Anti-static floor pressure detection device

Abstract

The utility model discloses an anti-static floor pressure detection device, comprising a pedestal on which an assembled anti-static floor is carried; the pressure applying structure is installed on the base in a sliding mode and comprises a pressure applying piece, a weight disc, a force applying rod and universal wheels, the pressure applying piece is located above the anti-static floor and used for applying pressure to the force applying rod, the force applying rod is perpendicular to the anti-static floor, the universal wheels are installed at the lower end of the force applying rod, and the universal wheels make rolling contact with the upper surface of the anti-static floor. The force application rod can also bear a weight disc. Fixed pressure is applied to the anti-static floor through the pressure applying piece on the pressure applying structure, pressure adjustment can be additionally carried out by increasing or reducing the weight pans, on one hand, fixed-point pressure applying can be carried out for detection, and on the other hand, through moving the pressure applying structure and matching with rolling flexibility of the universal wheels, the detection accuracy is improved. The free rolling state of the material trolley is effectively simulated, the detection precision is improved, and the detection effect is optimized.

Description

Technical Field

[0001] This utility model belongs to the field of floor testing technology, specifically relating to an antistatic floor pressure testing device. Background Technology

[0002] Semiconductor processing requires extremely high environmental standards, therefore semiconductor workshops must maintain a dust-free environment and implement effective anti-static measures. As a result, anti-static raised floors are widely used in semiconductor processing workshops.

[0003] Installing large processing equipment on the floor requires the floor to have a certain load-bearing capacity and to support the movement of workers and material carts.

[0004] Existing antistatic flooring typically uses a hydraulic mechanism to apply pressure to the floor during pressure testing to determine its pressure resistance. However, this testing method can only measure the pressure resistance of a single point on the floor, resulting in inaccurate results, and it cannot detect the floor's condition under conditions such as material cart movement. Utility Model Content

[0005] This utility model aims to solve at least one of the technical problems existing in the prior art.

[0006] Therefore, this utility model proposes an antistatic floor pressure detection device, which has the advantage of being able to detect the pressure of the floor under various usage conditions.

[0007] According to an embodiment of the present invention, an antistatic floor pressure detection device includes: a base on which an assembled antistatic floor is supported; and a pressure applying structure slidably mounted on the base, the pressure applying structure including a pressure applying component, a weight pan, a force applying rod, and casters. The pressure applying component is located above the antistatic floor and is used to apply pressure to the force applying rod. The force applying rod is perpendicular to the antistatic floor, and a caster is installed at the lower end of the force applying rod. The caster makes rolling contact with the upper surface of the antistatic floor, and the force applying rod can also support the weight pan.

[0008] According to one embodiment of the present invention, tracks are provided on both the left and right sides of the upper surface of the base, and the pressure-applying structure is slidably connected to the tracks via a bracket.

[0009] According to one embodiment of the present invention, a first movable seat plate and a second movable seat plate are slidably disposed on the bracket, the first movable seat plate is located above the second movable seat plate, and the movement directions of the first movable seat plate and the second movable seat plate are perpendicular to the movement direction of the bracket.

[0010] According to one embodiment of the present invention, the pressure-applying member is installed on the first movable seat plate, the force-applying rod is installed on the second movable seat plate, and the force-applying rod is slidably connected to the second movable seat plate in the vertical direction.

[0011] According to one embodiment of the present invention, the force-applying rod is provided with a mounting plate for mounting the weight pan, and the mounting plate is located between the first movable seat plate and the second movable seat plate.

[0012] According to one embodiment of the present invention, the number of weight pans is adjustable.

[0013] According to one embodiment of the present invention, the output end of the pressure-applying member is detachably connected to the force-applying rod.

[0014] The beneficial effects of this utility model are that it uses a base to place the assembled antistatic floor and applies pressure to the antistatic floor through the pressure-applying components on the pressure-applying structure. At the same time, the pressure can be adjusted by adding or removing weight pans. On the one hand, pressure can be applied at a fixed point for detection. On the other hand, by moving the pressure-applying structure and using the rolling flexibility of the casters, the free rolling state of the material cart can be effectively simulated, which improves the detection accuracy and optimizes the detection effect.

[0015] Other features and advantages of this invention will be set forth in the description which follows, and will be apparent in part from the description, or may be learned by practicing the invention. The objectives and other advantages of this invention are realized and obtained through the structures particularly pointed out in the description, claims, and drawings.

[0016] To make the above-mentioned objectives, features and advantages of this utility model more apparent and understandable, preferred embodiments are described below in detail with reference to the accompanying drawings. Attached Figure Description

[0017] The above and / or additional aspects and advantages of this utility model will become apparent and readily understood from the following description of the embodiments with accompanying drawings, in which:

[0018] Figure 1 This is a three-dimensional structural diagram based on the present utility model;

[0019] Figure 2 This is a three-dimensional structural diagram based on the present utility model;

[0020] Figure 3 This is a schematic diagram of the main structure of this utility model;

[0021] Figure label:

[0022] 1. Base; 2. Pressure-applying structure; 3. Anti-static floor; 11. Track; 21. Bracket; 22. First movable seat plate; 23. Second movable seat plate; 24. Pressure-applying component; 25. Weight pan; 26. Force-applying rod; 27. Casters. Detailed Implementation

[0023] The embodiments of this utility model are described in detail below. Examples of these embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain this utility model, and should not be construed as limiting this utility model.

[0024] In the description of this utility model, it should be understood that the terms "center," "longitudinal," "transverse," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," "counterclockwise," "axial," "radial," and "circumferential," etc., indicating the orientation or positional relationship shown in the accompanying drawings, are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model. Furthermore, features defined with "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this utility model, unless otherwise stated, "a plurality of" means two or more.

[0025] In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0026] The antistatic floor pressure detection device of this utility model embodiment is described in detail below with reference to the accompanying drawings.

[0027] like Figures 1-3As shown, the antistatic floor pressure detection device according to an embodiment of this utility model includes: a base 1 and a pressure applying structure 2. The base 1 supports an assembled antistatic floor 3. The pressure applying structure 2 is slidably mounted on the base 1 and includes a pressure applying component 24, a weight pan 25, a force applying rod 26, and casters 27. The pressure applying component 24 is located above the antistatic floor 3 and is used to apply pressure to the force applying rod 26. The force applying rod 26 is perpendicular to the antistatic floor 3. Casters 27 are installed at the lower end of the force applying rod 26 and roll in contact with the upper surface of the antistatic floor 3. The force applying rod 26 can also support the weight pan 25. Specifically, the number of weight pans 25 is adjustable.

[0028] In other words, traditional pressure testing devices can only perform single-point pressure testing. However, in this application, multiple antistatic flooring units 3 on the base 1 are assembled according to the actual usage state. The pressure applying component 24 applies pressure to the antistatic flooring units 3 to fix the pressure. At the same time, the pressure is further adjusted by adding or removing weight pans 25. Furthermore, by moving the power source for applying pressure, in conjunction with the rolling action of the casters 27, the simulation of the material cart is achieved, thus ensuring the testing effect.

[0029] In addition, the pressure-applying component 24 in this application is a hydraulic rod, electric cylinder, pneumatic cylinder, etc. In order to avoid the pressure applied by the pressure-applying component 24 changing during multiple uses and pressure adjustment, this application applies a constant pressure and uses a weight pan 25 to adjust the pressure, thus ensuring the accuracy of the applied force.

[0030] In this embodiment, rails 11 are provided on both the left and right sides of the upper surface of the base 1, and the pressure structure 2 is slidably connected to the rails 11 through the bracket 21.

[0031] Furthermore, a first movable seat plate 22 and a second movable seat plate 23 are slidably disposed on the bracket 21. The first movable seat plate 22 is located above the second movable seat plate 23, and the movement directions of the first movable seat plate 22 and the second movable seat plate 23 are perpendicular to the movement direction of the bracket 21.

[0032] In this embodiment, the first movable seat plate 22 and the second movable seat plate 23 can maintain synchronous movement, thereby ensuring that the pressure member 24 applies a vertical force through the force application rod 26.

[0033] Of course, the output end of the pressure applying element 24 is detachably connected to the force applying rod 26. That is to say, when the pressure applying element 24 fails, the output end of the pressure applying element 24 can be disconnected from the force applying rod 26, and pressure can be detected simply by adjusting the weight pan 25.

[0034] According to one embodiment of the present invention, the pressure-applying member 24 is installed on the first movable seat plate 22, the force-applying rod 26 is installed on the second movable seat plate 23, and the force-applying rod 26 and the second movable seat plate 23 are slidably connected in the vertical direction.

[0035] Based on this, the force-applying rod 26 is provided with a mounting plate for installing the weight pan 25, and the mounting plate is located between the first movable seat plate 22 and the second movable seat plate 23.

[0036] In other words, the antistatic floor 3 may dent downwards after being pressed, so the force-applying rod 26 needs to be able to move up and down relative to the second movable seat plate 23. The mounting plate on the force-applying rod 26 can also limit the force-applying rod 26 to prevent it from falling.

[0037] During testing, the assembled antistatic floor 3 is placed on the base 1, and pressure is applied to the antistatic floor 3 by the pressure-applying component 24 on the pressure-applying structure 2. The pressure can be adjusted by adding or removing weights 25. On the one hand, pressure can be applied at a fixed point for testing. On the other hand, the movable bracket 21, the first movable seat plate 22 and the second movable seat plate 23, together with the rolling flexibility of the casters 27, allow for free pressure testing of the entire assembled surface of the antistatic floor 3. This effectively simulates the free rolling state of the material cart, improving the testing accuracy and optimizing the testing effect. After the pressure test, the quality of the floor is judged by observing whether the antistatic floor 3 is deformed.

[0038] In the description of this specification, the references to terms such as "one embodiment," "some embodiments," "illustrative embodiment," "example," "specific example," or "some examples," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of the present invention. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples.

[0039] Although embodiments of the present invention have been shown and described, those skilled in the art will understand that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the claims and their equivalents.

Claims

1. An anti-static floor pressure detection apparatus, characterized by, The utility model relates to an anti-static floor assembly device, which comprises: a base (1) on which an assembled anti-static floor (3) is carried; a pressure applying structure (2) which is slidingly installed on the base (1), the pressure applying structure (2) comprising a pressure applying piece (24), a weight disc (25), a force applying rod (26) and a universal wheel (27), the pressure applying piece (24) being located above the anti-static floor (3) and used for applying pressure to the force applying rod (26), the force applying rod (26) being perpendicular to the anti-static floor (3), a lower end of the force applying rod (26) being provided with the universal wheel (27), the universal wheel (27) being in rolling contact with an upper surface of the anti-static floor (3), and the force applying rod (26) further carrying the weight disc (25).

2. The anti-static floor pressure detection apparatus according to claim 1, wherein Both left and right sides of an upper surface of the base (1) are provided with rails (11), and the pressure applying structure (2) is slidingly connected with the rails (11) through a support (21).

3. The anti-static floor pressure detection apparatus according to claim 2, wherein The support (21) is slidingly provided with a first movable seat plate (22) and a second movable seat plate (23), the first movable seat plate (22) being located above the second movable seat plate (23), and the first movable seat plate (22) and the second movable seat plate (23) being perpendicular to the support (21) in the direction of movement.

4. The anti-static floor pressure detection apparatus according to claim 3, wherein The pressure applying piece (24) is installed on the first movable seat plate (22), the force applying rod (26) is installed on the second movable seat plate (23), and the force applying rod (26) is slidingly connected with the second movable seat plate (23) in the vertical direction.

5. The anti-static floor pressure detection apparatus according to claim 4, wherein The force applying rod (26) is provided with a mounting disc for mounting the weight disc (25), and the mounting disc is located between the first movable seat plate (22) and the second movable seat plate (23).

6. The anti-static floor pressure detection apparatus according to claim 1, wherein The number of the weight discs (25) can be adjusted.

7. The anti-static floor pressure detection apparatus according to claim 1, wherein An output end of the pressure applying piece (24) is detachably connected with the force applying rod (26).

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