Ultrasonic phased array droplet control equipment in oil phase system

Abstract

The ultrasonic phased array droplet control equipment in the oil phase system comprises an oil tank, an ultrasonic phased array device and a control device, an oil phase system is contained in the oil groove, and a super-hydrophobic surface layer is arranged at the bottom of the oil groove; the ultrasonic phased array device comprises a plurality of ultrasonic probes arranged in an array, the ultrasonic probes are immersed in the oil phase system, and a plane formed by the plurality of ultrasonic probes is parallel to the super-hydrophobic surface layer; the control device is in control connection with the ultrasonic phased array device, the control device plans the moving path of the liquid drops and controls the multiple ultrasonic probes to generate ultrasonic beams focused above the liquid drops, and the liquid drops move along with the focus of the ultrasonic beams according to the moving path. Therefore, accurate control over the liquid drops is achieved, automatic and intelligent operation of the whole device is achieved, and the experiment efficiency and the control precision are improved.

Description

Technical Field

[0001] This utility model relates to the field of droplet manipulation, and in particular to an ultrasonic phased array droplet manipulation device in an oil phase system. Background Technology

[0002] In the development of droplet manipulation technology, based on whether external energy input is required, it can be divided into two types: active manipulation and passive manipulation. Passive droplet manipulation relies on surface geometry and wetting gradient for self-drive, requiring no external energy supply, thus offering advantages such as low cost and ease of fabrication. However, its manipulation method is relatively simple, the droplet movement speed is slow, the stroke is short, and the manipulation precision is difficult to meet the stringent requirements of complex industrial applications.

[0003] In contrast, active droplet manipulation utilizes external energy sources such as light, electricity, heat, magnetic fields, or ultrasound to achieve precise control over droplet motion. While external field manipulation techniques, such as magnetic, electric, and thermal fields, can achieve highly controllable droplet manipulation, each has inherent limitations restricting its widespread application. Light-driven techniques rely on photothermal and photoelectric effects, resulting in start-up delays; magnetically excited droplet manipulation requires loading magnetic particles inside or outside the droplet, easily leading to sample contamination; thermal field manipulation based on vapor-induced or surface deformation may adversely affect biomedical detection and analysis of the sample solution due to temperature increases; and electric drive requires complex electronic control systems designed for different structures, with high costs in electrode material selection and construction, and cumbersome operation.

[0004] Ultrasonic phased array technology achieves contactless manipulation using the radiation force of ultrasound, effectively avoiding contamination and sample property changes that may result from physical contact, thus strongly ensuring sample stability and activity. This technology can precisely manipulate droplets of different sizes, covering a wide range from microliters to nanoliters, demonstrating high efficiency and precision in operations such as micro-sample enrichment, mixing, and nebulization. Crucially, its manipulation process exhibits minimal thermal effects, making it particularly suitable for temperature-sensitive biomedical applications such as drug screening and single-cell analysis. It shows broad development prospects in both academic research and industrial applications, becoming an important research direction in the field of droplet manipulation technology.

[0005] However, existing ultrasonic droplet manipulation devices still have many limitations, which severely restrict their performance and application expansion:

[0006] (1) Simultaneous manipulation of multiple droplets faces challenges. Existing ultrasonic levitation technology mainly relies on a single ultrasonic probe to generate ultrasonic waves to manipulate the movement array of a single droplet in terms of droplet manipulation. This mode greatly limits its ability to manipulate multiple droplets at the same time, and it is inadequate in application scenarios of multi-droplet collaborative processing.

[0007] (2) Low level of intelligence. Although ultrasonic levitation technology has made initial progress in the field of automated droplet manipulation, it still has many limitations. Previous ultrasonic levitation technologies have focused on relatively basic aspects such as droplet suspension and stability, and have not delved deeply into the research on automated and precise droplet manipulation. It is difficult to achieve flexible manipulation over long distances and in multiple dimensions. Moreover, the complex and cumbersome hardware system not only increases the cost of research and development and application, but also reduces the system's response speed and stability. More importantly, droplet motion control lacks an effective feedback mechanism, making it impossible to achieve intelligent optimization of droplet motion paths for complex application scenarios, and thus difficult to adapt to the trend of intelligent development.

[0008] (3) Aerosol pollution in the air. At present, ultrasonic levitation technology for droplet manipulation is mostly carried out in the air. However, the aerosol pollution in the air causes changes in the physical properties of the droplets, which is a major obstacle. This may not only interfere with the accuracy of droplet manipulation, but also greatly increase the risk of interfering with the accuracy of droplet manipulation. It may also cause deviations in experimental results and have adverse effects, thus posing a challenge to the reliability and accuracy of related research and applications. Utility Model Content

[0009] This invention proposes an innovative ultrasonic phased array droplet manipulation device, which improves the precision and reliability of droplet manipulation.

[0010] The present invention adopts the following technical solution:

[0011] An ultrasonic phased array droplet manipulation device in an oil phase system includes an oil tank, an ultrasonic phased array device, and a control device;

[0012] The oil tank contains an oil phase system, and the bottom of the tank is equipped with a superhydrophobic surface layer, which provides a stable basic environment for droplet manipulation, promotes free movement and precise control of droplets, and reduces adhesion.

[0013] The ultrasonic phased array device includes multiple ultrasonic probes arranged in an array. The ultrasonic probes are immersed in an oil phase system and the plane formed by the multiple ultrasonic probes is parallel to the superhydrophobic surface layer. By precisely controlling the emission and focusing of ultrasonic waves, it generates precise acoustic radiation force on droplets, realizes the control of multiple droplets in suspension or non-suspension state, and complex movement and operation commands, giving full play to the advantages of ultrasonic phased array technology in droplet manipulation.

[0014] The control device is connected to the ultrasonic phased array device. It plans the droplet's movement path and controls multiple ultrasonic probes to generate ultrasonic beams focused above the droplet. The droplet moves along the path following the focal point of the ultrasonic beam. Through pre-set droplet manipulation tasks, the control device uses algorithms to plan the path and then precisely controls the movement of the focal point of the ultrasonic waves generated by the ultrasonic phased array device, thereby achieving precise control of the droplet. This enables automated and intelligent operation of the entire device, improving experimental efficiency and control accuracy.

[0015] In some preferred implementations, the ultrasonic phased array device also includes a phased array circuit PCB and an FPGA chip. Multiple ultrasonic probes are soldered on the phased array circuit PCB in an n×n configuration. The FPGA chip receives control signals from the control device and then adjusts the ultrasonic probes.

[0016] A further preferred embodiment uses the EP4CE6E22C8N FPGA chip, which controls the ultrasonic probe based on the UART protocol. The FPGA chip enables precise control of the probe, allowing it to generate ultrasonic waves at the corresponding focal point, thus meeting the requirements for high-precision manipulation of droplets.

[0017] Further preferred, the phased array circuit PCB components include a driver amplifier MIC4127 SOIC8, a shift register 74HC595D SOIC-16, and a 100nF surface mount capacitor.

[0018] In some preferred implementations, the ultrasonic phased array droplet manipulation device also includes an image acquisition device positioned below the oil tank to acquire droplet images. A control device is connected to the image acquisition device and receives the droplet images. The visible light transmittance of the superhydrophobic surface layer is ≥50%. The image acquisition device can acquire droplet image information at high resolution and high frame rate, providing accurate data support for subsequent image processing, analysis, and droplet manipulation decisions, enabling real-time monitoring and feedback control of droplet state and behavior. The superhydrophobic surface layer ensures that the image acquisition device can clearly and accurately acquire droplet image information, providing a reliable data foundation for precise manipulation.

[0019] Furthermore, the distance between the image acquisition device and the bottom of the oil tank can be flexibly adjusted according to actual experimental needs and droplet characteristics, adapting to different droplet manipulation tasks.

[0020] More preferably, the image acquisition device uses a USB driverless camera with dimensions of 32mm × 32mm, an image resolution of 2MP, a field of view of 80–120°, and a frame rate of 30–120fps. More preferably, the camera uses a USB 2.0 interface. These parameters enable the image acquisition device to quickly and stably transmit the acquired image data to the control device, providing strong support for real-time monitoring and control.

[0021] In some preferred implementations, the height of the oil tank is 160 mm.

[0022] In some preferred implementations, the oil phase system is a low-density mineral oil with a density below 0.9 g / mL (25°C). This medium not only provides a stable oil phase system but also facilitates the propagation of ultrasound within it and the effective manipulation of droplets, reducing energy loss and improving the sensitivity and precision of manipulation.

[0023] In some preferred implementations, the superhydrophobic surface layer has a static contact angle greater than 154° and a roll-off angle less than 3°, effectively reducing droplet adhesion to the surface. For example, the superhydrophobic surface layer is formed by spraying a hydrophobic material onto a glass plate followed by heating and cooling.

[0024] In some preferred implementations, the control device sends control signals via an Arduino module.

[0025] In some preferred implementations, the ultrasonic phased array droplet manipulation device further includes a waste liquid discharge device. This device comprises a miniature peristaltic pump with a flexible hose, which is connected to a control device, and the oil tank is connected to the hose of the miniature peristaltic pump on its side wall. The waste liquid discharge device effectively and promptly removes waste liquid generated during the experiment, ensuring the cleanliness and stability of the environment within the oil tank and providing reliable conditions for continuous and accurate droplet manipulation experiments. The miniature peristaltic pump has the ability to precisely control the droplet's movement speed and volume, efficiently and stably discharging waste liquid and preventing its residue and accumulation in the oil tank, which could affect the accuracy and stability of subsequent experiments. The flexible hose, serving as the waste liquid discharge channel, is corrosion-resistant and easy to clean, ensuring smooth discharge of waste liquid and maintaining the cleanliness and normal operation of the device.

[0026] As can be seen from the above description of this utility model, compared with the prior art, this utility model has the following beneficial effects:

[0027] 1. The device of this invention places droplets on a superhydrophobic surface at the bottom of an oil tank filled with an oil phase system, reducing the risk of aerosol cross-contamination and successfully creating a high-quality environment that is more stable and easier to control for droplet manipulation. In the unique context of the oil phase system, the various behaviors of the droplets can be more precisely and accurately controlled and guided, thus achieving a new leap and improvement in the precision and controllability of droplet manipulation technology.

[0028] 2. The device of this invention utilizes an ultrasonic phased array for droplet movement. This not only miniaturizes the equipment and reduces the use of mechanical equipment, but also demonstrates unique advantages in enabling the coordinated suspension and manipulation of multiple droplets, achieving precise control over the relative positions and interactions between multiple droplets. This opens up new development paths for the field of microscopic object manipulation, greatly expanding the application boundaries and depth of ultrasonic levitation technology in complex multi-body operation scenarios.

[0029] 3. In some possible implementations, the device of this invention uses an image acquisition device, a control device, and an FPGA chip of the ultrasonic phased array device to adjust the focusing point of the ultrasonic beam of the ultrasonic phased array device. With the help of machine learning algorithms and visual integration, high-precision identification of droplets is achieved. The phased array, with the FPGA as its core, fully leverages its advantages of high-speed computing and flexible control to rapidly process and analyze information from machine vision, thereby enabling flexible movement of the ultrasonic phased array focus. During complex operations such as droplet obstacle avoidance, fusion, and alignment, the level of intelligence is significantly improved, providing a more precise, efficient, and intelligent means of droplet manipulation for related experiments and applications. Attached Figure Description

[0030] Figure 1 A three-dimensional structural view of the ultrasonic phased array droplet manipulation device in the oil phase system provided in Example 1;

[0031] Figure 2 for Figure 1 The main view;

[0032] Figure 3 This is a diagram showing the probe arrangement of the ultrasonic phased array device in Example 1;

[0033] Figure 4 This is a front view of the ultrasonic phased array device in Example 1;

[0034] Figure 5 This is a schematic diagram of the ultrasonic phased array droplet manipulation device controlling the suspension of multiple droplets in the oil phase system in Example 1;

[0035] Figure 6 This is a schematic diagram of the ultrasonic phased array droplet manipulation device controlling the suspension and movement of multiple droplets in the oil phase system in Example 1;

[0036] Figure 7 This is a schematic diagram of the waste liquid discharge device in Example 1 discharging waste liquid;

[0037] Figure 8 This is a flowchart of the droplet control process of the ultrasonic phased array droplet control device in the oil phase system in Example 1.

[0038] The reference numerals in the figure are as follows: 10-ultrasonic phased array device, 11-FPGA chip, 12-phased array circuit PCB, 13-ultrasonic probe, 20-oil tank, 21-superhydrophobic surface layer, 30-waste liquid discharge device, 31-hose, 32-micro peristaltic pump, 40-image acquisition device. Detailed Implementation

[0039] In the description of the technical solution of this utility model, the use of terms such as "first," "second," and "third" is merely for the purpose of clearly distinguishing different elements, components, or parameters, and is by no means intended to limit their specific arrangement order or imply their relative importance. Similarly, the directional indicators such as "upper," "lower," "left," "right," "front," and "rear" mentioned when describing the structure, positional relationships, and operation procedures of the device are all described based on the perspective presented in the accompanying drawings, aiming to facilitate the reader's understanding of the technical details and working principles of this utility model, and do not imply any strict directional constraints on the installation, use scenarios, or operation methods of the actual device. Those skilled in the art can reasonably and flexibly interpret the precise meaning of these terms in this application based on specific actual conditions and application scenarios, and will not misunderstand them as any form of limitation on the scope of protection of this utility model.

[0040] Furthermore, in the textual description of this application, unless otherwise explicitly defined and explained, the term "multiple" refers to two or more quantities. The symbol "and / or," when used to describe the relationship between related objects, is intended to indicate three possible logical relationships: object A existing alone, objects A and B existing simultaneously, and object B existing alone. The character " / " typically indicates an "or" logical choice relationship between the preceding and following related objects, thereby ensuring the accurate communication of technical information and avoiding any ambiguity or vague understanding, thus enabling the technical solution of this utility model to be clearly and accurately explained and applied.

[0041] Example 1

[0042] Example 1 provides an ultrasonic phased array droplet manipulation device in an oil-phase system, such as Figure 1 and Figure 2As shown, it is mainly composed of core components such as an ultrasonic phased array device 10, an oil tank 20, a waste liquid discharge device 30, an image acquisition device 40, and a control device (not shown in the figure). The components work closely together and complement each other to achieve high-precision and intelligent control of droplets in the oil phase system, providing reliable technical support for experimental research and practical applications in related fields.

[0043] The oil tank 20 has a height of 160mm, and a superhydrophobic surface layer 21 is provided at its bottom. The superhydrophobic surface layer 21 has a static contact angle greater than 154° and a roll-off angle less than 3°, which can effectively reduce the adhesion and residue of droplets on the surface and ensure that droplets can move freely and be precisely controlled in the oil tank.

[0044] like Figure 3 and Figure 4 As shown, the ultrasonic phased array device 10 is positioned above the oil tank 20. It includes an FPGA chip 11, an ultrasonic phased array circuit PCB 12, and multiple ultrasonic probes 13. The multiple ultrasonic probes 13 are arranged in an n×n close array and soldered onto the ultrasonic phased array circuit PCB 12. Through precise phase control and coordinated driving of the emitted signals of each ultrasonic probe by the FPGA chip 11, a highly focused, directional, and flexibly adjustable ultrasonic beam can be generated. The plane formed by the ultrasonic probes 13 is parallel to the superhydrophobic surface layer 21 and immersed in the oil phase system. This layout design enables the ultrasonic phased array device to stably and efficiently generate precisely controllable acoustic radiation force on the droplets, thereby achieving precise switching and control of the droplets' suspended or non-suspended state in the oil phase system.

[0045] When the ultrasonic waves emitted by the ultrasonic phased array device 10 encounter the superhydrophobic surface layer 21, reflection occurs. The superhydrophobic surface layer 21 greatly reduces the surface tension between the droplet and the adhesion surface, enabling the droplet to achieve a stable suspension state in the oil phase system. Furthermore, the droplet can smoothly and precisely slide within the oil phase system or on the superhydrophobic surface layer 21 according to the focal point of the ultrasonic waves generated by the ultrasonic phased array device 20, laying a solid foundation for subsequent droplet manipulation operations.

[0046] The waste liquid discharge device 30 includes a miniature peristaltic pump 32 with a flexible tube 31. The miniature peristaltic pump 32 is connected to a control device, and the oil tank 20 is connected to the flexible tube 31 on its side wall. When the droplets need to be discharged after completing the experimental operation, the miniature peristaltic pump 32 starts its motor and generates suction under the command of the control device, drawing the droplets located near the outlet into the flexible tube 31 and then discharging them from the ultrasonic phased array droplet manipulation device. This ensures that the environment inside the oil tank remains clean and stable, providing good initial conditions for the next round of droplet manipulation experiments and ensuring the accuracy and repeatability of experimental data.

[0047] The image acquisition device 40 is positioned below the superhydrophobic surface layer 21, and the distance between it and the superhydrophobic surface layer 21 can be flexibly adjusted according to actual experimental needs and droplet characteristics to obtain the best image acquisition effect. The main function of this device is to acquire droplet image information in real time, providing accurate and detailed data support for subsequent image processing, analysis, and droplet manipulation decisions. To further optimize image acquisition quality, the superhydrophobic surface layer 21 is specially designed as a transparent material with a visible light transmittance of ≥50%, ensuring that the image acquisition device 30 can clearly and accurately capture key information such as the droplet's shape, position, and trajectory. This image information is then uploaded to the control device in real time via a high-speed and stable image transmission data line, enabling real-time monitoring and feedback control of the droplet's state. This provides visual technical support for the entire droplet manipulation process, greatly improving the accuracy and controllability of experimental operations. At the same time, the high light transmittance of the superhydrophobic surface layer 21 provides clear visual feedback to the operator, facilitating precise control and adjustment of the experimental process.

[0048] The image acquisition device 40 utilizes a high-definition, high-frame-rate USB driverless camera. Measuring 32mm x 32mm, it can be easily integrated into the entire system. This camera boasts excellent image acquisition capabilities, with a 2MP (1080P) image resolution. It supports various common data formats and can be flexibly selected according to the application scenario, achieving image acquisition at different resolutions such as 480P / 720P / 1080P to meet experimental requirements with varying precision. Furthermore, depending on the video resolution setting, its field of view can be flexibly adjusted within the range of 80-120°, and the frame rate can reach 30-120fps, ensuring rapid and accurate capture of the droplet's dynamic changes. Employing a convenient USB 2.0 interface, it enables high-speed and stable data transmission, transmitting the acquired image data to the control device in real-time and without loss, providing strong data support for the intelligent operation of the entire droplet manipulation system.

[0049] like Figure 8As shown, in this embodiment, the control device is a computer system. As the core control unit of the entire ultrasonic phased array droplet manipulation device, the control device undertakes the crucial task of coordinating and directing the collaborative work of various components. The control device receives and processes real-time droplet images acquired by the image acquisition device 40, analyzes the images using advanced image processing algorithms, and extracts key data such as the number of droplets, their diameter, and the precise coordinates of the droplets on the superhydrophobic surface layer 21. Then, based on the pre-set droplet manipulation task and the acquired droplet coordinates, the control device performs precise path planning using a complex and efficient algorithm, generating control commands for the ultrasonic phased array device 10. These commands are sent to the FPGA chip 11 of the ultrasonic phased array device 10 via the Arduino module. The FPGA chip 11 then performs extremely precise phase control on the drive signals of each ultrasonic probe 13 in the ultrasonic probe module 13 according to the received commands. By precisely adjusting the phase delay of the emitted signals of each ultrasonic probe 13, complex functions such as focusing and deflection of the ultrasonic beam are achieved, thereby precisely controlling the movement path and speed of the droplet on the superhydrophobic surface layer 21, and realizing precise manipulation of the droplet. Finally, after the droplet completes the predetermined manipulation task, the control device will issue another command to move the droplet to the outlet and then control the micro peristaltic pump 32 of the waste liquid discharge device 30 via the Arduino module to start, sucking up the droplet located near the outlet and discharging it from the device, completing the closed-loop control of the entire experimental operation process, ensuring the efficient and stable operation of the entire device and the accuracy and reliability of the experimental data.

[0050] The following is combined with Figures 5-7 The steps for controlling the suspension and movement of multiple droplets in an oil phase system using this device are described below:

[0051] First, pour oil into the oil tank until the ultrasonic probe 13 of the ultrasonic phased array device 10 is immersed in the oil phase system, and then droplets are added to the oil tank.

[0052] Next, the image acquisition device 40 acquires droplet images in real time and transmits them to the control device. The control device performs rapid and accurate image processing on the droplet images to obtain precise position information (coordinate information) of multiple droplets, including droplet A and droplet B. Then, the control device accurately calculates the start-up timing of each ultrasonic probe based on the droplet coordinate information and sends the corresponding control signal to the FPGA chip 11 of the ultrasonic phased array device 10. The FPGA chip 11 controls the ultrasonic probe 13 to generate corresponding ultrasonic waves, causing the ultrasonic phased array device 10 to generate ultrasonic waves focused directly above droplets A and B, causing the droplets to undergo [a specific motion / action]. Figure 5 The image shows a suspended object.

[0053] Subsequently, the control device calculates the activation sequence of each ultrasonic probe 13 in real time using an algorithm based on the current coordinates of the droplets and the target movement path, and continuously sends the corresponding control signals to the FPGA chip 11 of the ultrasonic phased array device 10. The FPGA chip 11 then continuously adjusts the working state of the ultrasonic probes 13 according to the received instructions, causing the ultrasonic phased array device 10 to generate ultrasonic waves whose focal points move along the target movement path. These ultrasonic focal points are always focused directly above droplets A and B, allowing the droplets to follow the movement of the ultrasonic focal points and generate ultrasonic waves as if... Figure 6 The precise movement shown enables flexible and accurate control of suspended droplets, allowing for the completion of complex droplet movement paths and operational tasks.

[0054] After completing the task of moving the suspended droplets, such as Figure 7 As shown, the ultrasonic phased array device 10 moves the droplet to the vicinity of the outlet of the waste liquid discharge device 30. Afterwards, the ultrasonic phased array device 10 stops operating, and the control device sends a corresponding control signal to the miniature peristaltic pump 32 of the waste liquid discharge device 30. The miniature peristaltic pump 32 starts its motor, drawing the droplet at the outlet into the tubing 31 and discharging it from the device, completing the entire experimental procedure and preparing for the next experiment.

[0055] The above description is only a preferred embodiment of the present utility model, and therefore cannot be used to limit the scope of the present utility model. All equivalent changes and modifications made in accordance with the scope of the present utility model patent and the contents of the specification should still fall within the scope of the present utility model.

Claims

1. An ultrasonic phased array droplet manipulation device in an oil-phase system, characterized in that, Includes an oil tank, an ultrasonic phased array device, and a control device; The oil tank contains an oil phase system, and the bottom of the oil tank is provided with a superhydrophobic surface layer. The ultrasonic phased array device includes multiple ultrasonic probes arranged in an array, the ultrasonic probes being immersed in the oil phase system and the plane formed by the multiple ultrasonic probes being parallel to the superhydrophobic surface layer. The control device is connected to the ultrasonic phased array device. The control device plans the movement path of the droplet and controls multiple ultrasonic probes to generate ultrasonic beams focused above the droplet. The droplet moves along the movement path according to the focal point of the ultrasonic beam.

2. The ultrasonic phased array droplet manipulation device in an oil-phase system as described in claim 1, characterized in that, The ultrasonic phased array device also includes a phased array circuit PCB and an FPGA chip. Multiple ultrasonic probes are soldered on the phased array circuit PCB in an n×n configuration. The FPGA chip receives the control signal from the control device and adjusts the ultrasonic probes.

3. The ultrasonic phased array droplet manipulation device in an oil-phase system as described in claim 2, characterized in that, The FPGA chip is EP4CE6E22C8N, which controls the ultrasound probe based on the UART protocol.

4. The ultrasonic phased array droplet manipulation device in an oil-phase system as described in claim 2 or 3, characterized in that, The phased array circuit PCB components include a driver amplifier MIC4127 SOIC8, a shift register 74HC595D SOIC-16, and a 100nF surface-mount capacitor.

5. The ultrasonic phased array droplet manipulation device as described in claim 1, characterized in that, It also includes an image acquisition device, which is disposed below the oil tank to acquire images of the droplets, and the control device is connected to the image acquisition device and receives the droplet images. The visible light transmittance of the superhydrophobic surface layer is ≥50%.

6. The ultrasonic phased array droplet manipulation device in an oil-phase system as described in claim 5, characterized in that: The image acquisition device uses a USB driverless camera with a camera size of 32mm×32mm, an image pixel of 2MP, a field of view of 80~120°, and a frame rate of 30~120fps.

7. The ultrasonic phased array droplet manipulation device as described in claim 1, characterized in that, The oil phase system is a low-density mineral oil, and the density of the low-density mineral oil should be less than 0.9 g / mL (25°C).

8. The ultrasonic phased array droplet manipulation device as described in claim 1, characterized in that, The static contact angle of the superhydrophobic surface layer is greater than 154°, and the roll-off angle is less than 3°.

9. The ultrasonic phased array droplet manipulation device as described in claim 1, characterized in that, The control device sends control signals through an Arduino module.

10. The ultrasonic phased array droplet manipulation device as described in claim 1, characterized in that, It also includes a waste liquid discharge device, which includes a miniature peristaltic pump with a hose, the miniature peristaltic pump being controlled and connected to the control device, and the oil tank being connected to the hose of the miniature peristaltic pump on its side wall.

Images