Cluster ion focusing and shaping device

Abstract

The utility model discloses a cluster ion focusing and shaping device, which comprises a pipeline and a nozzle, the nozzle is arranged at one end of the pipeline, mutually parallel deflection plates I are arranged at the other end in the pipeline, mutually parallel deflection plates II are arranged in the pipeline on one side, far away from the nozzle, of the deflection plates I, and the deflection plates II are arranged on the other side of the pipeline. A third deflection plate parallel to the first deflection plate is arranged in the pipeline on the other side of the second deflection plate, shielding plates are arranged on the two sides of the third deflection plate, the two sides of the second deflection plate and the two sides of the first deflection plate, a permanent magnet is arranged at the bottom end in the pipeline on the other side of the generation chamber, a tungsten filament block is arranged in the groove, and a sealing gasket is arranged in the groove in the top of the tungsten filament block. And a cover plate is arranged at the top of the sealing gasket. Under the action of the deflection plate I, the deflection plate II and the deflection plate III, the deflection effect can be improved, and the tungsten filament block can be conveniently maintained and replaced during use.

Description

Technical Field

[0001] This utility model relates to the field of cluster ion focusing and shaping technology, specifically a cluster ion focusing and shaping device. Background Technology

[0002] Cluster ion focusing shaping devices are used in polishing processes, mainly for ultra-smoothing of smooth surfaces of optical components and semiconductors. They can reduce surface roughness to 0.2~0.5nm, achieving ultra-high precision polishing results. The core technology of cluster ion focusing shaping devices is the cluster ion source, which can generate ion beams in a metal environment without toxic gases.

[0003] In the existing technology, most cluster ion focusing and shaping devices only have one set of deflection plates to deflect the ions, resulting in poor deflection effect. Furthermore, it is inconvenient to replace the tungsten wire during use, making the operation relatively complicated. Utility Model Content

[0004] The purpose of this invention is to provide a cluster ion focusing and shaping device to solve the problems mentioned in the background art.

[0005] To achieve the above objectives, this utility model provides the following technical solution: a cluster ion focusing and shaping device, comprising a pipe and a nozzle, wherein a nozzle is provided at one end of the pipe, and a first deflection plate is provided at the other end of the pipe, both parallel to each other; a second deflection plate is provided in the pipe on the side of the first deflection plate away from the nozzle, and a third deflection plate is provided in the pipe on the other side of the second deflection plate; shielding plates are provided on both sides of the third deflection plate, the second deflection plate, and the first deflection plate; a generation chamber is provided in the pipe on the side of the nozzle closest to the first deflection plate, and a bottom end of the pipe on the other side of the generation chamber is provided with... The device includes a permanent magnet. A groove is located at the top of the pipe corresponding to the permanent magnet, and a tungsten filament block is placed within the groove. A sealing gasket is located within the groove at the top of the tungsten filament block, and a cover plate is located on top of the sealing gasket. A protective cover is located at the top of the pipe corresponding to the cover plate, and a telescopic rod is located in the middle of the top of the protective cover. The output end of the telescopic rod is connected to the top of the cover plate. This allows the cluster ions to be deflected more effectively through the combined action of deflection plates one, two, and three. Furthermore, during maintenance, the tungsten filament block can be removed from the groove, facilitating maintenance and replacement within the protective cover.

[0006] Preferably, an extraction lens is provided in the pipe on the other side of the permanent magnet, and an aperture is provided in the pipe on the other side of the extraction lens. A Wien velocity filter is provided in the pipe between the aperture and the deflection plate. After electron bombardment ionization, the cluster ions can be accelerated and focused again through the extraction lens, and adjusted by the aperture. Then, the Wien velocity filter eliminates single ions or relatively light cluster molecular ions.

[0007] Preferably, a gear shaft one is provided at the middle position on one side of the protective cover, and a gear shaft two is provided at the middle position on the other side of the protective cover, and a gear is provided at the middle position of both the gear shaft two and the gear shaft one.

[0008] Preferably, a movable block is provided at the middle position on both sides of the top of the cover plate, and tooth marks are evenly provided at the middle position on the outer side of the movable block. The movable block meshes with the corresponding gear through the tooth marks, so that gear shaft one and gear shaft two drive the gear to rotate, and the gear drives the movable block meshing with it to move up and down, so as to facilitate the movement of the tungsten wire block into and out of the groove, which is convenient for subsequent maintenance.

[0009] Preferably, a spring is provided on the outer side of the output end of the telescopic rod, and the other end of the spring is connected to the top of the cover plate, so that when the moving block drives the cover plate to move, the telescopic rod can extend and retract under the action of the spring.

[0010] Preferably, one end of both gear shaft one and gear shaft two is provided with a pulley, and the pulleys are connected to each other by a belt.

[0011] Preferably, a turntable is provided on the outer side of the protective cover near the pulley end of the gear shaft, and the rotating rod on the inner side of the turntable extends into the protective cover and is connected to the gear shaft through bearings and couplings. Both sides of the turntable are connected to the protective cover through limiting rods, so that the limiting rods on both sides of the turntable limit the turntable and prevent the turntable from rotating.

[0012] Preferably, the bottom of the protective cover has an opening, and a maintenance door is hinged to the side of the protective cover away from the turntable.

[0013] Compared with the prior art, the beneficial effects of this utility model are as follows: This cluster ion focusing and shaping device initially adjusts the direction of the electron beam through the action of deflection plate one, then adjusts the direction and focusing state of the electron beam through the action of deflection plate two, and then adjusts the focusing state of the electron beam through the action of deflection plate three, and fine-tunes the deflection effect, thereby improving the deflection effect. In addition, during maintenance, the turntable can be rotated to drive the gear shaft one connected to it to rotate, and the gear shaft one drives the pulley to rotate, so that the pulleys are connected by a belt, which can drive the pulley on the other side to drive the gear shaft two to rotate, so that the gear shaft one and gear shaft two drive the gear to rotate synchronously, which can drive the moving block meshing with it to move upward, and the moving block can drive the cover plate, sealing gasket and tungsten wire block to move together, which facilitates the movement of the tungsten wire block into the protective cover, making it convenient for maintenance and replacement of the tungsten wire block. Attached Figure Description

[0014] Figure 1 This is a side sectional view of the present invention.

[0015] Figure 2 This is a top sectional view of the protective cover of this utility model;

[0016] Figure 3 This is a schematic diagram of the deflection plate and shielding plate structure of this utility model;

[0017] Figure 4 For the present utility model Figure 1 Enlarged structural diagram at point A in the middle;

[0018] Figure 5 For the present utility model Figure 1 Enlarged structural diagram at point B;

[0019] In the diagram: 1. Pipe; 2. Nozzle; 3. Protective cover; 4. Telescopic rod; 5. Extraction lens; 6. Wien velocity filter; 7. Generation chamber; 8. Permanent magnet; 9. Aperture; 10. Deflection plate one; 11. Deflection plate two; 12. Deflection plate three; 13. Pulley; 14. Gear shaft one; 15. Gear shaft two; 16. Turntable; 17. Cover plate; 18. Gear; 19. Moving block; 20. Shielding plate; 21. Groove; 22. Tungsten wire block; 23. Sealing gasket; 24. Spring. Detailed Implementation

[0020] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. All other embodiments obtained by those skilled in the art based on the embodiments of the present utility model without creative effort are within the scope of protection of the present utility model.

[0021] Please see Figure 1-5An embodiment of this utility model provides: a cluster ion focusing and shaping device, including a pipe 1 and a nozzle 2. One end of the pipe 1 is provided with the nozzle 2, and the other end of the pipe 1 is provided with mutually parallel deflection plates 10. The side of the pipe 1 away from the nozzle 2 of the deflection plate 10 is provided with mutually parallel deflection plates 21, and the other side of the pipe 1 of the deflection plate 21 is provided with mutually parallel deflection plates 32. Shielding plates 20 are provided on both sides of the deflection plates 32, 21, and 10.

[0022] In use, the electron beam direction can be initially adjusted by the action of deflection plate 10 to eliminate monomeric ions or relatively light cluster molecular ions. Then, the direction and focusing state of the electron beam can be adjusted by the action of deflection plate 21, and the focusing state of the electron beam can be adjusted by the action of deflection plate 312. The deflection effect can be finely adjusted, thereby improving the deflection effect. When deflection plate 10, deflection plate 21 and deflection plate 312 are used, the edge effect can be reduced by the shielding plates 20 on both sides.

[0023] A generation chamber 7 is provided in the pipe 1 on the side of the nozzle 2 near the deflection plate 10, and a permanent magnet 8 is provided at the bottom of the pipe 1 on the other side of the generation chamber 7. A groove 21 is provided at the top of the pipe 1 corresponding to the permanent magnet 8, and a tungsten wire block 22 is provided in the groove 21. An extraction lens 5 is provided in the pipe 1 on the other side of the permanent magnet 8, and an aperture 9 is provided in the pipe 1 on the other side of the extraction lens 5. A Wien speed filter 6 is provided in the pipe 1 between the aperture 9 and the deflection plate 10.

[0024] In use, the nozzle 2 can inject high-pressure argon gas into the pipe 1, which enters the vacuum generation chamber 7. Due to adiabatic expansion, it cools rapidly and condenses into gas clusters. Then, through the combined action of the tungsten wire block 22 and the permanent magnet 8, the path of the electrons can be guided and controlled when thermionic electrons are generated, which can improve the ionization efficiency. The electrons bombard and ionize, converting into positively charged cluster ions. The cluster ions are then accelerated and focused by the extraction lens 5, and adjusted by the aperture 9. The Wien velocity filter 6 eliminates single ions or relatively light cluster molecular ions. Finally, the deflection plates 10, 11, and 12 effectively remove neutral particles, so that the pure cluster ion beam is precisely focused.

[0025] A sealing gasket 23 is provided in the groove 21 at the top of the tungsten wire block 22, and a cover plate 17 is provided on the top of the sealing gasket 23. A protective cover 3 is provided on the top of the pipe 1 corresponding to the position of the cover plate 17, and a telescopic rod 4 is provided in the middle position of the top of the protective cover 3. The output end of the telescopic rod 4 is connected to the top of the cover plate 17. A spring 24 is provided on the outside of the output end of the telescopic rod 4, and the other end of the spring 24 is connected to the top of the cover plate 17. A gear shaft 14 is provided in the middle position of one side of the protective cover 3, and a gear shaft 25 is provided in the middle position of the other side of the protective cover 3. Both the gear shaft 25 and the gear shaft 14 are provided with The gear 18 and the cover plate 17 are both provided with moving blocks 19 at the middle position of the top two sides. The moving blocks 19 are evenly provided with tooth marks at the middle position of the outer side. The moving blocks 19 mesh with the corresponding gear 18 through the tooth marks. One end of the gear shaft 14 and the gear shaft 15 are both provided with pulleys 13. The pulleys 13 are connected to each other by a belt. The protective cover 3 near the pulley 13 of the gear shaft 14 is provided with a turntable 16. The rotating rod inside the turntable 16 extends into the protective cover 3 through bearings and couplings and is connected to the gear shaft 14. Both sides of the turntable 16 are connected to the protective cover 3 through limiting rods.

[0026] In use, the turntable 16 can be rotated to drive the gear shaft 14 connected to it to rotate. The gear shaft 14 drives the pulley 13 to rotate, so that the pulleys 13 are connected by a belt. The pulley 13 on the other side can drive the gear shaft 15 to rotate. The gear shaft 14 and the gear shaft 15 can drive the gear 18 to rotate synchronously. The gear 18 can drive the moving block 19 that meshes with it to move upward. During the movement, the telescopic rod 4 can extend and retract under the action of the spring 24. The moving block 19 can drive the sealing gasket 23 and the tungsten wire block 22 at the bottom of the cover plate 17 to move together, so that the tungsten wire block 22 can be moved into the protective cover 3, which is convenient for maintenance and replacement of the tungsten wire block 22.

[0027] The bottom of the protective cover 3 is provided with an opening, and a maintenance door is hinged to the side of the protective cover 3 away from the turntable 16;

[0028] When in use, the maintenance door can be opened to repair or replace the tungsten wire block 22 inside the protective cover 3.

[0029] In this embodiment, high-pressure argon gas is injected into pipe 1 through nozzle 2, entering the vacuum generation chamber 7. Due to adiabatic expansion, it rapidly cools and condenses into gas clusters. These clusters are then guided and controlled by tungsten filament block 22 and permanent magnet 8 during the generation of hot electrons, improving ionization efficiency. The electrons bombard and ionize, transforming into positively charged cluster ions. These cluster ions are then accelerated and focused by extraction lens 5, and adjusted by aperture 9. A Wien velocity filter 6 eliminates single ions or relatively light cluster molecular ions. The cluster ions are then initially oriented by deflection plate one 10, then further oriented and focused by deflection plate two 11, and finally focused by deflection plate three 12. Fine-tuning of the deflection effect improves the overall deflection efficiency, effectively removing neutral particles. A pure cluster ion beam is precisely focused. When used with deflector plate 10, deflector plate 21, and deflector plate 312, the edge effect can be reduced by the shielding plates 20 on both sides. When maintenance is required, the turntable 16 can be rotated to drive the gear shaft 14 connected to it to rotate. The gear shaft 14 drives the pulley 13 to rotate, and the pulleys 13 are connected by a belt. The pulley 13 on the other side can drive the gear shaft 25 to rotate. The gear shaft 14 and gear shaft 25 can drive the gear 18 to rotate synchronously. The gear 18 can drive the moving block 19 that meshes with it to move upward. During the movement, the telescopic rod 4 can extend and retract under the action of the spring 24. The moving block 19 can drive the sealing gasket 23 and the tungsten wire block 22 at the bottom of the cover plate 17 to move together, so that the tungsten wire block 22 can be moved into the protective cover 3. Then the maintenance door can be opened to repair and replace the tungsten wire block 22 in the protective cover 3.

[0030] Obviously, the embodiments described above are only some embodiments of this utility model, and not all embodiments. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort should fall within the protection scope of this utility model.

[0031] It should be noted that the terminology used herein is for the purpose of describing particular embodiments only and is not intended to limit the exemplary embodiments according to this application. As used herein, the singular form is intended to include the plural form as well, unless the context clearly indicates otherwise. Furthermore, it should be understood that when the terms "comprising" and / or "including" are used in this specification, they indicate the presence of features, steps, operations, devices, components, and / or combinations thereof.

[0032] It should be noted that the terms "first," "second," etc., used in the specification, claims, and accompanying drawings of this application are used to distinguish similar objects and are not necessarily used to describe a specific order or sequence. It should be understood that such data can be interchanged where appropriate so that the embodiments of this application described herein can be implemented in sequences other than those illustrated or described herein.

[0033] The above are merely preferred embodiments of this utility model and are not intended to limit the scope of this utility model. Various modifications and variations can be made to this utility model by those skilled in the art. Any modifications, equivalent substitutions, or improvements made within the spirit and principles of this utility model should be included within the protection scope of this utility model.

Claims

1. A cluster ion focusing shaping device, characterized by: The utility model provides a kind of nozzle and pipeline, including pipeline (1) and nozzle (2), one end of the pipeline (1) is equipped with nozzle (2), and the other end in the pipeline (1) is equipped with deflector plate one (10) mutually parallel, the other side of deflector plate two (11) in the pipeline (1) is equipped with deflector plate two (11) mutually parallel in the pipeline (1) far from nozzle (2) side deflector plate one (10), and the other side of deflector plate three (12) in the pipeline (1) is equipped with deflector plate three (12) mutually parallel, and the both sides of deflector plate three (12), deflector plate two (11) and deflector plate one (10) are equipped with shield plate (20), the other side of the generating chamber (7) in the pipeline (1) of nozzle (2) close to deflector plate one (10) is equipped with generating chamber (7), and the bottom of the other side pipeline (1) in the generating chamber (7) is equipped with permanent magnet (8), the top of the corresponding pipeline (1) in permanent magnet (8) is equipped with recess (21), and the recess (21) is equipped with tungsten wire block (22), the recess (21) in the top of tungsten wire block (22) is equipped with sealing pad (23), and the top of sealing pad (23) is equipped with cover plate (17), the top of the pipeline (1) is equipped with protective cover (3) in the position corresponding cover plate (17), and the top of the protective cover (3) is equipped with telescopic rod (4) in the middle position, and the output end of telescopic rod (4) is connected with the top of cover plate (17).

2. A cluster ion focusing and shaping device according to claim 1, wherein: The other side of the pipeline (1) in the permanent magnet (8) is equipped with extraction lens (5), and the other side of the pipeline (1) in extraction lens (5) is equipped with diaphragm (9), and the pipeline (1) between diaphragm (9) and deflector plate one (10) is equipped with Wien velocity filter (6).

3. A cluster ion focusing and shaping device according to claim 1, wherein: The middle position of one side in the protective cover (3) is equipped with gear shaft one (14), and the middle position of the other side in the protective cover (3) is equipped with gear shaft two (15), and the middle position of gear shaft two (15) and gear shaft one (14) is equipped with gear (18).

4. The cluster ion focusing and shaping device according to claim 1, wherein: The middle position of both sides of the top of cover plate (17) is equipped with moving block (19), and the middle position of the outside of moving block (19) is uniformly equipped with tooth mark, and moving block (19) is all engaged with corresponding gear (18) through tooth mark.

5. The cluster ion focusing and shaping device according to claim 1, wherein: The outside of the output end of telescopic rod (4) is equipped with spring (24), and the other end of spring (24) is connected with the top of cover plate (17).

6. A cluster ion focusing and shaping device according to claim 3, wherein: The one end of gear shaft one (14) and gear shaft two (15) is equipped with belt pulley (13), and belt pulley (13) is connected by belt.

7. A cluster ion focusing and shaping device according to claim 3, wherein: The outside of the protective cover (3) near the one end of gear shaft one (14) close to belt pulley (13) is equipped with turntable (16), and the inner side of turntable (16) is extended to the protective cover (3) and is connected with gear shaft one (14) through bearing and coupling of rotating rod, and the both sides of turntable (16) are connected with protective cover (3) through limiting rod.

8. The cluster ion focusing and shaping device according to claim 1, wherein: The bottom of the protective cover (3) is equipped with opening, and the side away from turntable (16) of the protective cover (3) is hinged with maintenance door.

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