SCI rotating cathode cooled through water cooling

Abstract

The utility model discloses an SCI rotating cathode cooled by water cooling. The SCI rotating cathode comprises a magnetic bar assembly and a driving end assembly, the magnetic bar assembly is provided with a cooling assembly, and cooling water is circularly introduced through the cooling assembly to cool the magnetic bar assembly; the cooling assembly comprises a water inlet pipe and a water outlet pipe, the water inlet pipe is communicated with a rear sealing cover of the driving end assembly through a water inlet flow channel, and cooling water enters from the water inlet pipe, enters a cooling chamber of the magnetic rod assembly through a center flow channel of the rear sealing cover, then passes through a cooling cavity of the magnetic rod assembly and a front sealing cover and then returns to a water return flow channel in the driving end assembly. And finally, the water is guided back through the water outlet pipe. According to the rotating cathode, the cooling pipeline is designed in the driving end, so that inlet water and outlet water of circulating cooling water can directly enter and exit from the magnetic rod assembly through the driving end, the function that the driving end drives the magnetic rod assembly to rotate is not affected through the ingenious pipeline design, and compared with an existing external cooling system, the structure is more ingenious, and the cooling efficiency is improved. The overall weight and the size of the rotating cathode are obviously improved.

Description

Technical Field

[0001] This utility model relates to the field of SCI rotating cathode structure technology, and in particular to an SCI rotating cathode cooled by water cooling. Background Technology

[0002] Vacuum magnetron sputtering is currently the best-quality and most widely used deposition process in the field of large-area thin film deposition. In the magnetron sputtering deposition process, the quality requirements for the magnetron sputtering equipment are very high, and the magnetron sputtering cathode is particularly important.

[0003] Existing SCI rotating cathode cooling systems are typically external, requiring cooling pipes to extend from the outside of the magnetic rod assembly and circulate cooling water to cool it. Because the magnetic rod assembly rotates during operation, this results in complex cooling system piping, which in turn complicates the overall rotating cathode structure. Utility Model Content

[0004] The purpose of this invention is to provide a water-cooled SCI rotating cathode, in which the cooling pipe of the SCI rotating cathode is designed in the active end, so that the cooling water can directly enter the magnetic rod assembly through the active end, thereby solving the defects of the existing structure.

[0005] To solve the above-mentioned technical problems, this utility model provides a water-cooled SCI rotating cathode, including a magnetic rod assembly, an active end assembly, and a driven end assembly; the magnetic rod assembly is coaxially mounted between the active end assembly and the driven end assembly;

[0006] The active end component is equipped with a power motor, which drives the target cylinder in the magnetic rod assembly to rotate.

[0007] The magnetic rod assembly is also equipped with a cooling assembly, through which cooling water is circulated to cool the magnetic rod assembly.

[0008] The cooling assembly includes an inlet pipe and an outlet pipe. The inlet pipe is connected to the rear sealing cover of the active end assembly through an inlet channel. Cooling water enters from the inlet pipe, passes through the central channel of the rear sealing cover into the cooling chamber of the magnetic rod assembly, then passes through the cooling cavity of the magnetic rod assembly and the front sealing cover before returning to the return channel in the active end assembly, and finally is guided back through the outlet pipe.

[0009] Preferably, the magnetic rod assembly, the active end assembly, the driven end assembly, the power motor, and the cooling assembly are each provided in two sets and are installed in parallel on the same substrate to form an SCI dual rotating cathode device.

[0010] Preferably, the water inlet pipe is connected to the central channel of the rear sealing cover through the water inlet channel, and the water outlet pipe is connected to the cooling chamber of the magnetic rod assembly through the return water channel, thereby forming a circulating cooling system.

[0011] Preferably, the active end assembly is provided with an active positioning shaft connected to the rear sealing cover, and the active positioning shaft is inserted into the connecting sleeve at the end of the magnetic rod assembly.

[0012] Preferably, a conductive spring is sleeved on the active positioning shaft, and the end of the conductive spring abuts against the connecting sleeve, so that the magnetic rod assembly is electrically connected to the active positioning shaft along the axis.

[0013] Preferably, the active end component housing is provided with a pulley, which is connected to the output shaft of the power motor via a belt, so that the power motor can drive the housing of the active end component and the target cylinder connected thereto to rotate.

[0014] Preferably, the two ends of the target cylinder of the magnetic rod assembly are sealed to the active end assembly and the driven end assembly respectively by clamps.

[0015] Preferably, the clamp is a clamp-type clamp, including an upper clamp body and a lower clamp body, which are spliced ​​together and then locked and fixed by bolts;

[0016] At least one annular groove is machined in the arc-shaped inner wall of the upper hoop and the lower hoop for placing a metal sealing ring. As the upper hoop and the lower hoop clamp, the metal sealing ring is pressed and fixed in the sealing groove on the outer wall of the target material.

[0017] Preferably, the metal sealing ring has a notch, and as the upper hoop and the lower hoop clamp it, the diameter of the metal sealing ring gradually decreases, eventually pressing and fixing it into the sealing groove on the outer wall of the target material.

[0018] Preferably, the upper hoop and the lower hoop are symmetrically provided with retaining edges on the same side, and the inner side of the retaining edge is a slope, which contacts the connecting part of the active end assembly or the driven end assembly, thereby locking the axial position of the target material.

[0019] Compared with the prior art, the beneficial effects of this utility model are:

[0020] The SCI rotating cathode of this invention incorporates cooling pipes in the active end, allowing circulating cooling water to enter and exit the magnetic rod assembly directly through the active end. Furthermore, through ingenious pipe design, the function of the active end in driving the magnetic rod assembly to rotate is not affected. Compared with existing external cooling systems, the structure is more ingenious, and the overall weight and volume of the rotating cathode are significantly improved. Attached Figure Description

[0021] Figure 1 This is a schematic diagram of the structure of a water-cooled SCI rotating cathode provided by this utility model;

[0022] Figure 2 This is a front view of a water-cooled SCI rotating cathode provided by this utility model;

[0023] Figure 3 This is a side view of a water-cooled SCI rotating cathode provided by this utility model;

[0024] Figure 4 This is a cross-sectional view of the first position of the active end component provided by this utility model;

[0025] Figure 5 This is a cross-sectional view of the second position of the active end component provided by this utility model;

[0026] Figure 6 This is a schematic diagram of the internal circulating water flow direction of the active end component provided by this utility model;

[0027] Figure 7 This is a first-view structural schematic diagram of the clamp provided by this utility model;

[0028] Figure 8 This is a structural schematic diagram of the clamp provided by this utility model from a second perspective;

[0029] Figure 9 This is a schematic diagram of the structure of the metal sealing ring provided by this utility model;

[0030] Figure 10 This is a schematic diagram of the structure of the lower hoop provided by this utility model.

[0031] In the diagram: 1. Magnetic rod assembly; 101. Cooling chamber; 102. Connecting sleeve; 103. Target material; 2. Active end assembly; 201. Rear sealing cover; 202. Front sealing cover; 203. Active positioning shaft; 204. Conductive spring; 205. Pulley; 3. Driven end assembly; 4. Power motor; 5. Cooling assembly; 501. Water inlet pipe; 502. Water outlet pipe; 6. Base plate; 7. Clamp; 701. Upper clamp body; 702. Lower clamp body; 703. Annular groove; 704. Metal sealing ring; 705. Edge retainer; 7041. Notch. Detailed Implementation

[0032] The present invention will be further described in detail below with reference to the accompanying drawings and specific embodiments. The advantages and features of the present invention will become clearer from the following description and claims. It should be noted that the drawings are all in a very simplified form and use non-precise proportions, and are only used to facilitate and clarify the illustration of the embodiments of the present invention.

[0033] In the description of this utility model, it should be understood that the terms "center", "longitudinal", "lateral", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", and "outer" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0034] In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances. Example

[0035] This invention provides a water-cooled SCI rotating cathode; please refer to [link / reference]. Figures 1-5 The system includes a magnetic rod assembly 1, an active end assembly 2, and a driven end assembly 3. The magnetic rod assembly 1 is coaxially mounted between the active end assembly 2 and the driven end assembly 3. The active end assembly 2 is equipped with a power motor 4, which drives the target cylinder 103 in the magnetic rod assembly 1 to rotate. The magnetic rod assembly 1 is also equipped with a cooling assembly 5, which circulates cooling water to cool the magnetic rod assembly 1.

[0036] For details, please refer to Figure 6 The cooling assembly 5 includes an inlet pipe 501 and an outlet pipe 502. The inlet pipe 501 is connected to the rear sealing cover 201 of the active end assembly 2 through an inlet flow channel. Cooling water enters from the inlet pipe 501, enters the cooling chamber of the magnetic rod assembly 1 through the central flow channel of the rear sealing cover 201, then passes through the cooling cavity 101 of the magnetic rod assembly 1 and the front sealing cover 202 before returning to the return flow channel in the active end assembly 2, and finally is guided back through the outlet pipe 502.

[0037] The SCI rotating cathode of this invention incorporates the cooling pipes of the SCI rotating cathode into the active end, allowing the inlet and outlet of the circulating cooling water to directly enter and exit the magnetic rod assembly through the active end. Furthermore, through the ingenious pipe design, the function of the active end in driving the magnetic rod assembly to rotate is not affected. Compared with the existing external cooling system, the structure is more ingenious, and the overall weight and volume of the rotating cathode are significantly improved.

[0038] In this embodiment, the magnetic rod assembly 1, the active end assembly 2, the driven end assembly 3, the power motor 4, and the cooling assembly 5 are each provided in two sets and are installed in parallel on the same substrate 6 to form an SCI dual rotating cathode device.

[0039] Specifically, the water inlet pipe 501 is connected to the central channel of the rear sealing cover 201 through the water inlet channel, while the water outlet pipe 502 is connected to the cooling chamber 101 of the magnetic rod assembly 1 through the return water channel, thereby forming a circulating cooling.

[0040] Furthermore, the active end assembly 2 is provided with an active positioning shaft 203 connected to the rear sealing cover 201, and the active positioning shaft 203 is inserted into the connecting sleeve 102 at the end of the magnetic rod assembly 1.

[0041] A conductive spring 204 is sleeved on the active positioning shaft 203, and the end of the conductive spring 204 abuts against the connecting sleeve 102, so that the magnetic rod assembly 1 is electrically connected to the active positioning shaft 203 along the axis.

[0042] The active end component 2 has a pulley 205 on its outer shell, which is connected to the output shaft of the power motor 4 via a belt, so that the power motor 4 can drive the outer shell of the active end component 2 and the target cylinder 103 connected thereto to rotate.

[0043] Specifically, please refer to 7-10. The two ends of the target material 103 of the magnetic rod assembly 1 are respectively sealed and connected to the active end assembly 2 and the driven end assembly 3 by clamps 7.

[0044] The clamp 7 is a clamp-type clamp, including an upper clamp body 701 and a lower clamp body 702. The upper clamp body 701 and the lower clamp body 702 are spliced ​​together and locked and fixed by bolts. At least one annular groove 703 is machined in the arc-shaped inner wall of the upper clamp body 701 and the lower clamp body 702 for placing a metal sealing ring 704. With the clamping of the upper clamp body 701 and the lower clamp body 702, the metal sealing ring 704 is pressed and fixed in the sealing groove on the outer wall of the target material 103.

[0045] Furthermore, such as Figure 9As shown, the metal sealing ring 704 has a notch 7041. As the upper hoop 701 and the lower hoop 702 clamp, the diameter of the metal sealing ring 704 gradually decreases, and finally it is pressed and fixed in the sealing groove on the outer wall of the target material 103.

[0046] Furthermore, such as Figure 10 As shown, the upper hoop 701 and the lower hoop 702 are symmetrically provided with baffles 705 on the same side, and the inner side of the baffles 705 is a slope, which contacts the connecting part of the active end assembly or the driven end assembly, thereby locking the axial position of the target material 103.

[0047] The above description is only a description of the preferred embodiment of the present utility model and is not intended to limit the scope of the present utility model in any way. Any changes or modifications made by those skilled in the art based on the above disclosure shall fall within the protection scope of the claims.

Claims

1. An SCI rotating cathode cooled by water, characterized in that, It comprises a magnetic rod assembly (1), a driving end assembly (2) and a driven end assembly (3); the magnetic rod assembly (1) is coaxially installed between the driving end assembly (2) and the driven end assembly (3); The driving end assembly (2) is provided with a power motor (4) for driving the target cylinder (103) in the magnetic rod assembly (1) to rotate; The magnetic rod assembly (1) is further provided with a cooling assembly (5) for circulating cooling water to cool the magnetic rod assembly (1); The cooling assembly (5) comprises an inlet pipe (501) and an outlet pipe (502); the inlet pipe (501) is communicated with the rear sealing cover (201) of the driving end assembly (2) through an inlet channel; the cooling water enters the inlet pipe (501), flows into the cooling chamber of the magnetic rod assembly (1) through the central channel of the rear sealing cover (201), flows back to the water return channel in the driving end assembly (2) after passing through the cooling cavity (101) of the magnetic rod assembly (1) and the front sealing cover (202), and is finally guided back through the outlet pipe (502).

2. The SCI rotating cathode cooled by water-cooling according to claim 1, characterized in that, The magnetic rod assembly (1), the driving end assembly (2), the driven end assembly (3), the power motor (4) and the cooling assembly (5) are all provided with two groups and are installed in parallel on the same substrate (6) to form an SCI double-rotating cathode device.

3. The SCI rotating cathode cooled by water-cooling according to claim 1, characterized in that, The inlet pipe (501) is communicated with the central channel of the rear sealing cover (201) through an inlet channel, and the outlet pipe (502) is communicated with the cooling cavity (101) of the magnetic rod assembly (1) through a water return channel, so as to form a circulating cooling.

4. The SCI rotating cathode cooled by water-cooling according to claim 1, characterized in that, A driving positioning shaft (203) connected with the rear sealing cover (201) is arranged in the driving end assembly (2) and is inserted with a connecting sleeve (102) at the end of the magnetic rod assembly (1).

5. A water-cooled SCI rotating cathode according to claim 4, characterized in that, A conductive spring (204) is sleeved and installed on the driving positioning shaft (203), and the end of the conductive spring (204) abuts against the connecting sleeve (102), so that the magnetic rod assembly (1) is electrically connected with the driving positioning shaft (203) along the axis.

6. A water-cooled SCI rotating cathode according to claim 5, characterized in that A belt pulley (205) is arranged on the shell of the driving end assembly (2) and is connected with the output shaft of the power motor (4) through a belt, so that the power motor (4) can drive the shell of the driving end assembly (2) and the target cylinder (103) connected therewith to rotate.

7. The SCI rotating cathode cooled by water-cooling according to claim 1, characterized in that, The target cylinder (103) of the magnetic rod assembly (1) is sealingly connected with the driving end assembly (2) and the driven end assembly (3) through a hoop (7) at both ends.

8. A water-cooled SCI rotating cathode according to claim 7, characterized in that The hoop (7) is a clamping hoop comprising an upper hoop body (701) and a lower hoop body (702); the upper hoop body (701) and the lower hoop body (702) are mutually spliced and locked and fixed through bolts. At least one annular groove (703) is machined in the arc-shaped inner wall of the upper and lower clamping bodies (701, 702) for placing a metal sealing ring (704), which is pressed and fixed in the sealing groove of the outer wall of the target cylinder (103) as the upper and lower clamping bodies (701, 702) are clamped.

9. A water-cooled SCI rotating cathode according to claim 8, characterized in that, A notch (7041) is formed on the metal sealing ring (704), and the diameter of the metal sealing ring (704) is gradually reduced as the upper and lower clamping bodies (701, 702) are clamped, and finally the metal sealing ring (704) is pressed and fixed in the sealing groove of the outer wall of the target cylinder (103).

10. The SCI rotating cathode cooled by water cooling according to claim 8, characterized in that, The upper and lower clamping bodies (701, 702) are symmetrically provided with a stop edge (705) on the same side, and the inner side of the stop edge (705) is a bevel, which is in contact with the connection part of the driving end assembly or the driven end assembly, so as to lock the axial position of the target cylinder (103).

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