Grinding head storage device

Abstract

The embodiment of the utility model discloses a grinding head storage device. The grinding head storage device comprises a storage cabinet, a supporting plate and a supporting assembly. The supporting plate is arranged in a cavity of the storage cabinet, the multiple supporting assemblies are arranged on the supporting plate and used for placing grinding heads, and a cabinet door is arranged on the side face of the storage cabinet; the supporting assembly comprises a bottom plate and a supporting seat, the bottom plate is connected with the supporting seat, the supporting seat is arranged on the bottom plate, a plurality of coaxial containing grooves with the diameters gradually decreased are formed in the center of the top of the supporting seat from top to bottom, and the containing grooves are used for containing grinding heads. The supporting seat in the embodiment of the utility model can provide a stable and reliable supporting effect for grinding heads of multiple specifications; according to the grinding head storage cabinet, through cooperation of the supporting plate and the supporting assembly, an independent storage position can be provided for each grinding head placed in the storage cabinet, then collision and friction between the grinding heads are avoided, and through independent storage of each grinding head, the cleanliness of the grinding heads is guaranteed.

Description

Technical Field

[0001] This application relates to the field of grinding head storage technology, and more particularly to a grinding head storage device. Background Technology

[0002] Grinding heads are important components in the process equipment for manufacturing silicon wafers for large-scale integrated circuits in the semiconductor industry.

[0003] Existing grinding head storage devices often only provide a storage platform for grinding heads to be laid flat on the platform, which affects storage convenience and space utilization. At the same time, they cannot guarantee the cleanliness of the grinding heads in the storage device, and the grinding heads need to be cleaned again after being taken out before they can be used again. Utility Model Content

[0004] This application aims to address at least one of the technical problems existing in the prior art. To this end, this application proposes a grinding head storage device that improves the convenience of storing grinding heads and the space utilization of the storage device, while also ensuring the cleanliness of the grinding heads within the storage device.

[0005] This application provides a grinding head storage device, including: a storage cabinet, a support plate, and a support assembly;

[0006] The support plate is disposed in the cavity of the storage cabinet, and multiple support components are arranged on the support plate and used to place the grinding head. The side of the storage cabinet is provided with a cabinet door, which is disposed opposite to the support plate and is used to open or close the cavity.

[0007] The support assembly includes a base plate and a support base. The base plate is connected to the support plate, and the support base is disposed on the base plate. Multiple coaxial receiving grooves with gradually decreasing diameters are opened from top to bottom at the center of the top of the support base. The receiving grooves are used to place the grinding head.

[0008] Based on the grinding head storage device, multiple receiving slots with gradually decreasing diameters arranged from top to bottom on the support base can be used to match grinding heads of various specifications, providing a stable and reliable support effect for grinding heads of various specifications, and significantly improving the versatility of the support base; through the cooperation of the support plate and support components, each grinding head placed inside the storage cabinet can be provided with an individual storage position, thereby avoiding collisions and friction between grinding heads, and the cleanliness of the grinding heads can also be guaranteed by the independent storage of each grinding head.

[0009] Optionally, the support base includes at least two support blocks evenly arranged circumferentially along the receiving groove. The top of each support block has multiple coaxial fan-shaped grooves with gradually decreasing diameters from top to bottom. At the same height, the fan-shaped grooves of at least two support blocks are combined to form one of the receiving grooves. The support block slides in the radial direction of the receiving groove with the base plate through a first sliding component.

[0010] Furthermore, based on the aforementioned support base, the grinding head can be placed and removed more easily by the reciprocating sliding of the support block. At the same time, the complete receiving groove composed of multiple fan-shaped grooves can also reliably support the grinding head.

[0011] Optionally, the first sliding component is provided with a locking structure for locking the support block and the base plate radially in the receiving groove.

[0012] Furthermore, based on the aforementioned locking structure, the support block can be slid to a larger interval position in advance when placing and removing the grinding head, which facilitates the placement and removal of the grinding head and reduces the probability of the support block colliding with the grinding head.

[0013] Optionally, the bottoms of every two adjacent receiving slots are spaced a distance apart in the vertical direction, and the center of the support base is provided with a clearance slot to avoid the bottom structure of the grinding head.

[0014] Furthermore, based on the above-mentioned arrangement of the receiving groove and the avoidance groove, the side wall of the receiving groove can be used to effectively protect the periphery of the grinding head, preventing the grinding head from detaching from the corresponding receiving groove in the horizontal direction. At the same time, the receiving groove or avoidance groove below the current grinding head can be used to accommodate the bottom structure of the grinding head.

[0015] Optionally, the storage device further includes a connecting frame, which is connected to two of the support components at both ends in the vertical direction, and the connecting frame has a pick-and-place opening on its periphery for picking up and placing the grinding head.

[0016] Furthermore, based on the aforementioned connecting frame design, grinding heads can be stacked in multiple layers without bumping or squeezing each other. Through the pick-and-place ports located on the periphery of the connecting frame, the grinding heads on the lower supporting components can be picked up and placed without removing the upper supporting components.

[0017] Optionally, the storage cabinet is equipped with wheels at the bottom.

[0018] Furthermore, based on the aforementioned wheels, the storage cabinet can be easily moved to a suitable workstation. There can be four wheels arranged in a rectangular pattern, and two or four adjacent wheels can be swivel casters, which makes it easier to move the storage cabinet and improves its flexibility.

[0019] Optionally, the storage device further includes a ventilation assembly, which includes a fan and an air inlet and an air outlet on the storage cabinet. The fan is located at the air inlet and / or the air outlet so that air flows into the cavity from the air inlet and is discharged from the air outlet. The air inlet is provided with a filter structure.

[0020] One of the air inlet and the air outlet is located above the support assembly, and the other is located below the support assembly.

[0021] Furthermore, based on the above-mentioned ventilation components, the combination of the fan, air inlet, and filter structure allows outside air to enter the storage cabinet through filtration and then be discharged outside the storage cabinet through the air outlet. The clean air circulates along a set route (the route through which air can flow over the surface of each grinding head), further improving the cleanliness of the cavity inside the storage cabinet used to store the grinding heads.

[0022] Optionally, the filter structure includes a dustproof mesh disposed between the support assembly and the air inlet, and divides the cavity into a receiving cavity for accommodating the support assembly and a buffer cavity located between the outside and the receiving cavity.

[0023] Furthermore, based on the aforementioned dustproof netting, not only can a buffer chamber be formed to isolate dust and other contaminants, further ensuring the cleanliness of the storage chamber inside the cabinet used to store grinding heads, but the dustproof netting can also form a base structure for installing fans, thereby increasing the number of fans and further improving the power of the ventilation components, thus significantly improving the cleanliness inside the storage chamber.

[0024] Optionally, the air outlet is located on the peripheral side wall of the storage cabinet and extends along the edge of the support plate, while the air inlet is located on the top of the storage cabinet.

[0025] Furthermore, based on the above-mentioned arrangement of air outlets and air inlets, a conical airflow path can be formed within the cavity, allowing the air entering from the air inlet to be evenly discharged towards the air outlet at the bottom of the storage cabinet side wall, reducing the formation of eddies, turbulence, or other chaotic flows within the cavity, which would affect the ventilation effect.

[0026] Optionally, the fan is a fan filter unit.

[0027] Furthermore, based on the aforementioned fan with filtration function, the cleanliness of the air entering the cavity can be further improved, thereby ensuring the cleanliness of the cavity containing the grinding head. The cleanliness of the air entering the cavity from the air inlet can also be further improved by adding filters to one or both sides of the fan.

[0028] The above-described one or more embodiments of this application have at least one or more of the following beneficial effects:

[0029] Based on the aforementioned support components, multiple receiving slots with gradually decreasing diameters arranged from top to bottom on the support base can be used to match multiple specifications of grinding heads, thereby providing a stable and reliable support effect for multiple specifications of grinding heads and significantly improving the versatility of the support base. Through the cooperation of the support plate and support components, each grinding head placed inside the storage cabinet can be provided with an individual storage location, thereby avoiding collisions and friction between grinding heads. The independent storage of each grinding head can also ensure the cleanliness of the grinding head.

[0030] Additional aspects and advantages of this application will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of this application. Attached Figure Description

[0031] The disclosure of this application will become more readily understood with reference to the accompanying drawings. It will be readily understood by those skilled in the art that these drawings are for illustrative purposes only and are not intended to limit the scope of protection of this application. Furthermore, similar numbers in the drawings are used to denote similar components, wherein:

[0032] Figure 1 This is a schematic diagram of the structure of the grinding head storage device described in the embodiments of this application;

[0033] Figure 2 This is a schematic diagram of the grinding head storage device described in an embodiment of this application from another angle;

[0034] Figure 3 This is a front view of the grinding head storage device described in the embodiments of this application;

[0035] Figure 4 This is a front view of the grinding head storage device described in this application embodiment when the cabinet door is closed;

[0036] Figure 5 This is a schematic diagram of the structure when two support components are connected by a connecting frame in an embodiment of this application;

[0037] Figure 6 for Figure 5 Top view;

[0038] Figure 7 for Figure 6Sectional view along the middle AA;

[0039] Figure 8 This is a schematic diagram illustrating the storage of multiple grinding heads in a storage cabinet, as described in one embodiment of this application.

[0040] Figure 9 for Figure 8 Top view;

[0041] Figure 10 for Figure 8 The front view.

[0042] Explanation of reference numerals in the attached figures

[0043] 1. Storage cabinet; 11. Cabinet door; 12. Dustproof net; 13. Connecting frame; 14. Traveling wheels; 15. Second locking assembly; 2. Support plate; 3. Support assembly; 31. Base plate; 32. Support block; 321. Sector groove; 331. Slide groove; 332. Sliding block; 41. Fan; 42. Air inlet; 43. Air outlet; 5. Grinding head. Detailed Implementation

[0044] Some embodiments of this application are described below with reference to the accompanying drawings. Those skilled in the art should understand that these embodiments are merely illustrative of the technical principles of this application and are not intended to limit the scope of protection of this application.

[0045] Existing grinding head storage devices often only provide a storage platform for grinding heads to be laid flat on the platform, which affects storage convenience and space utilization. At the same time, they cannot guarantee the cleanliness of the grinding heads in the storage device, and the grinding heads need to be cleaned again after being taken out before they can be used again.

[0046] Based on this, this application provides a grinding head storage device. Based on the aforementioned support assembly, multiple receiving slots with gradually decreasing diameters arranged from top to bottom on the support base can be used to match multiple specifications of grinding heads, thereby achieving a stable and reliable support effect for multiple specifications of grinding heads and significantly improving the versatility of the support base. Through the cooperation of the support plate and the support assembly, each grinding head placed inside the storage cabinet can be provided with an individual storage position, thereby avoiding collisions and friction between grinding heads. The independent storage of each grinding head can also ensure the cleanliness of the grinding head.

[0047] The present application will be described in detail below through specific embodiments.

[0048] Reference Figures 1 to 10As shown, this embodiment provides a grinding head storage device, including: a storage cabinet 1, a support plate 2, and a support assembly 3; the support plate 2 is disposed in the cavity of the storage cabinet 1, that is, inside the storage cabinet 1, and multiple support assemblies 3 are arranged on the support plate 2 and used to place grinding heads 5. It should be understood that the support assemblies 3 can be arranged at a set position or a random position on the top of the support plate 2. The side of the storage cabinet 1 is provided with a cabinet door 11, which is disposed opposite to the support plate 2 and is used to open or close the cavity. After opening the cabinet door 11, the support assemblies 3 above the support plate 2 can be taken out and put in through the cabinet door 11. The support assembly 3 includes a base plate 31 and a support seat. The base plate 31 is connected to the support plate 2, and the support seat is disposed on the base plate 31. Multiple coaxial receiving slots with gradually decreasing diameters are opened from top to bottom at the center of the top of the support seat. The receiving slots are used to place grinding heads 5. It should be understood that only one grinding head 5 can be placed on each support seat, and the grinding head 5 selects a receiving slot with a matching diameter according to its own size.

[0049] The grinding head storage device provided in this embodiment, based on the aforementioned support component 3, can utilize multiple receiving slots with gradually decreasing diameters arranged from top to bottom on the support base to match multiple specifications of grinding heads 5, thereby achieving a stable and reliable support effect for multiple specifications of grinding heads 5, significantly improving the versatility of the support base; through the cooperation of the support plate 2 and the support component 3, each grinding head 5 placed inside the storage cabinet 1 can be provided with an individual storage position, thereby avoiding collisions and friction between the grinding heads 5, and the cleanliness of the grinding heads 5 can also be guaranteed through the independent storage of each grinding head 5.

[0050] In a further embodiment, the center of the top of the support base has receiving slots with diameters of 12 inches, 8 inches and 6 inches respectively, which are used to hold grinding heads 5 with diameters of 12 inches, 8 inches and 6 inches respectively.

[0051] In some embodiments, the support base includes at least two support blocks 32 evenly arranged along the circumference of the receiving groove. The top of the support block 32 is provided with a plurality of coaxial fan-shaped grooves 321 with gradually decreasing diameter from top to bottom. At the same height, the fan-shaped grooves 321 of at least two support blocks 32 are combined to form one of the receiving grooves. The support block 32 is slidably engaged with the base plate 31 in the radial direction of the receiving groove through a first sliding component.

[0052] Furthermore, based on the aforementioned support base, the grinding head 5 can be placed and removed more conveniently through the reciprocating sliding of the support block 32. At the same time, the complete receiving groove assembled by multiple fan-shaped grooves 321 can also reliably support the grinding head 5.

[0053] In a further embodiment, the first sliding component may include a groove 331 formed on the bottom of the support block 32 and a slider 332 disposed on the base plate 31. The slider 332 slides in the groove 331. Each support block 32 can slide and engage with the base plate 31 through at least two first sliding components. The grooves 331 in each first sliding component are arranged in parallel to improve the stability of the support block 32 when sliding. The first sliding component can also improve the stability of the support block 32 when sliding by arranging multiple sliders 332 in one groove 331.

[0054] In some further embodiments, each support includes two support blocks 32, which move on the base plate 31 in a direction toward or away from each other via a first sliding assembly.

[0055] In some further embodiments, the first sliding assembly is provided with a locking structure for locking the support block 32 and the base plate 31 in the radial direction of the receiving groove. It should be understood that a clamping part can be provided at the part where at least one slider 332 extends out of the slide groove 331, and then the slider 332 is threadedly engaged with the base plate 31. When the slider 332 is turned, the clamping part is used to press and fix the support block 32 in the vertical direction or to loosen the support block 32, thereby achieving the locking and unlocking of the support block 32 and the base plate 31.

[0056] Furthermore, based on the above-mentioned locking structure, the support block 32 can be slid to a larger interval position in advance when placing and removing the grinding head 5, which facilitates the placement and removal of the grinding head 5 and reduces the probability of the support block 32 colliding with the grinding head 5.

[0057] Continue to refer to Figure 7 As shown, the bottoms of every two adjacent receiving slots are spaced a certain distance apart in the vertical direction. The center of the support base is provided with a clearance groove for avoiding the bottom structure of the grinding head 5. It should be understood that when the grinding head 5 is placed on the lowest receiving slot, the bottom structure of the grinding head 5 is located in the clearance groove. When the grinding head 5 is placed on a receiving slot other than the lowest one, the receiving slot below the receiving slot can form at least a partial clearance groove, which serves to avoid the bottom structure of the grinding head 5.

[0058] Furthermore, based on the above-mentioned arrangement of the receiving groove and the avoidance groove, the side wall of the receiving groove can be used to effectively protect the periphery of the grinding head 5, preventing the grinding head 5 from detaching from the corresponding receiving groove in the horizontal direction. At the same time, the receiving groove or avoidance groove below the current grinding head 5 can be used to accommodate the bottom structure of the grinding head 5.

[0059] In some further embodiments, a buffer layer is provided on the inner wall of the receiving groove. The buffer layer is made of a flexible material, so that when the buffer layer comes into contact with the peripheral side of the grinding head 5, it will not cause damage to the peripheral side of the grinding head 5.

[0060] Optionally, the storage device also includes a ventilation assembly, which includes a fan 41 and an air inlet 42 and an air outlet 43 formed on the storage cabinet 1. The fan 41 is located at the air inlet 42 and / or the air outlet 43 so that air flows into the cavity from the air inlet 42 and is discharged from the air outlet 43. The air inlet 42 is provided with a filter structure. One of the air inlet 42 and the air outlet 43 is located above the support assembly 3, specifically on the upper half of the center of the support assembly 3 or above the top of the support assembly 3, and the other is located below the support assembly 3, specifically on the lower half of the center of the support assembly 3 or below the bottom of the support assembly 3.

[0061] Furthermore, based on the above-mentioned ventilation components, the combination of the fan 41, the air inlet 42 and the filter structure allows outside air to enter the interior of the storage cabinet 1 through filtration, and then be discharged outside the storage cabinet 1 through the air outlet 43. The clean air circulates along a set route (the route through which the air can flow over the surface of each grinding head 5), further improving the cleanliness of the cavity inside the storage cabinet 1 used to store the grinding heads 5.

[0062] Continue to refer to Figure 1 and Figure 2 As shown, the filter structure includes a dustproof net 12, which is disposed between the support component 3 and the air inlet 42, and divides the cavity into a receiving cavity for accommodating the support component 3 and a buffer cavity located between the outside and the receiving cavity. The dustproof net 12 can be a plate-shaped structure with a vent hole in the middle. The dustproof effect can be achieved by setting the size of the vent hole within a certain range, or by additionally installing a dustproof mesh or other structures at the vent hole.

[0063] Furthermore, based on the aforementioned dustproof net 12, not only can a buffer cavity be formed to isolate dust and other contaminants, further ensuring the cleanliness of the storage cavity inside the storage cabinet 1 used to store the grinding head 5, but the dustproof net 12 can also form a base structure for installing the fan 41, thereby increasing the number of fans 41 and further improving the ventilation efficiency of the ventilation components, thus significantly improving the cleanliness inside the storage cavity.

[0064] In a further embodiment, the periphery of the buffer cavity is a closed structure. When the cabinet door 11 is opened, the buffer cavity cannot communicate with the outside through the gap formed after the cabinet door 11 is opened, thereby preventing the grinding head 5 from being contaminated by contaminants in the buffer cavity when the cabinet door 11 is opened.

[0065] Continue to refer to Figure 1 and Figure 2 As shown, the air outlet 43 is located on the periphery of the storage cabinet 1 and extends along the edge of the support plate 2, while the air inlet 42 is located on the top of the storage cabinet 1.

[0066] Furthermore, based on the above-mentioned arrangement of the air outlet 43 and air inlet 42, a conical airflow path can be formed in the cavity, so that the air entering from the air inlet 42 can be evenly discharged towards the air outlet 43 at the bottom of the side wall of the storage cabinet 1, reducing the possibility of air forming eddies, turbulence or other turbulence in the cavity, which would affect the ventilation effect.

[0067] In some embodiments, the air inlet 42 may be composed of multiple air inlets arranged in a matrix, and the air outlet 43 may be composed of strip-shaped air inlets extending in a horizontal direction, thereby ensuring air intake efficiency while improving the stability of air flowing along an L-shaped path.

[0068] In some cases, the storage cabinet 1 is provided with a second locking component 15 for locking the cabinet door 11. When the cabinet door 11 is closed, it can remain locked. At the same time, a sealing ring is provided inside the cabinet door 11. When the cabinet door 11 is closed, the sealing ring is pressed tightly to ensure the sealing of the connection between the cabinet door 11 and the storage cabinet 1, so that air can flow according to the set airflow path.

[0069] In some embodiments, fan 41 is a fan filter unit.

[0070] Furthermore, based on the aforementioned fan 41 with filtration function, the cleanliness of the air entering the cavity can be further improved, thereby ensuring the cleanliness of the cavity containing the grinding head 5. The cleanliness of the air entering the cavity from the air inlet 42 can also be further improved by adding filters to one or both sides of the fan 41.

[0071] Continue to refer to Figures 5 to 10 As shown, the storage device also includes a connecting frame 13, which is connected to two support components 3 at both ends in the vertical direction. The connecting frame 13 has a pick-and-place opening on its periphery for picking up and placing the grinding head 5.

[0072] Furthermore, based on the aforementioned connecting frame 13, the grinding heads 5 can be stacked in multiple layers without bumping or squeezing each other. Through the pick-and-place port located on the periphery of the connecting frame 13, the grinding heads 5 on the lower supporting component 3 can be picked up and placed without removing the upper supporting component 3.

[0073] In some further embodiments, the connecting frame 13 may be composed of multiple connecting plates, which are evenly arranged circumferentially. An air intake is formed between every two adjacent connecting plates. Each connecting plate has a connection part at the top and bottom for connecting the support component 3. The connecting plate may be an L-shaped or C-shaped plate, wherein the horizontally protruding part of the L-shaped or C-shaped plate is formed at the connection part of the support component 3. The connection part may be connected to the base plate 31 of the support component 3 by means of bolts or other connection methods. The part extending in the vertical direction forms the main support structure. The connecting frame 13 may also be composed of multiple connecting rods, as long as it can realize the multi-layer stacking of the support component 3.

[0074] Continue to refer to Figure 1 and Figure 2 As shown, the bottom of the storage cabinet 1 is equipped with wheels 14.

[0075] Furthermore, based on the aforementioned wheels 14, the storage cabinet 1 can be easily moved to a suitable workstation. There can be four wheels 14 arranged in a rectangular pattern. Two or four adjacent wheels 14 can be casters, which makes it easier to move the storage cabinet 1 and improves its flexibility.

[0076] In some further embodiments, the traveling wheels 14 may be provided with a locking structure similar to a brake, so that the position of the storage cabinet 1 can be fixed by locking the traveling wheels 14 after the storage cabinet 1 has moved to a specific position.

[0077] In the description of this specification, the references to terms such as "one embodiment," "some embodiments," "example," "specific example," or "some examples," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of this application. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples.

[0078] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature. In the description of this application, "multiple" means at least two, such as two, three, etc., unless otherwise explicitly specified.

[0079] Although embodiments of this application have been shown and described above, it is understood that the above embodiments are exemplary and should not be construed as limiting this application. Those skilled in the art can make changes, modifications, substitutions and variations to the above embodiments within the scope of this application.

Claims

1. A grinding head storage device, characterized in that, include: Storage cabinet (1), support plate (2) and support assembly (3); The support plate (2) is disposed in the cavity of the storage cabinet (1), and a plurality of support components (3) are arranged on the support plate (2) and used to place the grinding head (5). The side of the storage cabinet (1) is provided with a cabinet door (11), which is disposed opposite to the support plate (2) and is used to open or close the cavity. The support assembly (3) includes a base plate (31) and a support base. The base plate (31) is connected to the support plate (2). The support base is disposed on the base plate (31). Multiple coaxial receiving grooves with gradually decreasing diameters are opened from top to bottom at the center of the top of the support base. The receiving grooves are used to place the grinding head (5).

2. The grinding head storage device according to claim 1, characterized in that, The support base includes at least two support blocks (32) evenly arranged along the circumference of the receiving groove. The top of the support block (32) is provided with a plurality of coaxial fan-shaped grooves (321) with gradually decreasing diameter from top to bottom. At the same height, the fan-shaped grooves (321) of at least two support blocks (32) are combined to form one of the receiving grooves. The support block (32) slides in the radial direction of the receiving groove with the base plate (31) through a first sliding component.

3. The grinding head storage device according to claim 2, characterized in that, The first sliding assembly is provided with a locking structure, which is used to lock the support block (32) and the base plate (31) in the radial direction of the receiving groove.

4. The grinding head storage device according to claim 1, characterized in that, The bottoms of the receiving grooves of each two adjacent layers are spaced a distance apart in the vertical direction, and the center of the support base is provided with a clearance groove for avoiding the bottom structure of the grinding head (5).

5. The grinding head storage device according to claim 1, characterized in that, The storage device also includes a connecting frame (13), which is connected to two support components (3) at both ends in the vertical direction. The connecting frame (13) has a pick-and-place opening on its periphery for picking up and placing the grinding head (5).

6. The grinding head storage device according to claim 1, characterized in that, The storage cabinet (1) is equipped with wheels (14) at the bottom.

7. The grinding head storage device according to any one of claims 1 to 6, characterized in that, The storage device further includes a ventilation assembly, which includes a fan (41) and an air inlet (42) and an air outlet (43) opened on the storage cabinet (1). The fan (41) is located at the air inlet (42) and / or the air outlet (43) so that air flows into the cavity from the air inlet (42) and is discharged from the air outlet (43). The air inlet (42) is provided with a filter structure. One of the air inlet (42) and the air outlet (43) is located above the support assembly (3), and the other is located below the support assembly (3).

8. The grinding head storage device according to claim 7, characterized in that, The filter structure includes a dustproof net (12), which is disposed between the support assembly (3) and the air inlet (42) and divides the cavity into a receiving cavity for accommodating the support assembly (3) and a buffer cavity located between the outside and the receiving cavity.

9. The grinding head storage device according to claim 7, characterized in that, The air outlet (43) is located on the periphery of the storage cabinet (1) and extends along the edge of the support plate (2), while the air inlet (42) is located on the top of the storage cabinet (1).

10. The grinding head storage device according to claim 7, characterized in that, The fan (41) is a fan filter unit.

Images