Multi-chamber plasma cleaning device

Abstract

The utility model relates to the technical field of plasma cleaning machines, and discloses a multi-chamber plasma cleaning device which comprises a box body, two groups of sliding rails are fixedly connected in the box body, a mounting seat is connected outside the sliding rails in a sliding mode, a dismounting mechanism is arranged in the mounting seat, and the dismounting mechanism is connected with the box body in a sliding mode. The interior of the box body is fixedly connected with a plurality of plasma generators, the exterior of the box body is rotatably connected with a box door, the dismounting mechanism comprises a mounting groove, the mounting groove is formed in the mounting base, the interior of the mounting groove is fixedly connected with a spring, and the end, away from the mounting groove, of the spring is fixedly connected with a sliding plate; and the exterior of the sliding plate is slidably connected to the interior of the mounting groove. According to the device, the cleaning cavity can be conveniently taken out for maintenance through the dismounting mechanism, meanwhile, the getter pump and the treatment box are used for ensuring that waste gas reaches the standard to be discharged, and the maintenance convenience and the environmental protection performance of equipment are effectively improved.

Description

Technical Field

[0001] This utility model relates to the field of plasma cleaning machine technology, and in particular to a multi-chamber plasma cleaning device. Background Technology

[0002] Plasma cleaning equipment is a device that achieves surface cleaning through plasma technology. This device uses a high-energy electric field to ionize gas, generating charged particles and free radicals, thereby effectively removing contaminants, oil, dust, and organic matter from object surfaces. Typically, a plasma cleaning equipment consists of a plasma generator, a gas delivery system, an exhaust system, and a waste gas treatment device. It allows for precise control of the cleaning process and is widely used in industries such as semiconductors, electronics, medical, and aerospace to meet the demands for high-precision cleaning.

[0003] Because plasma cleaning technology eliminates the need for chemical solvents and achieves contactless cleaning, it not only significantly improves cleaning effectiveness but also offers advantages in terms of environmental friendliness and energy conservation. Compared to traditional cleaning methods, plasma cleaning has a smaller environmental impact and avoids chemical pollution, making it a greener cleaning solution.

[0004] However, during long-term use, key components of traditional plasma cleaning equipment, such as the plasma generator and cleaning chamber, are prone to aging and require regular inspection and maintenance. Furthermore, equipment maintenance is relatively complex, especially when dust or contaminants accumulate during the cleaning process. This directly affects the cleaning effect and may lead to a decline in equipment performance, increasing maintenance workload. Utility Model Content

[0005] To overcome the above shortcomings, this utility model provides a multi-chamber plasma cleaning device, which aims to improve the problem that key components such as plasma generators and cleaning chambers in existing ion cleaning devices are prone to aging during long-term use.

[0006] To achieve the above objectives, the present invention adopts the following technical solution: a multi-chamber plasma cleaning device, including a housing, two sets of slide rails are fixedly connected inside the housing, a mounting base is slidably connected outside the slide rails, a disassembly mechanism is provided inside the mounting base, multiple plasma generators are fixedly connected inside the housing, and a door is rotatably connected outside the housing.

[0007] The disassembly mechanism includes a mounting groove, which is formed inside the mounting base. A spring is fixedly connected inside the mounting groove. A sliding plate is fixedly connected to the end of the spring away from the mounting groove. The outside of the sliding plate is slidably connected inside the mounting groove. A limit rod is fixedly connected to the side of the sliding plate away from the spring. The outside of the limit rod is slidably connected inside the mounting base.

[0008] Furthermore, a limiting groove is provided inside the mounting base, a limiting block is slidably connected inside the limiting groove, and a cleaning chamber is fixedly connected to the top of the limiting block.

[0009] Furthermore, the end of the limiting rod away from the slide plate is disposed inside the limiting hole, and the limiting hole is opened inside the limiting block.

[0010] Furthermore, the output end of a hydraulic cylinder is fixedly connected to the outside of the mounting base, and the hydraulic cylinder is fixedly connected to the inside of the housing.

[0011] Furthermore, a dust collection hood is fixedly connected to the inside of the box, and a dust collection pipe is fixedly connected to the top of the dust collection hood.

[0012] Furthermore, a processing box is fixedly connected to the end of the suction pipe away from the suction hood, and the bottom of the processing box is fixedly connected to the top of the box body.

[0013] Furthermore, a filter screen is fixedly connected inside the processing box, and an air suction pump is fixedly connected to the side of the processing box away from the suction pipe, with the air suction pump fixedly connected to the outside of the box.

[0014] Furthermore, a pull plate is fixedly connected to the outside of the skateboard, and the pull plate is slidably connected to the inside of the mounting base.

[0015] This utility model has the following beneficial effects:

[0016] 1. In this utility model, as the equipment is used for a long time, the cleaning chamber and plasma generator require regular maintenance. At this time, the sliding plate is moved by pulling the plate, and the movement of the sliding plate simultaneously causes the limiting rod to shift. When the limiting rod disengages from the limiting hole, the cleaning chamber can be removed from the mounting base via the limiting block, thus facilitating cleaning and maintenance of the equipment.

[0017] 2. In this invention, when the cleaning device is running, the suction pump starts, effectively expelling the harmful gases generated inside the chamber. The exhaust gas is guided into the suction pipe through the dust hood and further flows into the treatment chamber. Inside the treatment chamber, the exhaust gas undergoes rigorous filtration through the filter plate, effectively removing harmful substances and ensuring that the exhaust gas meets standards. Finally, the treated exhaust gas is discharged through the output end of the suction pump, ensuring compliance with emission standards and protecting environmental safety. Attached Figure Description

[0018] Figure 1 This is a perspective view of the multi-chamber plasma cleaning device proposed in this utility model;

[0019] Figure 2 This is a schematic diagram of the interior of the multi-chamber plasma cleaning device proposed in this utility model;

[0020] Figure 3 This is a partial structural schematic diagram of the multi-chamber plasma cleaning device proposed in this utility model;

[0021] Figure 4 This is a partial structural cross-sectional view of the multi-chamber plasma cleaning device proposed in this utility model;

[0022] Figure 5 for Figure 4 Enlarged view of point A in the middle.

[0023] Legend:

[0024] 1. Cabinet body; 2. Cabinet door; 3. Hydraulic cylinder; 4. Slide rail; 5. Mounting base; 6. Cleaning chamber; 7. Dust hood; 8. Dust suction pipe; 9. Filter screen; 10. Processing box; 11. Air pump; 12. Limiting block; 13. Limiting groove; 14. Mounting groove; 15. Spring; 16. Slide plate; 17. Limiting rod; 18. Limiting hole; 19. Pull plate; 20. Plasma generator. Detailed Implementation

[0025] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0026] Reference Figures 1-5 An embodiment of this utility model is provided: a multi-chamber plasma cleaning device, including a housing 1, two sets of slide rails 4 are fixedly connected inside the housing 1, and mounting bases 5 are slidably connected to the outside of the slide rails 4. A disassembly mechanism is provided inside the mounting bases 5. Multiple plasma generators 20 are fixedly connected inside the housing 1, and a door 2 is rotatably connected to the outside of the housing 1.

[0027] The disassembly mechanism includes a mounting groove 14, which is located inside the mounting base 5. A spring 15 is fixedly connected inside the mounting groove 14. A slide plate 16 is fixedly connected to the end of the spring 15 away from the mounting groove 14. The slide plate 16 is slidably connected to the inside of the mounting groove 14. A limit rod 17 is fixedly connected to the side of the slide plate 16 away from the spring 15. The limit rod 17 is slidably connected to the inside of the mounting base 5. A pull plate 19 is fixedly connected to the outside of the slide plate 16. The pull plate 19 is slidably connected to the inside of the mounting base 5. A limit groove 13 is located inside the mounting base 5. A limit block 12 is slidably connected inside the limit groove 13. A cleaning chamber 6 is fixedly connected to the top of the limit block 12. The end of the limit rod 17 away from the slide plate 16 is located inside the limit hole 18, which is located inside the limit block 12. The output end of a hydraulic cylinder 3 is fixedly connected to the outside of the mounting base 5. The hydraulic cylinder 3 is fixedly connected to the inside of the housing 1.

[0028] The slide rail 4 limits the movement range of the mounting base 5, which in turn mounts the cleaning chamber 6. The mounting groove 14 secures the limiting slide plate 16 and the spring 15; the spring 15 ensures the slide plate 16 returns to its original position and provides a clamping force. The limiting hole 18 engages with the limiting rod 17 to ensure the limiting block 12 is securely fixed within the limiting groove 13. The cleaning chamber 6 is fixedly mounted on the top of the limiting block 12. The pull plate 19 drives the movement of the slide plate 16, while the hydraulic cylinder 3 drives the mounting base 5 to move smoothly on the slide rail 4. The plasma generator 20 performs the cleaning operation, ensuring efficient cleaning.

[0029] Reference Figure 1 and Figure 2 A dust collection hood 7 is fixedly connected inside the housing 1. A dust collection pipe 8 is fixedly connected to the top of the dust collection hood 7. A processing box 10 is fixedly connected to the end of the dust collection pipe 8 away from the dust collection hood 7. The bottom of the processing box 10 is fixedly connected to the top of the housing 1. A filter screen 9 is fixedly connected inside the processing box 10. An air pump 11 is fixedly connected to the side of the processing box 10 away from the dust collection pipe 8. The air pump 11 is fixedly connected to the outside of the housing 1.

[0030] Harmful gases generated during the cleaning process inside chamber 1 are first vacuumed by suction pump 11. The vacuumed harmful gases are guided through suction hood 7 into suction pipe 8, and then into processing chamber 10. Inside processing chamber 10, the gases are filtered and purified by a precision-designed filter screen 9, effectively removing harmful substances. Finally, the purified gases are discharged through suction pump 11, ensuring clean and safe emissions.

[0031] Working principle: During operation, first open the chamber door 2 and activate the hydraulic cylinder 3. Driven by the hydraulic cylinder 3, the cleaning chamber 6 is pushed out of the chamber 1, providing sufficient space for subsequent operations. Next, accurately place the object to be cleaned into the cleaning chamber 6, and activate the hydraulic cylinder 3 again to retract the cleaning chamber 6 to its original position. Then, close the chamber door 2 to ensure a tight seal, and activate the plasma generator 20 to perform the cleaning operation, effectively removing dirt from the surface of the items.

[0032] As the equipment operates for extended periods, the cleaning chamber 6 and plasma generator 20 require regular maintenance and upkeep. At this time, pulling the plate 19 moves the sliding plate 16, which in turn moves the limiting rod 17. When the limiting rod 17 disengages from the limiting hole 18, the cleaning chamber 6 can be easily removed from the mounting base 5 via the limiting block 12. This design greatly simplifies the maintenance process, making cleaning and maintenance of the equipment more convenient, improving equipment efficiency, and extending its service life.

[0033] When the cleaning device starts operating, the suction pump 11 immediately activates, rapidly and effectively expelling the harmful gases generated inside the chamber 1. The exhaust gas is guided through the dust suction hood 7 into the suction pipe 8 and further flows into the treatment chamber 10. Inside the treatment chamber 10, the exhaust gas undergoes rigorous treatment via a multi-layer filter system 9, thoroughly removing all harmful substances and ensuring that emissions meet environmental standards. After this series of highly efficient filtrations, the treated exhaust gas is discharged through the suction pump 11, ensuring compliance with national emission standards, thereby guaranteeing environmental safety and cleanliness and reducing the impact on surrounding air quality.

[0034] Finally, it should be noted that the above description is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. Although the present utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present utility model should be included within the protection scope of the present utility model.

Claims

1. Multi-chamber plasma cleaning apparatus comprising a cabinet (1), characterized in that: The inside of the box (1) is fixedly connected with two groups of slide rails (4), the outside of the slide rails (4) is slidably connected with a mounting seat (5), the inside of the mounting seat (5) is provided with a dismounting mechanism, the inside of the box (1) is fixedly connected with a plurality of plasma generators (20), and the outside of the box (1) is rotatably connected with a box door (2). The dismounting mechanism comprises a mounting groove (14) formed in the inside of the mounting seat (5), a spring (15) fixedly connected to the inside of the mounting groove (14), a sliding plate (16) fixedly connected to the end of the spring (15) away from the mounting groove (14), the outside of the sliding plate (16) is slidably connected in the inside of the mounting groove (14), a limiting rod (17) fixedly connected to the side of the sliding plate (16) away from the spring (15), and the outside of the limiting rod (17) is slidably connected in the inside of the mounting seat (5).

2. The multi-chambered plasma ashing apparatus of claim 1, wherein: The inside of the mounting seat (5) is provided with a limiting groove (13), the inside of the limiting groove (13) is slidably connected with a limiting block (12), and the top of the limiting block (12) is fixedly connected with a cleaning chamber (6).

3. The multi-chambered plasma ashing apparatus of claim 1, wherein: The end of the limiting rod (17) away from the sliding plate (16) is arranged in the inside of a limiting hole (18) formed in the inside of the limiting block (12).

4. The multi-chambered plasma ashing apparatus of claim 1, wherein: The outside of the mounting seat (5) is fixedly connected with the output end of a hydraulic cylinder (3), and the outside of the hydraulic cylinder (3) is fixedly connected in the inside of the box (1).

5. The multi-chambered plasma ashing apparatus of claim 1, wherein: The inside of the box (1) is fixedly connected with a dust suction cover (7), and the top of the dust suction cover (7) is fixedly connected with a dust suction pipe (8).

6. The multi-chambered plasma ashing apparatus of claim 5, wherein: The end of the dust suction pipe (8) away from the dust suction cover (7) is fixedly connected with a treatment box (10), and the bottom of the treatment box (10) is fixedly connected to the top of the box (1).

7. The multi-chambered plasma ashing apparatus of claim 6, wherein: The inside of the treatment box (10) is fixedly connected with a filter screen (9), one side of the treatment box (10) away from the dust suction pipe (8) is fixedly connected with a suction pump (11), and the suction pump (11) is fixedly connected to the outside of the box (1).

8. The multi-chambered plasma ashing apparatus of claim 1, wherein: The outside of the sliding plate (16) is fixedly connected with a pulling plate (19), and the outside of the pulling plate (19) is slidably connected in the inside of the mounting seat (5).

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