Multi-nozzle array type chip cleaning micro-nano bubble device

Abstract

The utility model relates to a cleaning device, belongs to the technical field of micro-nano bubble cleaning equipment, and particularly relates to a multi-nozzle array type chip cleaning micro-nano bubble device, which comprises a base, a micro-nano bubble generating mechanism is arranged on the base, a handle and a plurality of motors are fixedly connected onto a sliding frame, and the micro-nano bubble generating mechanism is arranged on the sliding frame. A plurality of rotating discs are rotationally connected to the sliding frame, and output shafts of the multiple motors are fixedly connected to the multiple rotating discs correspondingly; according to the chip cleaning device, through cooperation of the communicating pipe, the supporting box and the spray heads, multiple sets of chips can be cleaned at the same time, the cleaning efficiency of the device is improved, through cooperation of the motor, the rotating disc, the first gear, the second gear, the mounting frame, the mounting groove and the blocking strip, the chips are driven by the motor to rotate and rotate at the same time, and the chip cleaning efficiency is improved. And meanwhile, water stains attached to the surface of the chip can be conveniently spin-dried after cleaning is completed, and the practicability of the device is improved.

Description

TECHNICAL FIELD

[0001] The utility model relates to micro nano bubble cleaning equipment technical field, specifically a kind of multi-nozzle array chip cleaning micro nano bubble device. BACKGROUND

[0002] Chip cleaning is very important in semiconductor manufacturing, the traditional cleaning method has the problem of low efficiency or damage to the chip surface, and micro nano bubble technology is more suitable for fine cleaning of chip due to its high surface area and strong oxidation capacity.

[0003] The Chinese patent with publication number CN221869516U discloses an ozone micro-nano bubble cleaning device, which includes a box body, an ozone micro-nano bubble generating mechanism, a gas-liquid mixing pump, a cleaning mechanism, a cleaning tank, and a drainage mechanism. The ozone micro-nano bubble generating mechanism is fixedly connected to the bottom of the box body. The ozone micro-nano bubble generating mechanism includes a gas-liquid mixing pump, which is fixedly connected to the ozone micro-nano generating mechanism. The cleaning mechanism is fixedly connected to the upper layer of the box body and is used for cleaning metal parts and other objects. The cleaning mechanism includes a cleaning tank, which is fixedly connected to the box body. The drainage mechanism is slidingly connected to the box body. Through the above technical solution, the problem of the prior art that the cleaned objects need to be drained before being taken out, and a large amount of water is brought out when the objects are taken out, which causes inconvenience in use, is solved.

[0004] In the above technical solution, after cleaning is completed, water is discharged through the drainage channel, but there are still water droplets adhering to the cleaned objects and the supporting spring. If the objects are directly taken out, water flow will be generated, which needs to be cleaned manually, which is relatively cumbersome.

[0005] Therefore, the utility model provides a multi-nozzle array chip cleaning micro-nano bubble device. UTILITY MODEL CONTENTS

[0006] To solve the above technical problems, the utility model provides a multi-nozzle array chip cleaning micro-nano bubble device, which can send the water flow mixed with ozone micro-nano bubbles into the support box through the communication pipe by the micro-nano bubble generating mechanism, and clean the chip by the nozzle. The nozzle can clean the chip from multiple angles by rotating the chip around the rotating disc while rotating it by the motor, which improves the cleaning effect of the device. After cleaning is completed, the installation frame and the chip are rotated by the motor, which can shake off the water droplets adhering to them, achieving the effect of draining and improving the practicality of the device.

[0007] The technical solution for achieving the utility model discloses a multi-nozzle array type chip cleaning micro-nano bubble device which comprises a base, a micro-nano bubble generating mechanism is arranged on the base, and further comprises;

[0008] A sliding frame is slidably connected to the base, a handle and a plurality of motors are fixedly connected to the sliding frame, a plurality of rotating discs are rotatably connected to the sliding frame, output shafts of the plurality of motors are fixedly connected to the plurality of rotating discs respectively, a plurality of gear wheels one are rotatably connected to the plurality of rotating discs respectively, a plurality of gear wheels two are fixedly connected to the sliding frame, the gear wheels one are engaged with the gear wheels two, and a plurality of mounting frames are fixedly connected to the plurality of gear wheels one respectively.

[0009] Preferably, a plurality of supporting boxes are fixedly connected to the base, and a plurality of spray heads are fixedly connected to the plurality of supporting boxes.

[0010] Preferably, a communication pipe is arranged on the micro-nano bubble generating mechanism, and the plurality of supporting boxes are connected in communication through the communication pipe.

[0011] Preferably, a plurality of mounting grooves are formed in the plurality of mounting frames respectively, and a plurality of blocking strips are clamped on the plurality of mounting frames respectively.

[0012] Preferably, a filter screen is fixedly connected to the base.

[0013] Preferably, a drain pipe is fixedly connected to the base, and an electromagnetic valve is fixedly connected to the drain pipe.

[0014] Compared with the prior art, the utility model has the following remarkable advantages:

[0015] Firstly, the communication pipe, the supporting boxes and the spray heads are matched, so that multiple groups of chips can be cleaned at the same time, and the cleaning efficiency of the device is improved.

[0016] Secondly, the motor, the rotating disc, the gear wheel one, the gear wheel two, the mounting frame, the mounting groove and the blocking strip are matched, the motor drives the chip to rotate at the same time, the chip rotates by itself, the multiple angles of the chip are cleaned, the water stains attached to the surface of the chip are shaken dry after cleaning, and the practicability of the device is improved. BRIEF DESCRIPTION OF DRAWINGS

[0017] The utility model will be explained further in combination with the drawings and the embodiments:

[0018] Figure 1 is the three-dimensional structure schematic diagram of the utility model;

[0019] Figure 2 is the three-dimensional structure schematic diagram of the sliding frame in the utility model;

[0020] Figure 3It is the three-dimensional structure schematic view of the supporting box and the spray head in the utility model;

[0021] Figure 4 It is the three-dimensional structure schematic view of the gear one and the gear two in the utility model;

[0022] Figure 5 It is the three-dimensional structure schematic view of the installation frame and the blocking strip in the utility model.

[0023] Mark explanation:

[0024] 1, base;2, micro-nano bubble generating mechanism;3, communication pipe;4, supporting box;5, spray head;6, sliding frame;7, handle;8, motor;9, rotating disc;10, gear one;11, gear two;12, installation frame;13, installation groove;14, blocking strip;15, filter screen;16, drain pipe;17, electromagnetic valve. Specific implementation

[0025] The utility model is described in detail below, and the technical scheme in the embodiment of the utility model is clearly and completely described. Obviously, the described embodiment is only a part of the embodiment of the utility model, not all. Based on the embodiment of the utility model, all other embodiments obtained by the ordinary skill in the art without creative labor belong to the scope of protection of the utility model.

[0026] The utility model improves and provides a kind of multi-nozzle array type chip cleaning micro-nano bubble device, and the technical scheme of the utility model is:

[0027] As Figures 1-5 Shown, a kind of multi-nozzle array type chip cleaning micro-nano bubble device, including base 1, base 1 is equipped with micro-nano bubble generating mechanism 2, still include;

[0028] Sliding frame 6, sliding frame 6 is slidably connected on base 1, handle 7 is fixedly connected on sliding frame 6, a plurality of motors 8 are fixed with bolt on sliding frame 6, motor 8 is linear array distribution on sliding frame 6, a plurality of rotating discs 9 are rotatably connected on sliding frame 6, two rows of rotating discs 9 on the inner wall of sliding frame 6 are symmetrical with handle 7 as the axis, the output shaft of a plurality of motors 8 is fixed on a plurality of rotating discs 9 respectively by bolt, gear one 10 is rotatably connected on a plurality of rotating discs 9, a plurality of gear two 11 are fixedly connected on sliding frame 6, the diameter of gear two 11 is greater than the diameter of rotating disc 9, gear one 10 is engaged with gear two 11, a plurality of installation frames 12 are fixedly connected on a plurality of gear one 10 respectively, utilize motor 8 to drive chip rotation at the same time to make chip autorotation, it is convenient to clean a plurality of angles of chip, while it is convenient to shake dry water stain attached to the surface of chip after cleaning, improve the practicability of the device.

[0029] Further, as shown in Figure 1 and Figure 3 The base 1 is fixedly connected with a plurality of support boxes 4, the cross section of the support box 4 is inverted "U" shape, a plurality of support boxes 4 are fixedly connected with a plurality of spray heads 5, the spray head 5 is linear array distribution on the support box 4.

[0030] Further, as shown in Figure 1 and Figure 3 The micro-nano bubble generating mechanism 2 is provided with a communication pipe 3, a plurality of support boxes 4 are connected through the communication pipe 3, the micro-nano bubble generating mechanism 2 includes a micro-nano bubble generator, an ozone generator and a gas-liquid mixing pump.

[0031] Further, as shown in Figure 2 and Figure 5 A plurality of mounting frames 12 are respectively provided with a plurality of mounting grooves 13, the mounting grooves 13 are linear array distribution on the mounting frame 12, a plurality of mounting frames 12 are respectively connected with a plurality of blocking strips 14, the chip in the mounting groove 13 can be taken out after the blocking strip 14 is taken off.

[0032] Further, as shown in Figure 3 The base 1 is fixedly connected with a filter screen 15, the filtered water after cleaning is filtered through the filter screen 15, which is convenient for recycling and utilization of water, and has a certain environmental protection effect.

[0033] Further, as shown in Figure 1 and Figure 3 The base 1 is fixedly connected with a drain pipe 16, the drain pipe 16 is fixedly connected with a solenoid valve 17, and the opening and closing of the drain pipe 16 is controlled through the solenoid valve 17.

[0034] The specific working method is: pull the handle 7, take out the sliding frame 6 from the base 1, then take off the blocking strip 14 on the mounting frame 12, put the chip into the mounting groove 13 one by one, cover the blocking strip 14 to prevent the chip from falling off during cleaning, after the chip installation is completed, reset the sliding frame 6, start the micro-nano bubble generating mechanism 2, the water flow mixed with ozone micro-nano bubbles is introduced into the support box 4 through the communication pipe 3, and sprayed from the spray head 5 to clean the chip, at the same time, start the motor 8, the output shaft drives the rotating disc 9 to rotate, the gear one 10 rotates, since the gear one 10 is engaged with the gear two 11, the gear one 10 rotates with the rotation of the rotating disc 9, drives the chip to rotate around the rotating disc 9, so that the spray head 5 can clean the chip from multiple angles, improve the cleaning effect of the device, at the same time, after cleaning, the installation frame 12 and the chip are driven to rotate by the motor 8, which can shake off the water droplets attached thereto, and has a draining effect, improving the practicability of the device.

[0035] The technical means disclosed by the utility model scheme are not limited to the technical means disclosed by the above technical means, and also include technical schemes composed of equivalent replacement of the above technical features. The unfinished matters of the utility model belong to the common knowledge of the person skilled in the art.

Claims

1. A multi-nozzle array chip cleaning micro-nano bubble device comprising a base (1), characterized in that: The base (1) is provided with a micro-nano bubble generating mechanism (2), and further comprises; A sliding frame (6) is slidingly connected to the base (1), and a handle (7) and a plurality of motors (8) are fixedly connected to the sliding frame (6); a plurality of rotating discs (9) are rotatably connected to the sliding frame (6), and output shafts of the plurality of motors (8) are fixedly connected to the plurality of rotating discs (9), respectively; a plurality of gear wheels I (10) are rotatably connected to the plurality of rotating discs (9), respectively; a plurality of gear wheels II (11) are fixedly connected to the sliding frame (6), and the gear wheels I (10) are engaged with the gear wheels II (11); and a plurality of mounting frames (12) are fixedly connected to the plurality of gear wheels I (10), respectively.

2. The multi-nozzle array chip cleaning micro-nano bubble device according to claim 1, characterized in that: A plurality of supporting boxes (4) are fixedly connected to the base (1), and a plurality of spray heads (5) are fixedly connected to the plurality of supporting boxes (4).

3. The multi-nozzle array chip cleaning micro-nano bubble device according to claim 2, characterized in that: The micro-nano bubble generating mechanism (2) is provided with a communication pipe (3), and the plurality of supporting boxes (4) are connected in communication through the communication pipe (3).

4. The multi-nozzle array chip cleaning micro-nano bubble device according to claim 1, wherein: A plurality of mounting grooves (13) are formed in the plurality of mounting frames (12), respectively, and a plurality of blocking strips (14) are clamped to the plurality of mounting frames (12), respectively.

5. The multi-nozzle array chip cleaning micro-nano bubble device according to claim 1, wherein: A filter screen (15) is fixedly connected to the base (1).

6. The multi-nozzle array chip cleaning micro-nano bubble device according to claim 1, wherein: A drain pipe (16) is fixedly connected to the base (1), and an electromagnetic valve (17) is fixedly connected to the drain pipe (16).

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