Automatic rotating chip ultrasonic cleaning mechanism of chip unsealing machine

Abstract

The utility model discloses an automatic rotating chip ultrasonic cleaning mechanism of a chip unsealing machine, which relates to the technical field of semiconductor manufacturing equipment, and comprises an ultrasonic cleaning box, a pneumatic clamping jaw, a rotating shaft, a rotating shaft, a rotating shaft and a rotating shaft, the servo motor is arranged on one side of the pneumatic clamping jaw and used for driving the pneumatic clamping jaw to rotate; the water pump is connected to the outer surface of the ultrasonic cleaning box and used for pumping water in the ultrasonic cleaning box, the water outlet end of the water pump is connected with a spray head, and the water suction end of the water pump is connected with a filter cartridge; the chip is clamped by the pneumatic clamping jaw, the stability of the chip in the cleaning process is ensured, dirt on the surface of the chip can be effectively peeled off through impact force generated by cavitation bubbles in ultrasonic cleaning, the pneumatic clamping jaw is driven by the servo motor to rotate, all the surfaces of the chip can make full contact with the ultrasonic cleaning environment, all-directional and dead-corner-free cleaning is achieved, and the chip cleaning efficiency is improved. The cleaning effect is improved.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor manufacturing equipment technology, specifically to an automatic rotating chip ultrasonic cleaning mechanism for a chip unpacking machine. Background Technology

[0002] In semiconductor packaging and testing, chip unpacking is a crucial step in obtaining internal chip information. However, the unpacked chip surface often contains residual packaging material, dust, and other contaminants, which can severely impact subsequent testing and analysis. Traditional manual cleaning methods are not only inefficient but also struggle to guarantee consistent and thorough cleaning. Ultrasonic cleaning, due to its high efficiency and ability to reach all areas, has been widely adopted in the semiconductor cleaning field. However, how to combine ultrasonic cleaning with the automated operation of chip unpacking machines to achieve automatic rotational cleaning of chips remains a pressing problem to be solved. Utility Model Content

[0003] The purpose of this invention is to provide an automatic rotating chip ultrasonic cleaning mechanism for chip unpacking machines, so as to solve the problems mentioned in the background art.

[0004] To solve the above-mentioned technical problems, the present invention provides an automatic rotating chip ultrasonic cleaning mechanism for a chip unpacking machine, comprising an ultrasonic cleaning chamber, and including...

[0005] Pneumatic grippers are rotatably mounted inside the ultrasonic cleaning chamber to hold the chip and make it rotate.

[0006] A servo motor is located on one side of the pneumatic gripper and is used to drive the pneumatic gripper to rotate.

[0007] A water pump is connected to the outer surface of the ultrasonic cleaning box and is used to draw water from inside the ultrasonic cleaning box. The water outlet of the water pump is connected to a nozzle, and the water suction end of the water pump is connected to a filter cylinder.

[0008] Furthermore, the filter cylinder is provided with filter screens and filter plate bodies at equal intervals along the axial direction.

[0009] Furthermore, the water inlet end of the filter cartridge is connected to a connecting pipe, and the other end of the connecting pipe extends into the ultrasonic cleaning chamber.

[0010] Furthermore, a mounting base is connected to one side of the ultrasonic cleaning box, and a first telescopic cylinder is connected to the mounting base. The first telescopic cylinder is used to control the pneumatic gripper to slide along the length direction of the ultrasonic cleaning box.

[0011] Furthermore, the telescopic end of the first telescopic cylinder is connected to a second telescopic cylinder, and the telescopic end of the second telescopic cylinder is connected to a mounting bracket. The pneumatic gripper and the servo motor are respectively connected to both sides of the mounting bracket. The second telescopic cylinder is used to control the pneumatic gripper to slide along the height direction of the ultrasonic cleaning box.

[0012] Furthermore, a fixed frame is connected to one side of the ultrasonic cleaning box, and a microcomputer controller is connected to the fixed frame. The microcomputer controller is used to control the pneumatic gripper, servo motor, water pump, first telescopic cylinder and second telescopic cylinder.

[0013] Furthermore, both the servo motor and the pneumatic gripper are fitted with waterproof sleeves.

[0014] Furthermore, the water outlet of the water pump is connected to the nozzle via a corrugated pipe, and a snap-fit ​​block is connected to the ultrasonic cleaning box to limit the nozzle position.

[0015] Compared with the prior art, the beneficial effects of this utility model are:

[0016] 1. Pneumatic grippers hold the chip, ensuring its stability during the cleaning process. Ultrasonic cleaning utilizes the impact force generated by cavitation bubbles to effectively remove dirt from the chip surface. A servo motor drives the pneumatic grippers to rotate, ensuring that all surfaces of the chip can fully contact the ultrasonic cleaning environment, achieving all-round, no-dead-angle cleaning and improving the cleaning effect.

[0017] 2. The use of a water pump to circulate and transport the cleaning solution effectively reduces the consumption of the cleaning solution. By filtering and recycling the wastewater, the frequent replacement of large amounts of cleaning solution is avoided, saving costs. At the same time, the cleaning solution is continuously filtered through the filter tank to ensure the subsequent cleaning effect. Attached Figure Description

[0018] Figure 1 This is a schematic diagram of the overall structure of this utility model;

[0019] Figure 2 This is a top view of the present invention;

[0020] Figure 3 This is a side view of the present invention;

[0021] Figure 4 This is a schematic diagram of the internal structure of the filter cylinder in this utility model;

[0022] Figure 5 This utility model Figure 1 Enlarged view of the structure at point A in the middle.

[0023] In the diagram: 1. Ultrasonic cleaning box; 2. Pneumatic gripper; 3. Servo motor; 4. Water pump; 5. Nozzle; 6. Filter cartridge; 7. Filter screen; 8. Filter plate body; 9. Mounting base; 10. First telescopic cylinder; 11. Second telescopic cylinder; 12. Microcomputer controller; 13. Connecting pipe. Detailed Implementation

[0024] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0025] Please see Figure 1-5 This utility model provides a technical solution: an automatic rotating chip ultrasonic cleaning mechanism for a chip unpacking machine, including an ultrasonic cleaning chamber 1, comprising...

[0026] The pneumatic gripper 2 is rotatably mounted inside the ultrasonic cleaning chamber 1 and is used to hold the chip and make it rotate.

[0027] Servo motor 3 is located on one side of pneumatic gripper 2 and is used to drive pneumatic gripper 2 to rotate;

[0028] Water pump 4 is connected to the outer surface of ultrasonic cleaning box 1 and is used to draw water from inside ultrasonic cleaning box 1. The water outlet end of water pump 4 is connected to nozzle 5 and the water suction end of water pump 4 is connected to filter cylinder 6.

[0029] It should be noted that the ultrasonic cleaning box 1 has a built-in ultrasonic generator to generate high-frequency vibration waves, which are transmitted to the chip surface through a liquid medium such as deionized water to remove dirt. The ultrasonic cleaning box 1 is made of stainless steel, which is highly corrosion resistant and easy to clean.

[0030] In practice, during the chip cleaning process, the pneumatic gripper 2 is used to hold the chip, and then the held chip is introduced into the ultrasonic cleaning box 1. At the same time, the ultrasonic generator is turned on to clean the chip. In addition, the servo motor 3 can be started to drive the pneumatic gripper 2 to rotate. In this process, the ultrasonic cleaning and chip rotation are combined to achieve all-round, no dead angle cleaning of the chip surface and effectively remove various contaminants.

[0031] During the cleaning process, the water pump 4 can draw the wastewater generated in the ultrasonic cleaning tank 1 into the filter cartridge 6. After being filtered by the filter cartridge 6, the wastewater flows back into the ultrasonic cleaning tank 1 through the nozzle 5. The use of a circulating filtration system reduces the consumption and discharge of cleaning fluid, which meets the requirements of green manufacturing.

[0032] See Figure 1 , Figure 2 and Figure 4 The filter cylinder 6 is provided with filter screens 7 and filter plate bodies 8 at equal intervals along the axial direction.

[0033] It should be noted that the filter plate body 8 can be made of activated carbon, fiber, ceramic or microporous membrane to filter fine impurities. In actual production, users can choose according to their needs, which will not be explained in detail here.

[0034] In practice, the filter screen 7 can filter out larger impurities in the cleaning solution, while the filter plate body 8 can filter out fine impurities. The two work together to purify the impurities generated during cleaning and ensure the cleanliness of the circulating water.

[0035] See Figure 3 The inlet end of the filter cartridge 6 is connected to a connecting pipe 13, and the other end of the connecting pipe 13 extends into the ultrasonic cleaning box 1.

[0036] In practice, the connecting pipe 13 is used to connect the filter cylinder 6 and the ultrasonic cleaning box 1, so that sewage can be easily introduced into the filter cylinder 6 for filtration.

[0037] See Figure 1 , Figure 2 and Figure 3 An ultrasonic cleaning box 1 is connected to a mounting base 9 on one side, and a first telescopic cylinder 10 is connected to the mounting base 9. The first telescopic cylinder 10 is used to control the pneumatic gripper 2 to slide along the length of the ultrasonic cleaning box 1.

[0038] In specific implementation, the first telescopic cylinder 10 is set to facilitate the adjustment of the cleaning range and adapt to cleaning chips of different sizes. In the actual cleaning process, as a preferred embodiment, the first telescopic cylinder 10 can also be activated periodically to make the chip rotate back and forth for cleaning, thereby further improving the cleaning effect.

[0039] See Figure 1 , Figure 2 and Figure 3 The first telescopic cylinder 10 is connected to the telescopic end of the second telescopic cylinder 11, and the telescopic end of the second telescopic cylinder 11 is connected to the mounting bracket. The pneumatic gripper 2 and the servo motor 3 are respectively connected to the two sides of the mounting bracket. The second telescopic cylinder 11 is used to control the pneumatic gripper 2 to slide along the height direction of the ultrasonic cleaning box 1.

[0040] In practice, this setting allows for easy adjustment of the cleaning depth of the pneumatic gripper 2, making it easy to adapt to different chip models.

[0041] refer to Figure 2 and Figure 3 The ultrasonic cleaning box 1 is connected to a fixed frame on one side, and a microcomputer controller 12 is connected to the fixed frame. The microcomputer controller 12 is used to control the pneumatic gripper 2, servo motor 3, water pump 4, first telescopic cylinder 10 and second telescopic cylinder 11.

[0042] It should be noted that the microcomputer controller 12 can be a PLC, a single-chip microcomputer, or an industrial computer, and has the characteristics of flexible programming and high reliability.

[0043] In practice, the microcomputer controller 12 can control various electrical devices installed on the ultrasonic cleaning box 1, such as pneumatic grippers 2, servo motors 3, water pumps 4, first telescopic cylinders 10 and second telescopic cylinders 11, thereby improving the efficiency of automated work.

[0044] refer to Figure 1 Both the servo motor 3 and the pneumatic gripper 2 are fitted with waterproof sleeves.

[0045] In practice, a waterproof sleeve is installed to prevent water from entering the servo motor 3 and pneumatic gripper 2 when they are immersed in the cleaning solution.

[0046] refer to Figure 1 and Figure 2 The water outlet of the water pump 4 is connected to the nozzle 5 via a corrugated pipe. The ultrasonic cleaning box 1 is equipped with a snap-fit ​​block for limiting the nozzle 5.

[0047] In practice, this setup allows users to manually adjust the spray position of the nozzle 5 to achieve the purpose of rinsing the chip, and also allows the nozzle 5 to be clipped onto the ultrasonic cleaning box 1 to achieve the purpose of automatic water circulation.

[0048] Working principle: During the chip cleaning process, the pneumatic gripper 2 is used to hold the chip, and then the held chip is introduced into the ultrasonic cleaning box 1. At the same time, the ultrasonic generator is turned on to clean the chip. In addition, the servo motor 3 can be started to drive the pneumatic gripper 2 to rotate. In this process, the ultrasonic cleaning and chip rotation are combined to achieve all-round, no dead angle cleaning of the chip surface, effectively removing various contaminants.

[0049] During the cleaning process, the water pump 4 can draw the wastewater generated in the ultrasonic cleaning tank 1 into the filter cartridge 6. After being filtered by the filter cartridge 6, the wastewater flows back into the ultrasonic cleaning tank 1 through the nozzle 5. The use of a circulating filtration system reduces the consumption and discharge of cleaning fluid, which meets the requirements of green manufacturing.

Claims

1. An automatic rotating chip ultrasonic cleaning mechanism for a chip unpacking machine, comprising an ultrasonic cleaning chamber (1), characterized in that, include, The pneumatic gripper (2) is rotatably installed inside the ultrasonic cleaning box (1) and is used to hold the chip and make rotational movements. A servo motor (3) is located on one side of the pneumatic gripper (2) and is used to drive the pneumatic gripper (2) to rotate. A water pump (4) is connected to the outer surface of the ultrasonic cleaning box (1) and is used to draw water from the ultrasonic cleaning box (1). The water outlet end of the water pump (4) is connected to a nozzle (5), and the water suction end of the water pump (4) is connected to a filter cylinder (6).

2. The automatic rotating chip ultrasonic cleaning mechanism of the chip unpacking machine as described in claim 1, characterized in that: The filter cylinder (6) is provided with filter screens (7) and filter plate bodies (8) at equal intervals along the axial direction.

3. The automatic rotating chip ultrasonic cleaning mechanism of the chip unpacking machine as described in claim 2, characterized in that: The filter cartridge (6) has a connecting pipe (13) at its water inlet end, and the other end of the connecting pipe (13) extends into the ultrasonic cleaning box (1).

4. The automatic rotating chip ultrasonic cleaning mechanism of the chip unpacking machine as described in claim 1, characterized in that: The ultrasonic cleaning box (1) is connected to a mounting base (9) on one side, and a first telescopic cylinder (10) is connected to the mounting base (9). The first telescopic cylinder (10) is used to control the pneumatic gripper (2) to slide along the length of the ultrasonic cleaning box (1).

5. The automatic rotating chip ultrasonic cleaning mechanism of the chip unpacking machine as described in claim 4, characterized in that: The first telescopic cylinder (10) is connected to a second telescopic cylinder (11) at its telescopic end. The second telescopic cylinder (11) is connected to a mounting bracket at its telescopic end. The pneumatic gripper (2) and the servo motor (3) are respectively connected to both sides of the mounting bracket. The second telescopic cylinder (11) is used to control the pneumatic gripper (2) to slide along the height direction of the ultrasonic cleaning box (1).

6. The automatic rotating chip ultrasonic cleaning mechanism of the chip unpacking machine as described in claim 1, characterized in that: The ultrasonic cleaning box (1) is connected to a fixed frame on one side, and a microcomputer controller (12) is connected to the fixed frame. The microcomputer controller (12) is used to control the pneumatic gripper (2), servo motor (3), water pump (4), first telescopic cylinder (10) and second telescopic cylinder (11).

7. The automatic rotating chip ultrasonic cleaning mechanism for the chip unpacking machine as described in claim 1, characterized in that: Both the servo motor (3) and the pneumatic gripper (2) are fitted with waterproof sleeves.

8. The automatic rotating chip ultrasonic cleaning mechanism of the chip unpacking machine as described in claim 1, characterized in that: The water outlet of the water pump (4) is connected to the nozzle (5) through a corrugated pipe. The ultrasonic cleaning box (1) is connected to a snap-fit ​​block for limiting the nozzle (5).

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