A SEM fixture for observing barbaric microstructures

Abstract

This utility model relates to the field of clamping technology and discloses a SEM clamp for observing bar microstructures. It includes a clamp base mounted on an SEM microscope stage base; a fixed clamp block located on one side of the top of the clamp base; a movable clamp block located on the other side of the top of the clamp base and cooperating with the fixed clamp block; several movable clamping plates located inside the movable clamping blocks for fixing the bar; limiting blocks located on both sides of the movable clamping blocks and cooperating with them; and a reset assembly located between the clamp base, the movable clamping blocks, and the movable clamping plates for resetting the movable clamping blocks and plates. This utility model provides a clamp for SEM observation that is simple to operate, highly efficient, and allows for the simultaneous installation of multiple bar strips, thus effectively solving the problem of low efficiency in observing the side morphology of bar strips using SEM electron microscopes in the semiconductor laser chip industry.

Description

Technical Field

[0001] This utility model relates to the field of fixture technology, and more specifically, to a SEM fixture for observing bar strip microstructures. Background Technology

[0002] Currently, the SEM fixtures used in the industry for observing the side morphology of laser wafer strips using electron microscopes (SEM) are composed of metal component structures, such as... Figure 8 As shown, it consists of four parts: a stainless steel clamp base, a copper clamp block (including a fixed clamp block c and a movable clamp block d), an aluminum metal ring b, and a low-carbon steel locking screw e.

[0003] When observing the side morphology of the bar strip product, the bar strip needs to be fixed in the middle of the clamping block and tightened with screws. Then, the clamping block with the bar strip is placed in the metal ring and tightened with screws. Finally, the metal ring with the bar strip is placed on the fixture base and tightened with screws. At this time, the SEM fixture assembly is completed. The fixture containing the bar strip product can then be loaded into the SEM microscope cavity for morphological observation.

[0004] However, traditional SEM fixtures have the following defects or shortcomings:

[0005] 1. The process of fixing the bar to the clamp is complex: First, the bar is installed in the clamp block. Specifically, this requires manual handling of the clamp block. After adjusting the width and position of the movable clamp block, the bar is picked up with tweezers and placed in the gap between the fixed block and the movable block. The height and horizontal position of the bar in the gap are adjusted with the tweezers, and then the movable clamp block is clamped with fingers. Finally, the movable clamp block is locked with the locking screw, securing the bar between the clamp blocks. Next, the clamp block is fixed inside the metal ring. Specifically, the clamp block with the bar installed is placed on a flat table, and then the metal ring is placed over the clamp block. The metal ring is also placed on the same flat table, keeping it at the same level as the clamp block. The position of the clamp block and the metal ring is adjusted, and then the clamp block is fixed inside the metal ring with the locking screw. Finally, the metal ring with the clamping block is installed onto the metal base. Specifically, it is placed in the circular groove of the metal base, the size of which matches the outer diameter of the metal ring. After adjusting the position of the metal ring, it is secured with locking screws. At this point, the bar, bar clamping block, metal ring, and metal base are all fixed as a whole, completing the installation of the bar to the clamp. Looking at the entire process, it is necessary to fix the bar to the clamping block step by step, then fix the clamping block to the metal ring, and then fix the metal ring to the metal base. Each step requires adjustment of position and tightening with screws, making the process numerous, complex, and extremely inefficient.

[0006] 2. Bar strips are prone to falling off during clamping: Bar strips are approximately 1-2cm long and 1-3mm wide, with various sizes and widths. When fixing the bar strip to the clamp, tweezers are needed to adjust its position, trying to make the viewing surface of the bar strip parallel to the surface of the clamp. The entire adjustment process is time-consuming. During the adjustment, the movable clamp is not yet locked, and the bar strip is prone to falling directly into the gap of the clamp. At this time, the bar strip needs to be removed from the gap and the position readjusted until the bar strip is properly positioned. Then the movable clamp is locked. The smaller the width of the bar strip, the greater the chance of it falling off during the adjustment, resulting in low efficiency and wasted labor.

[0007] 3. There is a limit to the number of grippers on the bar strips, and multiple bar strips cannot be observed on the gripper at the same time: This gripper can only install one bar strip at a time. However, when observing with a SEM microscope, the total time for one sample loading and unloading process, vacuuming, vacuuming, and adjusting the observation position in the equipment cavity is at least 20 minutes. When observing multiple bar strips, they can only be installed on the gripper one by one, and the vacuuming, vacuuming, and observation position adjustment must be repeated. Multiple bar strips cannot be installed on the gripper at the same time, which wastes the effective working time of the equipment.

[0008] In summary, the currently used bar clamps have disadvantages such as complex bar installation procedures, easy breakage during installation, low operating efficiency, and limited sample capacity.

[0009] No effective solutions have yet been proposed to address the problems in the relevant technologies. Utility Model Content

[0010] In view of the problems in the related technologies, this utility model proposes a SEM fixture for observing bar strip microstructures, so as to overcome the above-mentioned technical problems existing in the existing related technologies.

[0011] Therefore, the specific technical solution adopted by this utility model is as follows:

[0012] A SEM fixture for observing bar strip microstructures includes a fixture base mounted on an SEM microscope stage base; a fixed clamping block mounted on one side of the top of the fixture base; a movable clamping block mounted on the other side of the top of the fixture base and cooperating with the fixed clamping block; several movable clamping plates disposed inside the movable clamping block for fixing bar strips; limiting blocks disposed on both sides of the movable clamping block and cooperating with the movable clamping block; and a reset assembly disposed between the fixture base, the movable clamping block, and the movable clamping plates for resetting the movable clamping block and the movable clamping plates.

[0013] Furthermore, in order to facilitate the connection between the fixture base and the SEM microscope stage base, the bottom of the fixture base is provided with a movable groove that matches the SEM microscope stage base, and a positioning plate is provided on one side of the top of the fixture base.

[0014] Furthermore, in order to facilitate the cooperation between the fixed clamping block and the movable clamping block, a T-shaped groove is provided at the bottom of the fixed clamping block to cooperate with the movable clamping block.

[0015] Furthermore, to facilitate the clamping and fixing of the bar, the movable clamping block includes a base plate installed inside the T-shaped groove, a side plate that mates with the base plate on one side, and a top plate on the top of the side plate; a pressing rod that mates with the T-shaped groove is provided in the middle of the other side of the base plate, and the other end of the pressing rod extends to the outside of the fixed clamping block and connects with the pressing block; both sides of the top plate are provided with bosses that mate with the limiting blocks.

[0016] Furthermore, in order to effectively limit the sliding movement of the movable clamping block, a limiting groove that matches the boss is provided on one side of the limiting block.

[0017] Furthermore, in order to achieve a good reset effect, the reset assembly includes several second screws installed on both sides of the side plate, with one end of the second screw penetrating the side plate and connected to the movable clamping plate; a first spring is wound around the outside of the second screw, and the two ends of the first spring are respectively connected to the movable clamping plate and the side plate; the reset assembly also includes several second springs installed between the positioning plate and the side plate.

[0018] Furthermore, to facilitate the installation and fixation of the various components, the fixture base, the fixed clamping block, and the limiting block are all connected by several first screws. Positioning pins that mate with the second spring are provided on one side of the positioning plate and one side of the side plate. Through holes that mate with the first and second screws are respectively provided on the top outer side of the fixture base and on both sides of the side plate; several screw holes that mate with the first and second screws are respectively provided on the bottom outer side of the fixed clamping block, one side of the movable clamping plate, and the bottom of the limiting block.

[0019] The beneficial effects of this utility model are as follows:

[0020] 1) This utility model provides a SEM observation fixture that is simple to operate, highly efficient, and allows multiple bars to be installed simultaneously, thereby effectively solving the problem of low efficiency in observing the side morphology of bars using SEM electron microscopes in the semiconductor laser chip industry.

[0021] 2) Simplify the loading and unloading process of bar bars and improve efficiency: Eliminate the tedious steps of assembling and disassembling bar bars step by step using the original clamps. There is no need to repeatedly tighten and loosen screws to load and unload bar bars. Simply press the pressing block of the movable clamp to open and close the clamps, thereby realizing the loading and unloading of bar bars.

[0022] 3) Prevent bar clips from falling during loading: The clamps are easy to open and close, making the process of loading and unloading bar clips simpler. There is no need to remove bar clips that have fallen into the gaps of the clamps by removing screws, thus avoiding the problem of bar clips falling into the gaps of the clamps during loading and unloading and then having to remove bar clips by removing screws to open the clamps.

[0023] 4) Increase the number of bar strips loaded to save SEM observation time: Up to 4 bar strips can be loaded and observed at the same time, which can save the time of repeatedly assembling with screws after loading each bar strip, extracting and releasing vacuum after placing it into the SEM equipment, and adjusting the observation position of the clamp in the SEM microscope cavity. The efficiency of clamp usage is increased by at least 3 times. Attached Figure Description

[0024] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0025] Figure 1 This is a schematic diagram of the structure of an SEM fixture for observing bar strip microstructures according to an embodiment of the present invention;

[0026] Figure 2 This is a three-dimensional assembly schematic diagram of a SEM fixture for observing bar strip microstructures according to an embodiment of the present invention;

[0027] Figure 3 This is a schematic diagram of the fixture base in an SEM fixture for observing bar strip microstructures according to an embodiment of the present invention;

[0028] Figure 4 This is a schematic diagram of the structure of a fixing block in an SEM fixture for observing bar microstructures according to an embodiment of the present invention;

[0029] Figure 5 This is a schematic diagram of the movable clamping block in an SEM fixture for observing bar microstructures according to an embodiment of the present invention;

[0030] Figure 6 This is a schematic diagram of the limiting block in an SEM fixture for observing bar microstructures according to an embodiment of the present invention;

[0031] Figure 7 This is a schematic diagram of the resetting component in an SEM fixture for observing bar microstructures according to an embodiment of the present invention;

[0032] Figure 8It is a traditional SEM fixture in existing technology.

[0033] In the picture:

[0034] 1. Fixture base; 101. Movable groove; 102. Positioning plate; 2. Fixed clamping block; 201. T-shaped groove; 3. Movable clamping block; 301. Base plate; 302. Side plate; 303. Top plate; 304. Pressing rod; 305. Pressing block; 306. Boss; 4. Movable clamping plate; 5. Limiting block; 501. Limiting groove; 6. Reset assembly; 601. Second screw; 602. First spring; 603. Second spring; 7. First screw; 8. Positioning post; 9. Through hole; 10. Screw hole. Detailed Implementation

[0035] To further illustrate the various embodiments, the present invention provides accompanying drawings, which are part of the disclosure of the present invention. These drawings are mainly used to illustrate the embodiments and can be used in conjunction with the relevant descriptions in the specification to explain the operating principles of the embodiments. With reference to these contents, those skilled in the art should be able to understand other possible implementation methods and the advantages of the present invention. The components in the figures are not drawn to scale, and similar component symbols are usually used to represent similar components.

[0036] According to an embodiment of the present invention, a SEM fixture for observing bar strip microstructures is provided.

[0037] The present invention will now be further described in conjunction with the accompanying drawings and specific embodiments, such as... Figures 1-7 As shown, the SEM fixture for observing bar strip microstructures according to an embodiment of the present invention includes a fixture base 1, which is disposed on the SEM microscope stage base; a fixed clamping block 2, which is disposed on one side of the top of the fixture base 1; a movable clamping block 3, which is disposed on the other side of the top of the fixture base 1 and cooperates with the fixed clamping block 2; a plurality of movable clamping plates 4, which are disposed inside the movable clamping block 3 for fixing bar strips; limiting blocks 5, which are disposed on both sides of the movable clamping block 3 and cooperate with the movable clamping block 3; and a reset assembly 6, which is disposed between the fixture base 1, the movable clamping block 3 and the movable clamping plates 4 for resetting the movable clamping block 3 and the movable clamping plates 4.

[0038] In one embodiment, the bottom of the clamp base 1 is provided with an movable groove 101 that mates with the SEM microscope stage base, and a positioning plate 102 is provided on one side of the top of the clamp base 1, thereby facilitating the connection between the clamp base 1 and the SEM microscope stage base.

[0039] In specific applications, the fixture base 1 in this embodiment is made of 304 stainless steel and is manufactured to specific dimensions using CNC technology. The bottom of the fixture base 1 is provided with a movable groove 101 that cooperates and is fixed to the SEM microscope stage base for mounting and fixing the fixture base 1 to the SEM stage. The top of the fixture base 1 is provided with an opening for connecting and fixing the clamping block 2 and the limiting block 5. Screws are connected and fixed to the clamping block 2 and the limiting block 5 through the opening. The top right side of the fixture base 1 is provided with a positioning plate 102 for limiting the position of the movable clamping block 3. It is an integral structure with the base. The left side of the positioning plate 102 is provided with two spring positioning posts, which are integral structures with the positioning plate 102 and are used to fix the springs.

[0040] In one embodiment, the bottom of the fixed clamping block 2 is provided with a T-shaped groove 201 that cooperates with the movable clamping block 3, thereby facilitating the cooperation between the fixed clamping block 2 and the movable clamping block 3.

[0041] In practical applications, the fixed clamping block 2 is made of 304 stainless steel and is made to a specific size using CNC technology. The bottom of the fixed clamping block 2 is provided with a T-shaped groove 201 that cooperates with the movable clamping block 3 to limit the movement position of the movable clamping block 3. The T-shaped groove 201 has a small groove in the movement direction of the movable clamping block 3 to cooperate with the pressing rod of the movable clamping block 3. The bottom of the fixed clamping block 2 is provided with 4 screw holes for connecting and fixing it to the clamping base 1.

[0042] In one embodiment, the movable clamping block 3 includes a base plate 301 installed inside the T-shaped groove 201. A side plate 302 is provided on one side of the base plate 301 to cooperate with it, and a top plate 303 is provided on the top of the side plate 302. A pressing rod 304 is provided in the middle of the other side of the base plate 301 to cooperate with the T-shaped groove 201. The other end of the pressing rod 304 extends to the outside of the fixed clamping block 2 and is connected to the pressing block 305. Both sides of the top plate 303 are provided with protrusions 306 to cooperate with the limiting block 5, thereby facilitating the clamping and fixing of the bar strip.

[0043] In practical applications, the movable clamping block 3 is made of 304 stainless steel and its specific dimensions are determined using CNC machining. A base plate 301 is provided at the bottom of the movable clamping block 3. The dimensions of the base plate 301 match the dimensions of the T-shaped groove 201 of the fixed clamping block 2, limiting the range of motion of the base plate 301 within the T-shaped groove 201. A pressing rod 304, connected to the base plate 301, is also provided at the bottom of the movable clamping block 3. The dimensions of the pressing rod 304 match the dimensions of the small groove in the fixed clamping block 2, limiting the range of motion of the pressing rod 304 within the small groove. A pressing block 305 is provided at the leftmost end of the movable clamping block 3. During use, the pressing block 305 gradually transmits the force to the pressing rod 304 and the base plate 301, allowing the entire movable clamping block 3 to move within a certain stroke. A side plate 302 is provided at the right end of the base plate of the movable clamping block 3, connecting to the top plate 303. The side plate 302, base plate 301, and top plate 303 are an integral structure. Side plate 302 has an opening for screws to pass through. The size of the opening matches the screw, allowing the screw to move within the opening. Two positioning posts are provided on the right side of side plate 302, integral with side plate 302. The positioning posts of side plate 302 mate with the positioning posts of positioning plate 102 to secure the spring. The top of movable clamping block 3 is provided with a top plate 303 connected to side plate 302. Bosses 306 are provided on both sides of top plate 303 along the moving direction of movable clamping block 3. The dimensions of bosses 306 match the dimensions of the limiting groove of limiting block 5, allowing it to move horizontally within the limited stroke range of limiting block 5.

[0044] In one embodiment, a limiting groove 501 that mates with the boss 306 is provided on one side of the limiting block 5, so as to effectively limit the sliding of the movable clamping block 3.

[0045] In practical applications, the limiting block 5 is made of 304 stainless steel and its specific dimensions are determined using CNC machining. The bottom of the limiting block 5 has four screw holes for connecting and fixing it to the fixture base 1. The inner top of the limiting block 5 has a limiting groove 501 extending along the movement direction of the movable clamping block 3. The dimensions of the limiting groove 501 match the dimensions of the boss 306 of the movable clamping block 3, allowing the movable clamping block 3 to be limited in the horizontal direction.

[0046] In one embodiment, the reset assembly 6 includes a plurality of second screws 601 installed on both sides of the side plate 302, and one end of the second screw 601 passes through the side plate 302 and is connected to the movable clamping plate 4; a first spring 602 is wound around the outside of the second screw 601, and the two ends of the first spring 602 are respectively connected to the movable clamping plate 4 and the side plate 302; the reset assembly 6 also includes a plurality of second springs 603 installed between the positioning plate 102 and the side plate 302, thereby achieving a good reset effect.

[0047] In one embodiment, the clamp base 1 is connected to the fixed clamp block 2 and the limiting block 5 by a plurality of first screws 7. Positioning pins 8 that cooperate with the second spring 603 are provided on one side of the positioning plate 102 and one side of the side plate 302. Through holes 9 that cooperate with the first screws 7 and the second screws 601 are respectively provided on the top outer side of the clamp base 1 and on both sides of the side plate 302; a plurality of screw holes 10 that cooperate with the first screws 7 and the second screws 601 are respectively provided on the bottom outer side of the fixed clamp block 2, one side of the movable clamp plate 4, and the bottom of the limiting block 5. This facilitates the installation and fixing of the various components.

[0048] In practical applications, the movable clamping plate 4 is made of stainless steel and its dimensions are determined using CNC machining. Screw holes are provided on the right side of the movable clamping plate 4 for connection with the second screw. Both the first and second screws are made of 304 stainless steel and their dimensions are determined using CNC machining. The first spring 602 is made of 302 nickel-chromium stainless steel and manufactured using a cold-rolling process. The second screw 601 is coaxially fitted with the first spring 602, allowing the first spring 602 to freely extend and retract axially. The second spring 603 is made of alloy spring steel, such as 50CrV4 alloy steel, and is manufactured using a cold-rolling process. The inner diameter of the second spring 603 is coaxially fitted with the movable clamping block 3 and the positioning post 8, allowing the second spring 603 to freely extend and retract axially.

[0049] To facilitate understanding of the above-mentioned technical solutions of this utility model, the following provides a detailed description of the assembly and usage methods of this utility model in actual practice.

[0050] The assembly steps are as follows:

[0051] 1. Assemble the movable clamping block assembly: Place the second screw 601 from top to bottom through the through hole 9 of the side plate 302 of the movable clamping block 3, then put the first spring 602 into the second screw 601 in turn, and then connect and lock the movable clamping plate 4 to the second screw 601 in turn to assemble the movable clamping block assembly.

[0052] 2. Install the limit block: Align the screw hole 10 at the bottom of the limit block 5 with the through hole 9 of the fixture base 1, and then pass the first screw 7 through the through hole 9 of the fixture base 1 and connect and lock it with the screw hole 10 of the limit block 5 to fix the limit block 5 on the fixture base 1.

[0053] 3. Install the movable clamping block assembly: Insert the second spring 603 into the positioning post 8 of the clamp base 1, align the assembled movable clamping block assembly horizontally with the limiting block 5, align the boss 306 of the movable clamping block 3 with the limiting groove 501 of the limiting block 5, and push the movable clamping block assembly to the right. At this time, the positioning post 8 of the side plate of the movable clamping block 3 is aligned with the positioning post 8 of the right side plate of the clamp base 1, and the second spring 603 is inserted into the positioning post 8 of the side plate of the movable clamping block 3 and the positioning post 8 of the right side plate of the clamp base 1. The movable clamping block assembly is now installed in place.

[0054] 4. Install the fixed clamping block: First, press the movable clamping block assembly to the right to fix it, so that the second spring 603 is in a certain compressed state, so that the base of the movable clamping block 3 matches the T-shaped groove 201 of the fixed clamping block 2. Then, align the screw hole 10 at the bottom of the fixed clamping block 2 with the through hole 9 of the fixture base 1. The first screw 7 passes through the through hole 9 of the fixture base 1 and connects and locks with the screw hole 10 of the fixed clamping block 2, thus fixing the fixed clamping block 2 on the fixture base 1. Finally, release the pressing state of the movable clamping block assembly. The bottom plate of the movable clamping block 3 is in a limited moving state in the T-shaped groove 201 of the fixed clamping block 2. Under the action of the first spring 602, the clamping surface of the movable clamping plate 4 is in close contact with the clamping surface of the fixed clamping block 2, and the fixture assembly is completed.

[0055] The method of using the fixture is as follows:

[0056] First, press down firmly on the pressing block 305 of the movable clamping block 3, causing several movable clamping plates 4 to move horizontally to the right in sequence, so that the clamping surfaces of the movable clamping plates 4 leave the clamping surfaces of the fixed clamping block 2, and the clamp is in a state of gradual opening; second, use tweezers to pick up the bar to be tested, perpendicular to the clamping table surface, with one side of the bar tightly against the fixed clamping block 2, and then release the pressing block 305 of the movable clamping block 3. Under the action of the first spring 602, several movable clamping plates 4 move horizontally to the left in sequence, so that the clamping surfaces are tightly against the other side of the bar, clamping and fixing the bar to the clamp; in addition, When multiple bar straps need to be fixed to the clamp at the same time, the above actions can be repeated. First, clamp the first bar strap, then press the pressing block 305 of the movable clamping block 3, release the remaining movable clamping plates 4, put in the second bar strap, so that one side of the bar strap is close to the side of the first bar strap, then release the pressing block 305 of the movable clamping block 3. Under the action of the first spring 602, the movable clamping plate 4 moves horizontally to the left, so that the clamping surface is close to the other side of the bar strap, so that the bar strap is clamped and fixed on the clamp. This process can be repeated, and up to 4 bar straps can be placed and fixed on the clamp at the same time.

[0057] In summary, by means of the above-mentioned technical solution of this utility model, a SEM observation fixture is provided that is simple to install, highly efficient, and allows multiple bars to be installed simultaneously, thereby effectively solving the problem of low efficiency in observing the side morphology of bars using SEM electron microscopes in the semiconductor laser chip industry.

[0058] In addition, the loading and unloading process of bar bars is simplified, improving efficiency: the tedious steps of loading and unloading bar bars by assembling and disassembling them step by step are eliminated. There is no need to repeatedly tighten and loosen screws to load and unload bar bars. Simply press the pressing block of the movable clamp to open and close the clamp, thereby realizing the loading and unloading of bar bars.

[0059] In addition, it prevents bar clips from falling out during loading: the clamps are easy to open and close, making the process of loading and unloading bar clips simpler. There is no need to remove bar clips that have fallen into the gaps of the clamps by removing screws, thus avoiding the problem of bar clips falling into the gaps of the clamps during loading and unloading and then having to remove bar clips by removing screws to open the clamps.

[0060] In addition, the increased number of bar strips can save SEM observation time: up to 4 bar strips can be loaded and observed at the same time, which can save the time of repeatedly assembling with screws after each bar strip is loaded, extracting and releasing vacuum after being placed in the SEM equipment, and adjusting the position of the clamp in the SEM microscope cavity. The efficiency of clamp usage is increased by at least 3 times.

[0061] In this utility model, unless otherwise explicitly specified and limited, the terms "installation", "setting", "connection", "fixing", "screw connection", etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal connection of two components or the interaction between two components. Unless otherwise explicitly limited, those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0062] The above description is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present utility model should be included within the protection scope of the present utility model.

Claims

1. A SEM fixture for observing barium strip microstructures, comprising: The clamp base (1) is set on the SEM microscope stage base; A fixing block (2) is disposed on one side of the top of the clamp base (1); The movable clamping block (3) is located on the other side of the top of the clamp base (1) and cooperates with the fixed clamping block (2); Several movable clamps (4) are disposed inside the movable clamp (3) for fixing the bar strip; Limiting blocks (5) are disposed on both sides of the movable clamping block (3) and cooperate with the movable clamping block (3); A reset component (6) is disposed between the clamp base (1), the movable clamping block (3) and the movable clamping plate (4) for resetting the movable clamping block (3) and the movable clamping plate (4).

2. The SEM fixture for observing barium strip microstructures according to claim 1, characterized in that, The bottom of the clamp base (1) is provided with an movable groove (101) that cooperates with the SEM microscope stage base, and a positioning plate (102) is provided on one side of the top of the clamp base (1).

3. The SEM fixture for observing barium strip microstructures according to claim 2, characterized in that, The bottom of the fixed clamping block (2) is provided with a T-shaped groove (201) that cooperates with the movable clamping block (3).

4. A SEM fixture for observing barium strip microstructures according to claim 3, characterized in that, The movable clamping block (3) includes a base plate (301) installed inside the T-shaped groove (201), a side plate (302) is provided on one side of the base plate (301) to cooperate with it, and a top plate (303) is provided on the top of the side plate (302). A pressing rod (304) that cooperates with the T-shaped groove (201) is provided in the middle of the other side of the base plate (301). The other end of the pressing rod (304) extends to the outside of the fixing clamp (2) and is connected to the pressing block (305). Both sides of the top plate (303) are provided with bosses (306) that cooperate with the limiting block (5).

5. A SEM fixture for observing barium strip microstructures according to claim 4, characterized in that, The limiting block (5) has a limiting groove (501) on one side that cooperates with the boss (306).

6. A SEM fixture for observing barium strip microstructures according to claim 4, characterized in that, The clamp base (1) is connected to the fixed clamp block (2) and the limiting block (5) by a number of first screws (7).

7. A SEM fixture for observing barium strip microstructures according to claim 6, characterized in that, The reset assembly (6) includes a plurality of second screws (601) installed on both sides of the side plate (302), and one end of the second screw (601) passes through the side plate (302) and is connected to the movable clamping plate (4); A first spring (602) is wound around the outside of the second screw (601), and the two ends of the first spring (602) are respectively connected to the movable clamp (4) and the side plate (302); The reset assembly (6) also includes a plurality of second springs (603) installed between the positioning plate (102) and the side plate (302).

8. A SEM fixture for observing barium strip microstructures according to claim 7, characterized in that, The positioning plate (102) and the side plate (302) are each provided with a positioning post (8) that cooperates with the second spring (603).

9. A SEM fixture for observing barium strip microstructures according to claim 7, characterized in that, The top outer side of the clamp base (1) and both sides of the side plate (302) are respectively provided with through holes (9) that cooperate with the first screw (7) and the second screw (601); The bottom outer side of the fixed clamping block (2), one side of the movable clamping plate (4) and the bottom of the limiting block (5) are respectively provided with a plurality of screw holes (10) that cooperate with the first screw (7) and the second screw (601).

Images