Anti-toppling device for assembling silicon boat

Abstract

The utility model relates to the technical field of silicon boat assembly, and discloses an anti-toppling device for silicon boat assembly, which comprises a bottom plate, a silicon boat base and a fixing seat, the silicon boat base and the fixing seat are fixedly mounted at the top of the bottom plate, a silicon boat rod is mounted at the other end, far away from the bottom plate, of the silicon boat base in an inserted manner, and a supporting frame is fixedly mounted at the top of the fixing seat. Sliding grooves are formed in the two sides of the interior of the supporting frame, and a sliding assembly is slidably connected to the outer side of the supporting frame. According to the anti-toppling device for silicon boat assembling, the other end of the first bolt makes contact with the outer wall of the supporting frame through the first bolt, the limiting effect can be achieved, the sliding assembly can be prevented from moving, when the angle needs to be limited, the second bolt can be rotated through the design of the second bolt, the second bolt makes contact with the connecting rod, and therefore the angle can be limited. And when the angle needs to be adjusted, a second bolt can be loosened, the angle of the clamping assembly can be conveniently adjusted, and the diversity of the whole device is improved.

Description

Technical Field

[0001] This utility model relates to the field of silicon boat assembly technology, specifically to an anti-tipping device for silicon boat assembly. Background Technology

[0002] Silicon boats are frequently used in fields such as semiconductor manufacturing. They are used to carry semiconductor materials, such as silicon wafers, for various processing steps. Silicon boats play a crucial role in semiconductors. Their structure is delicate and their value is high. If they tip over, they may cause serious damage to the silicon wafers they carry, affecting product quality and production schedule. To prevent them from tipping over easily, anti-tipping devices are often used during assembly.

[0003] As prior art, Chinese utility model patent CN218592821U specifically discloses a clamp for assisting in the assembly of a silicon boat. This clamp uses a supporting clamping platform to hold and fix the flange of the silicon boat. Simultaneously, the pushing action of the pushing member on the limiting plate allows the limiting part to be adjusted to the required angle, ensuring that the side support rod is clamped at a suitable angle between the limiting part and the clamping seat. However, this clamping solution lacks a clamping structure for the silicon boat rod, which easily leads to the need for manual support of the silicon boat rod during installation. This not only increases the workload of workers but also makes it prone to instability and tipping over due to prolonged operation, hindering its widespread use. Summary of the Invention

[0004] This invention aims to provide an anti-tipping device for assembling silicon boats, which improves the stability and reliability of the clamping and support of silicon boat rods.

[0005] To achieve the above objectives, the technical solution adopted by this utility model is as follows:

[0006] An anti-tipping device for assembling a silicon boat includes a base plate and a silicon boat base and a fixed seat fixedly installed on the top of the base plate. A silicon boat rod is inserted and installed at the other end of the silicon boat base away from the base plate. A support frame is fixedly installed on the top of the fixed seat. Sliding grooves are opened on both sides inside the support frame. A sliding component is slidably connected to the outside of the support frame. A clamping component is fixedly installed at one end of the sliding component.

[0007] The clamping assembly includes a fixed post, a first rotating block rotatably mounted on the outside of the fixed post, a first clamp fixedly mounted on one end of the first rotating block, a first spring fixedly mounted on the other end of the first rotating block away from the first clamp, and a second rotating block rotatably mounted on the outside of the fixed post.

[0008] Preferably, the clamping assembly further includes a second rotating block, a second clamp is fixedly installed at one end of the second rotating block, and a second spring is fixedly installed at the other end of the second rotating block away from the second clamp. The first clamp and the second clamp have the same structure, and the other ends of the first spring and the second spring are fixedly installed with the connecting rod.

[0009] Through the above technical solution, by cooperating with the first and second clips, one end of the first and second clips can be pressed, causing the first and second springs to deform, thereby realizing the opening and closing of the first and second clips. In use, the first and second clips can be pressed, and then the silicon boat rod can be placed between the first and second clips. Then, the first and second clips can be released to reset the first and second springs, which can clamp the silicon boat rod. Before curing and fixing of the upper and lower plates, manual support by workers can be avoided, reducing manpower and improving overall stability.

[0010] Preferably, the cross-sections of the first clip and the second clip are the same as the shape of the silicon boat rod, and the first clip and the second clip correspond one-to-one with the silicon boat rod.

[0011] Through the above technical solution, by cooperating with the first and second clips, when placing multiple silicon boat rods, the clamping components and sliding components can be selected according to the actual situation, which can improve the versatility of the overall device.

[0012] Preferably, the sliding assembly includes a movable block, a rotating rod is fixedly installed on the inner side of the movable block, a connecting rod is fixedly installed on the outer side of the rotating rod, and a limit groove is formed at the end of the connecting rod away from the movable block.

[0013] Preferably, a slider is fixedly installed on the inner side of the movable block, and the movable block is slidably connected to the slide groove through the slider.

[0014] With the above technical solution, the sliding component can be inserted into the sliding groove through the cooperation of the slider and the groove. This not only enables the overall device to move up and down, but also provides a certain degree of limitation to prevent the sliding component from falling off.

[0015] Preferably, the movable block is threaded with a first bolt on its back side, the first bolt passing through the movable block and extending to the outside of the support frame to contact it.

[0016] With the above technical solution, when the slide reaches a suitable height, the first bolt can be rotated so that the other end of the first bolt contacts the outer wall of the support frame, which can play a limiting role and prevent the sliding component from moving.

[0017] Preferably, a second bolt is threaded onto the top of the movable block, the second bolt passing through the movable block and contacting the connecting rod.

[0018] Through the above technical solution, the design of the second bolt allows the second bolt to be rotated to contact the connecting rod when the angle needs to be limited, thereby preventing the connecting rod from rotating and limiting the adjustment of its angle. When the angle needs to be adjusted, the second bolt can be loosened, which facilitates the adjustment of the angle of the clamping component and improves the versatility of the overall device.

[0019] Preferably, the fixing seat is fixedly installed to the base plate by screws, and a quartz cover is slidably connected to the outside of the support frame, with the quartz cover located on top of the silicon boat rod.

[0020] Through the above technical solution, the cooperation between the fixing seat and the base plate can prevent the fixing seat from easily loosening or moving, and facilitate subsequent disassembly and assembly. At the same time, the quartz cover can protect the silicon boat rod and prevent external dust, impurities, moisture and other factors from contaminating or damaging the silicon boat rod.

[0021] The anti-tipping device for silicon boat assembly provided by this utility model has the following advantages over the prior art:

[0022] 1. The anti-tipping device for assembling this silicon boat, through the cooperation of the first and second clamps, can press one end of the first and second clamps, causing the first and second springs to deform, thereby realizing the opening and closing of the first and second clamps. In use, the first and second clamps can be pressed, and then the silicon boat rod can be placed between the first and second clamps. Then, the first and second clamps can be released to allow the first and second springs to return to their original positions, which can clamp the silicon boat rod. Before curing and fixing of the upper and lower plates, it can avoid manual support by workers, reduce manpower, and improve overall stability. When placing multiple silicon boat rods, the clamping components and sliding components can be selected according to the actual situation, which can improve the versatility of the overall device.

[0023] 2. The anti-tipping device for assembling this silicon boat uses a first bolt, with one end contacting the outer wall of the support frame, which acts as a limit and prevents the sliding components from moving. The design of the second bolt allows for angle restriction; when angle restriction is needed, the second bolt can be rotated to contact the connecting rod, thus preventing the connecting rod from rotating and limiting its angle adjustment. When angle adjustment is needed, the second bolt can be loosened, facilitating angle adjustment of the clamping components and improving the versatility of the overall device. Attached Figure Description

[0024] Figure 1 This is a first-view three-dimensional structural diagram of the anti-tipping device for assembling the silicon boat in this utility model;

[0025] Figure 2This is a second-view three-dimensional structural diagram of the anti-tipping device for assembling the silicon boat in this utility model;

[0026] Figure 3 This is a schematic diagram of the disassembled structure of the anti-tipping device for assembling the silicon boat in this utility model;

[0027] Figure 4 This is a schematic diagram of the installation structure of the support frame and sliding component in this utility model;

[0028] Figure 5 This is a three-dimensional structural diagram of the sliding component in this utility model;

[0029] Figure 6 This is a first-view schematic diagram of the disassembled sliding component structure in this utility model;

[0030] Figure 7 This is a first-view schematic diagram of the disassembled sliding component structure in this utility model;

[0031] Figure 8 This is a schematic diagram of the disassembled structure of the clamping component in this utility model.

[0032] The components are as follows: 1. Base plate; 2. Silicon boat base; 3. Silicon boat rod; 4. Fixed seat; 5. Support frame; 6. Quartz cover; 7. Slide groove; 8. Sliding assembly; 801. Movable block; 802. Slider; 803. First bolt; 804. Rotating rod; 805. Second bolt; 806. Connecting rod; 807. Limiting groove; 9. Clamping assembly; 901. Fixed column; 902. First rotating block; 903. First clamp; 904. First spring; 905. Second rotating block; 906. Second clamp; 907. Second spring. Detailed Implementation

[0033] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0034] Example 1:

[0035] like Figure 1-4 As shown, the anti-tipping device for assembling a silicon boat provided in this example includes a base plate 1 and a silicon boat base 2 and a fixing seat 4 fixedly installed on the top of the base plate 1. A silicon boat rod 3 is inserted and installed at the other end of the silicon boat base 2 away from the base plate 1. A support frame 5 is fixedly installed on the top of the fixing seat 4. Sliding grooves 7 are opened on both sides inside the support frame 5. A sliding component 8 is slidably connected to the outside of the support frame 5. A clamping component 9 is fixedly installed at one end of the sliding component 8.

[0036] See further Figure 5 and Figure 7 In this example, the sliding component 8 includes a movable block 801, a rotating rod 804 is fixedly installed on the inner side of the movable block 801, a connecting rod 806 is fixedly installed on the outer side of the rotating rod 804, and a limit groove 807 is formed at the end of the connecting rod 806 away from the movable block 801.

[0037] Furthermore, in this example, a slider 802 is fixedly installed inside the movable block 801, and the movable block 801 is slidably connected to the slide groove 7 through the slider 802.

[0038] Based on the above settings, the sliding component 8 can be inserted into the sliding groove 7 through the cooperation of the slider 802 and the sliding groove 7. This not only enables the overall device to move up and down, but also provides a certain limit to prevent the sliding component 8 from falling off.

[0039] See further Figure 8 In this example, the clamping assembly 9 includes a fixed post 901, a first rotating block 902 is rotatably mounted on the outside of the fixed post 901, a first clamp 903 is fixedly mounted on one end of the first rotating block 902, a first spring 904 is fixedly mounted on the other end of the first rotating block 902 away from the first clamp 903, and a second rotating block 905 is rotatably mounted on the outside of the fixed post 901.

[0040] Furthermore, the clamping assembly 9 in this example also includes a second rotating block 905. A second clamp 906 is fixedly installed at one end of the second rotating block 905, and a second spring 907 is fixedly installed at the other end of the second rotating block 905 away from the second clamp 906. The first clamp 903 and the second clamp 906 have the same structure. The other ends of the first spring 904 and the second spring 907 are fixedly installed with the connecting rod 806.

[0041] Based on the above configuration, by cooperating with the first clip 903 and the second clip 906, one end of the first clip 903 and the second clip 906 can be pressed, causing the first spring 904 and the second spring 907 to deform, thereby opening and closing the first clip 903 and the second clip 906. In use, the first clip 903 and the second clip 906 can be pressed, and then the silicon boat rod 3 can be placed between the first clip 903 and the second clip 906. Then, the first clip 903 and the second clip 906 can be released, causing the first spring 904 and the second spring 907 to reset, which can clamp the silicon boat rod 3. Before curing and fixing of the upper and lower plates, manual support by workers can be avoided, reducing manpower and improving overall stability.

[0042] Furthermore, in this example, the cross-sections of the first clip 903 and the second clip 906 are the same as the shape of the silicon boat rod 3, and the first clip 903 and the second clip 906 correspond one-to-one with the silicon boat rod 3.

[0043] Based on the above settings, by cooperating with the first clip 903 and the second clip 906, when multiple silicon boat rods 3 are placed, the use of the clamping component 9 and the sliding component 8 can be selected according to the actual situation, which can improve the versatility of the overall device.

[0044] Example 2:

[0045] This example provides a further specific improvement to the solution given in Example 1.

[0046] Combination Figures 4 to 7 As shown, in this example, the back of the movable block 801 is threaded with a first bolt 803. The first bolt 803 passes through the movable block 801 and extends to the outside of the support frame 5 to contact it.

[0047] Based on the above settings, when the slide reaches a suitable height, the first bolt 803 can be rotated so that the other end of the first bolt 803 contacts the outer wall of the support frame 5, which can play a limiting role and prevent the sliding component 8 from moving.

[0048] Furthermore, a second bolt 805 is threadedly connected to the top of the movable block 801, the second bolt 805 passing through the movable block 801 and contacting the connecting rod 806.

[0049] Based on the above settings, the design of the second bolt 805 allows for angle restriction. When the angle needs to be limited, the second bolt 805 can be rotated to contact the connecting rod 806, thereby preventing the connecting rod 806 from rotating and limiting its angle adjustment. When the angle needs to be adjusted, the second bolt 805 can be loosened, facilitating angle adjustment of the clamping assembly 9 and improving the versatility of the overall device.

[0050] Combination Figures 1 to 4 As shown, in this example, the fixed base 4 is fixedly installed to the base plate 1 by screws, and the support frame 5 is slidably connected to the outside of the quartz cover 6, which is located on the top of the silicon boat rod 3.

[0051] Based on the above settings, the cooperation between the fixing seat 4 and the base plate 1 ensures that the fixing seat 4 will not easily loosen or move, and facilitates subsequent disassembly and assembly. At the same time, the quartz cover 6 can protect the silicon boat rod 3 and prevent external dust, impurities, moisture, etc. from contaminating or damaging the silicon boat rod 3.

[0052] Regarding the anti-tipping device for silicon boat assembly given in the above example, its operation process is explained in detail below.

[0053] When in use, the anti-tipping device for assembling this silicon boat works by pressing one end of the first clip 903 and the second clip 906 together, causing the first spring 904 and the second spring 907 to deform, thereby opening and closing the first clip 903 and the second clip 906.

[0054] Based on this, the first clip 903 and the second clip 906 can be pressed, and then the silicon boat rod 3 can be placed between the first clip 903 and the second clip 906. Then, the first clip 903 and the second clip 906 can be released to reset the first spring 904 and the second spring 907, which can clamp the silicon boat rod 3. Before curing and fixing of the upper and lower plates, manual support by staff can be avoided, reducing manpower and improving overall stability.

[0055] Furthermore, through the cooperation of the first clip 903 and the second clip 906, when multiple silicon boat rods 3 are placed, the use of the clamping component 9 and the sliding component 8 can be selected according to the actual situation, which can improve the versatility of the overall device.

[0056] With the cooperation of slider 802 and slide groove 7, when sliding component 8 is placed, it can be placed from slide groove 7, which can realize the up and down movement of the whole device and also play a certain limiting role to prevent sliding component 8 from falling. When it slides to a suitable height, the first bolt 803 can be rotated so that the other end of the first bolt 803 contacts the outer wall of support frame 5, which can play a limiting role and prevent sliding component 8 from moving.

[0057] Based on the second bolt 805, when it is necessary to limit the angle, the second bolt 805 can be rotated so that the second bolt 805 contacts the connecting rod 806, thereby preventing the connecting rod 806 from rotating and limiting its angle adjustment; when it is necessary to adjust the angle, the second bolt 805 can be loosened, which makes it easier for the clamping assembly 9 to adjust the angle and improve the versatility of the overall device.

[0058] Finally, the cooperation between the fixing seat 4 and the base plate 1 ensures that the fixing seat 4 will not easily loosen or move, and facilitates subsequent disassembly and assembly. At the same time, the quartz cover 6 can protect the silicon boat rod 3 and prevent external dust, impurities, moisture and other factors from contaminating or damaging the silicon boat rod 3.

[0059] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. An anti-tipping device for assembling a silicon boat, comprising a base plate (1) and a silicon boat base (2) and a fixing seat (4) fixedly mounted on the top of the base plate (1), characterized in that: Silicon boat base (2) is connected to a silicon boat rod (3) at the other end away from the base plate (1). A support frame (5) is fixedly installed on the top of the fixed seat (4). Sliding grooves (7) are opened on both sides inside the support frame (5). A sliding component (8) is slidably connected to the outside of the support frame (5). A clamping component (9) is fixedly installed at one end of the sliding component (8). The clamping assembly (9) includes a fixed post (901), a first rotating block (902) is rotatably mounted on the outside of the fixed post (901), a first clamp (903) is fixedly mounted on one end of the first rotating block (902), a first spring (904) is fixedly mounted on the other end of the first rotating block (902) away from the first clamp (903), and a second rotating block (905) is rotatably mounted on the outside of the fixed post (901).

2. The anti-tipping device for silicon boat assembly according to claim 1, characterized in that: The clamping assembly (9) further includes a second rotating block (905), one end of which is fixedly mounted with a second clip (906), and the other end of the second rotating block (905) away from the second clip (906) is fixedly mounted with a second spring (907). The first clip (903) and the second clip (906) have the same structure, and the other ends of the first spring (904) and the second spring (907) are fixedly mounted with the connecting rod (806).

3. The anti-tipping device for assembling a silicon boat according to claim 2, characterized in that: The first clip (903) and the second clip (906) have the same cross-section as the silicon boat rod (3), and the first clip (903) and the second clip (906) correspond one-to-one with the silicon boat rod (3).

4. The anti-tipping device for assembling a silicon boat according to claim 1, characterized in that: The sliding assembly (8) includes a movable block (801), a rotating rod (804) is fixedly installed on the inner side of the movable block (801), a connecting rod (806) is fixedly installed on the outer side of the rotating rod (804), and a limit groove (807) is formed at the end of the connecting rod (806) away from the movable block (801).

5. The anti-tipping device for assembling a silicon boat according to claim 4, characterized in that: A slider (802) is fixedly installed on the inner side of the movable block (801), and the movable block (801) is slidably connected to the slide groove (7) through the slider (802).

6. The anti-tipping device for assembling a silicon boat according to claim 4, characterized in that: The movable block (801) is threaded with a first bolt (803) on its back side. The first bolt (803) passes through the movable block (801) and extends to the outside of the support frame (5) where it contacts the support frame (5).

7. The anti-tipping device for assembling a silicon boat according to claim 4, characterized in that: The top of the movable block (801) is threaded with a second bolt (805), which passes through the movable block (801) and contacts the connecting rod (806).

8. The anti-tipping device for silicon boat assembly according to claim 1, characterized in that: The fixed base (4) is fixedly installed to the base plate (1) by screws. A quartz cover (6) is slidably connected to the outside of the support frame (5). The quartz cover (6) is located on the top of the silicon boat rod (3).

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