Universal airway component integrated box body for vacuum chuck surface type detection

Abstract

The utility model relates to the technical field of vacuum chuck surface type detection equipment, in particular to a universal air passage component integrated box body for vacuum chuck surface type detection, which comprises a shell assembly, a knob switch valve assembly, a pressure regulating valve assembly, a vacuum generator assembly and a one-to-two air passage assembly. Through the arrangement of the knob switch valve assembly, the pressure regulating valve assembly, the vacuum generator assembly and the one-to-two air passage assembly, the device compactly and reasonably integrates various air passage components through the integrated design, so that the size is greatly reduced, and the device can be conveniently carried, can be conveniently disassembled and assembled, and is convenient to use. Meanwhile, the device covers key functions of gas transmission, flow control, pressure regulation and the like, is more convenient to operate, can be operated by an operator without complex training, reduces the possibility of manual operation errors, and further improves the detection efficiency of the vacuum chuck surface type.

Description

Technical Field

[0001] This utility model relates to the technical field of vacuum suction cup surface shape detection equipment, specifically an integrated housing for airway components commonly used in vacuum suction cup surface shape detection. Background Technology

[0002] When using a laser interferometer to inspect the surface shape of a vacuum chuck, it is necessary to ensure the stability of the vacuum chuck and avoid displacement, tilting or warping. It is necessary to use the air channel components commonly used in vacuum chuck surface shape inspection to adsorb the workpiece.

[0003] Existing methods for vacuum suction cup surface shape inspection often involve a large number of airway components, which occupy a lot of space and have complex connection structures. These components are not only difficult to carry, but also time-consuming and laborious to install and disassemble, making them cumbersome for users to operate. Furthermore, the high operating threshold increases the possibility of human error, thus affecting the efficiency of vacuum suction cup surface shape inspection. Therefore, this paper proposes an integrated housing for airway components used in vacuum suction cup surface shape inspection to address the above problems. Utility Model Content

[0004] The purpose of this utility model is to provide a universal airway component integrated housing for vacuum suction cup surface shape inspection, so as to solve the problems of existing universal airway components for vacuum suction cup surface shape inspection having a large number of components, occupying a large space, and having a complex connection structure.

[0005] To achieve the above objectives, this utility model provides the following technical solution:

[0006] An integrated housing for airway components used in vacuum suction cup surface shape inspection includes a housing assembly, a rotary switch valve assembly, a pressure regulating valve assembly, a vacuum generator assembly, and a one-turn two-air-port assembly. The housing assembly includes a front left plate, with an upper right plate bolted to the upper right of the front left plate and a rear lower plate bolted to the lower rear of the front left plate. A handle is fixedly connected to the upper side of the upper right plate, and a rubber pad is fixedly connected to the lower side of the rear lower plate. A rotary switch valve assembly is located on the front left plate, including a first rotary switch valve detachably connected to the front side plate of the front left plate. A second rotary switch valve, detachably connected to the front side plate of the front left plate, is located to the left of the first rotary switch valve. A connection is made to the front left plate behind the second rotary switch valve. A third rotary switch valve is detachably connected to the left side panel of the front left plate. A fourth rotary switch valve is detachably connected to the left side panel of the front left plate on the front side of the third rotary switch valve. A fifth rotary switch valve is detachably connected to the left side panel of the front left plate on the front side of the fourth rotary switch valve. A pressure regulating valve assembly is provided on the front left plate. The pressure regulating valve assembly includes a first pressure regulating valve detachably connected to the front side panel of the front left plate. A second pressure regulating valve is detachably connected to the front side panel of the front left plate on the upper right side of the first pressure regulating valve. A third pressure regulating valve is detachably connected to the front side panel of the front left plate on the upper side of the second pressure regulating valve. A fourth pressure regulating valve is detachably connected to the front side panel of the front left plate on the upper left side of the third pressure regulating valve. A fifth rotary switch valve is detachably connected to the left side panel of the front left plate on the upper left side of the first pressure regulating valve. A first digital screen is detachably connected to the front side panel of the plate. A second digital screen is detachably connected to the front side panel of the front left plate on the lower side of the second pressure regulating valve. A third digital screen is detachably connected to the front side panel of the front left plate on the upper side of the third pressure regulating valve. A fourth digital screen is detachably connected to the front side panel of the front left plate on the lower side of the fourth pressure regulating valve. A vacuum generator assembly is provided on the inner side of the rear lower plate. The vacuum generator assembly includes a first vacuum generator detachably connected to the lower side panel of the rear lower plate. A second vacuum generator is detachably connected to the lower side panel of the rear lower plate on the rear side of the first vacuum generator. A third vacuum generator is detachably connected to the lower side panel of the rear lower plate on the rear side of the second vacuum generator. The inner side of the rear lower plate is detachably connected to the front left plate. A vacuum cover plate is connected and located above and in front of the first vacuum generator. A one-turn two-air-port assembly is provided inside the outer casing assembly. This assembly includes a first air-port detachably connected to the rear side plate of the lower rear plate; a second air-port detachably connected to the rear side plate of the lower rear plate on the right side of the first air-port; a third air-port detachably connected to the rear side plate of the lower rear plate on the upper side of the second air-port; a fourth air-port detachably connected to the rear side plate of the lower rear plate on the left side of the third air-port; a fifth air-port detachably connected to the right side plate of the upper right plate; a sixth air-port detachably connected to the right side plate of the upper right plate on the lower side of the fifth air-port; and a seventh air-port, limited by an air supply pipe, is provided behind the third rotary switch valve.An eighth air duct is fixedly connected to the upper side of the seventh air duct, and a ninth air duct is fixedly connected to the upper side of the third vacuum generator.

[0007] Preferably, the lower end of the third rotary switch valve is connected to a double port of the seventh gas passage through a gas supply pipe; the lower end of the fourth rotary switch valve is connected to another double port of the seventh gas passage through a gas supply pipe; a single port of the seventh gas passage is connected to a double port of the eighth gas passage; the lower end of the fifth rotary switch valve is connected to another double port of the eighth gas passage through a gas supply pipe; a single port of the eighth gas passage is connected to the upper end of the second rotary switch valve through a gas supply pipe; and the upper end of the third rotary switch valve is connected to the air inlet of the first pressure regulating valve through a gas supply pipe.

[0008] Preferably, the P port of the first vacuum generator is connected to the upper end of the first rotary switch valve through a gas supply pipe, the P port of the second vacuum generator is connected to the upper end of the fourth rotary switch valve through a gas supply pipe, and the P port of the third vacuum generator is connected to the upper end of the fifth rotary switch valve through a gas supply pipe.

[0009] Preferably, a plug is provided in one of the double ports of the first, second, third, fourth, and fifth air passages. The V port of the first vacuum generator is connected to the other double port of the fifth air passage through a gas supply pipe. The V port of the second vacuum generator is connected to the inlet of the second pressure regulating valve through a gas supply pipe. The V port of the third vacuum generator is connected to the single port of the ninth air passage through a gas supply pipe. The inlet of the third pressure regulating valve is connected to one double port of the ninth air passage through a gas supply pipe. The inlet of the fourth pressure regulating valve is connected to the other double port of the ninth air passage through a gas supply pipe.

[0010] Preferably, the lower end of the first rotary switch valve is connected to one double port of the sixth air passage through an air supply pipe, the lower end of the second rotary switch valve is connected to the other double port of the sixth air passage through an air supply pipe, the air outlet of the first pressure regulating valve is connected to the double port of the first air passage without a blockage through an air supply pipe, the air outlet of the second pressure regulating valve is connected to the double port of the second air passage without a blockage through an air supply pipe, the air outlet of the third pressure regulating valve is connected to the double port of the third air passage without a blockage through an air supply pipe, and the air outlet of the fourth pressure regulating valve is connected to the double port of the fourth air passage without a blockage through an air supply pipe.

[0011] Compared with the prior art, the beneficial effects of this utility model are:

[0012] In this invention, by incorporating a rotary switch valve assembly, a pressure regulating valve assembly, a vacuum generator assembly, and a one-turn two-air-pass assembly, the device integrates various airway components in a compact and reasonable manner, significantly reducing its size and making it easy to carry and disassemble, thus improving equipment maintenance efficiency. Furthermore, the device covers key functions such as gas transmission, flow control, and pressure regulation, eliminating the need for multiple independent components as in traditional methods. This makes operation more convenient, requiring minimal training for operators, reducing the possibility of human error, and further improving the detection efficiency of vacuum suction cup surfaces. Attached Figure Description

[0013] Figure 1 This is a schematic diagram of the overall structure of this utility model;

[0014] Figure 2 This is a front view of the internal structure of this utility model;

[0015] Figure 3 This is a rear view of the internal structure of this utility model;

[0016] Figure 4 This is a first structural cross-sectional view of the outer shell assembly of this utility model;

[0017] Figure 5 This is a second structural cross-sectional view of the outer shell assembly of this utility model;

[0018] Figure 6 This is a schematic diagram of the first mounting structure of the front left plate of this utility model;

[0019] Figure 7 This is a schematic diagram of the second mounting structure of the front left plate of this utility model;

[0020] Figure 8 This is a schematic diagram of the rear lower plate installation structure of this utility model;

[0021] Figure 9 This is a schematic diagram of the first mounting structure of the upper right plate of this utility model;

[0022] Figure 10 This is a schematic diagram of the second mounting structure of the upper right plate of this utility model.

[0023] In the diagram: 1. Housing assembly; 11. Front left panel; 12. Upper right panel; 13. Rear lower panel; 14. Handle; 15. Rubber pad; 2. Knob switch valve assembly; 21. First knob switch valve; 22. Second knob switch valve; 23. Third knob switch valve; 24. Fourth knob switch valve; 25. Fifth knob switch valve; 3. Pressure regulating valve assembly; 31. First pressure regulating valve; 32. Second pressure regulating valve; 33. Third pressure regulating valve; 34. Fourth pressure regulating valve; 35. First digit 36. Second digital screen; 37. Third digital screen; 38. Fourth digital screen; 4. Vacuum generator assembly; 41. First vacuum generator; 42. Second vacuum generator; 43. Third vacuum generator; 44. Vacuum cover plate; 5. One-to-two air passage assembly; 51. First air passage; 52. Second air passage; 53. Third air passage; 54. Fourth air passage; 55. Fifth air passage; 56. Sixth air passage; 57. Seventh air passage; 58. Eighth air passage; 59. Ninth air passage. Detailed Implementation

[0024] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0025] In the description of this utility model, it should be understood that the directional terms such as "front, back, up, down, left, right", "horizontal, vertical, horizontal" and "top, bottom" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description. Unless otherwise stated, these directional terms do not indicate or imply that the device or element referred to must have a specific orientation or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation on the scope of protection of this utility model. The directional terms "inner" and "outer" refer to the inner and outer contours of each component itself.

[0026] Furthermore, it should be noted that the use of terms such as "first" and "second" to define components is merely for the purpose of distinguishing the corresponding components. Unless otherwise stated, the above terms have no special meaning and therefore cannot be construed as limiting the scope of protection of this utility model.

[0027] Please see Figure 1-10 This utility model provides a technical solution:

[0028] An integrated housing for airway components used in vacuum suction cup surface shape inspection includes a housing assembly 1, a rotary switch valve assembly 2, a pressure regulating valve assembly 3, a vacuum generator assembly 4, and a one-turn two-air-channel assembly 5. The housing assembly 1 includes a front left plate 11, with an upper right plate 12 bolted to the upper right of the front left plate 11 and a rear lower plate 13 bolted to the lower rear of the front left plate 11. A handle 14 is fixedly connected to the upper side of the upper right plate 12, and a rubber pad 15 is fixedly connected to the lower side of the rear lower plate 13. The rotary switch valve assembly 2 is mounted on the front left plate 11. The rotary switch valve assembly 2 includes a first rotary switch valve 21 detachably connected to the front side plate of the front left plate 11, and a second rotary switch valve 21 detachably connected to the front side plate of the front left plate 11 is located on the left side of the first rotary switch valve 21. A rotary switch valve 22 is provided. A third rotary switch valve 23 is detachably connected to the left side plate of the front left plate 11 behind the second rotary switch valve 22. A fourth rotary switch valve 24 is detachably connected to the left side plate of the front left plate 11 on the front side of the third rotary switch valve 23. A fifth rotary switch valve 25 is detachably connected to the left side plate of the front left plate 11 on the front side of the fourth rotary switch valve 24. A pressure regulating valve assembly 3 is provided on the front left plate 11. The pressure regulating valve assembly 3 includes a first pressure regulating valve 31 detachably connected to the front side plate of the front left plate 11. A second pressure regulating valve 32 is detachably connected to the front side plate of the front left plate 11 on the upper right side of the first pressure regulating valve 31. A third pressure regulating valve 25 is detachably connected to the front side plate of the front left plate 11 on the upper side of the second pressure regulating valve 32. The pressure regulating valve 33 has a fourth pressure regulating valve 34 detachably connected to the front side plate of the front left plate 11 located on its upper left side. The first pressure regulating valve 31 has a first digital screen 35 detachably connected to the front side plate of the front left plate 11 located on its upper side. The second pressure regulating valve 32 has a second digital screen 36 detachably connected to the front side plate of the front left plate 11 located on its lower side. The third pressure regulating valve 33 has a third digital screen 37 detachably connected to the front side plate of the front left plate 11 located on its upper side. The fourth pressure regulating valve 34 has a fourth digital screen 38 detachably connected to the front side plate of the front left plate 11 located on its lower side. A vacuum generator assembly 4 is located inside the rear lower plate 13. The vacuum generator assembly 4 includes a first vacuum generator 41 detachably connected to the lower side plate of the rear lower plate 13. A second vacuum generator 42 is detachably connected to the lower side plate of the rear lower plate 13 at the rear side of the first vacuum generator 41. A third vacuum generator 43 is detachably connected to the lower side plate of the rear lower plate 13 at the rear side of the second vacuum generator 42. A vacuum cover plate 44 is detachably connected to the inner side of the rear lower plate 13. The vacuum cover plate 44 is located above and in front of the first vacuum generator 41. A one-to-two-air-port assembly 5 is provided inside the outer casing assembly 1. The one-to-two-air-port assembly 5 includes a first air port 51 detachably connected to the rear side plate of the rear lower plate 13. A second air port 52 detachably connected to the rear side plate of the rear lower plate 13 is provided to the right of the first air port 51. A third air port 53 detachably connected to the rear side plate of the rear lower plate 13 is provided above the second air port 52.A fourth air vent 54, detachably connected to the rear side plate of the lower rear plate 13, is located on the left side of the third air vent 53. A fifth air vent 55 is detachably connected to the right side plate of the upper right plate 12. A sixth air vent 56, detachably connected to the right side plate of the upper right plate 12, is located below the fifth air vent 55. A seventh air vent 57, limited by an air supply pipe, is located behind the third rotary switch valve 23. An eighth air vent 58 is fixedly connected to the upper side of the seventh air vent 57. A ninth air vent 59 is fixedly connected to the upper side of the third vacuum generator 43.

[0029] The lower end of the third rotary valve 23 is connected to a double port of the seventh gas passage 57 via an air supply pipe. The lower end of the fourth rotary valve 24 is connected to another double port of the seventh gas passage 57 via an air supply pipe. A single port of the seventh gas passage 57 is connected to a double port of the eighth gas passage 58. The lower end of the fifth rotary valve 25 is connected to another double port of the eighth gas passage 58 via an air supply pipe. A single port of the eighth gas passage 58 is connected to the upper end of the second rotary valve 22 via an air supply pipe. The upper end of the third rotary valve 23 is connected to the air inlet of the first pressure regulating valve 31 via an air supply pipe. The valves 23, 24, and 25 are connected via the first rotary valve 21, the second rotary valve 22, the third rotary valve 23, the fourth rotary valve 24, and the fifth rotary valve 25. The switching valve 25 can control the opening and closing of the air passage; the P port of the first vacuum generator 41 is connected to the upper end of the first rotary valve 21 through an air supply pipe, the P port of the second vacuum generator 42 is connected to the upper end of the fourth rotary valve 24 through an air supply pipe, and the P port of the third vacuum generator 43 is connected to the upper end of the fifth rotary valve 25 through an air supply pipe. The first vacuum generator 41, second vacuum generator 42, and third vacuum generator 43 can compress air to generate negative pressure; each of the first air passage 51, second air passage 52, third air passage 53, fourth air passage 54, and fifth air passage 55 has a plug pipe installed in one of its double ports. The V port of the first vacuum generator 41 is connected to the other double port of the fifth air passage 55 through an air supply pipe. The V-port of the second vacuum generator 42 is connected to the inlet of the second pressure regulating valve 32 via a gas supply pipe. The V-port of the third vacuum generator 43 is connected to a single port of the ninth gas passage 59 via a gas supply pipe. The inlet of the third pressure regulating valve 33 is connected to a double port of the ninth gas passage 59 via a gas supply pipe. The inlet of the fourth pressure regulating valve 34 is connected to another double port of the ninth gas passage 59 via a gas supply pipe. Pressure can be regulated through the first pressure regulating valve 31, the second pressure regulating valve 32, the third pressure regulating valve 33, and the fourth pressure regulating valve 34. The first digital screen 35, the second digital screen 36, the third digital screen 37, and the fourth digital screen 38 can display the information of the first pressure regulating valve 31, the second pressure regulating valve 32, the third pressure regulating valve 33, and the fourth pressure regulating valve 34. The air pressure value is 4; the lower end of the first rotary switch valve 21 is connected to one double port of the sixth air passage 56 through the air supply pipe, the lower end of the second rotary switch valve 22 is connected to the other double port of the sixth air passage 56 through the air supply pipe, the outlet of the first pressure regulating valve 31 is connected to the double port of the first air passage 51 without a blockage through the air supply pipe, the outlet of the second pressure regulating valve 32 is connected to the double port of the second air passage 52 without a blockage through the air supply pipe, the outlet of the third pressure regulating valve 33 is connected to the double port of the third air passage 53 without a blockage through the air supply pipe, and the outlet of the fourth pressure regulating valve 34 is connected to the double port of the fourth air passage 54 without a blockage through the air supply pipe. The air passage components can be connected through the one-turn two-air passage assembly 5.

[0030] Working process: This device requires an air compressor to operate. The air compressor provides air pressure to the device's air passages. The device can be carried by the handle 14. After moving the device to a suitable position, the rubber pad 15 stabilizes it. The front left plate 11, upper right plate 12, and rear lower plate 13 protect the air passage components. The air passages can be controlled by the first rotary valve 21, the second rotary valve 22, the third rotary valve 23, the fourth rotary valve 24, and the fifth rotary valve 25. The first pressure regulating valve 31 is a positive pressure regulating valve. The second pressure regulating valve 3... 2. The third pressure regulating valve 33 and the fourth pressure regulating valve 34 are both negative pressure regulating valves. Pressure can be regulated through the first pressure regulating valve 31, the second pressure regulating valve 32, the third pressure regulating valve 33, and the fourth pressure regulating valve 34. The air pressure values ​​of the first pressure regulating valve 31, the second pressure regulating valve 32, the third pressure regulating valve 33, and the fourth pressure regulating valve 34 can be displayed through the first digital screen 35, the second digital screen 36, the third digital screen 37, and the fourth digital screen 38. The first vacuum generator 41, the second vacuum generator 42, and the third vacuum generator 43 can compress air to generate negative pressure. The vacuum cover plate 44 can control the pressure of the first vacuum generator 41, the second vacuum generator 42, and the third vacuum generator 43. Vacuum generators 42 and 43 are protected. When using this device, power is connected to the air compressor, and the compressor is started to generate air pressure. First, the first rotary valve 21 is opened to open the airflow passage, allowing air pressure to flow through the first vacuum generator 41, second vacuum generator 42, and third vacuum generator 43, converting the air pressure into negative pressure. Then, the second rotary valve 22, third rotary valve 23, fourth rotary valve 24, and fifth rotary valve 25 are opened, opening the single port of the first air passage 51, the single port of the second air passage 52, the single port of the third air passage 53, and the single port of the fourth air passage 54. The single port of the 4-way valve generates an adsorption effect, which can adsorb objects. The device integrates various airway components into a compact and reasonable whole through integrated design, which greatly reduces the size and makes it easy to carry and disassemble, resulting in high equipment maintenance efficiency. At the same time, the device covers key functions such as gas transmission, flow control, and pressure regulation. Users no longer need to achieve these functions through multiple independent components as in the traditional method, making it more convenient to operate. Operators can get started without complicated training, reducing the possibility of human error and further improving the detection efficiency of vacuum suction cup surface.

[0031] Contents not described in detail in this specification are existing technologies known to those skilled in the art. Standard parts used in this invention can all be purchased commercially, and irregularly shaped parts can be custom-made according to the description and drawings. The specific connection methods for each part all employ conventional methods such as bolts, rivets, and welding, which are already mature technologies. The machinery, parts, and equipment all use conventional models from the prior art, and the circuit connections also employ conventional connection methods from the prior art, which will not be detailed here.

[0032] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A universal airway component integrated box for vacuum chuck face detection, comprising a shell assembly (1), a knob switch valve assembly (2), a pressure regulating valve assembly (3), a vacuum generator assembly (4) and a one-to-two air passage assembly (5), characterized in that: The shell assembly (1) includes a front left plate (11), the upper right plate (12) is bolted to the upper right of the front left plate (11), the lower back plate (13) is bolted to the lower back of the front left plate (11), the upper side of the upper right plate (12) is fixedly connected with a hand-held handle (14), the lower side of the lower back plate (13) is fixedly connected with a rubber pad (15), a knob switch valve assembly (2) is arranged on the front left plate (11), the knob switch valve assembly (2) includes a first knob switch valve (21) which is detachably connected with the front side plate of the front left plate (11), the left side of the first knob switch valve (21) is provided with a second knob switch valve (22) which is detachably connected with the front side plate of the front left plate (11), the rear of the second knob switch valve (22) is provided with a third knob switch valve (23) which is detachably connected with the left side plate of the front left plate (11), the front side of the third knob switch valve (23) is provided with a fourth knob switch valve (24) which is detachably connected with the left side plate of the front left plate (11), the front side of the fourth knob switch valve (24) is provided with a fifth knob switch valve (25) which is detachably connected with the left side plate of the front left plate (11), a pressure regulating valve assembly (3) is arranged on the front left plate (11), the pressure regulating valve assembly (3) includes a first pressure regulating valve (31) which is detachably connected with the front side plate of the front left plate (11), the upper right of the first pressure regulating valve (31) is provided with a second pressure regulating valve (32) which is detachably connected with the front side plate of the front left plate (11), the upper side of the second pressure regulating valve (32) is provided with a third pressure regulating valve (33) which is detachably connected with the front side plate of the front left plate (11), the upper left of the third pressure regulating valve (33) is provided with a fourth pressure regulating valve (34) which is detachably connected with the front side plate of the front left plate (11), the upper side of the first pressure regulating valve (31) is provided with a first digital screen (35) which is detachably connected with the front side plate of the front left plate (11), the lower side of the second pressure regulating valve (32) is provided with a second digital screen (36) which is detachably connected with the front side plate of the front left plate (11), the upper side of the third pressure regulating valve (33) is provided with a third digital screen (37) which is detachably connected with the front side plate of the front left plate (11), the lower side of the fourth pressure regulating valve (34) is provided with a fourth digital screen (38) which is detachably connected with the front side plate of the front left plate (11), the inner side of the lower back plate (13) is provided with a vacuum generator assembly (4), the vacuum generator assembly (4) includes a first vacuum generator (41) which is detachably connected with the lower side plate of the lower back plate (13), the rear side of the first vacuum generator (41) is provided with a second vacuum generator (42) which is detachably connected with the lower side plate of the lower back plate (13), the rear side of the second vacuum generator (42) is provided with a third vacuum generator (43) which is detachably connected with the lower side plate of the lower back plate (13), the inner side of the lower back plate (13) is detachably connected with a vacuum cover plate (44), the vacuum cover plate (44) is located in front of the upper side of the first vacuum generator (41), the inner side of the shell assembly (1) is provided with a one-to-two gas passing assembly (5),The one-to-two air passing assembly (5) comprises a first air passing (51) detachably connected with the rear side plate of the rear lower plate (13), the right side of the first air passing (51) is provided with a second air passing (52) detachably connected with the rear side plate of the rear lower plate (13), the upper side of the second air passing (52) is provided with a third air passing (53) detachably connected with the rear side plate of the rear lower plate (13), the left side of the third air passing (53) is provided with a fourth air passing (54) detachably connected with the rear side plate of the rear lower plate (13), the right side plate of the upper right plate (12) is detachably connected with a fifth air passing (55), the lower side of the fifth air passing (55) is provided with a sixth air passing (56) detachably connected with the right side plate of the upper right plate (12), the rear side of the third rotary knob switch valve (23) is provided with a seventh air passing (57) limited through a gas pipeline, the upper side of the seventh air passing (57) is fixedly connected with an eighth air passing (58), and the upper side of the third vacuum generator (43) is fixedly connected with a ninth air passing (59).

2. The integrated airway component case for general use in vacuum chuck surface inspection according to claim 1, characterized in that: The lower end of the third knob switch valve (23) is communicated with one double port of the seventh gas passage (57) through a gas pipeline, the lower end of the fourth knob switch valve (24) is communicated with another double port of the seventh gas passage (57) through a gas pipeline, the single port of the seventh gas passage (57) is communicated with one double port of the eighth gas passage (58), the lower end of the fifth knob switch valve (25) is communicated with another double port of the eighth gas passage (58) through a gas pipeline, the single port of the eighth gas passage (58) is communicated with the upper end of the second knob switch valve (22) through a gas pipeline, and the upper end of the third knob switch valve (23) is communicated with the gas inlet of the first pressure regulating valve (31) through a gas pipeline.

3. The integrated airway component case for general use in vacuum chuck surface inspection, according to claim 1, wherein: The P port of the first vacuum generator (41) is communicated with the upper end of the first knob switch valve (21) through a gas pipeline, the P port of the second vacuum generator (42) is communicated with the upper end of the fourth knob switch valve (24) through a gas pipeline, and the P port of the third vacuum generator (43) is communicated with the upper end of the fifth knob switch valve (25) through a gas pipeline.

4. The integrated airway component case for general use in vacuum chuck surface inspection according to claim 1, characterized in that: One double port of the first gas passage (51), the second gas passage (52), the third gas passage (53), the fourth gas passage (54) and the fifth gas passage (55) is provided with a plug, the V port of the first vacuum generator (41) is communicated with another double port of the fifth gas passage (55) through a gas pipeline, the V port of the second vacuum generator (42) is communicated with the gas inlet of the second pressure regulating valve (32) through a gas pipeline, the V port of the third vacuum generator (43) is communicated with the single port of the ninth gas passage (59) through a gas pipeline, the gas inlet of the third pressure regulating valve (33) is communicated with one double port of the ninth gas passage (59) through a gas pipeline, and the gas inlet of the fourth pressure regulating valve (34) is communicated with another double port of the ninth gas passage (59) through a gas pipeline.

5. The integrated airway component case for general use in vacuum chuck surface inspection, according to claim 1, wherein: The lower end of the first knob switch valve (21) is communicated with one double port of the sixth gas passage (56) through a gas pipeline, the lower end of the second knob switch valve (22) is communicated with another double port of the sixth gas passage (56) through a gas pipeline, the gas outlet of the first pressure regulating valve (31) is communicated with the double port without the plug of the first gas passage (51) through a gas pipeline, the gas outlet of the second pressure regulating valve (32) is communicated with the double port without the plug of the second gas passage (52) through a gas pipeline, the gas outlet of the third pressure regulating valve (33) is communicated with the double port without the plug of the third gas passage (53) through a gas pipeline, and the gas outlet of the fourth pressure regulating valve (34) is communicated with the double port without the plug of the fourth gas passage (54) through a gas pipeline.

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