Eccentric trimmer

Abstract

The embodiment of the utility model provides an eccentric trimmer, and relates to the technical field of polisher trimmers. The eccentric trimmer comprises a machining table, polishing solution spraying equipment is installed in an inner cavity of the machining table, a rotary base table is installed at the bottom of the inner cavity of the machining table, a polishing assembly is arranged in the inner cavity of the machining table, a pneumatic lifting device is installed in the inner cavity of the machining table, and a polishing device body is fixedly connected to the front side of the pneumatic lifting device. And the polishing assembly comprises a mounting box. By arranging the polishing assembly, flexible adjustment of the position and the length of the polishing component is achieved, and the polishing component is made to do asymmetric rotation movement in the finishing process through the eccentric movement structure. By means of the design, the dressing range is effectively expanded, the problem that a traditional fixed dresser has a blind area is solved, and therefore all-directional and dead-corner-free dressing on the surface of a polished workpiece is achieved.

Description

Technical Field

[0001] This utility model relates to the field of polishing machine dressing technology, and in particular to an eccentric dressing. Background Technology

[0002] CMP (Chemical Mechanical Polishing) is a technique used in semiconductor manufacturing to planarize surfaces. In this process, the dresser (also called a conditioner or conditioning device) is a key component used to maintain the surface condition of the polishing pad, ensuring its flatness and removing abrasive particles and material residues that may accumulate on the pad. For diamond dressing, the dresser typically used is a tool containing diamond particles because diamond has extremely high hardness, making it ideal for dressing and cleaning CMP polishing pads. These dressers generally consist of a carrier (such as a metal disk) on which a layer of diamond abrasive grains is fixed. These abrasive grains act mechanically on the surface of the polishing pad to restore its properties without damaging its structure.

[0003] Existing dressing tools, when dressing polished parts, are mostly fixed in structure and lack flexible adjustment functions. Therefore, they can only treat limited, localized polished areas by oscillation. This limitation means the equipment cannot cover the entire workpiece surface, restricting the dressing range and making it difficult to achieve efficient and comprehensive dressing results. To compensate for this deficiency, users often need to repeatedly adjust or move the position of the workpiece to ensure that all areas are adequately dressed. This not only increases operational complexity and labor intensity but also reduces overall work efficiency. Furthermore, blind spots or incomplete dressing may occur during the dressing process, affecting the final processing quality and consistency. Utility Model Content

[0004] The purpose of this invention is to provide an eccentric dresser that avoids the problems of existing dressers, which, due to their fixed structure and limited adjustment functions, can only dress localized areas, resulting in small coverage and low efficiency. Users also face the issues of frequent workpiece position adjustments, cumbersome operation, and the potential for blind spots in dressing, affecting processing quality and consistency.

[0005] This utility model provides an eccentric dressing device, including a processing table, a polishing liquid spraying device installed in the inner cavity of the processing table, a rotating base installed at the bottom of the inner cavity of the processing table, a polishing assembly provided in the inner cavity of the processing table, a pneumatic lifting device installed in the inner cavity of the processing table, a polishing device body fixedly connected to the front side of the pneumatic lifting device, the polishing assembly including a mounting box, a first motor fixedly connected to the inner cavity of the mounting box, and a rotating rod fixedly connected to the output shaft of the first motor.

[0006] In one specific implementation, a rotating arm is fixedly connected to the top end of the rotating rod, and a movable plate is slidably connected to the inner cavity of the rotating arm, with the right side of the movable plate extending through to the outer side of the rotating arm.

[0007] In one specific implementation, a protective box is fixedly connected to the bottom of the rotating arm, a motor is fixedly connected to the inner cavity of the protective box, a threaded rod is fixedly connected to the output shaft of the motor, a threaded block is threadedly connected to the outer surface of the threaded rod, and the outer surface of the threaded block is slidably connected to the inner cavity of the protective box.

[0008] In one specific implementation, a push rod is fixedly connected to the right side of the threaded block, and the front end of the push rod extends through to the right side of the protective box and is fixedly connected to the bottom of the movable plate.

[0009] In one specific implementation, a polishing box is fixedly connected to the front side of the movable plate, a second motor is installed inside the polishing box, and a fixed plate is fixedly connected to the inside of the polishing box.

[0010] In one specific implementation, an L-shaped rod is slidably connected to the bottom of the fixed disk, a first gear is fixedly connected to the bottom end of the L-shaped rod, and a running rod is fixedly connected to the output shaft of the second motor.

[0011] In one specific implementation, the bottom end of the operating rod extends to the outer side of the bottom of the fixed disk and is fixedly connected to a second gear that meshes with the first gear.

[0012] In one specific implementation, the inner cavity of the polishing box is slidably connected to a first gear, the bottom of the first gear is fixedly connected to a limiting frame, and the top of the limiting frame is movably connected to a third gear that meshes with the first gear.

[0013] In one specific implementation, a second gear disk that meshes with the first and second gears is fixedly connected to the inner side of the third gear, and a mounting rod is installed at the bottom of the third gear, with a polishing component bolted to the bottom end of the mounting rod.

[0014] The beneficial effects of this application are as follows: By setting up the polishing assembly, not only can the position and length of the polishing component be flexibly adjusted, but also the eccentric motion structure enables the polishing component to perform asymmetrical rotational motion during the dressing process. This design effectively expands the dressing range and avoids the blind spot problem existing in traditional fixed dressers, thereby achieving all-round, dead-angle-free dressing of the surface of the polished workpiece. At the same time, the eccentric motion can also evenly distribute the dressing pressure, reduce the occurrence of defects such as edge collapse, improve dressing accuracy and surface flatness, and further ensure the consistency and stability of processing quality. Attached Figure Description

[0015] To more clearly illustrate the technical solutions of the embodiments of this utility model, the drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of this utility model and should not be regarded as a limitation of the scope. For those skilled in the art, other related drawings can be obtained from these drawings without creative effort.

[0016] Figure 1 This is a three-dimensional schematic diagram of the overall structure of an embodiment of the present utility model;

[0017] Figure 2 This is a front sectional view of the overall structure of an embodiment of the present utility model;

[0018] Figure 3 This is a three-dimensional schematic diagram of the overall structure of the polishing component in an embodiment of the present invention, showing its disassembled state.

[0019] Figure 4 This is a three-dimensional side view sectional view of the polishing box structure according to an embodiment of the present utility model;

[0020] Figure 5 This is a three-dimensional schematic diagram of the polishing box structure in a disassembled state according to an embodiment of the present utility model;

[0021] Figure 6 This is a three-dimensional schematic diagram of the second gear structure according to an embodiment of the present utility model;

[0022] Figure 7 This is a three-dimensional side view sectional view of the fixed disk structure according to an embodiment of the present utility model.

[0023] Icons: 1. Processing table; 2. Polishing slurry spraying equipment; 3. Rotating base; 4. Polishing assembly; 41. Mounting box; 42. First motor; 43. Rotating rod; 44. Rotating arm; 45. Moving plate; 46. Protective box; 47. Motor; 48. Threaded rod; 49. Threaded block; 410. Push rod; 411. Polishing box; 412. Second motor; 413. Fixed plate; 414. L-shaped rod; 415. First gear; 416. Running rod; 417. Second gear; 418. First gear disc; 419. Third gear; 420. Second gear disc; 421. Polishing component; 422. Limiting frame; 423. Mounting rod; 5. Pneumatic lifting device; 51. Polishing device body. Detailed Implementation

[0024] Existing dressers, due to their fixed structure and limited adjustment functions, can only dress localized areas, resulting in small coverage and low efficiency. Users need to frequently adjust the workpiece position, making operation cumbersome and prone to creating blind spots, affecting processing quality and consistency. Therefore, the inventors have developed an eccentric dresser. The polishing component allows for flexible adjustment of the polishing part's position and length, and the eccentric motion structure enables asymmetrical rotation, expanding the dressing range, avoiding blind spots, and achieving dressing without dead angles. Simultaneously, it evenly distributes dressing pressure, reducing edge collapse and improving dressing accuracy and surface quality, thus solving the aforementioned defects.

[0025] The following detailed description, in conjunction with the accompanying drawings, outlines some embodiments of the present invention. Unless otherwise specified, the following embodiments and features can be combined with each other.

[0026] Please refer to Figures 1 to 7 This utility model provides an eccentric dressing device, including a processing table 1. A polishing liquid spraying device 2 is installed in the inner cavity of the processing table 1. A rotating base 3 is installed at the bottom of the inner cavity of the processing table 1. The rotating base 3 comprises a stepper motor mounting box, a stepper motor, a rotating table, and corresponding clamps for holding polishing pads. A polishing assembly 4 is provided in the inner cavity of the processing table 1. A pneumatic lifting device 5 is installed in the inner cavity of the processing table 1. A polishing device body 51 is fixedly connected to the front side of the pneumatic lifting device 5. The polishing assembly 4 includes a mounting box 41. The bottom of the mounting box 41 is fixedly connected to the bottom of the inner cavity of the processing table 1. A first motor 42 is fixedly connected to the inner cavity of the mounting box 41. A rotating rod 43 is fixedly connected to the output shaft of the first motor 42. A rotating arm 44 is fixedly connected to the top of the rod 43. A movable plate 45 is slidably connected to the inner cavity of the rotating arm 44. The right side of the movable plate 45 extends through to the outside of the rotating arm 44. The area where the movable plate 45 and the rotating arm 44 penetrate through the rotating arm 44 is sealed. A protective box 46 is fixedly connected to the bottom of the rotating arm 44. A motor 47 is fixedly connected to the inner cavity of the protective box 46. A threaded rod 48 is fixedly connected to the output shaft of the motor 47. The outer surface of the threaded rod 48 is provided with external threads. A threaded block 49 is threadedly connected to the outer surface of the threaded rod 48. The area where the threaded block 49 contacts the threaded rod 48 is provided with matching internal threads. The outer surface of the threaded block 49 is slidably connected to the inner cavity of the protective box 46. A push rod 410 is fixedly connected to the right side of the threaded block 49.

[0027] Please refer to Figures 2 to 7The front end of the push rod 410 extends through to the right side of the protective box 46 and is fixedly connected to the bottom of the movable plate 45. The area where the push rod 410 contacts the protective box 46 is sealed. A polishing box 411 is fixedly connected to the front side of the movable plate 45. A second motor 412 is installed inside the polishing box 411. A fixed plate 413 is fixedly connected to the inner cavity of the polishing box 411. An L-shaped rod 414 is slidably connected to the bottom of the fixed plate 413. A first gear 415 is fixedly connected to the bottom end of the L-shaped rod 414. A running rod 416 is fixedly connected to the output shaft of the second motor 412. The bottom end of the running rod 416 extends through to the outer side of the bottom of the fixed plate 413 and is fixedly connected to a gear 415. The first gear 415 meshes with the second gear 417. The inner cavity of the polishing box 411 is slidably connected to the first gear disk 418. The bottom of the first gear disk 418 is fixedly connected to the limit frame 422. The top of the limit frame 422 is movably connected to the third gear 419, which meshes with the first gear disk 418. The inner side of the third gear 419 is fixedly connected to the second gear disk 420, which meshes with the first gear 415 and the second gear 417. The bottom of the third gear 419 is equipped with an installation rod 423. The bottom end of the installation rod 423 is bolted to a polishing component 421. The bottom of the polishing box 411 is provided with an open structure, and the polishing component 421 can be a polishing disc or the like.

[0028] Specifically, when the surface of the polished part is being finished, the second motor 412 is started, which drives the running rod 416 to rotate, and the running rod 416 in turn drives the second gear 417 to rotate. During the rotation of the second gear 417, it simultaneously meshes and rotates with the first gear 415 and the second gear disk 420. The second gear disk 420 further drives the third gear 419 to rotate eccentrically. The first gear 415 moves in a circle with the second gear 417 as the center, and applies a force to one side of the second gear disk 420 and the third gear 419, thereby causing the third gear 419 to rotate eccentrically when meshing with the first gear disk 418. At this time, the third gear 419 drives the polishing component 421 to rotate eccentrically, and its eccentric motion achieves a seamless and edge-free finishing of the surface of the polished part. In addition, during the finishing process, the motor 47 can also be started, which drives the threaded rod 48 to rotate, and through the thread transmission principle, pushes the threaded block 49 to move reciprocally in a linear motion. The threaded block 49 drives the push rod 410, the moving plate 45, the polishing box 411 and the polishing component 421 to move synchronously, thereby adjusting the length of the dressing stroke to adapt to the dressing requirements of different angle surfaces of the polished parts, and improving the applicability and ease of use of the equipment.

[0029] In summary, the working principle of an eccentric dressing device according to an embodiment of this utility model is as follows: First, the user places the workpiece to be polished onto the rotating base 3. Then, the polishing liquid spraying device 2 is activated to spray polishing liquid onto the workpiece. At this time, the rotating base 3 and the polishing device body 51 are activated to polish the workpiece. During the polishing process, the polishing assembly 4 is activated, wherein the first motor 42 is activated. The first motor 42 drives the rotating rod 43, the rotating arm 44 and the polishing box 411 to swing back and forth. While swinging, the polishing assembly 4 is used to eccentrically dress the surface of the workpiece, thereby improving the cleanliness of the surface of the workpiece and making it easier to use.

[0030] The above are merely preferred embodiments of this utility model and are not intended to limit the scope of this utility model. Various modifications and variations can be made to this utility model by those skilled in the art. Any modifications, equivalent substitutions, or improvements made within the spirit and principles of this utility model should be included within the protection scope of this utility model.

Claims

1. An eccentric trimmer, characterized in that, The equipment includes a processing table (1), a polishing liquid spraying device (2) installed in the inner cavity of the processing table (1), a rotating base (3) installed at the bottom of the inner cavity of the processing table (1), a polishing assembly (4) provided in the inner cavity of the processing table (1), a pneumatic lifting device (5) installed in the inner cavity of the processing table (1), a polishing device body (51) fixedly connected to the front side of the pneumatic lifting device (5), the polishing assembly (4) includes a mounting box (41), a first motor (42) fixedly connected to the inner cavity of the mounting box (41), and a rotating rod (43) fixedly connected to the output shaft of the first motor (42).

2. The eccentric trimmer according to claim 1, characterized in that, The top end of the rotating rod (43) is fixedly connected to a rotating arm (44), and a moving plate (45) is slidably connected to the inner cavity of the rotating arm (44), with the right side of the moving plate (45) extending through to the outside of the rotating arm (44).

3. An eccentric trimmer according to claim 2, characterized in that, The bottom of the rotating arm (44) is fixedly connected to a protective box (46), and the inner cavity of the protective box (46) is fixedly connected to a motor (47). The output shaft of the motor (47) is fixedly connected to a threaded rod (48), and the outer surface of the threaded rod (48) is threadedly connected to a threaded block (49), and the outer surface of the threaded block (49) is slidably connected to the inner cavity of the protective box (46).

4. An eccentric trimmer according to claim 3, characterized in that, A push rod (410) is fixedly connected to the right side of the threaded block (49). The front end of the push rod (410) extends through to the right side of the protective box (46) and is fixedly connected to the bottom of the movable plate (45).

5. An eccentric trimmer according to claim 4, characterized in that, A polishing box (411) is fixedly connected to the front side of the movable plate (45). A second motor (412) is installed in the inner cavity of the polishing box (411). A fixed plate (413) is fixedly connected to the inner cavity of the polishing box (411).

6. An eccentric trimmer according to claim 5, characterized in that, The bottom of the fixed disk (413) is slidably connected to an L-shaped rod (414), the bottom end of the L-shaped rod (414) is fixedly connected to a first gear (415), and the output shaft of the second motor (412) is fixedly connected to a running rod (416).

7. An eccentric trimmer according to claim 6, characterized in that, The bottom end of the running rod (416) extends to the outside of the bottom of the fixed plate (413) and is fixedly connected to a second gear (417) that meshes with the first gear (415).

8. An eccentric trimmer according to claim 7, characterized in that, The inner cavity of the polishing box (411) is slidably connected to a first gear disc (418), the bottom of the first gear disc (418) is fixedly connected to a limiting frame (422), and the top of the limiting frame (422) is movably connected to a third gear (419) that meshes with the first gear disc (418).

9. An eccentric trimmer according to claim 8, characterized in that, The inner side of the third gear (419) is fixedly connected to a second gear disk (420) that meshes with the first gear (415) and the second gear (417). A mounting rod (423) is installed at the bottom of the third gear (419), and a polishing component (421) is bolted to the bottom end of the mounting rod (423).

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