Target material backboard structure

Abstract

The utility model belongs to the field of sputtering film formation, and particularly relates to a target material back plate structure. The utility model provides a target material back plate structure which comprises a back plate with a water tank arranged on one face, cooling water enters from one end of the water tank and flows out from the other end of the water tank, and tooth pieces arranged in the water tank in the flowing direction of the cooling water in the water tank are arranged in the water tank. And the cover plate covers the water tank. The target material back plate structure provided by the utility model can absorb the heat of the target material during sputter coating. By adopting the tooth sheet structure, on one hand, the heat dissipation effect can be improved, and on the other hand, the water tank and the whole back plate can be structurally reinforced. And the groove structure arranged at the end of the water tank can achieve a better sealing effect.

Description

Technical Field

[0001] This utility model belongs to the field of sputtering film formation, specifically relating to a target backplate structure. Background Technology

[0002] In modern coating technology, sputtering targets are crucial materials widely used in semiconductors, flat panel displays, solar cells, and many other fields. During operation, the targets are bombarded by high-energy particles, generating a large amount of heat and causing their temperature to rise rapidly. High temperatures not only affect sputtering efficiency and coating quality but can also cause deformation and damage, significantly shortening their lifespan. Currently, common cooling methods often employ air cooling or simple indirect liquid cooling. These methods have low cooling efficiency and cannot quickly and effectively dissipate the heat generated by the target, failing to meet the heat dissipation requirements of targets under high power and long-term operation.

[0003] Meanwhile, the target backplate, as a crucial component supporting the target, has a vital impact on the target's stability and reliability. In practical applications, the target backplate must withstand various forces, including the target's weight, installation stress, and thermal stress during sputtering. Existing target backplates sometimes lack sufficient strength, making them prone to deformation or even breakage under significant stress. This leads to loosening of the bond between the target and the backplate, affecting the uniformity and stability of the coating, and consequently reducing product quality and production efficiency. Therefore, how to implement an efficient cooling structure behind the target backplate for rapid heat dissipation, and how to increase the strength of the target backplate, have become pressing technical problems that need to be solved. Utility Model Content

[0004] The target backplate structure provided by this utility model can effectively solve the problems in the background art.

[0005] The present invention provides a target backplate structure, comprising:

[0006] A back plate with a water tank on one side, cooling water enters from one end of the water tank and flows out from the other end, and toothed plates are arranged in the water tank in the direction of the cooling water flow.

[0007] And, the cover plate placed on the water tank.

[0008] As a further optimization of this utility model, the back plate is in the shape of a long strip, and the water tank is U-shaped with its vertical section being slightly shorter than the length of the back plate.

[0009] As a further optimization of this utility model, the toothed plate presses against the cover plate.

[0010] As a further optimization of this utility model, the edge of the water tank is provided with a stepped section, and the cover plate is installed on the stepped section.

[0011] As a further optimization of this utility model, the cover plate and the back plate are fixed by FSW friction welding or EB welding.

[0012] As a further optimization of this utility model, several toothed plates are arranged in parallel at intervals to form a cluster, and several clusters of toothed plates are arranged at intervals along the length of the water tank.

[0013] As a further optimization of this utility model, the toothed plate is elongated.

[0014] As a further optimization of this utility model, the end of the cover plate does not completely cover the end of the water tank.

[0015] As a further optimization of this utility model, a groove is provided that covers the end of the water tank and the end of the cover plate that is placed behind the water tank; a pipe joint that corresponds to the shape of the groove and fills the groove is also provided.

[0016] As a further optimization of this utility model, the end of the water tank is oval; the end of the cover plate is provided with a semi-oval groove corresponding to the oval shape.

[0017] This invention provides a target backplate structure that can absorb heat from the target material during sputtering coating. The toothed structure used in this invention improves heat dissipation and strengthens the water tank and the entire backplate. Furthermore, the groove structure at the end of the water tank provides a good sealing effect. Attached Figure Description

[0018] Figure 1 This is a schematic diagram of the structure of this embodiment;

[0019] Figure 2 yes Figure 1 A partially enlarged structural diagram;

[0020] Figure 3 yes Figure 1 Structural diagram with cover plate removed;

[0021] Figure 4 yes Figure 3 A partially enlarged structural diagram;

[0022] Among them, there is a back plate 1, a water tank 1a, a toothed plate 1b, a stepped part 1c, a groove 1d, and a cover plate 2. Detailed Implementation

[0023] like Figure 1-4 As shown, this embodiment includes a back plate 1 and a cover plate 2.

[0024] The back plate 1 is a long strip-shaped structure. In other embodiments, the back plate 1 may also be square, circular, or other shapes.

[0025] In this embodiment, a water trough 1a is provided on one side of the back plate 1. The water trough 1a is U-shaped, and the vertical section of the U-shape is slightly shorter than the length of the back plate 1, so that the water trough 1a covers the back plate 1 to the maximum extent. In other embodiments, the water trough 1a may also adopt other shapes such as wavy or M-shaped.

[0026] In this embodiment, one end of the water tank 1a is used for water inlet and the other end is used for water outlet. Cooling water flows in from the water inlet end of the water tank 1a, flows along the length of the water tank 1a, and flows out from the water outlet end.

[0027] A toothed plate 1b is installed in the water tank 1a. The toothed plate 1b is arranged in the direction of the cooling water flow in the water tank 1a, so that the water flows through the toothed plate 1b with the largest possible area, thereby improving the heat dissipation effect. At the same time, the toothed plate 1b does not obstruct the water flow.

[0028] Specifically, the toothed plate 1b is long and strip-shaped, and the toothed plate 1b is parallel to the length direction of the water tank 1a. Several toothed plates 1b are arranged in parallel and spaced apart to form a cluster, and there are several clusters of toothed plates 1b arranged at intervals along the length direction of the water tank 1a.

[0029] Cover plate 2 is placed on water tank 1a.

[0030] In this embodiment, a stepped portion 1c is provided on the side of the water tank 1a, and the cover plate 2 is made into a U-shape corresponding to the shape of the water tank 1a and can be placed on the stepped portion 1c. The thickness of the cover plate 2 is equal to the height of the stepped portion 1c, so that the cover plate 2 is coplanar with the back plate 1 after it is placed on the stepped portion 1c.

[0031] In this embodiment, the height of the toothed plate 1b is exactly equal to the depth of the water tank 1a, so that after the cover plate 2 is placed on the water tank 1a, the toothed plate 1b presses against the cover plate 2. In this way, in addition to increasing the heat dissipation area, the toothed plate 1b can also support the cover plate 2 and strengthen the overall structure of the back plate 1.

[0032] Because the backplate 1 has a water tank 1a, its interior is relatively fragile. Furthermore, due to the high temperature generated by the target material during the sputtering process, the backplate 1 is prone to collapse at high temperatures. In this embodiment, it is essential to use the toothed plate 1b to support and reinforce the backplate 1.

[0033] Since this embodiment includes a stepped portion 1c, the cover plate 2 fits precisely onto the stepped portion 1c. Based on this structure, the cover plate 2 and the back plate 1 can be fixed using FSW friction welding. In other embodiments, the cover plate 2 and the back plate 1 can also be welded using EB welding.

[0034] Preferably, in this embodiment, the end of the cover plate 2 does not completely cover the end of the water tank 1a, so that the part of the end of the water tank 1a that extends beyond the cover plate 2 can serve as the water inlet and outlet.

[0035] Furthermore, a groove 1d is provided that covers the end of the water tank 1a and the end of the cover plate 2 that is placed behind the water tank 1a. That is, the groove 1d is an integral shape formed after the cover plate 2 is placed behind the water tank 1a.

[0036] It also includes a pipe fitting that corresponds to the shape of the groove 1d and fills the groove 1d. In this structure, when the pipe fitting is engaged with the groove 1d, it can simultaneously press down the back plate 1 and the cover plate 2, which can effectively prevent water leakage.

[0037] Specifically, in this embodiment, the end of the water tank 1a is set as an oval shape. The end of the cover plate 2 is provided with a semi-oval groove corresponding to the oval shape.

[0038] It should be noted that the descriptions of directions such as up, down, left, right, front, back, top, bottom, tail, horizontal, and vertical in this application are all based on the accompanying drawings and are only used to more clearly express the technical solution, and do not indicate any limitation on the scope of protection.

[0039] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of this utility model, and are not intended to limit the scope of protection of this utility model. Although this utility model has been described in detail with reference to preferred embodiments, those skilled in the art should understand that modifications or equivalent substitutions can be made to the technical solutions of this utility model without departing from the essence and scope of the technical solutions of this utility model.

Claims

1. A target backing plate structure, characterized by, The application relates to a water-cooled backplane, which comprises: a backplane provided with a water tank, cooling water entering from one end of the water tank and flowing out from the other end, and toothed plates arranged along the flowing direction of the cooling water in the water tank; and a cover plate provided on the water tank.

2. The target backing plate structure of claim 1, wherein The backplane is in the shape of a long strip, and the water tank is in the shape of a U and its vertical section is slightly shorter than the length of the backplane.

3. The target backing plate structure of claim 1, wherein The toothed plates abut against the cover plate.

4. The target backing plate structure of claim 1, wherein The edge of the water tank is provided with a stepped section, and the cover plate is installed on the stepped section.

5. The target backing plate structure of claim 4, wherein The cover plate and the backplane are fixed by FSW friction welding or EB welding.

6. The target backing plate structure of claim 1, wherein A plurality of toothed plates are arranged in parallel and at intervals to form a cluster, and a plurality of clusters of toothed plates are arranged at intervals along the length direction of the water tank.

7. The target backing plate structure of claim 1, wherein The toothed plates are in the shape of a long strip.

8. The target backing plate structure of claim 1, wherein The end of the cover plate does not completely cover the end of the water tank.

9. The target backing plate structure of claim 8, wherein, A recess is further arranged to cover the end of the water tank and the end of the cover plate provided on the water tank, and a pipe joint corresponding to the shape of the recess is further arranged to cover the recess.

10. The target backing plate structure of claim 8, wherein The end of the water tank is in the shape of a waist circle, and the end of the cover plate is provided with a half-waist circle notch corresponding to the shape of the waist circle.

Images