Laser-induced droplet deposition device

Abstract

The utility model provides a laser-induced droplet deposition device which comprises a deposition assembly, the deposition assembly comprises a connecting piece, a plurality of droplet spraying assemblies connected to the connecting piece and a laser assembly, and the droplet spraying assemblies are arranged on the periphery of the laser assembly. According to the device, the plurality of liquid drop ejectors are matched with the laser for operation, so that accurate circuit patterns can be quickly deposited on the substrate with fewer consumables, and the obtained product is high in precision and low in production cost.

Description

Technical Field

[0001] This utility model relates to the field of electronic circuit technology, and in particular to a laser-induced droplet deposition device. Background Technology

[0002] With the rapid development of manufacturing and scientific technologies, the market demand for printed circuit boards (PCBs) has gradually expanded along with industrial upgrading, giving rise to the demand for manufacturing metal circuits on insulating materials such as glass and ceramics, and also generating corresponding processing technologies. However, current processes for fabricating microcircuits on substrates and other materials have disadvantages such as high production costs, cumbersome manufacturing procedures, poor fabrication precision, and the need to add additional electrode materials.

[0003] Laser-induced liquid phase deposition (LAD) is a technique that uses laser energy to induce material deposition in a liquid environment. By focusing laser energy onto a liquid system, the substances in the liquid absorb the energy. In certain chemical solutions, the laser energy can trigger chemical reactions or alter the physical state of the substances. During this process, the photon energy of the laser may excite molecules or ions in the liquid, giving them sufficient energy to participate in the deposition process. For example, when a laser irradiates the surface of a substrate in contact with the deposition solution, it generates a thermal effect, locally heating the deposition solution, activating redox reactions, and inducing copper deposition. This technique is simple to process, has low manufacturing costs, high precision, and produces good deposition quality. Compared to traditional chemical copper plating, LAD not only eliminates the need for masks and pretreatment but also allows for the deposition of thicker copper layers in a shorter time.

[0004] Chinese invention patent CN110565130A discloses a "laser-enhanced three-dimensional micro-area electrodeposition device," which integrates laser irradiation into a microtube-based micro-area electrodeposition device to achieve an enhanced deposition rate through laser-assisted deposition. However, this device employs a single-outlet liquid discharge design, meaning the deposition rate is still affected by the liquid discharge rate, preventing further improvements. Therefore, there is an urgent need to research a laser-induced liquid phase deposition device with a fast liquid discharge rate, low production cost, and high precision. Summary of the Invention

[0005] This invention addresses the shortcomings of existing technologies by providing a laser-induced droplet deposition device. By utilizing a droplet jetting component in conjunction with a laser component, precise circuit patterns can be rapidly deposited on a substrate with minimal consumables, resulting in high-precision products and low production costs.

[0006] This invention provides a laser-induced droplet deposition device, including a deposition component. The deposition component includes a connector, a plurality of droplet ejection components connected to the connector, and a laser component. The plurality of droplet ejection components are disposed around the laser component.

[0007] The deposition assembly is a device for depositing metal ions to create circuits. Multiple droplet jetting assemblies are connected to containers containing deposition liquid, which can spray small amounts of the deposition liquid onto the substrate to be deposited, avoiding the waste of excess material. Furthermore, the jetting points of the multiple droplet jetting assemblies are all located below the laser assembly, ensuring that the irradiation point of the laser assembly is covered by the deposition liquid. Next, the laser assembly can emit a high-energy beam to activate the redox reaction in the deposition liquid, causing the metal ions in the deposition liquid to deposit into circuit patterns on the substrate.

[0008] In a preferred embodiment of this invention, the droplet jetting assembly includes a droplet nozzle, a liquid reservoir connected to the droplet nozzle, and a liquid guide port located on the liquid reservoir. One end of the liquid reservoir is connected to the connector. A liquid storage chamber and a liquid guide pipe are formed in the liquid reservoir. The liquid guide pipe communicates with the liquid storage chamber and the droplet nozzle. The liquid storage chamber communicates with the liquid guide port.

[0009] The reservoir's storage chamber is used to store the deposited liquid to be sprayed. The droplet spraying assembly can obtain the deposited liquid from the external container through the liquid guide port on the reservoir, and use the liquid guide tube in the droplet nozzle to make the deposited liquid spray out in a uniform thin strip under the action of gravity, so as to control the amount of deposited liquid used.

[0010] In a preferred embodiment of this invention, one end of the liquid guide tube is provided with a liquid control port, which is connected to the liquid storage cavity.

[0011] The liquid control port is a conical opening. When the deposition liquid enters the liquid guide tube due to gravity, a uniformly distributed pressure reaction is generated on the wall of the liquid control port, which makes the deposition liquid form a stable and consistent liquid column in the liquid guide tube, thereby ensuring that the ejected deposition liquid can be continuous and stable, and thus the deposition liquid on the substrate can be continuous.

[0012] In a preferred embodiment of this invention, the liquid reservoir has a through-hole, and the droplet ejection assembly further includes a flow rate control component. One end of the flow rate control component is connected to the connector, and the other end is rotatably connected to the through-hole. The flow rate control component passes through the through-hole and abuts against the liquid control port.

[0013] The reservoir has an internal thread in its through-hole, and the flow control component has an external thread. The reservoir and the flow control component are threaded together, thus connecting the reservoir and the droplet nozzle to the connector. The connection depth between these two components controls the tightness of the flow control component against the liquid control port, thereby controlling the amount of deposited liquid entering the guide tube and adjusting the outflow rate.

[0014] In a preferred embodiment of this invention, a hydraulic valve is provided in the droplet nozzle, and the hydraulic valve is connected to the liquid guide tube and the droplet nozzle.

[0015] The hydraulic valve, located between the liquid guide tube of the reservoir and the droplet nozzle, increases the liquid outlet pressure to control the liquid outlet rate. The droplet injection assembly first adjusts the injection speed of the deposited liquid through the contact gap between the liquid control port in the reservoir and the flow rate control component. Then, the hydraulic valve further precisely controls the liquid outlet rate to achieve high-precision adjustment.

[0016] In a preferred embodiment of this invention, the connector includes a rotating shaft and a housing. One end of the rotating shaft is rotatably connected to the housing, and the other end is fixed with the laser assembly and the droplet jet assembly.

[0017] The outer casing is fitted onto one end of the rotating shaft, and the rotating shaft and the outer casing are rotatably connected to adjust the position of the droplet ejection component. In this way, the ejection position of the deposition liquid can be changed by rotating the shaft, thereby changing the moving direction of the deposition component and realizing a multi-angle deposition path.

[0018] In a preferred embodiment of this invention, a movable component is further included. The movable component includes a base and a frame, with the frame fixed to the base. A Y-axis guide rail and a worktable are provided on the top of the base. The worktable is slidably connected to the Y-axis guide rail. An X-axis guide rail is provided on the frame. A movable seat is slidably connected to the X-axis guide rail. A Z-axis guide rail is provided on the movable seat, and the Z-axis guide rail is slidably connected to the outer casing.

[0019] The base and frame are each equipped with a motor that controls the three-axis movement of the deposition components, and all motors are electrically connected to the control system. This design gives the worktable one degree of freedom and the moving base two degrees of freedom, allowing the device to further adjust the liquid outlet position and flexibly respond to complex graphic designs for corresponding production activities. Furthermore, combined with the high precision characteristics of the device, it can achieve high-resolution graphic deposition manufacturing.

[0020] In a preferred embodiment of this invention, the connector is provided with two droplet ejection components, which are symmetrically arranged about the laser component.

[0021] The axes of the two droplet ejection components intersect at an angle, and the laser component irradiation point is located at the angle. This symmetrical layout ensures that droplets are ejected from both sides of the laser component and evenly distributed on the central deposition area irradiated by the laser component, avoiding the deposition liquid from concentrating on one side and ensuring the uniformity of the coating.

[0022] In a preferred embodiment of this invention, the laser assembly has a laser head, and the droplet nozzle and the laser head are disposed on the same horizontal plane.

[0023] Because laser beams have divergence, in order to ensure the energy required for inducing deposition liquid, the laser component is usually set close to the top of the substrate and adjusted to an appropriate distance to avoid losing too much energy due to excessive irradiation distance. At this time, setting the droplet nozzle at the same level as the laser head can ensure that the droplet nozzle is also close to the substrate, so that the deposition liquid is sprayed out and falls accurately on the predetermined pattern line.

[0024] In a preferred embodiment of this invention, the laser assembly is provided with a plurality of laser heads, the axes of which intersect directly below the laser assembly.

[0025] The laser assembly utilizes multiple laser heads to set multiple laser beams, thereby enabling single-laser or multi-laser scanning and improving the deposition rate.

[0026] The specific implementation process is as follows: The operator places the substrate horizontally on the worktable, allowing the liquid reservoir to receive the deposition solution from the outside. Then, the operator designs the overall movement path of the deposition assembly according to the required pattern. Next, the control system sets the program, aligns the laser assembly and the droplet jet assembly with the movement path, and begins operation. During operation, the droplet jet assembly evenly sprays the deposition solution onto the movement path, while the laser assembly irradiates the substrate, causing the metal lines to be deposited on the substrate. Alternatively, at startup, only the droplet jet assembly is activated to dispense the solution. Once the complete pattern on the substrate is covered with the deposition solution, the laser assembly is activated, focusing and depositing along the movement path to finally obtain the completed pattern.

[0027] This utility model has at least the following beneficial effects:

[0028] This invention provides a laser-induced droplet deposition apparatus. The apparatus includes a droplet jetting component for providing the deposition solution and a laser component for providing a laser beam. Multiple droplet jetting components jet the deposition solution onto a predetermined patterned line, causing droplets to form thin strips on a substrate. Simultaneously, the laser component irradiates the surface of the deposition solution in contact with the substrate, generating a thermal effect that locally heats the deposition solution, activating a redox reaction and causing ions in the deposition solution to deposit and form the line. Alternatively, the same effect can be achieved by first jetting the deposition solution onto the line using droplet jetting components, followed by laser irradiation. This apparatus offers a high liquid dispensing speed, enabling rapid line deposition. Furthermore, the precise liquid dispensing from the droplet jetting components reduces material waste and avoids the challenges of complex post-processing. Attached Figure Description

[0029] Figure 1 This is a three-dimensional schematic diagram of the laser-induced droplet deposition device provided in this application;

[0030] Figure 2 This is a front view of the laser-induced droplet deposition apparatus provided in this application;

[0031] Figure 3 This is a structural schematic diagram of the connector provided in this application;

[0032] Figure 4 This is a cross-sectional view along the height direction of the deposition assembly provided in this application.

[0033] Figure label:

[0034] 1. Deposition assembly; 11. Connector; 111. Rotating shaft; 112. Housing; 12. Droplet ejection assembly; 121. Droplet nozzle; 122. Liquid reservoir; 123. Liquid storage chamber; 13. Laser assembly; 131. Laser head; 2. Worktable; 3. Liquid guide port;

[0035] 4. Liquid guide tube; 41. Liquid control port;

[0036] 5. Flow rate control components;

[0037] 6. Hydraulic valves;

[0038] 7. Machine base; 71. Y-axis guide rail;

[0039] 8. Frame; 81. X-axis guide rail; 82. Moving base; 821. Z-axis guide rail. Detailed Implementation

[0040] Preferred embodiments of the present invention will now be described in more detail with reference to the accompanying drawings. While preferred embodiments of the present invention are shown in the drawings, it should be understood that the present invention may be implemented in various forms and should not be limited to the embodiments set forth herein. Rather, these embodiments are provided so that the present invention will be thorough and complete, and will fully convey the scope of the present invention to those skilled in the art.

[0041] In the description of this utility model, the terms "upper", "lower", "left" and "right" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and do not require that this utility model must be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0042] Example 1

[0043] See Figures 1 to 4 As shown, this application provides a laser-induced droplet deposition device, including a deposition component 1. The deposition component 1 includes a connector 11, a plurality of droplet ejection components 12 connected to the connector 11, and a laser component 13. The plurality of droplet ejection components 12 are disposed around the laser component 13.

[0044] Specifically, deposition component 1 is an apparatus for depositing metal ions to create circuits, and droplet jetting components can be configured as a combination of one or more with the same jetting point. Droplet jetting component 12 can be a liquid injector with an external container of deposition liquid, which can spray a small amount of deposition liquid onto the substrate to be deposited, avoiding the waste of excess material. The jetting points of multiple droplet jetting components 12 are all located below laser component 13, so that the irradiation point of laser component 13 can be covered by deposition liquid. Laser component 13 is one of single laser or multiple laser combination, and the light source includes one or more combinations of nanosecond laser, picosecond laser, and femtosecond laser. It can use laser component 13 to emit a high-energy beam to activate the redox reaction in the deposition liquid, so that the metal ions in the deposition liquid are deposited on the substrate to form circuit patterns. When using the apparatus, the substrate material is placed horizontally on the worktable 2, and the direction of movement of the deposition component 1 is the side of the droplet jetting component 12 relative to the laser component 13. In this way, it can be ensured that the laser irradiation area is covered by deposition liquid, avoiding circuit disconnection.

[0045] Furthermore, the droplet ejection assembly 12 includes a droplet nozzle 121, a reservoir 122 connected to the droplet nozzle 121, and a liquid guide port 3 located on the reservoir 122. One end of the reservoir 122 is connected to the connector 11. A reservoir cavity 123 and a liquid guide pipe 4 are formed in the reservoir 122. The liquid guide pipe 4 is connected to the reservoir cavity 123 and the droplet nozzle 121. The reservoir cavity 123 is connected to the liquid guide port 3.

[0046] Specifically, the bottom of the reservoir 122 is connected to the droplet nozzle 121, which has a drip outlet. The top of the reservoir 122 is vertically connected to the connector 11. The reservoir chamber 123 is used to store the deposited liquid to be sprayed. The droplet spray assembly 12 can obtain the deposited liquid from an external container through the liquid guide port 3 on the reservoir 122, and use the liquid guide tube 4 in the droplet nozzle 121 to spray the deposited liquid out in a uniform thin strip under the action of gravity, so as to control the amount of deposited liquid used and reduce the additional costs caused by the low utilization rate of materials.

[0047] Furthermore, one end of the liquid guide tube 4 is provided with a liquid control port 41, which is connected to the liquid storage chamber 123.

[0048] Specifically, the liquid control port 41 is a conical opening. When the deposition liquid enters the liquid guide tube 4 due to gravity, a uniformly distributed pressure reaction is generated on the wall of the liquid control port 41, which makes the intermolecular forces in the deposition liquid reach a balanced state. This allows the deposition liquid to form a stable and uniform liquid column in the liquid guide tube 4, thereby ensuring that the ejected deposition liquid can be continuous, and thus the deposition liquid on the substrate can be continuously and uniformly distributed.

[0049] Furthermore, the connector 11 is provided with two droplet ejection assemblies 12, which are symmetrically arranged about the laser assembly 13.

[0050] Specifically, the axes of the two droplet ejection components 12 form an angle at their intersection, and the irradiation line of the laser component 13 passes through the vertex of the angle. This symmetrical layout ensures that droplets are ejected from both sides of the laser component 13 and evenly distributed on the central deposition area irradiated by the laser component 13, avoiding the deposition liquid from concentrating on one side and ensuring the uniformity of the coating.

[0051] Furthermore, the laser assembly 13 has a laser head 131, and the droplet nozzle 121 is disposed on the same horizontal plane as the laser head 131.

[0052] Specifically, because laser beams have divergence, in order to ensure the energy required for inducing deposition solution, the laser component 13 is usually positioned close to the substrate and adjusted to an appropriate distance to avoid losing too much energy due to excessive irradiation distance. At this time, setting the droplet nozzle 121 and the laser head 131 at the same level can ensure that the droplet nozzle 121 is also close to the substrate, so that the deposition solution is sprayed out and falls accurately on the predetermined pattern line, thereby improving the deposition quality and thus increasing the yield.

[0053] Furthermore, the laser assembly 13 is provided with a plurality of laser heads 131, the axes of which intersect directly below the laser assembly 13.

[0054] Specifically, the laser assembly 13 can use three laser heads 131 to set three laser beams that intersect at a point, thereby enabling multi-laser scanning and improving the deposition rate.

[0055] Example 2

[0056] See Figures 1 to 4 As shown, this embodiment provides a laser-induced droplet deposition device, including a deposition component 1. The deposition component 1 includes a connector 11, a plurality of droplet ejection components 12 connected to the connector 11, and a laser component 13. The plurality of droplet ejection components 12 are disposed around the laser component 13.

[0057] Specifically, deposition component 1 is an apparatus for depositing metal ions to create circuits, and droplet jetting components can be configured as a combination of one or more with the same jetting point. Droplet jetting component 12 can be a liquid injector with an external container of deposition liquid, which can spray a small amount of deposition liquid onto the substrate to be deposited, avoiding the waste of excess material. The jetting points of multiple droplet jetting components 12 are all located below laser component 13, so that the irradiation point of laser component 13 can be covered by deposition liquid. Laser component 13 is one of single laser or multiple laser combination, and the light source includes one or more combinations of nanosecond laser, picosecond laser, and femtosecond laser. It can use laser component 13 to emit a high-energy beam to activate the redox reaction in the deposition liquid, so that the metal ions in the deposition liquid are deposited on the substrate to form circuit patterns. When using the apparatus, the substrate material is placed horizontally on the worktable 2, and the direction of movement of the deposition component 1 is the side of the droplet jetting component 12 relative to the laser component 13. In this way, it can be ensured that the laser irradiation area is covered by deposition liquid, avoiding circuit disconnection.

[0058] Furthermore, the droplet ejection assembly 12 includes a droplet nozzle 121, a reservoir 122 connected to the droplet nozzle 121, and a liquid guide port 3 located on the reservoir 122. One end of the reservoir 122 is connected to the connector 11. A reservoir cavity 123 and a liquid guide pipe 4 are formed in the reservoir 122. The liquid guide pipe 4 is connected to the reservoir cavity 123 and the droplet nozzle 121. The reservoir cavity 123 is connected to the liquid guide port 3.

[0059] Specifically, the bottom of the reservoir 122 is connected to the droplet nozzle 121, which has a drip outlet. The top of the reservoir 122 is vertically connected to the connector 11. The reservoir chamber 123 is used to store the deposited liquid to be sprayed. The droplet spray assembly 12 can obtain the deposited liquid from an external container through the liquid guide port 3 on the reservoir 122, and use the liquid guide tube 4 in the droplet nozzle 121 to spray the deposited liquid out in a uniform thin strip under the action of gravity, so as to control the amount of deposited liquid used and reduce the additional costs caused by the low utilization rate of materials.

[0060] Furthermore, one end of the liquid guide tube 4 is provided with a liquid control port 41, which is connected to the liquid storage chamber 123.

[0061] Specifically, the liquid control port 41 is a conical opening. When the deposition liquid enters the liquid guide tube 4 due to gravity, a uniformly distributed pressure reaction is generated on the wall of the liquid control port 41, which makes the intermolecular forces in the deposition liquid reach a balanced state. This allows the deposition liquid to form a stable and uniform liquid column in the liquid guide tube 4, thereby ensuring that the ejected deposition liquid can be continuous, and thus the deposition liquid on the substrate can be continuously and uniformly distributed.

[0062] Furthermore, the liquid reservoir 122 has a through-hole, and the droplet injection assembly 12 also includes a flow rate control component 5. One end of the flow rate control component 5 is connected to the connector 11, and the other end is rotatably connected to the through-hole. The flow rate control component 5 passes through the through-hole and abuts against the liquid control port 41.

[0063] Specifically, the flow rate control component 5 can be a long screw, and the liquid reservoir 122 has an internal thread in the through-hole. The liquid reservoir 122 is threadedly connected to the flow rate control component 5, thereby connecting the liquid reservoir 122 together with the droplet nozzle 121 to the connector 11. The tightness of the flow rate control component 5 against the liquid control port 41 is controlled by the connection depth of the two, and the gap size between the flow rate control component 5 and the liquid control port 41 can be controlled, thereby controlling the amount of sediment entering the liquid guide tube 4 to adjust the liquid output rate.

[0064] Furthermore, a hydraulic valve 6 is provided in the droplet nozzle 121, and the hydraulic valve 6 is connected to the liquid guide tube 4 and the droplet nozzle 121.

[0065] Specifically, the hydraulic valve 6 is located between the liquid guide pipe 4 of the liquid reservoir 122 and the droplet nozzle 121, which can increase the liquid outlet pressure and thus control the liquid outlet rate. The droplet injection assembly 12 can first perform the first step of sediment injection speed adjustment through the contact gap between the liquid control port 41 and the flow rate control component 5, and then further precisely control the liquid outlet rate through the hydraulic valve 6 to achieve high-precision adjustment.

[0066] Example 3

[0067] See Figures 1 to 4 As shown, this embodiment provides a laser-induced droplet deposition device, including a deposition component 1. The deposition component 1 includes a connector 11, a plurality of droplet ejection components 12 connected to the connector 11, and a laser component 13. The plurality of droplet ejection components 12 are disposed around the laser component 13.

[0068] Specifically, deposition component 1 is an apparatus for depositing metal ions to create circuits, and droplet jetting components can be configured as a combination of one or more with the same jetting point. Droplet jetting component 12 can be a liquid injector with an external container of deposition liquid, which can spray a small amount of deposition liquid onto the substrate to be deposited, avoiding the waste of excess material. The jetting points of multiple droplet jetting components 12 are all located below laser component 13, so that the irradiation point of laser component 13 can be covered by deposition liquid. Laser component 13 is one of single laser or multiple laser combination, and the light source includes one or more combinations of nanosecond laser, picosecond laser, and femtosecond laser. It can use laser component 13 to emit a high-energy beam to activate the redox reaction in the deposition liquid, so that the metal ions in the deposition liquid are deposited on the substrate to form circuit patterns. When using the apparatus, the substrate material is placed horizontally on the worktable 2, and the direction of movement of the deposition component 1 is the side of the droplet jetting component 12 relative to the laser component 13. In this way, it can be ensured that the laser irradiation area is covered by deposition liquid, avoiding circuit disconnection.

[0069] Furthermore, the connector 11 is provided with two droplet ejection assemblies 12, which are symmetrically arranged about the laser assembly 13.

[0070] Specifically, the axes of the two droplet ejection components 12 form an angle at their intersection, and the irradiation line of the laser component 13 passes through the vertex of the angle. This symmetrical layout ensures that droplets are ejected from both sides of the laser component 13 and evenly distributed on the central deposition area irradiated by the laser component 13, avoiding the deposition liquid from concentrating on one side and ensuring the uniformity of the coating.

[0071] Furthermore, the laser assembly 13 has a laser head 131, and the droplet nozzle 121 is disposed on the same horizontal plane as the laser head 131.

[0072] Specifically, because laser beams have divergence, in order to ensure the energy required for inducing deposition solution, the laser component 13 is usually positioned close to the substrate and adjusted to an appropriate distance to avoid losing too much energy due to excessive irradiation distance. At this time, setting the droplet nozzle 121 and the laser head 131 at the same level can ensure that the droplet nozzle 121 is also close to the substrate, so that the deposition solution is sprayed out and falls accurately on the predetermined pattern line, thereby improving the deposition quality and thus increasing the yield.

[0073] Furthermore, the connector 11 includes a rotating shaft 111 and a housing 112. One end of the rotating shaft 111 is rotatably connected to the housing 112, and the other end is fixed with the laser assembly 13 and the droplet jet assembly 12.

[0074] Specifically, the outer shell 112 is cylindrical and sleeved on one end of the rotating shaft 111. The rotating shaft 111 and the outer shell 112 are rotatably connected to adjust the position of the droplet injection assembly 12. In this way, the spray position of the deposition liquid can be changed by rotating shaft 111, and the moving direction of the deposition assembly 1 can be changed to realize a multi-angle deposition path.

[0075] Furthermore, it also includes a moving component, which includes a base 7 and a frame 8, with the frame 8 fixed on the base 7; the top of the base 7 is provided with a Y-axis guide rail 71 and a worktable 2, with the worktable 2 slidably connected to the Y-axis guide rail 71; the frame 8 is provided with an X-axis guide rail 81, with a moving seat 82 slidably connected to the X-axis guide rail 81, and a Z-axis guide rail 821 provided on the moving seat 82, with the Z-axis guide rail 821 slidably connected to the outer casing 112.

[0076] Specifically, the base 7 and frame 8 are each equipped with a motor that controls the three-axis movement of the deposition assembly 1, and both motors are electrically connected to the control system. This design gives the worktable 2 one degree of freedom, allowing the substrate to move along the Y-axis on the worktable. The moving seat 82 has two degrees of freedom, allowing the deposition assembly to move in the XZ plane. One side of the housing 112 is connected to the Z-axis guide rail 821, enabling the device to further adjust the liquid outlet position and flexibly respond to complex graphic designs for corresponding production activities. Combined with the high precision characteristics of the device, it can achieve high-resolution graphic deposition manufacturing.

[0077] The above description is merely a preferred embodiment of this utility model and is not intended to limit the utility model. Various modifications and variations can be made to this utility model by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this utility model should be included within the protection scope of this utility model.

Claims

1. A laser-induced droplet deposition apparatus, characterized by: The deposition assembly (1) comprises a connecting piece (11), a plurality of droplet ejection assemblies (12) connected to the connecting piece (11) and a laser assembly (13), and the plurality of droplet ejection assemblies (12) are arranged at the periphery of the laser assembly (13).

2. The laser-induced droplet deposition apparatus of claim 1, wherein: The droplet ejection assembly (12) comprises a droplet ejection head (121), a liquid reservoir (122) connected to the droplet ejection head (121) and a liquid guide opening (3) on the liquid reservoir (122), one end of the liquid reservoir (122) is connected to the connecting piece (11); a liquid storage cavity (123) and a liquid guide pipe (4) are arranged in the liquid reservoir (122), the liquid guide pipe (4) communicates with the liquid storage cavity (123) and the droplet ejection head (121), and the liquid storage cavity (123) communicates with the liquid guide opening (3).

3. The laser-induced droplet deposition apparatus of claim 2, wherein: One end of the liquid guide pipe (4) is provided with a liquid control opening (41), and the liquid control opening (41) is connected to the liquid storage cavity (123).

4. The laser-induced droplet deposition apparatus of claim 3, wherein: A through hole is arranged on the liquid reservoir (122), and the droplet ejection assembly (12) further comprises a flow rate control piece (5), one end of the flow rate control piece (5) is connected to the connecting piece (11), and the opposite end is rotationally connected to the through hole; the flow rate control piece (5) passes through the through hole and abuts against the liquid control opening (41).

5. The laser-induced droplet deposition apparatus of claim 3, wherein: A hydraulic valve (6) is arranged in the droplet ejection head (121), and the hydraulic valve (6) communicates with the liquid guide pipe (4) and the droplet ejection head (121).

6. The laser-induced droplet deposition apparatus of claim 1, wherein: The connecting piece (11) comprises a rotating shaft (111) and a housing (112), one end of the rotating shaft (111) is rotationally connected in the housing (112), and the opposite end is fixed with the laser assembly (13) and the droplet ejection assembly (12).

7. The laser-induced droplet deposition apparatus of claim 6, wherein: Further comprising a moving assembly, the moving assembly comprises a base (7) and a rack (8), the rack (8) is fixed on the base (7); a Y-axis guide rail (71) and a workbench (2) are arranged on the top of the base (7), the workbench (2) is slidingly connected to the Y-axis guide rail (71), an X-axis guide rail (81) is arranged on the rack (8), a moving seat (82) is slidingly connected to the X-axis guide rail (81), a Z-axis guide rail (821) is arranged on the moving seat (82), and the Z-axis guide rail (821) is slidingly connected to the housing (112).

8. The laser-induced droplet deposition apparatus of claim 1, wherein: Two droplet ejection assemblies (12) are arranged on the connecting piece (11), and the two droplet ejection assemblies (12) are symmetrically arranged about the laser assembly (13).

9. The laser-induced droplet deposition apparatus of claim 2, wherein: The laser assembly (13) has a laser head (131), and the droplet ejection head (121) and the laser head (131) are arranged on the same horizontal plane.

10. The laser-induced droplet deposition apparatus of claim 9, wherein: The laser assembly (13) is provided with a plurality of laser heads (131), and the axes of the plurality of laser heads (131) all intersect below the laser assembly (13).

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