Constant temperature and humidity device of photoresist storage tank

Abstract

The utility model discloses a constant temperature and humidity device of a photoresist storage tank, which comprises a temperature and humidity adjusting mechanism arranged on the outer side of the photoresist storage tank and used for adjusting the temperature and humidity in the photoresist storage tank, and a fixing mechanism used for connection is arranged between the temperature and humidity adjusting mechanism and the photoresist storage tank; through the temperature and humidity adjusting mechanism, a stable constant-temperature and constant-humidity environment can be provided for the inside of the photoresist storage tank, the stability of the quality of the photoresist is ensured, the overall quality of the photoetching process is further improved, a traditional spiral pipe does not need to be adopted, the internal structure of the photoresist storage tank is simplified, and the production cost is reduced. Therefore, the phenomenon of resource waste caused by the fact that the photoresist remains in the included angle between the spiral pipe and the photoresist storage tank and is difficult to discharge during discharging is effectively avoided; the temperature and humidity adjusting mechanism can be supported in an auxiliary mode through the fixing mechanism, so that it is guaranteed that the temperature and humidity adjusting mechanism can operate stably.

Description

Technical Field

[0001] This utility model relates to the field of photoresist storage technology, and in particular to a constant temperature and humidity device for photoresist storage tanks. Background Technology

[0002] Photoresist, also known as photoresist, is a photosensitive liquid mixture. It is a key component in photolithography, primarily used to transfer patterns from a photomask to a substrate such as a wafer. Its solubility changes when exposed to ultraviolet light, electron beams, ion beams, X-rays, or other forms of radiation. In the photolithography process, the photoresist is applied to the substrate, and after exposure and development, a pattern identical to that on the photomask is formed. Finally, etching is performed on the substrate to complete the pattern transfer.

[0003] A patent document with publication number CN222347795U discloses a photoresist delivery device, including a base, a storage tank fixedly mounted on the base, a delivery pipe fixedly mounted on the side of the storage tank, the delivery pipe connecting to the storage tank, a stirring mechanism installed inside the storage tank, a thermometer fixedly mounted on the surface of the storage tank with its temperature monitoring probe inside the storage tank, a heating mechanism installed inside the storage tank, and a pump fixedly mounted on the storage tank with its outlet pipe connected to the storage tank. The stirring mechanism effectively prevents photoresist crystallization during storage, ensuring the uniformity and stability of photoresist delivery. The heating mechanism, in conjunction with the thermometer, facilitates maintaining the photoresist temperature, preventing crystallization during storage and ensuring the uniformity and stability of photoresist delivery.

[0004] Although the aforementioned photoresist delivery device can solve the corresponding technical problems, the spiral tube in its heating mechanism is fixedly installed inside the storage tank. Hot water heats the photoresist in the storage tank through the spiral tube. There is an angle between the spiral tube and the storage tank, which makes it easy for the photoresist to remain in the angle and difficult to discharge during the discharge process. At the same time, the performance of the photoresist is quite sensitive to the temperature and humidity of the storage environment. Inappropriate temperature and humidity may cause the photoresist to deteriorate and affect the subsequent photolithography effect.

[0005] Therefore, a constant temperature and humidity device for photoresist storage tanks is proposed. Utility Model Content

[0006] The purpose of this invention is to provide a constant temperature and humidity device for photoresist storage tanks to solve the problems mentioned in the background art.

[0007] To achieve the above objectives, the main technical solutions adopted by this utility model include:

[0008] The temperature and humidity control device for the photoresist storage tank includes:

[0009] A temperature and humidity control mechanism is located outside the photoresist storage tank and is used to regulate the temperature and humidity inside the photoresist storage tank. A fixing mechanism is provided between the mechanism and the photoresist storage tank for connection.

[0010] The temperature and humidity control mechanism includes a chassis, with a partition A fixedly connected to the inner cavity of the chassis. The partition A divides the inner cavity of the chassis into two cavities A. A heat exchanger is installed in one of the cavities A. The two sides of the heat exchanger are fixedly connected to the chassis and the partition A, respectively. The chassis is also equipped with an air supply assembly and an air exhaust assembly. A humidifier and a dehumidifier are installed in the two cavities A, respectively. The humidifier works in conjunction with the air supply assembly, and the dehumidifier works in conjunction with the air exhaust assembly.

[0011] As a preferred technical solution, the partition A has ventilation holes that are arranged corresponding to the heat exchanger, and another cavity A is fixedly connected to a partition B. The two sides of the partition B are fixedly connected to the chassis and the partition A, respectively. The partition B is used to divide the inner cavity of the ventilation hole into two cavities B.

[0012] As a preferred technical solution, the air supply assembly includes a fan A installed in another cavity A and located above the partition B. An air inlet pipe is connected to the bottom of the chassis and below the heat exchanger, and an air supply pipe is connected to the top of the chassis and above the fan A. A conduit A is connected between the air supply pipe and the photoresist storage tank.

[0013] As a preferred technical solution, the humidifier is located between the fan A and the air supply pipe, and the air supply pipe, heat exchanger, fan A, humidifier, air supply pipe and duct A form an air supply channel.

[0014] As a preferred technical solution, the exhaust assembly includes a fan B installed in another cavity A and located below the partition B. The bottom of the chassis is connected to an exhaust pipe that is opposite to the air supply pipe. The top of the chassis is connected to a return air pipe that is opposite to the air inlet pipe. A conduit B connects the return air pipe to the photoresist storage tank.

[0015] As a preferred technical solution, the dehumidifier is located between the heat exchanger and the return air duct, and the exhaust duct B, the return air duct, the dehumidifier, the heat exchanger, the fan B, and the exhaust duct form an exhaust channel.

[0016] As a preferred technical solution, one of the cavities A is further equipped with two sets of filters arranged vertically, one set of filters being located between the dehumidifier and the return air duct, and the other set of filters being located between the heat exchanger and the inlet air duct, with two filters in each set arranged vertically.

[0017] As a preferred technical solution, a guide plate is fixedly connected to both sides of the heat exchanger, and the side of the guide plate away from the heat exchanger is fixedly connected to the partition plate A.

[0018] As a preferred technical solution, the side of the chassis away from the fixing mechanism is open, and the surface of the chassis is fitted with a cover that can seal and cover the open area.

[0019] As a preferred technical solution, the fixing mechanism includes a mounting plate installed on the side of the chassis away from the cover, and a clamp is fixedly connected to the mounting plate. The clamp is installed on the outer surface of the photoresist storage tank.

[0020] This utility model has at least the following beneficial effects:

[0021] This application utilizes a temperature and humidity control mechanism to provide a stable constant temperature and humidity environment within the photoresist storage tank, ensuring the stability of photoresist quality and thus improving the overall quality of the photolithography process. Furthermore, it eliminates the need for a traditional spiral tube, simplifying the internal structure of the photoresist storage tank and effectively preventing the waste of resources caused by residual photoresist trapped in the angle between the spiral tube and the photoresist storage tank during discharge. The fixing mechanism provides auxiliary support to the temperature and humidity control mechanism, ensuring its stable operation. Attached Figure Description

[0022] Figure 1 This is a schematic diagram of the temperature and humidity control device and the photoresist storage tank of this utility model.

[0023] Figure 2 This is a schematic diagram of the temperature and humidity control device for the photoresist storage tank of this utility model.

[0024] Figure 3 This is an exploded view of the temperature and humidity control mechanism of the constant temperature and humidity device for the photoresist storage tank of this utility model.

[0025] In the diagram: 1. Photoresist storage tank; 100. Temperature and humidity control mechanism; 110. Chassis; 111. Cover; 120. Partition A; 121. Ventilation hole; 122. Partition B; 130. Heat exchanger; 140. Air supply assembly; 141. Fan A; 142. Air inlet duct; 143. Air supply duct; 144. Duct A; 150. Exhaust assembly; 151. Fan B; 152. Exhaust duct; 153. Return air duct; 154. Duct B; 160. Humidifier; 170. Dehumidifier; 180. Filter screen; 190. Deflector; 200. Fixing mechanism; 210. Mounting plate; 220. Clamp. Detailed Implementation

[0026] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0027] Please see Figures 1-3 This utility model provides a temperature and humidity control device for a photoresist storage tank, including a temperature and humidity control mechanism 100 disposed outside the photoresist storage tank 1 for adjusting the temperature and humidity inside the photoresist storage tank 1, and a fixing mechanism 200 for connection. The temperature and humidity control mechanism 100 is mounted on the photoresist storage tank 1 via the fixing mechanism 200. The temperature and humidity control mechanism 100 includes a housing 110, and a vertically arranged partition A120 is fixedly connected to the inner cavity of the housing 110. A120 is used to divide the inner cavity of the chassis 110 into two cavities A. A heat exchanger 130 is installed in one of the cavities A. The two sides of the heat exchanger 130 are fixedly connected to the chassis 110 and the partition A120, respectively. The chassis 110 is also equipped with an air supply assembly 140 and an exhaust assembly 150. A humidifier 160 and a dehumidifier 170 are installed in the two cavities A, respectively. The humidifier 160 is used in conjunction with the air supply assembly 140, and the dehumidifier 170 is used in conjunction with the exhaust assembly 150.

[0028] It also includes a temperature sensor, a humidity sensor, and a controller. The temperature sensor and humidity sensor are respectively installed on the top of the inner cavity of the photoresist storage tank 1, and the controller is installed on the outside of the photoresist storage tank 1. The temperature sensor, humidity sensor, heat exchanger 130, fan A141, fan B151, humidifier 160, and dehumidifier 170 are electrically connected to the controller. The controller is used to adjust the working status or parameters of the temperature sensor, humidity sensor, heat exchanger 130, fan A141, fan B151, humidifier 160, and dehumidifier 170. The temperature sensor and humidity sensor can monitor the temperature and humidity inside the photoresist storage tank 1 in real time and transmit the monitoring data to the controller. The controller receives the data and controls the operation of the temperature and humidity regulating mechanism 100. The controller can be a Siemens S7-300 series PLC controller, the temperature sensor can be a PT100 temperature sensor, and the humidity sensor can be an APEM5900 temperature sensor.

[0029] The partition A120 has ventilation holes 121 that are corresponding to the heat exchanger 130. Another cavity A is fixedly connected to a partition B122 that is perpendicular to the partition A120. The two sides of the partition B122 are fixedly connected to the chassis 110 and the partition A120, respectively. The partition B122 is used to divide the inner cavity of the ventilation hole 121 into two cavities B.

[0030] The air supply assembly 140 includes a fan A141 installed in another cavity A and located above the partition B122. An air inlet pipe 142 is connected to the bottom of the chassis 110 and below the heat exchanger 130. An air supply pipe 143 is connected to the top of the chassis 110 and above the fan A141. A conduit A144 connects the air supply pipe 143 and the photoresist storage tank 1. By starting the fan A141, outside air can be delivered to the chassis 110 and heat-exchanged by the heat exchanger 130 to form hot air or cold air, which is then sent into the inner cavity of the photoresist storage tank 1 to ensure the temperature balance of the photoresist in the photoresist storage tank 1.

[0031] The humidifier 160 is located between the fan A141 and the air supply pipe 143, and the air supply channel is formed between the air inlet pipe 142, the heat exchanger 130, the fan A141, the humidifier 160, the air supply pipe 143 and the duct A144.

[0032] The exhaust assembly 150 includes a fan B151 installed in another cavity A and located below the partition B122. The bottom of the housing 110 is connected to an exhaust pipe 152 that is opposite to the air supply pipe 143. The top of the housing 110 is connected to a return air pipe 153 that is opposite to the air inlet pipe 142. A conduit B154 connects the return air pipe 153 and the photoresist storage tank 1. By starting the fan B151, the gas in the photoresist storage tank 1 can be transported to the housing 110 and discharged after passing through the heat exchanger 130, so as to ensure the stable gas pressure in the photoresist storage tank 1.

[0033] The dehumidifier 170 is located between the heat exchanger 130 and the return air duct 153, and the exhaust duct 154, the return air duct 153, the dehumidifier 170, the heat exchanger 130, the fan 151 and the exhaust duct 152 form an exhaust channel.

[0034] One of the cavities A is equipped with two sets of filters 180 arranged vertically. One set of filters 180 is located between the dehumidifier 170 and the return air duct 153, and the other set of filters 180 is located between the heat exchanger 130 and the air inlet duct 142. There are two filters 180 arranged vertically in each set. The filters 180 can filter the air entering the inner cavity of the chassis 110 to ensure the cleanliness of the air entering the photoresist storage tank 1. They can also prevent dust and other impurities from adhering to the electrical components inside the chassis 110 and affecting the operating performance.

[0035] A guide plate 190 is fixedly connected to both sides of the heat exchanger 130. The side of the guide plate 190 away from the heat exchanger 130 is fixedly connected to the partition plate A120. The guide plate 190 can guide the air in one cavity A, so that the air can smoothly enter the other cavity A through the ventilation hole 121 after passing through the heat exchanger 130.

[0036] The side of the chassis 110 away from the fixing mechanism 200 is open, and the surface of the chassis 110 is detachably fitted with a cover 111 that can seal the open area by screws, so that the cover 111 can be removed from the chassis 110 to perform regular inspection or maintenance of the electrical components inside the chassis 110, or to disassemble, clean or replace the filter screen 180.

[0037] The fixing mechanism 200 includes a mounting plate 210 installed on the side of the chassis 110 away from the cover 111. A clamp 220 is fixedly connected to the mounting plate 210 and installed on the outer surface of the photoresist storage tank 1. The fixing mechanism 200 enables a detachable connection between the temperature and humidity control mechanism 100 and the photoresist storage tank 1. It can provide auxiliary support for the temperature and humidity control mechanism 100 to improve the stability of the connection between the conduit A144 and the photoresist storage tank 1 and the conduit B154 and the photoresist storage tank 1, thereby improving the operational stability of the temperature and humidity control mechanism 100. It can also facilitate the subsequent removal of the temperature and humidity control mechanism 100 from the photoresist storage tank 1 for separate inspection or maintenance.

[0038] The working principle of this utility model is as follows: When the temperature inside the photoresist storage tank 1 is too high or too low, the heat exchanger 130, fan A141, and fan B151 are activated. Fan A141 delivers outside air to the housing 110 through the air inlet pipe 142, where it is first filtered by the corresponding filter screen 180, and then heat-exchanged by the heat exchanger 130. The cold or hot air then sequentially passes through the ventilation hole 121, fan A141, humidifier 160, air supply pipe 143, and duct A144 to the inner cavity of the photoresist storage tank 1, thereby lowering or raising the temperature inside the photoresist storage tank 1. The gas inside the photoresist storage tank 1 is then sequentially delivered to the housing 110 through duct B154 and return air pipe 153, and is first filtered by the corresponding filter screen 180. The filtration process involves passing the filtration fluid through heat exchanger 130, fan B151, and exhaust pipe 152 until the temperature inside the photoresist storage tank 1 is kept constant within a certain range, thus ensuring temperature balance within the photoresist storage tank 1. When humidification is required, simply turn on the humidifier 160 to diffuse water mist into the cold or hot air, which is then carried into the inner cavity of the photoresist storage tank 1. When dehumidification is required, turn off the humidifier 160 and turn on the dehumidifier 170, allowing the moisture inside the photoresist storage tank 1 to enter the casing 110 with the return air and be dehumidified by the dehumidifier 170 before being discharged, until the humidity inside the photoresist storage tank 1 is kept constant within a certain range, thus ensuring humidity balance within the photoresist storage tank 1.

[0039] All parts not described in this utility model are the same as or can be implemented using existing technology. Although embodiments of this utility model have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of this utility model, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A temperature and humidity control device for a photoresist storage tank, characterized in that, include: A temperature and humidity regulating mechanism (100) is provided on the outside of the photoresist storage tank (1) and is used to regulate the temperature and humidity inside the photoresist storage tank (1). A fixing mechanism (200) for connection is provided between the mechanism and the photoresist storage tank (1). The temperature and humidity control mechanism (100) includes a chassis (110), and a partition A (120) is fixedly connected to the inner cavity of the chassis (110). The partition A (120) is used to divide the inner cavity of the chassis (110) into two cavities A. A heat exchanger (130) is installed in one of the cavities A. The two sides of the heat exchanger (130) are fixedly connected to the chassis (110) and the partition A (120) respectively. The chassis (110) is also provided with an air supply assembly (140) and an exhaust assembly (150). A humidifier (160) and a dehumidifier (170) are installed in the two cavities A respectively. The humidifier (160) is used in conjunction with the air supply assembly (140), and the dehumidifier (170) is used in conjunction with the exhaust assembly (150). The air supply assembly (140) includes a fan A (141) installed in another cavity A and located above the partition B (122). An air inlet pipe (142) is connected to the bottom of the casing (110) and below the heat exchanger (130). An air supply pipe (143) is connected to the top of the casing (110) and above the fan A (141). A conduit A (144) is connected between the air supply pipe (143) and the photoresist storage tank (1). The humidifier (160) is located between the fan A (141) and the air supply pipe (143). An air supply channel is formed between the air inlet pipe (142), the heat exchanger (130), the fan A (141), the humidifier (160), the air supply pipe (143), and the conduit A (144). The exhaust assembly (150) includes a fan B (151) installed in another cavity A and located below the partition B (122). The bottom of the housing (110) is connected to an exhaust pipe (152) that is opposite to the air supply pipe (143). The top of the housing (110) is connected to a return air pipe (153) that is opposite to the air inlet pipe (142). A conduit B (154) is connected between the return air pipe (153) and the photoresist storage tank (1).

2. The temperature and humidity control device for the photoresist storage tank according to claim 1, characterized in that: The partition A (120) has ventilation holes (121) that are corresponding to the heat exchanger (130). Another cavity A is fixedly connected to a partition B (122). The two sides of the partition B (122) are fixedly connected to the chassis (110) and the partition A (120) respectively. The partition B (122) is used to divide the inner cavity of the ventilation hole (121) into two cavities B.

3. The temperature and humidity control device for the photoresist storage tank according to claim 1, characterized in that: The dehumidifier (170) is located between the heat exchanger (130) and the return air duct (153), and an exhaust channel is formed between the duct B (154), the return air duct (153), the dehumidifier (170), the heat exchanger (130), the fan B (151), and the exhaust duct (152).

4. The temperature and humidity control device for the photoresist storage tank according to claim 3, characterized in that: One of the cavities A is also equipped with two sets of filters (180) arranged vertically. One set of filters (180) is located between the dehumidifier (170) and the return air duct (153), and the other set of filters (180) is located between the heat exchanger (130) and the air inlet duct (142). There are two filters (180) in each set.

5. The temperature and humidity control device for the photoresist storage tank according to claim 1, characterized in that: A guide plate (190) is fixedly connected to both sides of the heat exchanger (130), and the side of the guide plate (190) away from the heat exchanger (130) is fixedly connected to the partition plate A (120).

6. The temperature and humidity control device for the photoresist storage tank according to claim 1, characterized in that: The chassis (110) is open on the side away from the fixing mechanism (200), and the surface of the chassis (110) is fitted with a cover (111) that can seal and cover the open area.

7. The temperature and humidity control device for the photoresist storage tank according to claim 6, characterized in that: The fixing mechanism (200) includes a mounting plate (210) installed on the side of the chassis (110) away from the cover (111), and a clamp (220) is fixedly connected to the mounting plate (210), and the clamp (220) is installed on the outer surface of the photoresist storage tank (1).

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