Cooling liquid supply system of temperature cooling unit

Abstract

The utility model discloses a cooling liquid supply system of a temperature cooling unit, which comprises a machine table, the machine table is provided with the temperature cooling unit, the temperature cooling unit comprises a water injection pipeline, a water outlet pipeline and a cooling water tank, and the cooling water tank is provided with a water inlet; an access port is formed in the bottom of the machine table, cooling liquid is introduced into one end of the water injection pipeline, the other end of the water injection pipeline extends into the machine table through the access port, and the cooling liquid is injected into the cooling water tank through the water inlet; the water outlet pipeline is used for cooling circulation; a control assembly is arranged on the water injection pipeline. The water injection pipeline is connected into the cooling water tank in the machine table through the access port in the bottom of the machine table, the control assembly is arranged on the water injection pipeline and controls the water injection pipeline to inject cooling liquid into the cooling water tank, the situation that impurities are introduced into equipment and the pipeline is blocked in the bottled transferring process can be avoided, meanwhile, manpower can be saved, and the working efficiency is improved.

Description

Technical Field

[0001] This utility model belongs to the field of coolant supply technology, and in particular relates to a coolant supply system for a temperature cooling unit. Background Technology

[0002] Optical metrology equipment is primarily used for wafer measurement and quality control in chip manufacturing. The optical metrology system includes a Temperature Cooling Unit (TCU) to provide internal circulating coolant to the heat-generating components of the machine, maintaining stable temperatures and ensuring optimal equipment operation for measurement accuracy and reliability. Coolant loss often occurs within the TCU, requiring timely replenishment. However, the coolant tank in the TCU lacks a coolant inlet, necessitating manual replenishment via bottled coolant. This manual replenishment can be problematic, as the bottles may be unclean or have contaminated openings, introducing impurities into the equipment. The accumulation of these impurities can lead to pipe blockages, corrosion, and leaks.

[0003] Based on the above problems, a coolant supply system for the temperature cooling unit is needed to avoid introducing impurities into the TCU cooling water tank and to save manpower. Utility Model Content

[0004] The purpose of this invention is to solve all or part of the above-mentioned problems by providing a coolant supply system for a temperature cooling unit. An inlet is provided at the bottom of the machine, and a water injection pipe is connected to the cooling water tank inside the machine through the inlet at the bottom of the machine. A control component is provided on the water injection pipe to control the injection of coolant into the cooling water tank. This can prevent impurities from being introduced into the cooling water tank during bottle transfer and blockage of the pipes. At the same time, it can save manpower and improve work efficiency.

[0005] This utility model provides a coolant supply system for a temperature cooling unit, including a machine base. The machine base is equipped with a temperature cooling unit, which includes a water injection pipe, a water outlet pipe, and a cooling water tank. The cooling water tank has a water inlet. The bottom of the machine base has an inlet. One end of the water injection pipe is supplied with coolant, and the other end extends into the machine base through the inlet. The coolant is injected into the cooling water tank through the water inlet. The water outlet pipe circulates the coolant. A control component is provided on the water injection pipe.

[0006] A water pipe adapter is installed on the water inlet, and the water injection pipeline is connected to the water inlet through the water pipe adapter, so as to facilitate the injection of coolant into the cooling water tank and prevent leakage.

[0007] The water pipe adapter includes an inlet end and an outlet end, and has a hollow water channel inside for coolant flow; the inlet end is connected to the water injection pipe, and the outlet end is connected to the water inlet, so that coolant is introduced into the water injection pipe and injected into the cooling water tank through the water pipe adapter.

[0008] The inlet end size matches the water injection pipeline, and the outlet end size matches the water inlet to prevent coolant leakage during the injection process.

[0009] The water pipe adapter is connected to the water inlet by a thread, and the water pipe adapter is fixedly connected to the water inlet, which ensures a stable structure and smooth injection of coolant.

[0010] The water injection pipe has a diameter of 1 / 4 to 1 / 2 inch and can be installed inside the machine through the inlet to inject coolant into the cooling water tank.

[0011] The length of the water injection pipe is 2-4 meters. The water injection pipe has a reasonable length for easy installation and is long enough to connect the water pipe adapter, so as to inject coolant into the cooling water tank.

[0012] The water injection pipeline is a flexible pipeline, which is fixed with cable ties. The pipeline has a certain degree of flexibility and can be bent to facilitate the water injection pipeline to extend through the inlet at the bottom of the machine and be installed inside the machine. The cable ties ensure that the water injection pipeline remains stable during the coolant injection process, does not affect the operation of the machine, and prevents coolant leakage.

[0013] The control component can be a manual valve or a solenoid valve. The type of valve can be selected according to the process requirements, making it easy to operate and improving work efficiency.

[0014] The solenoid valve is connected to the machine's water tank replenishment and full signal to control the automatic addition of coolant. The machine's signal automatically controls the solenoid valve's on / off state, achieving automated operation and saving manpower. Compared with existing technologies, the advantages of this invention are: an inlet is provided at the bottom of the machine, through which the water injection pipe extends into the machine and connects to the coolant tank's inlet, injecting water into the coolant tank without bottled transportation and pouring. This effectively avoids introducing impurities into the coolant tank during injection, preventing pipe blockage. Simultaneously, a control component is installed on the water injection pipe to control water injection, effectively saving manpower and improving work efficiency. Attached Figure Description

[0015] To more clearly illustrate the technical solutions in the specific embodiments of this utility model, the drawings used in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0016] Figure 1 A schematic diagram of the coolant supply system for a temperature cooling unit provided by this utility model.

[0017] Figure 2 This utility model provides a schematic diagram of a water pipe adapter structure in the coolant supply system of a temperature cooling unit. Reference numerals: 1-Machinery, 11-Water injection pipe, 12-Cooling water tank, 13-Inlet, 2-Control component, 3-Water pipe adapter, 31-Inlet end, 32-Outlet end. Detailed Implementation

[0018] The technical solutions in specific embodiments of this utility model will be clearly and completely described below. Obviously, the described embodiments are only a part of the embodiments of this utility model, and not all of them. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of this utility model.

[0019] Example

[0020] This embodiment describes a coolant supply system for a temperature cooling unit, such as... Figure 1 As shown, the system includes a machine base 1, which is equipped with a temperature cooling unit. The temperature cooling unit includes a water injection pipe 11, a water outlet pipe, and a cooling water tank 12. The cooling water tank 12 has a water inlet. An inlet 13 is located at the bottom of the machine base 1. One end of the water injection pipe 11 is supplied with coolant, and the other end extends into the machine base 1 through the inlet 13, injecting coolant into the cooling water tank 12 through the water inlet. The water outlet pipe circulates the cooling system. A control component 2 is installed on the water injection pipe 11. Injecting coolant into the cooling water tank 12 through the water injection pipe 11 prevents impurities from being introduced into the cooling water tank 12 during coolant transfer. Simultaneously, controlling the water injection through the control component 2 effectively saves manpower. In this embodiment, ultrapure water is used as the coolant.

[0021] A water pipe adapter 3 is installed on the water inlet, and the water injection pipe 11 is connected to the water inlet through the water pipe adapter 3. This facilitates the injection of ultrapure water into the cooling water tank 12 via the water injection pipe 11. Figure 2As shown, the water pipe adapter 3 includes an inlet end 31 and an outlet end 32, and has a hollow water channel inside for ultrapure water flow; the inlet end 31 is connected to the water injection pipe 11, and the outlet end 32 is connected to the water inlet; the size of the inlet end 31 matches the size of the water injection pipe 11, and the size of the outlet end 32 matches the size of the water inlet; the water pipe adapter 3 is connected to the water inlet by a thread, which is structurally stable and avoids leakage during the ultrapure water injection process.

[0022] The water injection pipe 11 has a diameter of 1 / 4-1 / 2 inch and a length of 2-4 meters. The water injection pipe 11 has a reasonable diameter and length, sufficient to connect to the water pipe adapter 3, enabling the injection of coolant into the cooling water tank 12. The water injection pipe 11 is a flexible pipe, allowing it to bend to a certain extent. This flexibility facilitates its insertion into the inlet 13 at the bottom of the machine 1 and its installation within the machine 1. The water injection pipe 11 is secured with cable ties to ensure stability during ultrapure water injection, preventing shaking and ensuring the normal operation of the machine 1, while also preventing leaks. In this embodiment, the length of the water injection pipe 11 is 3 meters. The water injection pipe 11 is made of high-purity materials such as polyvinylidene fluoride (PVDF HP) and perfluoroalkoxyalkane (PFA HP).

[0023] Control component 2 can be a manual valve or a solenoid valve, which is easy to operate, and the type of valve can be selected according to the work requirements. If a solenoid valve is selected, it can be connected to the water tank replenishment and full signal of the machine 1 to automatically control the injection of ultrapure water into the cooling water tank 12; the solenoid valve can be automatically controlled to switch on and off through the signal of the machine 12, realizing the automated operation of the solenoid valve, saving manpower and improving work efficiency.

[0024] This invention injects coolant into a cooling water tank 12 via a water injection pipe 11, avoiding the use of bottled coolant and preventing impurities from being introduced into the cooling water tank 12. It also eliminates the need for manual handling, saving labor costs. Furthermore, the control component 2 controls the start and stop of water injection, improving work efficiency. It will be apparent to those skilled in the art that this invention is not limited to the details of the above exemplary embodiments, and that it can be implemented in other specific forms without departing from the spirit or essential characteristics of this invention. Therefore, the embodiments should be considered illustrative and non-limiting in all respects, and the scope of this invention is defined by the appended claims rather than the foregoing description. Therefore, it is intended that all variations falling within the meaning and scope of equivalents of the claims be included within this invention. No reference numerals in the claims should be construed as limiting the scope of the claims.

Claims

1. A coolant supply system for a temperature cooling unit, characterized in that, The machine includes a machine base (1), which is equipped with a temperature cooling unit. The temperature cooling unit includes a water injection pipe (11), a water outlet pipe, and a cooling water tank (12). The cooling water tank (12) is equipped with a water inlet. The bottom of the machine base (1) is equipped with an inlet (13). One end of the water injection pipe (11) is connected to the coolant, and the other end extends into the machine base (1) through the inlet (13). The coolant is injected into the cooling water tank (12) through the water inlet. The water outlet pipe is used for cooling circulation. The water injection pipe (11) is equipped with a control component (2).

2. The coolant supply system for the temperature cooling unit according to claim 1, characterized in that, A water pipe adapter (3) is installed on the water inlet, and the water injection pipeline (11) is connected to the water inlet through the water pipe adapter (3).

3. The coolant supply system for the temperature cooling unit according to claim 2, characterized in that, The water pipe adapter (3) includes an inlet end (31) and an outlet end (32), and has a hollow water channel inside; the inlet end (31) is connected to the water injection pipe (11), and the outlet end (32) is connected to the water inlet.

4. The coolant supply system for the temperature cooling unit according to claim 3, characterized in that, The size of the inlet end (31) matches the size of the water injection pipe (11), and the size of the outlet end (32) matches the size of the water inlet.

5. The coolant supply system for the temperature cooling unit according to claim 2, characterized in that, The water pipe adapter (3) is connected to the water inlet by means of a thread.

6. The coolant supply system for the temperature cooling unit according to claim 1, characterized in that, The diameter of the water injection pipe (11) is 1 / 4 to 1 / 2 inches.

7. The coolant supply system for the temperature cooling unit according to claim 1, characterized in that, The length of the water injection pipeline (11) is 2-4 meters.

8. The coolant supply system for the temperature cooling unit according to claim 1, characterized in that, The water injection pipeline (11) is a flexible pipeline and is fixed by cable ties.

9. The coolant supply system for the temperature cooling unit according to claim 1, characterized in that, The control component (2) may be a manual valve or a solenoid valve.

10. The coolant supply system for the temperature cooling unit according to claim 9, characterized in that, The solenoid valve is connected to the water tank replenishment and water tank full signal of the machine (1) to control the automatic injection of coolant.

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