Heating assembly

Abstract

The utility model relates to the technical field of semiconductor heating equipment, in particular to a heating assembly, which comprises a shell and an electric heating tube, the electric heating tube comprises a spiral tube part and a straight tube part positioned at the end part of the spiral tube part, the shell is provided with an accommodating cavity, the spiral tube part is positioned in the accommodating cavity, at least part of the straight tube part extends out of the shell, and the electric heating tube is arranged in the accommodating cavity. The heating assembly comprises a supporting piece, the supporting piece abuts against the spiral pipe part, and at least part of the supporting piece is located between the spiral pipe part and the shell. According to the device, at least part of the straight pipe part extends out of the shell and is used for being connected with external equipment, the supporting piece is arranged and abuts against the spiral pipe part, meanwhile, at least part of the supporting piece is located between the spiral pipe part and the shell, and effective supporting force can be formed between the spiral pipe part and the shell through the structure; the probability of breakage caused by overweight of the electric heating tube is reduced, and the safety performance of equipment in the using and carrying process is improved.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor heating equipment technology, and in particular to a heating component. Background Technology

[0002] Fluid heating equipment can be used in industries such as semiconductors, photovoltaic solar energy, display panels, testing equipment and instruments, and micro-chemicals. For example, wet cleaning equipment in semiconductor manufacturing processes can be used in multiple stages, such as etching and resist removal, and ultrapure water cleaning. These processes require heating acid and alkali solutions, chemical solutions, pure water or ultrapure water to improve the cleaning effect and speed by increasing the temperature of the cleaning liquid.

[0003] Currently, the liquid flow rate in semiconductor wet cleaning equipment is relatively large. In order to meet the heating efficiency, the heating tube is designed in a spiral shape. Since the fluid heating equipment needs to heat a large flow rate of fluid, if the assembly structure between the heating tube and the shell is not designed properly, the overall weight of the heating tube will cause damage to the equipment. Utility Model Content

[0004] The purpose of this invention is to solve one of the problems pointed out in the background art, and to propose a heating component.

[0005] To achieve the above objectives, the present invention adopts the following technical solution:

[0006] A heating assembly includes a housing and a heating element, the heating element comprising a spiral tube portion and a straight tube portion located at the end of the spiral tube portion, the housing having a receiving cavity, the spiral tube portion being located within the receiving cavity, at least a portion of the straight tube portion being located extending out of the housing, the heating assembly including a support member abutting against the spiral tube portion, at least a portion of the support member being located between the spiral tube portion and the housing.

[0007] The heating assembly proposed in this utility model has the following advantages: at least a portion of the straight tube extends out of the outer shell for connecting external equipment. A support member is provided, and the support member abuts against the spiral tube. At the same time, at least a portion of the support member is located between the spiral tube and the outer shell. This structure can form an effective supporting force between the spiral tube and the outer shell, reducing the probability of breakage due to excessive weight of the heating element and improving the safety performance during equipment use and transportation. Attached Figure Description

[0008] Figure 1 This is a three-dimensional structural diagram of one embodiment of the present utility model;

[0009] Figure 2 This is a schematic diagram of the internal main structure of one embodiment of the present invention. Figure 1;

[0010] Figure 3 This is a schematic diagram of the internal three-dimensional structure of one embodiment of the present invention;

[0011] Figure 4 This is a schematic diagram of the internal main structure of one embodiment of the present invention. Figure 2 ;

[0012] Figure 5 This is a schematic diagram of an embodiment of the present invention, showing a cylindrical section with an arc-shaped piece combination structure.

[0013] Figure 6 This is a schematic diagram of the internal three-dimensional structure of one embodiment of the present invention;

[0014] Figure 7 This is a schematic diagram of the internal main structure of one embodiment of the present invention. Figure 3 ;

[0015] Figure 8 This is a schematic diagram of the cover plate structure according to one embodiment of the present utility model;

[0016] Figure 9 This is a schematic diagram of the mounting hole configuration structure in one embodiment of the present invention.

[0017] In the diagram: 1. Outer shell; 2. Side plate; 3. Straight tube section; 4. Limiting cover; 5. Heating tube; 6. Spiral tube section; 7. Support pad; 8. Base plate; 9. Support cylinder; 10. Cover plate; 11. Cylinder section; 12. Arc-shaped piece; 13. First half ring; 14. Second half ring; 15. Clamp; 16. Through hole; 17. Main body section; 18. Ear section; 19. Mounting hole; 20. Support component; 21. Receiving cavity. Detailed Implementation

[0018] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present utility model. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments.

[0019] Reference Figures 1-9 A heating assembly includes a housing 1 and an electric heating tube 5. The electric heating tube 5 includes a spiral tube portion 6 and a straight tube portion 3 located at the end of the spiral tube portion 6. The housing 1 has a receiving cavity 21. The spiral tube portion 6 is located in the receiving cavity 21. At least a portion of the straight tube portion 3 is located extending out of the housing 1. The heating assembly includes a support member 20. The support member 20 abuts against the spiral tube portion 6. At least a portion of the support member 20 is located between the spiral tube portion 6 and the housing 1.

[0020] This device has at least a portion of the straight tube section 3 extending out of the outer casing 1 for connecting external equipment, and provides a support member 20 that abuts against the spiral tube section 6. At the same time, at least a portion of the support member 20 is located between the spiral tube section 6 and the outer casing 1. This structure can create an effective supporting force between the spiral tube section 6 and the outer casing 1, reducing the probability of breakage due to excessive weight of the heating element and improving the safety performance during equipment use and handling.

[0021] As one implementation method, the heating element 5 is a quartz tube. Quartz tubes are relatively pure and will not contaminate the liquid when used in semiconductor heating equipment.

[0022] As one implementation method, refer to Figure 2 The support member 20 includes a support pad 7, and the outer shell 1 includes a base plate 8. One end of the support pad 7 abuts against the base plate 8, and the other end of the support pad 7 abuts against the end of the spiral tube section 6.

[0023] The support pad 7 is placed between the spiral tube section 6 and the base plate 8. In one embodiment, the side of the support pad 7 closest to the spiral tube section 6 can be shaped to match the outer wall of the spiral tube section 6, thereby increasing the contact area with the spiral tube section 6. In another embodiment, the support pad 7 can be made of a flexible material, which can provide elastic support and better adapt to the shape of the outer wall of the spiral tube section 6. In another embodiment, the support pad 7 is placed between the bottom end of the spiral tube section 6 and the bottom plate of the outer casing, and between the top end of the spiral tube section 6 and the top plate of the outer casing, to prevent damage to the heating element 5 caused by vibration during transportation.

[0024] As one implementation method, refer to Figure 3 The support member 20 includes a support cylinder 9, which is sleeved on the outer periphery of the spiral tube section 6. At least part of the outer wall of the spiral tube section 6 abuts against the inner wall of the support cylinder 9, and the support cylinder 9 is fixed to or abuts against the outer shell 1.

[0025] In one embodiment, the support cylinder 9 holds the spiral tube section 6, and the support cylinder 9 is fixedly disposed to the outer shell 1, for example, by means of a clamp to fix the support cylinder 9 to the outer shell. The friction between the inner wall of the support cylinder 9 and the outer wall of the spiral tube section 6 provides support for the spiral tube section 6 and the outer shell 1.

[0026] In one embodiment, the outer casing 1 includes a base plate 8, a support cylinder 9 that holds the spiral tube portion 6, and the bottom end of the support cylinder 9 is supported on the base plate 8; furthermore, the outer casing also has a top plate, and the top end of the support cylinder 9 abuts against the top plate, which can prevent the support cylinder 9 from shaking inside the outer casing.

[0027] In one embodiment, a cover plate 10 is installed at least below the spiral tube section 6 on the support cylinder 9. The spiral tube section 6 can be supported by friction with the support cylinder 9, or it can be supported by the cover plate, so that the cover plate serves as an indirect support between the spiral tube section 6 and the support cylinder 9.

[0028] During the production of the heating element 5, the straightness of the spiral tube section 6 varies. As one implementation method, refer to... Figure 4 The support cylinder 9 includes at least two cylinder sections 11, which are stacked along their axial direction, and at least a portion of the inner wall of each cylinder section 11 abuts against at least a portion of the wall of the spiral tube section 6.

[0029] The spiral tube section 6 is supported by a combination of multiple cylinder sections 11. This reduces the impact of the straightness difference of the spiral tube section 6 on the support effect of the support cylinder 9, increases the support force, and reduces the manufacturing precision requirements of the spiral tube section 6.

[0030] During the production of the heating element 5, the spiral diameter tolerance of the spiral tube section 6 varies. The cylinder section 11 includes at least two arc-shaped plates 12, which are distributed in a ring. Two adjacent cylinder sections 11 are defined as the first cylinder and the second cylinder, respectively. At least a portion of the end of the arc-shaped plate 12 of the first cylinder facing the second cylinder abuts against at least a portion of the end of the arc-shaped plate 12 of the second cylinder along the axial direction of the cylinder section 11. At least a portion of the inner wall of each arc-shaped plate 12 abuts against at least a portion of the wall of the spiral tube section 6.

[0031] In one embodiment, multiple cylindrical sections 11 are stacked along their axial direction, with the two cylindrical sections 11 located at both ends abutting against the bottom plate and top plate of the outer shell, respectively. This device applies axial pressure to the cylindrical sections 11 through the bottom plate and top plate, and uses axial pressure to prevent the multiple arc-shaped pieces 12 of the cylindrical sections 11 from moving away from the spiral tube section.

[0032] As another implementation method, refer to Figure 6 Multiple cylindrical sections 11 are stacked along their axial direction. At least two cylindrical sections 11 located at both ends are fixed to the outer shell by clamps. The clamps form a stable cylindrical structure with the cylindrical sections 11 of the arc-shaped piece 12 structure. Then, the stable cylindrical structure is used to apply axial pressure to the cylindrical section 11 of the arc-shaped piece 12 structure in the middle without clamps. The axial pressure is used to prevent the multiple arc-shaped pieces 12 of the cylindrical section 11 from moving away from the spiral tube section.

[0033] The cylindrical part 11 of this device is formed by combining multiple arc-shaped pieces 12 to avoid radial stress fracture of the spiral tube part 6. The multiple arc-shaped pieces 12 can be abutted together by overlapping in an up-down staggered manner.

[0034] As one implementation method, refer to Figure 6The heating assembly includes a clamp 15, which includes a first half-ring 13 and a second half-ring 14. The first half-ring 13 and the second half-ring 14 are assembled and connected, and the cylindrical part 11 is limited and installed between the first half-ring 13 and the second half-ring 14. At least a portion of the inner wall of the first half-ring 13 and the second half-ring 14 abuts against at least a portion of the outer wall of the cylindrical part 11. At least a portion of the inner wall of the cylindrical part 11 abuts against at least a portion of the outer wall of the spiral tube part 6. The clamp 15 is fixed to the outer shell 1.

[0035] The clamp 15 can improve the support performance of the support cylinder 9 and the outer shell, and can also better fasten multiple arc-shaped pieces 12 together.

[0036] As a way of fixing the clamp 15 to the outer shell, the outer side of the first half ring 13 has a threaded hole, and the screw passes through the outer shell and is fixed to the threaded hole of the first half ring 13.

[0037] As another way of fixing the clamp 15 to the outer shell, the outer side of the first half ring 13 has a threaded column, and the outer shell has a threaded hole. The first half ring 13 is directly fixed to the outer shell through the threaded column and the threaded hole of the outer shell.

[0038] The heating assembly includes a cover plate 10, which includes a main body 17 and an ear portion 18 located around the main body 17. A mounting hole 19 is provided around the support cylinder 9 and at the end of the spiral tube portion 6. The main body 17 covers the end of the support cylinder 9 and the ear portion 18 is supported in the mounting hole 19.

[0039] By sealing both ends of the support cylinder 9 with the cover plate 10, the spiral tube section 6 can be sealed in the cavity formed by the support cylinder 9 and the cover plate 10, thus better protecting the spiral tube section 6.

[0040] In one embodiment, at least part of the end of the spiral tube section 6 abuts against the cover plate 10. The cover plate 10 not only serves as a chamber cover, but also provides some support for the spiral tube section 6, thereby improving the support performance between the spiral tube section 6 and the support cylinder 9.

[0041] As one assembly method of the limiting cover 4, the heating assembly includes the limiting cover 4, the outer shell 1 includes a side plate 2, the side plate 2 has a through hole 16, the straight tube part 3 passes through the through hole 16, the limiting cover 4 is fixed on the side plate 2 away from the spiral tube part 6, the straight tube part 3 and the limiting cover 4 are limited and assembled, and the limiting cover 4 abuts against the straight tube part 3.

[0042] The diameter of the through hole 16 is larger than the diameter of the straight tube 3, which allows the straight tube 3 to pass through the side plate 2 more easily. Then, the straight tube 3 is fitted with the limiting cover 4 with a clearance fit or an interference fit. Finally, the limiting cover 4 is fixed to the side plate 2 to support the straight tube 3. As an assembly method, the straight tube 3 is first passed through the through hole 16, and then the limiting cover 4 is put on the straight tube 3. Then, holes are drilled in the side plate 2 according to the fixing holes on the limiting cover 4. Finally, the limiting cover 4 is fixed to the side plate with screws. This assembly method is more precise.

[0043] As one implementation method, the support cylinder 9 is made of mica material. Mica can directly contact the heating element and is not easily damaged by heat, while providing stable support.

[0044] In one embodiment, the heating assembly of this device is used in a semiconductor device, and the straight tube 3 is connected to the main body of the semiconductor device.

[0045] For semiconductor equipment with high flow rate requirements, such as semiconductor cleaning equipment, the required fluid flow rate is large, the overall size of the heating component is relatively large, and the heating tube itself is relatively heavy. When flowing liquid is introduced into the heating tube, the overall weight is even greater. The heating component of this device has a support structure, which can be better applied to the above-mentioned equipment.

[0046] The above description is only a preferred embodiment of the present utility model, but the protection scope of the present utility model is not limited thereto. Any technical solution, concept, or design obtained by those skilled in the art by making equivalent substitutions or changes based on the technical solution and utility model concept disclosed in the present utility model should be included within the protection scope of the present utility model.

Claims

1. A heating assembly, characterized by, The heating assembly comprises a shell (1), an electric heating tube (5), the electric heating tube (5) comprises a spiral tube part (6) and a straight tube part (3) at the end of the spiral tube part (6), the shell (1) has a containing cavity (21), the spiral tube part (6) is located in the containing cavity (21), at least part of the straight tube part (3) is located outside the shell (1), the heating assembly comprises a support (20), the support (20) abuts against the spiral tube part (6), at least part of the support (20) is located between the spiral tube part (6) and the shell (1).

2. A heating assembly according to claim 1, wherein, The support (20) comprises a support pad (7), the shell (1) comprises a bottom plate (8), one end of the support pad (7) abuts against the bottom plate (8), the other end of the support pad (7) abuts against the end of the spiral tube part (6).

3. A heating assembly according to claim 1, wherein, The support (20) comprises a support cylinder (9), the support cylinder (9) is sleeved on the outer circumferential side of the spiral tube part (6), at least part of the outer wall of the spiral tube part (6) abuts against the inner wall of the support cylinder (9), and the support cylinder (9) is fixed to or abuts against the shell (1).

4. A heating assembly according to claim 3, wherein, The support cylinder (9) comprises at least two cylinder parts (11), the at least two cylinder parts (11) are laminated, and at least part of the inner wall of each cylinder part (11) abuts against at least part of the wall of the spiral tube part (6).

5. A heating assembly according to claim 4, wherein, The cylinder part (11) comprises at least two arc-shaped pieces (12), the at least two arc-shaped pieces (12) are distributed in a ring shape, adjacent two cylinder parts (11) are defined as a first cylinder and a second cylinder, respectively, and at least part of the arc-shaped piece (12) of the first cylinder faces at least part of the end of the arc-shaped piece (12) of the second cylinder in the axial direction of the cylinder part (11), and at least part of the inner wall of each arc-shaped piece (12) abuts against at least part of the wall of the spiral tube part (6).

6. A heating assembly according to claim 4 or 5, wherein, The heating assembly comprises a clamp (15), the clamp (15) comprises a first half ring (13) and a second half ring (14), the first half ring (13) and the second half ring (14) are assembled and connected, and the cylinder part (11) is positioned and installed between the first half ring (13) and the second half ring (14), at least part of the inner wall of the first half ring (13) and the second half ring (14) abuts against at least part of the outer wall of the cylinder part (11), at least part of the inner wall of the cylinder part (11) abuts against at least part of the outer wall of the spiral tube part (6), and the clamp (15) is fixed to the shell (1).

7. A heating assembly according to any one of claims 3 to 5, wherein, The heating assembly comprises a cover plate (10), the cover plate (10) comprises a main body part (17) and an ear part (18) located on the circumferential side of the main body part (17), an installation hole (19) is formed in the circumferential side of the support cylinder (9) and at the end of the spiral tube part (6), the main body part (17) covers the end of the support cylinder (9), and the ear part (18) is supported in the installation hole (19).

8. A heating assembly according to claim 7, wherein, At least part of the end of the spiral tube part (6) abuts against the cover plate (10).

9. A heating assembly according to any of claims 1-5, 8, wherein, The heating assembly comprises a limiting cover (4), the shell (1) comprises a side plate (2) provided with a through hole (16), the straight pipe part (3) penetrates through the through hole (16), the limiting cover (4) is fixed on the side plate (2) far away from the spiral pipe part (6), the straight pipe part (3) is limitedly assembled with the limiting cover (4), and the limiting cover (4) abuts against the straight pipe part (3).

10. A heating assembly according to any of claims 3-5, 8, wherein, The heating assembly is used for a semiconductor device, and the straight pipe part (3) is connected with a main body of the semiconductor device.

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