Furnace roller combination device of annealing furnace

Abstract

The utility model discloses a furnace roller combination device of an annealing furnace, which relates to the technical field of annealing furnace rollers, and comprises a connecting plate, a rotating roller assembly is arranged at the middle end of the connecting plate, the rotating roller assembly comprises a plurality of groups of rotating rollers arranged at the middle end of the connecting plate at equal intervals, and two groups of mutually symmetrical mounting blocks are arranged at the front end and the rear end of each rotating roller. The lower end of the mounting block is sleeved with a mounting sleeve, a first bolt is inserted into the upper end of the mounting block in a threaded mode, and a first motor is connected to the upper end of the outer wall of the connecting plate. The first bolt is rotated, the lower end of the first bolt is screwed out of the mounting hole, then the rotating roller is lifted upwards, the mounting blocks at the two ends of the rotating roller leave the mounting sleeve, and therefore the rotating roller is sequentially detached from the middle end of the connecting plate according to the operation, and the rotating roller is convenient to detach, clean and maintain after being used.

Description

Technical Field

[0001] This utility model relates to the field of annealing furnace roller technology, and specifically to a furnace roller assembly device for an annealing furnace. Background Technology

[0002] Annealing furnaces are a process used in semiconductor device manufacturing that involves heating multiple semiconductor wafers to influence their electrical properties. Heat treatments are designed for different effects. They can heat wafers to activate dopants, transform thin films into wafer-substrate interfaces, enable densely deposited films, alter the state of grown films, repair implanted damage, move dopants, or transfer dopants from one film to another or from one film into the wafer substrate. Annealing furnaces can be integrated into other furnace processing steps, such as oxidation, or they can handle these processes independently. Annealing furnaces are equipment specifically designed for heating semiconductor wafers. They are energy-efficient, cycle-type furnaces with an ultra-energy-saving structure using a fiber structure, saving up to 60% on electricity.

[0003] The existing annealing furnaces are not easy to disassemble after use, making them inconvenient to maintain and repair. Furthermore, during use, the rotating rollers will have adhesive residues adhering to the outer wall, often requiring the machine to be stopped for cleaning, which is very inconvenient. Utility Model Content

[0004] The purpose of this invention is to provide a furnace roller assembly device for an annealing furnace, so as to solve the problems in the prior art where the annealing furnace is not easy to disassemble after use, thus making it inconvenient to maintain and repair it, and during the use of the annealing furnace, the rotating rollers will have adhesive substances adhering to the outer wall, which often requires stopping the machine to clean, which is very inconvenient.

[0005] To achieve the above objectives, this utility model provides the following technical solution: a furnace roller assembly for an annealing furnace, comprising a connecting plate, a rotating roller assembly at the middle of the connecting plate, the rotating roller assembly comprising a plurality of rotating rollers equidistantly arranged at the middle of the connecting plate, two sets of symmetrical mounting blocks at the front and rear ends of the rotating rollers, a mounting sleeve fitted at the lower end of the mounting block, a first bolt threaded into the upper end of the mounting block, a first motor connected to the upper end of the outer wall of the connecting plate, a driving assembly provided on the outer wall of the connecting plate away from the first motor, a cleaning assembly provided on the inner wall of the connecting plate at the lower end of the rotating roller assembly, the cleaning assembly comprising two sets of symmetrical fixing plates fixedly disposed on one side of the outer wall of the connecting plate, a second motor provided on the outer wall of one end of one set of fixing plates, a ball screw connected to the output end of the second motor, a ball screw sleeve fitted on the outer wall of the ball screw, a receiving plate provided on the upper end of the ball screw, and a cleaning brush provided on the upper end of the receiving plate.

[0006] Preferably, the upper end of the mounting sleeve has a mounting groove that mates with the mounting block, the mounting block is movably inserted into the mounting groove, and the lower end of the mounting sleeve in the mounting groove has a mounting hole that mates with the first bolt. The lower end of the first bolt passes through the mounting block and is threaded into the mounting hole. The end of the mounting sleeve away from the rotating roller is rotatably connected to the inner wall of the connecting plate.

[0007] Preferably, the drive assembly includes a rotating shaft fixedly disposed at one end of one of the mounting sleeves, the rotating shaft passing through a connecting plate, the rotating shaft and the connecting plate being rotatably connected, a sprocket being fixedly connected to the end of the rotating shaft away from the mounting sleeve, a chain being drivenly wrapped around the outer wall of the sprocket, and the chain and the sprocket meshing with each other.

[0008] Preferably, the output end of the first motor is fixedly connected to one of the sets of mounting sleeves.

[0009] Preferably, a slide rod is fixedly provided at the front end of the fixed plate away from the ball screw, and a sliding sleeve is movably sleeved on the outer wall of the slide rod. A fixed block is provided at the end of both the ball screw and the slide rod away from the second motor. The ball screw and the slide rod are rotatably connected to the fixed block, and the fixed block is rotatably connected to the fixed plate.

[0010] Preferably, a receiving plate is fixedly provided at the upper end of the ball screw sleeve and the sliding sleeve, and a receiving groove is provided at the upper end of the receiving plate, and a cleaning brush is movably inserted in the middle of the receiving groove.

[0011] Preferably, a second bolt is threaded into the middle of the outer wall of the receiving plate. The second bolt moves from the outside to the inside through the receiving plate, the receiving groove and the cleaning brush. The upper end of the cleaning brush is parallel to the lower end of the rotating roller.

[0012] Preferably, a collection box is movably inserted into the lower inner wall of the connecting plate, and insert blocks are fixed at both ends of the collection box. The inner wall of the connecting plate has slots that cooperate with the insert blocks.

[0013] In the above technical solution, this utility model provides a furnace roller assembly device for an annealing furnace, which has the following beneficial effects: By rotating the first bolt, the lower end of the first bolt is unscrewed from the mounting hole, and then the roller is lifted upwards, causing the mounting blocks at both ends of the roller to separate from the mounting sleeve. Thus, the roller can be disassembled from the middle of the connecting plate in sequence according to the above operation, making it convenient to disassemble, clean, and maintain the roller after use. When the roller is in operation and there are adhering substances on its outer wall, the second motor can be started to rotate, driving the ball screw to rotate. The upper end of the cleaning brush moves along the lower end face of the roller, and the cleaning brush can clean the adhering substances on the outer wall of the roller. Therefore, it is not necessary to stop the machine to clean the roller during use, increasing the continuity of the device's operation. Attached Figure Description

[0014] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the drawings used in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments recorded in this utility model. For those skilled in the art, other drawings can be obtained based on these drawings.

[0015] Figure 1 This is a schematic diagram of the overall three-dimensional structure provided for an embodiment of the present utility model;

[0016] Figure 2 This is an exploded perspective view of the roller assembly provided in an embodiment of the present utility model;

[0017] Figure 3 This is a three-dimensional structural diagram of the mounting sleeve provided in an embodiment of the present utility model;

[0018] Figure 4 This is a three-dimensional structural diagram of the driving component provided in an embodiment of the present utility model;

[0019] Figure 5 This is a partially exploded three-dimensional structural diagram of the cleaning component provided in an embodiment of the present utility model.

[0020] Explanation of reference numerals in the attached figures:

[0021] 1. Connecting plate; 2. Roller assembly; 21. Roller; 22. Mounting block; 23. Mounting sleeve; 24. Mounting groove; 25. Mounting hole; 26. First bolt; 3. First motor; 4. Drive assembly; 41. Shaft; 42. Sprocket; 43. Chain; 5. Cleaning assembly; 501. Fixing plate; 502. Second motor; 503. Ball screw; 504. Sliding rod; 505. Ball screw sleeve; 506. Sliding sleeve; 507. Fixing block; 508. Receiving plate; 509. Receiving groove; 510. Cleaning brush; 511. Second bolt; 6. Collection box; 7. Insert block. Detailed Implementation

[0022] To enable those skilled in the art to better understand the technical solution of this utility model, the present utility model will be further described in detail below with reference to the accompanying drawings.

[0023] Please see Figure 1-4 A furnace roller assembly device for an annealing furnace. The technical solution proposed in this utility model includes a connecting plate 1, a rotating roller assembly 2 at the middle of the connecting plate 1, a plurality of rotating rollers 21 equidistantly arranged at the middle of the connecting plate 1, two sets of mounting blocks 22 symmetrically arranged at the front and rear ends of the rotating rollers 21, a mounting sleeve 23 sleeved on the lower end of the mounting block 22, a first bolt 26 threadedly inserted into the upper end of the mounting block 22, and a first motor 3 connected to the upper end of the outer wall of the connecting plate 1.

[0024] The upper end of the mounting sleeve 23 has a mounting groove 24 that mates with the mounting block 22. The mounting block 22 is movably inserted into the mounting groove 24. The lower end of the mounting sleeve 23 located in the mounting groove 24 has a mounting hole 25 that mates with the first bolt 26. The lower end of the first bolt 26 passes through the mounting block 22 and is threaded into the mounting hole 25. The end of the mounting sleeve 23 away from the rotating roller 21 is rotatably connected to the inner wall of the connecting plate 1.

[0025] The drive assembly 4 includes a rotating shaft 41 fixedly disposed at one end of one of the mounting sleeves 23. The rotating shaft 41 passes through the connecting plate 1 and is rotatably connected to the connecting plate 1. A sprocket 42 is fixedly connected to the end of the rotating shaft 41 away from the mounting sleeve 23. A chain 43 is wrapped around the outer wall of the sprocket 42, and the chain 43 and the sprocket 42 mesh with each other.

[0026] The output end of the first motor 3 is fixedly connected to one of the mounting sleeves 23.

[0027] After the roller 21 is used, it needs to be disassembled for easy cleaning and maintenance. The first bolt 26 can be rotated to unscrew the lower end of the first bolt 26 from the mounting hole 25. Then, the roller 21 is lifted upward so that the mounting blocks 22 at both ends of the roller 21 are separated from the mounting sleeve 23. The roller 21 can be disassembled from the middle of the connecting plate 1 in sequence according to the above operation. During the use of the roller 21, the first motor 3 can be started to drive one set of mounting blocks 22 to rotate. The mounting blocks 22 drive the rotating shaft 41 to rotate, and the rotating shaft 41 drives the sprocket 42 to rotate. Under the action of the chain 43, the other sets of sprockets 42 rotate in the same direction, so that the roller 21 rotates in the same direction at the same speed. The conveying operation is carried out by the rotation of the roller 21.

[0028] Please see Figure 1-5 A drive assembly 4 is provided on the outer wall of the connecting plate 1 away from the first motor 3. A cleaning assembly 5 is provided on the inner wall of the connecting plate 1 at the lower end of the roller assembly 2. The cleaning assembly 5 includes two sets of fixing plates 501 fixedly disposed on one side of the outer wall of the connecting plate 1. A second motor 502 is provided on the outer wall of one set of fixing plates 501. A ball screw 503 is connected to the output end of the second motor 502. A ball sleeve 505 is sleeved on the outer wall of the ball screw 503. A receiving plate 508 is provided on the upper end of the ball sleeve 505. A cleaning brush 510 is provided on the upper end of the receiving plate 508.

[0029] A slide rod 504 is fixedly provided at the front end of the fixed plate 501 away from the ball screw 503. A slide sleeve 506 is movably sleeved on the outer wall of the slide rod 504. A fixed block 507 is provided at the end of the ball screw 503 and the slide rod 504 away from the second motor 502. The ball screw 503 and the slide rod 504 are rotatably connected to the fixed block 507. The fixed block 507 is rotatably connected to the fixed plate 501.

[0030] A receiving plate 508 is fixedly provided on the upper end of the ball sleeve 505 and the sliding sleeve 506. A receiving groove 509 is provided on the upper end of the receiving plate 508. A cleaning brush 510 is movably inserted in the middle of the receiving groove 509.

[0031] A second bolt 511 is threaded into the middle of the outer wall of the receiving plate 508. The second bolt 511 moves from the outside to the inside through the receiving plate 508, the receiving groove 509 and the cleaning brush 510. The upper end of the cleaning brush 510 is parallel to the lower end of the rotating roller 21.

[0032] A collection box 6 is movably inserted into the inner wall of the lower end of the connecting plate 1. Insert blocks 7 are fixed at both ends of the collection box 6. The inner wall of the connecting plate 1 has slots that cooperate with the insert blocks 7.

[0033] When the roller 21 is in operation and there is residue adhering to its outer wall, the second motor 502 can be started to rotate, driving the ball screw 503 to rotate. The rotation of the ball screw 503 can drive the ball sleeve 505 to move along the ball screw 503 towards the fixed block 507. During this movement, the upper end of the cleaning brush 510 moves along the lower end face of the roller 21. When the cleaning brush 510 contacts the roller 21, the roller 21 is also rotating, so the cleaning brush 510 can clean the residue adhering to its outer wall. After the ball sleeve 505 contacts the fixed block 507, the second motor 502 is started in reverse, causing the ball sleeve 505 to move towards the fixed plate 501. This process is repeated multiple times, so that the cleaning brush 510 can clean the outer wall of the roller 21 during its operation. The cleaning brush 510 can clean the adhering substances without stopping the machine to clean the roller 21. The sliding sleeve 506 and sliding rod 504 increase the stability of the cleaning brush 510 during movement. In addition, the cleaned adhering substances will fall into the collection box 6. When it is necessary to clean the adhering substances in the collection box 6, the collection box 6 can be pulled outward, so that the insert block 7 slides along the slot opened in the inner wall of the connecting plate 1, and the collection box 6 can be pulled out for easy processing of the adhering substances in the collection box 6. When the cleaning brush 510 needs to be cleaned or replaced after long-term use, the second bolt 511 can be rotated so that the second bolt 511 is disengaged from the receiving plate 508. Then the cleaning brush 510 can be lifted upward, so that the lower end of the cleaning brush 510 is pulled out from the receiving groove 509, thereby facilitating the replacement or cleaning of the cleaning brush 510.

[0034] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A roller assembly for an annealing furnace, comprising a connecting plate (1), characterized in that, The connecting plate (1) is provided with a rotating roller assembly (2) at the middle end, the rotating roller assembly (2) comprises a plurality of rotating roller groups (21) equidistantly arranged at the middle end of the connecting plate (1), the rotating roller (21) is provided with two groups of mounting blocks (22) which are symmetrical to each other at the front and rear ends, the mounting block (22) is provided with a mounting sleeve (23) at the lower end, the mounting block (22) is provided with a first bolt (26) at the upper end, the connecting plate (1) is provided with a first motor (3) at the outer wall of the upper end, the outer wall of the end of the connecting plate (1) away from the first motor (3) is provided with a driving assembly (4), the inner wall of the connecting plate (1) is provided with a cleaning assembly (5) at the lower end of the rotating roller assembly (2), the cleaning assembly (5) comprises two groups of fixed plates (501) which are fixedly arranged at the outer wall of the connecting plate (1) and symmetrical to each other, one end of one group of the fixed plates (501) is provided with a second motor (502), the second motor (502) is connected with a ball screw (503) at the output end, the ball screw (503) is provided with a ball screw sleeve (505) at the outer wall, the ball screw sleeve (505) is provided with a receiving plate (508) at the upper end, and the receiving plate (508) is provided with a cleaning brush (510) at the upper end.

2. The roller assembly of an annealing furnace according to claim 1, wherein The mounting sleeve (23) is provided with a mounting groove (24) at the upper end, the mounting block (22) is movably inserted into the mounting groove (24), the mounting sleeve (23) is provided with a mounting hole (25) at the lower end of the mounting groove (24), the first bolt (26) is screwed into the mounting hole (25) at the lower end, and the mounting sleeve (23) is rotatably connected with the inner wall of the connecting plate (1) away from the rotating roller (21).

3. The roller assembly of an annealing furnace according to claim 1, wherein The driving assembly (4) comprises a rotating shaft (41) fixedly arranged at one end of one group of the mounting sleeve (23), the rotating shaft (41) penetrates through the connecting plate (1), the rotating shaft (41) is rotatably connected with the connecting plate (1), the rotating shaft (41) is fixedly connected with a chain wheel (42) at the end away from the mounting sleeve (23), and the chain wheel (42) is transmissionally wrapped with a chain (43) at the outer wall.

4. The roller assembly of claim 1, wherein: The first motor (3) is fixedly connected with one group of the mounting sleeve (23) at the output end.

5. The roller assembly of claim 1, wherein: The fixed plate (501) away from the ball screw (503) is provided with a sliding rod (504) at the front end, the sliding rod (504) is movably sleeved with a sliding sleeve (506) at the outer wall, the ball screw (503) and the sliding rod (504) are provided with a fixed block (507) at the end away from the second motor (502), the ball screw (503) and the sliding rod (504) are rotatably connected with the fixed block (507), and the fixed block (507) is rotatably connected with the fixed plate (501).

6. The roller assembly of an annealing furnace according to claim 5, wherein The ball screw sleeve (505) and the sliding sleeve (506) are provided with a receiving plate (508) at the upper end, the receiving plate (508) is provided with a receiving groove (509) at the upper end, and the cleaning brush (510) is movably inserted into the receiving groove (509).

7. The roller assembly of claim 5 wherein: The second bolt (511) is movably inserted into the outer wall of the receiving plate (508) from outside to inside, sequentially passing through the receiving plate (508), the receiving groove (509) and the cleaning brush (510), and the upper end of the cleaning brush (510) is parallel to the lower end surface of the rotating roller (21).

8. The roller assembly of claim 1, wherein: The collecting box (6) is movably arranged on the inner wall of the lower end of the connecting plate (1), and the two ends of the collecting box (6) are fixedly provided with the plug blocks (7); and the inner wall of the connecting plate (1) is provided with the plug grooves matched with the plug blocks (7).

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