object extends into the anti-pinch protection area, the lifting driving unit and the front and rear moving unit stop.

[0009] The loading space includes a loading port and an anti-pinch groove provided on the inner side wall of the loading port, one end of the loading port corresponds to the front end of the opening and closing unit, the anti-pinch groove communicates the top end and the left and right sides of the loading port, and the anti-pinch protection area is provided in the anti-pinch groove.

[0010] The anti-pinch detection assembly is installed on the inner side wall of the anti-pinch groove, the anti-pinch detection assembly is provided at the top end and the left and right sides of the loading port, and the anti-pinch detection assembly adopts a distance sensor.

[0011] The opening and closing unit includes an opening and closing plate and a clamping component, the opening and closing plate is drivingly connected with the front and rear moving unit, the clamping component is installed on the opening and closing plate, the clamping component is provided opposite to the opening side of the wafer box, the front and rear moving unit drives the opening and closing plate to move forward and backward, and the opening and closing plate uses the clamping component to clamp the box cover when the opening and closing plate approaches the wafer box on the loading platform.

[0012] The clamping component includes a suction cup and a clamping piece, the suction cup is installed on one side of the opening and closing plate close to the loading platform, and the clamping piece is installed on the opening and closing plate.

[0013] The clamping piece is rotationally connected to the opening and closing plate, the clamping piece is connected with a moving frame, and the opening and closing plate is provided with a driving cylinder drivingly connected with the moving frame.

[0014] When the box cover needs to be clamped, the driving cylinder drives the moving frame to move and drives the clamping piece to rotate, so that one end of the clamping piece is opposite to the mounting hole on the box cover.

[0015] The moving frame is provided with a guide groove, the clamping piece includes a clamping positioning block rotationally connected to the opening and closing plate and a swing rod connected with the clamping positioning block, the swing rod is rotationally connected to the opening and closing plate, and one end of the swing rod is matched with the guide groove.

[0016] When the box cover needs to be clamped, the driving cylinder drives the moving frame to move, drives one end of the swing rod to swing in the guide groove, and drives the clamping positioning block to rotate to the required angle.

[0017] The output end of the front-back moving unit is connected with a moving auxiliary frame, the moving auxiliary frame is arranged in the movable opening, the moving auxiliary frame is connected with the opening and closing unit, and the front-back moving unit and the lifting frame are located on the same side of the mounting frame.

[0018] The utility model discloses beneficial effects:

[0019] Satisfy the smooth installation or unloading of wafer box, facilitate the transfer or detection wafer box internal wafer, prevent personnel from entering wafer box interior, avoid personnel from being extruded by opening and closing unit and / or mechanical hand, avoid the shutdown due to personnel being clamped, improve production efficiency, arrange lifting drive unit, lifting frame and loading platform on the same side of mounting frame, effectively utilize the same side space of mounting frame, reduce the transverse space occupation of whole structure, facilitate the increase of storage station, improve wafer transfer efficiency. BRIEF DESCRIPTION OF DRAWINGS

[0020] Figure 1 It is the perspective view of the wafer loading platform switch door anti-pinch protection structure.

[0021] Figure 2 It is another perspective view of the wafer loading platform switch door anti-pinch protection structure.

[0022] Figure 3 It is the perspective view of wafer box and box cover separation.

[0023] Figure 4 It is the perspective view of the partial structure of opening and closing unit and front-back moving unit.

[0024] Figure 5 It is the perspective view of opening and closing unit and mounting frame.

[0025] Figure 6 It is the partial structure schematic diagram of mounting frame.

[0026] Figure 7 It is the perspective structure schematic diagram of opening and closing unit.

[0027] Figure 8 It is the connection structure schematic diagram of opening and closing unit and front-back moving unit.

[0028] Figure 9 It is the perspective structure schematic diagram of moving frame and clamping piece.

[0029] 01, wafer box; 02, box cover;

[0030] 1, mounting frame; 101, movable opening;

[0031] 100, loading space;

[0032] 110, loading opening; 120, anti-pinch groove;

[0033] 2, lifting drive unit; 3, lifting frame; 4, loading platform;

[0034] 5, front and rear moving unit; 51, moving auxiliary frame;

[0035] 6, opening and closing unit;

[0036] 61, opening and closing plate;

[0037] 62, clamping component;

[0038] 621, suction cup; 622, clamping piece;

[0039] 6221, clamping positioning block; 6222, swing rod;

[0040] 7, anti-pinch detection assembly;

[0041] 8, moving frame; 81, guide groove;

[0042] 9, drive cylinder. DETAILED DESCRIPTION

[0043] In order to facilitate the understanding of those skilled in the art, the present application will be further described below in conjunction with the embodiments and the drawings. The specific embodiments of the present application will be described below, and it should be pointed out that, in the specific description of these embodiments, in order to be brief and concise, the present specification cannot describe all the features of the actual embodiments in detail.

[0044] Reference Figures 1 to 9 The utility model provides a wafer loading platform switch door anti-pinch protection structure, including mounting frame 1, install in the same side of mounting frame 1 lifting drive unit 2, lifting frame 3 and loading platform 4, and install in the front and rear moving unit 5 of lifting frame 3, lifting frame 3 is driven to be connected with lifting drive unit 2, the loading platform 4 is used to install wafer box 01, the front and rear moving unit 5 is driven to be connected with the opening and closing unit 6 for clamping wafer box 01 on the box cover 02, the opening and closing unit 6 with the opening side of wafer box 01 on loading platform 4 is opposite, the mounting frame 1 is provided with loading space 100, the opening and closing unit 6 and loading platform 4 are located respectively at the both ends of loading space 100 opening, loading space 100 is provided with anti-pinch protection area, the mounting frame 1 is installed with the anti-pinch detection assembly 7 for detecting whether the anti-pinch protection area has foreign matter to extend.

[0045] Reference Figure 1 , 2, 3, in actual application, the wafer box 01 is installed on the loading platform 4, the lifting driving unit 2 adopts a lead screw motor module, the lifting driving unit 2 drives the lifting frame 3 to move upward to the required position, the front and rear moving unit 5 drives the opening and closing unit 6 to move to the required position after passing through the loading space 100, the opening and closing unit 6 clamps the box cover 02 on the wafer box 01, the front and rear moving unit 5 drives the opening and closing unit 6 away from the wafer box 01, the box cover 02 is taken away to release the detection space of the wafer, a mechanical hand can smoothly pass through the loading space 100 to clamp the wafer, after the wafer is completely clamped, the opening and closing unit 6 is driven by the lifting driving unit 2 and the front and rear moving unit 5 to approach the wafer box 01, so that the box cover 02 covers the wafer box 01, thereby realizing the overall detection of the wafer, and the wafer box 01 is unloaded from the loading platform 4 to complete the wafer loading work; the wafer box 01 is smoothly installed or unloaded, and the wafer in the wafer box 01 is conveniently transferred or detected; as shown in Figure 6 , specifically, when the anti-pinch detection assembly 7 detects that a foreign object extends into the anti-pinch protection area, the lifting driving unit 2 and the front and rear moving unit 5 stop, thereby preventing personnel from mistakenly entering the inside of the wafer box 01, avoiding the personnel being squeezed by the opening and closing unit 6 and / or the mechanical hand, avoiding the machine being stopped due to the personnel being pinched, and improving the production efficiency; by arranging the lifting driving unit 2, the lifting frame 3 and the loading platform 4 on the same side of the mounting frame 1, the space on the same side of the mounting frame 1 is effectively utilized, the horizontal space occupation of the overall structure is reduced, the storage station is conveniently increased, and the wafer transfer efficiency is improved.

[0046] As shown in Figure 6 , in the embodiment, the loading space 100 includes a loading port 110 and an anti-pinch groove 120 arranged on the inner side wall of the loading port 110, one end of the loading port 110 corresponds to the front end of the opening and closing unit 6, the anti-pinch groove 120 communicates the top end and the left and right sides of the loading port 110, and the anti-pinch protection area is arranged in the anti-pinch groove 120; by arranging the loading port 110, the normal clamping of the wafer box 01 by the opening and closing unit 6 is met, and the mechanical hand can smoothly pass through to smoothly grasp the wafer in the wafer box 01; by arranging the anti-pinch protection area, when personnel extend into the anti-pinch protection area, the anti-pinch detection assembly 7 is triggered to stop the lifting driving unit 2 and the front and rear moving unit 5, thereby preventing the lifting driving unit 2 and the front and rear moving unit 5 from causing secondary injury to the personnel, the personnel can conveniently leave the anti-pinch protection area, and the wafer loading efficiency is ensured.

[0047] As shown in Figure 2 , 6As shown, in the embodiment, the anti-pinch detection assembly 7 is installed on the inner side wall of the anti-pinch groove 120, and the anti-pinch detection assembly 7 is arranged at the top and both sides of the loading port 110. The anti-pinch detection assembly 7 adopts a distance sensor. In actual application, the anti-pinch detection assembly 7 adopts an infrared distance sensor, and the detection range of the anti-pinch detection assembly 7 covers the anti-pinch protection area. In actual application, a person usually enters the loading space 100 along the surrounding space of the loading space 100. In fact, the contact space of the person corresponds to the anti-pinch protection area. By arranging the anti-pinch detection assembly 7 in the anti-pinch protection area, it is convenient to quickly detect whether the person enters the anti-pinch protection area. When the person is in the anti-pinch protection area, the anti-pinch detection assembly 7 is triggered, which is beneficial to timely protect the person and ensure the normal operation of wafer loading.

[0048] Reference Figure 7 , 8 As shown, in the embodiment, the opening and closing unit 6 includes an opening and closing plate 61 and a clamping component 62. The opening and closing plate 61 is drivingly connected with the front and rear moving unit 5. The clamping component 62 is installed on the opening and closing plate 61 and is arranged opposite to the opening side of the wafer box 01. When it is necessary to clamp the box cover 02, the lifting driving unit 2 and the front and rear moving unit 5 drive the opening and closing unit 6 to move to the required position. The front and rear moving unit 5 drives the opening and closing plate 61 to move forward and backward. When the opening and closing plate 61 approaches the wafer box 01 on the loading platform 4, the clamping component 62 clamps the box cover 02, which facilitates smooth clamping of the box cover 02.

[0049] Reference Figure 7 , 8 As shown, in the embodiment, the clamping component 62 includes a suction cup 621 and a clamping piece 622. The suction cup 621 is installed on one side of the opening and closing plate 61 close to the loading platform 4. The clamping piece 622 is installed on the opening and closing plate 61 and one end of the clamping piece 622 corresponds to the mounting hole on the box cover 02. In actual application, the opening and closing plate 61 approaches the wafer box 01 on the loading platform 4. The front and rear moving unit 5 adopts an oil cylinder or an electric cylinder. The front and rear moving unit 5 drives the clamping piece 622 to adapt to the mounting hole on the box cover 02. The suction cup 621 adsorbs the box cover 02 through negative pressure, thereby effectively positioning the wafer box 01 and facilitating rapid movement of the opening and closing unit 6.

[0050] Reference Figure 8 , 9As shown, in this embodiment, the clamping member 622 is rotatably connected to the opening and closing plate 61, and the clamping member 622 is connected to the moving frame 8. The opening and closing plate 61 is equipped with a driving cylinder 9 that is driven and connected to the moving frame 8. In actual application, when it is necessary to clamp the cover 02, the driving cylinder 9 drives the moving frame 8 to move, thereby driving the clamping member 622 to rotate, so that one end of the clamping member 622 is aligned with the mounting hole on the cover 02, so as to smoothly position the cover 02. The front and rear moving unit 5 can move the cover 02 away from the wafer box 01, which facilitates the quick clamping of the cover 02.

[0051] refer to Figure 7 , 9 As shown, in this embodiment, the movable frame 8 is provided with a guide groove 81, and the clamping component 622 includes a clamping positioning block 6221 rotatably connected to the opening and closing plate 61 and a swing rod 6222 connected to the clamping positioning block 6221. The swing rod 6222 is rotatably connected to the opening and closing plate 61, and one end of the swing rod 6222 cooperates with the guide groove 81. In actual application, when it is necessary to clamp the cover 02, the driving cylinder 9 drives the movable frame 8 to move, causing one end of the swing rod 6222 to swing in the guide groove 81, thereby causing the clamping positioning block 6221 to rotate to the required angle. The front and rear moving unit 5 drives the clamping positioning block 6221 to cooperate and insert into the mounting hole of the wafer box 01. The cover 02 is adsorbed by the suction cup 621. The front and rear moving unit 5 drives the cover 02 away from the wafer box 01, thereby smoothly removing the cover 02 from the wafer box 01, making it easier to free up operating space for the wafer.

[0052] refer to Figure 4 , 5 As shown, in this embodiment, the mounting frame 1 has a longitudinally arranged movable opening 101. The output end of the front-to-back moving unit 5 is connected to a moving auxiliary frame 51, which passes through the movable opening 101. The moving auxiliary frame 51 is connected to the opening and closing unit 6. The front-to-back moving unit 5 and the lifting frame 3 are located on the same side of the mounting frame 1. In actual application, the front-to-back moving unit 5 drives the moving auxiliary frame 51 to move within the movable opening 101, thereby driving the opening and closing unit 6 to move synchronously, smoothly moving the opening and closing unit 6 closer to or away from the wafer cassette 01. (Reference) Figure 1 , 4 As shown, by placing the front and rear moving unit 5 and the lifting frame 3 on the same side of the mounting frame 1, the space on the same side of the mounting frame 1 is effectively utilized, reducing the lateral space occupation of the overall structure. The structure is compact and saves space.

[0053] The above is only the preferred embodiment of the present application, and does not limit the present application in any form. Although the present application is disclosed as above in the preferred embodiment, it is not intended to limit the present application. Any skilled person in the art can make some changes or modifications to the disclosed technical content without departing from the technical solution of the present application, and any equivalent embodiment with equivalent changes is equivalent to the above embodiment. Any simple modification, equivalent change and modification of the above embodiment according to the present application technical solution are within the scope of the present application technical solution.

Claims

1. A wafer loading platform switch door anti-pinch protection structure, characterized in that, The utility model provides a kind of wafer box loading and unloading device, including mounting frame (1), lift drive unit (2) installed in the same side of mounting frame (1), lifting frame (3) and loading platform (4), and front and back moving unit (5) installed in lifting frame (3), the lifting frame (3) is driven connection with lift drive unit (2), the loading platform (4) is used to install wafer box (01), the front and back moving unit (5) is driven connection with the opening and closing unit (6) for clamping wafer box (01) on box cover (02), the opening and closing unit (6) is opposite with the opening side of wafer box (01) on loading platform (4), the mounting frame (1) is provided with loading space (100), the opening and closing unit (6) and loading platform (4) are respectively located in the both ends opening of loading space (100), the loading space (100) is provided with anti-pinch protection area, the mounting frame (1) is installed with the anti-pinch detection assembly (7) for detecting whether foreign matter extends into anti-pinch protection area; When wafer box (01) is installed on loading platform (4), lift drive unit (2) drives lifting frame (3) to move upwards to the required position, front and back moving unit (5) drives opening and closing unit (6) to move to the required position after passing through loading space (100), opening and closing unit (6) clamps box cover (02) on wafer box (01), and front and back moving unit (5) drives opening and closing unit (6) to move away from wafer box (01); When anti-pinch detection assembly (7) detects that foreign matter extends into anti-pinch protection area, lift drive unit (2) and front and back moving unit (5) stop.

2. The round crystal loading platform switch door anti-pinch protection structure according to claim 1, characterized in that, The loading space (100) includes loading port (110) and anti-pinch groove (120) provided on the inner side wall of the loading port (110), one end of the loading port (110) corresponds to the front end of the opening and closing unit (6), the anti-pinch groove (120) communicates the top end and the left and right sides of the loading port (110), and the anti-pinch protection area is provided in the anti-pinch groove (120).

3. The round crystal loading platform switch door anti-pinch protection structure according to claim 2, characterized in that, The anti-pinch detection assembly (7) is installed on the inner side wall of the anti-pinch groove (120), the anti-pinch protection area is provided with anti-pinch detection assembly (7) at the top end and the left and right sides of the loading port (110), and the anti-pinch detection assembly (7) adopts a distance sensor.

4. The round crystal loading platform switch door anti-pinch protection structure according to claim 1, characterized in that, The opening and closing unit (6) includes an opening and closing plate (61) and a clamping component (62), the opening and closing plate (61) is drivenly connected with the front and back moving unit (5), the clamping component (62) is installed on the opening and closing plate (61), the clamping component (62) is arranged opposite to the opening side of the wafer box (01), the front and back moving unit (5) drives the opening and closing plate (61) to move forward and backward, and the opening and closing plate (61) is close to the wafer box (01) on the loading platform (4) to clamp the box cover (02) by the clamping component (62).

5. The round crystal loading platform switch door anti-pinch protection structure according to claim 4, characterized in that, The clamping component (62) comprises a suction cup (621) and a clamping piece (622), the suction cup (621) is installed on the opening and closing plate (61) near the loading platform (4), and the clamping piece (622) is installed on the opening and closing plate (61), one end of the clamping piece (622) corresponds to the mounting hole on the box cover (02).

6. The round crystal loading platform switch door anti-pinch protection structure according to claim 5, characterized in that, The clamping piece (622) is rotationally connected to the opening and closing plate (61), the clamping piece (622) is connected with a moving frame (8), and the opening and closing plate (61) is provided with a driving cylinder (9) which is drivingly connected with the moving frame (8). When the box cover (02) needs to be clamped, the driving cylinder (9) drives the moving frame (8) to move, so as to drive the clamping piece (622) to rotate, so that one end of the clamping piece (622) is opposite to the mounting hole on the box cover (02).

7. The round crystal loading platform switch door anti-pinch protection structure according to claim 6, characterized in that, The moving frame (8) is provided with a guide groove (81), the clamping piece (622) comprises a clamping positioning block (6221) which is rotationally connected to the opening and closing plate (61) and a swing rod (6222) which is connected with the clamping positioning block (6221), one end of the swing rod (6222) is rotationally connected to the opening and closing plate (61), and the swing rod (6222) is matched with the guide groove (81). When the box cover (02) needs to be clamped, the driving cylinder (9) drives the moving frame (8) to move, so that one end of the swing rod (6222) swings in the guide groove (81), and the clamping positioning block (6221) is rotated to a required angle.

8. The round crystal loading platform switch door anti-pinch protection structure according to claim 1, characterized in that, The mounting frame (1) is longitudinally provided with a movable opening (101), the output end of the front and rear moving unit (5) is connected with a moving auxiliary frame (51), the moving auxiliary frame (51) is arranged in the movable opening (101), the moving auxiliary frame (51) is connected with the opening and closing unit (6), and the front and rear moving unit (5) and the lifting frame (3) are located on the same side of the mounting frame (1).

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