Degumming frame transfer tool trolley and crystal bar slicing system

Abstract

The utility model relates to the field of degumming frame transfer, in particular to a degumming frame transfer tool trolley and a crystal bar slicing system, which comprise a conveying mechanism, a roller slide way, a degumming frame transfer trolley and a crystal bar slicing trolley, the material receiving plate is used for collecting fragments generated in the transfer process; the sewage collecting hopper is used for collecting sewage, and a sewage discharge valve is arranged at the bottom of the sewage collecting hopper; and the butt joint plate is used for being in butt joint with the AGV. The degumming frame can be automatically transferred, fragments and sewage generated in the transportation process can be classified and collected, and the cleanliness in the operation process is improved.

Description

TECHNICAL FIELD

[0001] The utility model relates to the field of degreasing frame transfer, specifically, relates to a degreasing frame transfer tool car and crystal bar slicing system. BACKGROUND

[0002] With the continuous progress of semiconductor manufacturing technology, the automation demand in the wafer production process is increasing. In the wafer manufacturing process, the degreasing process after the slicing of the crystal bar is a key link.

[0003] In the prior art, after the slicing of the crystal bar is completed by the slicing machine, the crystal bar is loaded into the degreasing frame and transported to the corresponding degreasing machine by the transfer trolley for the next process operation. This process mainly relies on manual operation in the traditional manufacturing environment, and the design of the transfer trolley is mainly for the manual operation scenario. However, with the development of intelligent manufacturing, this transfer mode relying on manual operation cannot meet the requirements of automation, high efficiency and cleanliness in modern semiconductor manufacturing. Specifically, the existing transfer trolley has obvious deficiencies in automated transfer, and its design cannot meet the needs of the automated production line. In addition, since the transfer trolley accumulates debris and sewage during transportation, these residues not only affect the cleanliness of the production environment, but also increase the difficulty and workload of manual cleaning. At the same time, the design of the existing transfer trolley limits it to be sent into the degreasing machine at a fixed angle, which limits its application in diversified production scenarios to some extent. SUMMARY

[0004] The utility model aims at providing a degreasing frame transfer tool car, which can not only realize the automated transfer of the degreasing frame, but also classify and collect the debris and sewage generated during transportation, thereby improving the cleanliness of the operation process.

[0005] Another object of the utility model is to provide a crystal bar slicing system, which can not only realize the automated transfer of the degreasing frame, but also classify and collect the debris and sewage generated during transportation, thereby improving the cleanliness of the operation process.

[0006] The technical scheme of the utility model is as follows:

[0007] A degreasing frame transfer tool car comprises:

[0008] A conveying mechanism is used to convey the degreasing frame.

[0009] A receiving plate is used to collect the debris generated during the transfer process.

[0010] A sewage collection bucket is used to collect sewage, and a sewage discharge valve is arranged at the bottom of the sewage collection bucket.

[0011] A docking plate is used to dock with the AGV trolley.

[0012] Further, a frame is further included, and the conveying mechanism is arranged on the top of the frame.

[0013] Further, the conveying mechanism adopts roller slides, and the roller slides are symmetrically arranged on the left and right sides of the top of the frame and used for jointly conveying the degumming frame.

[0014] Further, a material receiving plate is arranged on the frame and between the two roller slides, a plurality of water leakage holes are arranged on the material receiving plate, linear guide grooves are respectively arranged on the left and right sides of the frame and correspond to the material receiving plate, and the two ends of the material receiving plate are respectively located in the linear guide grooves, so that the material receiving plate can linearly displace along the linear guide grooves.

[0015] A sewage collecting hopper is arranged on the frame and below the material receiving plate, a water outlet of the sewage collecting hopper is provided with a drain pipe, and a discharge valve is mounted on the drain pipe.

[0016] Further, a guide assembly is further included, and the guide assemblies are respectively arranged on the top of the frame and outside the two roller slides, and the guide assemblies on the left and right sides are used for providing guidance when the degumming frame is conveyed.

[0017] Further, the guide assembly includes a row of guide rollers arranged in the conveying direction, the outer side of the guide roller is covered with a buffer layer, the guide roller is installed on the frame through a roller shaft, and the axial direction of the roller shaft and the guide roller is vertical.

[0018] Further, at least two blocking pieces are arranged at the end of the conveying mechanism and on the top of the frame, and used for blocking the degumming frame from continuing to be conveyed.

[0019] Further, the blocking piece adopts a bolt, and a threaded hole is arranged on the top surface of the frame, the bolt is arranged in one-to-one correspondence with the threaded hole, and the lower part of the bolt is screw-mounted in the threaded hole.

[0020] Alternatively, the blocking piece adopts a plug rod, a plug hole is arranged on the top surface of the frame, the plug rod is arranged in one-to-one correspondence with the plug hole, and the lower part of the plug rod is movably inserted into the plug hole.

[0021] Further, the butt joint plate is arranged at the central position of the bottom of the frame, and a plurality of positioning holes are uniformly distributed on the butt joint plate and used for accurate positioning when the AGV trolley is carried.

[0022] A crystal bar slicing system includes the degumming frame transfer tool vehicle.

[0023] Compared with the prior art, the degumming frame transfer tool vehicle has the following beneficial effects:

[0024] The application sets a docking plate for docking with an AGV on the basis of a manual cart, reserves an AGV carrying docking port, can complete material carrying, cargo transportation and other tasks according to a predetermined path or instruction without intervention, increases the compatibility of the demand for automation, increases the conveying mode through the roller slide, changes the mode of only feeding and discharging through grabbing, is more labor-saving compared with the feeding and discharging mode, and is provided with a receiving plate and a sewage collecting hopper, increases the collection of fragments and sewage, beautifies the environment and facilitates cleaning, and improves the cleanliness of the transfer process of the degreasing frame. BRIEF DESCRIPTION OF DRAWINGS

[0025] In order to more clearly illustrate the technical scheme of the embodiments of the present application, the drawings needed to be used in the embodiments will be briefly introduced as follows, and it should be understood that the following drawings only show some embodiments of the present application, and therefore should not be regarded as a limitation on the scope. For those skilled in the art, other related drawings can also be obtained without creative labor on the premise of the drawings.

[0026] Figure 1 It is an exploded structural schematic view of the degreasing frame transfer tool car, the degreasing frame and the cut silicon wafer of the present application.

[0027] Figure 2 It is a structural schematic view of the degreasing frame transfer tool car of the present application.

[0028] Figure 3 It is a structural schematic view of the degreasing frame transfer tool car of the present application.

[0029] Figure 4 It is a structural schematic view of the degreasing frame transfer tool car of the present application.

[0030] Figure 5 It is a structural schematic view of the degreasing frame transfer tool car of the present application.

[0031] Figure 6 It is a structural schematic view of the degreasing frame transfer tool car of the present application.

[0032] Figure 7 It is a structural schematic view of the degreasing frame transfer tool car of the present application.

[0033] In the drawings:

[0034] 1-silicon wafer; 2-dregreasing frame; 3-dregreasing frame transfer tool car;

[0035] 4-obstruction; 5-guide roller; 6-roller slide; 7-receiving plate;

[0036] 8-docking plate; 801-positioning hole;

[0037] 9 - drain valve; 10 - sump; 11 - handle; 12 - wheel. DETAILED DESCRIPTION

[0038] In order to make the objects, technical solutions and advantages of the embodiments of the present application clearer, the following will clearly and completely describe the technical solutions in the embodiments of the present application with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only some but not all of the embodiments of the present application. The components of the embodiments of the present application described and shown in the drawings herein can be arranged and designed in various different configurations.

[0039] Therefore, the following detailed description of the embodiments of the present application provided in the drawings is not intended to limit the scope of the claimed present application, but only represents selected embodiments of the present application. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without creative work fall within the scope of protection of the present application.

[0040] It should be noted that: similar reference numbers and letters represent similar items in the following drawings, therefore, once an item is defined in one drawing, it does not need to be further defined and explained in subsequent drawings.

[0041] In the description of the present application, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer" and the like indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, or the orientation or positional relationship commonly placed when the product of the present application is used, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the indicated device or element must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as a limitation on the present application. In addition, the terms "first", "second", "third" and the like are only used to distinguish the description and cannot be understood as indicating or implying relative importance.

[0042] In addition, the terms "horizontal", "vertical", "overhang" and the like do not mean that the component must be absolutely horizontal or overhanging, but can be slightly inclined. For example, "horizontal" only means that its direction is relatively more horizontal than "vertical", and does not mean that the structure must be completely horizontal, but can be slightly inclined.

[0043] In the description of the utility model, still need to explain, unless another explicit provision and limitation, term "arrangement", "installation", "link", "connection" should do broad sense understanding, for example, can be fixed connection, also can be detachable connection, or integrally connected;Can be mechanical connection, also can be electrical connection;Can be directly connected, also can pass through intermediate medium indirectly connected, can be two elements inside the communication。For ordinary skilled person in the art, can understand the specific meaning of the above terms in the utility model according to specific circumstances.

[0044] Some embodiments of the utility model will be described in detail below with reference to the drawings.In the case of no conflict, the following examples and features in examples can be combined with each other.

[0045] Example 1

[0046] Reference Figures 1-7 The embodiment provides a degumming frame transfer tool car 3, comprising:

[0047] Conveying mechanism for conveying degumming frame 2;

[0048] Material receiving plate 7 for collecting debris generated during transfer;

[0049] Sewage collection bucket 10 for collecting sewage, sewage collection bucket 10 bottom is equipped with sewage discharge valve 9;

[0050] Butt plate 8 for butt joint with AGV trolley;

[0051] Frame, conveying mechanism is arranged on the top of frame, material receiving plate 7, sewage collection bucket 10, butt plate 8 are arranged on the frame respectively, four wheels 12 are arranged on the bottom of frame, handle 11 is further arranged on the frame, which is convenient for hand pushing transfer tool car.

[0052] AGV trolley, full name for "Automated Guided Vehicle", Chinese is usually translated as "automatic guided vehicle" or "automatic guided trolley".It is a kind of unmanned vehicle controlled by computer, can automatically travel according to predetermined path in specific environment, completes material handling, transportation and other tasks.In the scheme, butt plate 8 is arranged on the frame, the butt joint with AGV trolley can be realized, AGV trolley accurately drags degumming frame transfer tool car 3 to specified position, AGV trolley has the following characteristics:

[0053] 1. Automatic navigation: AGV trolley relies on a variety of navigation technologies to realize path planning and autonomous movement.Common navigation methods include magnetic stripe navigation, laser navigation, visual navigation, inertial navigation and two-dimensional code navigation, etc.

[0054] 2. Unmanned operation: no need for manual driving, complete tasks through preset programs or real-time instructions.

[0055] 3. High flexibility: can adjust the path or task according to actual needs, adapt to different working scenarios.

[0056] 4. Strong safety: equipped with sensors and obstacle avoidance system, can detect obstacles and stop or bypass in time to ensure safe operation.

[0057] In this embodiment, the conveying mechanism adopts roller slides 6, which are symmetrically arranged on the left and right sides of the top of the frame for jointly conveying the degumming frame 2.

[0058] A material receiving plate 7 is arranged on the frame between the two roller slides 6, a plurality of water leakage holes are formed in the material receiving plate 7, linear guide grooves are respectively formed on the left and right sides of the frame corresponding to the material receiving plate 7, the two ends of the material receiving plate 7 are respectively located in the linear guide grooves, and the material receiving plate 7 can linearly displace along the linear guide grooves; when the debris on the material receiving plate 7 reaches a certain amount and needs to be transferred, the material receiving plate 7 can be pulled out of the linear guide grooves to uniformly collect and process the debris on the material receiving plate 7.

[0059] A sewage collecting hopper 10 is arranged on the frame below the material receiving plate 7, a drain pipe is arranged at the water outlet of the sewage collecting hopper 10, and a discharge valve 9 is installed on the drain pipe. A large amount of sewage and debris are mixed in the cut silicon wafer 1, and the sewage and debris generated during the conveying of the degumming frame 2 on the roller slide 6 fall on the material receiving plate 7, wherein the debris is retained on the material receiving plate 7, and the sewage leaks out of the water leakage holes and is collected in the sewage collecting hopper 10, when it needs to be discharged, the discharge valve 9 is opened, and the sewage can be uniformly collected and processed.

[0060] The material receiving plate 7 and the sewage collecting hopper 10 are separately arranged for classified collection of debris and sewage, and the sewage collecting hopper 10 has a certain slope to guide the flow of sewage to the drain pipe.

[0061] It also includes a guide assembly, the top of the frame and outside the two roller slides 6 are respectively provided with a guide assembly, and the guide assemblies on both sides are used to provide guidance when the degumming frame 2 is conveyed, and play a limiting role on the conveyed degumming frame 2.

[0062] The guide assembly comprises a row of guide rollers 5 arranged in the conveying direction, the outer side of the guide rollers 5 is covered with a buffer layer, which plays a buffering role when the buffer layer contacts the degumming frame 2, the buffer layer can be made of polyurethane material, which has point elasticity, wear resistance, silence and buffering reduction, so that the degumming frame 2 can smoothly enter the transmission line, and the device is suitable for automatic lines of conveying lines. The guide rollers 5 are installed on the frame through rollers, and the axial direction of the rollers and the guide rollers 5 is vertical, and the degumming frame 2 contacts the guide rollers 5 during the conveying process of the roller slide 6 and drives the guide rollers 5 to rotate horizontally through friction.

[0063] At least two blocking pieces 4 are arranged at the end of the conveying mechanism and on the top of the frame, which are used to block the degumming frame 2 from continuing to convey and also play a role in positioning the degumming frame 2. When the degumming frame 2 is conveyed to the end of the roller slide 6 and is blocked by the blocking piece 4, the degumming frame 2 stops moving at this time, and the degumming frame 2 is conveyed to the designated position by the transfer trolley to realize positioning, and then the degumming frame 2 is grabbed by the mechanical hand and sent to the degumming machine.

[0064] The blocking piece 4 adopts a bolt, and a threaded hole is formed on the top surface of the frame, the bolt and the threaded hole are arranged one by one, the bolt is vertically installed, and the lower part of the bolt is screwed into the threaded hole; the blocking piece 4 adopts a bolt, which can be easily disassembled.

[0065] Alternatively, the blocking piece 4 adopts a plug rod, and a plug hole is formed on the top surface of the frame, the plug rod and the plug hole are arranged one by one, and the lower part of the plug rod is movably inserted into the plug hole.

[0066] Whether the blocking piece 4 adopts a bolt or a plug rod, it is to meet the blocking effect of the degumming frame 2 and also to facilitate the disassembly.

[0067] A butt plate 8 is arranged at the central position of the bottom of the frame, and a plurality of positioning holes 801 are uniformly distributed on the butt plate 8 for accurate positioning when the AGV trolley is carried.

[0068] Specifically, the butt plate 8 of the AGV trolley is installed at the central position of the bottom of the frame, the butt plate 8 is located in the center of the frame, and four holes are uniformly distributed on the butt plate 8, so that the AGV can be accurately positioned through the four holes during carrying, and the overturning caused by uneven weight distribution during transfer can be prevented.

[0069] This degumming frame transfer tool vehicle 3 has the following key design points:

[0070] (1) Structure design

[0071] Roller slide 6: Instead of the traditional grabbing mode, the roller slide 6 is used to realize stable conveying of the degumming frame 2, which is more labor-saving.

[0072] Blocking piece 4 and guide roller 5: used to fix the position of the degumming frame 2 to ensure that it does not shake during transportation.

[0073] The material receiving plate 7 and the sewage collecting bucket 10: a specially designed collecting device can classify and collect the debris and sewage mixed in the cut silicon wafer 1, facilitating subsequent cleaning.

[0074] The sewage discharge valve 9: the sewage collecting bucket 10 has a sewage discharge valve at the bottom, which can easily discharge sewage when connected to a hose.

[0075] (2) Automatic docking function

[0076] The docking plate 8 is installed in the middle of the tool car at the bottom, and four holes are evenly distributed on it. When automatic transportation is needed, the AGV (Automatic Guided Vehicle) can accurately position and carry the trolley through the four holes, ensuring that the trolley will not tip over due to uneven weight distribution during transportation.

[0077] (3) Work flow

[0078] 1. After the stripping frame 2 is loaded into the transfer trolley, it can be smoothly sent to the designated position through the roller slide 6.

[0079] 2. If an automatic system is used, the AGV carries the trolley to the front of the stripping machine through the docking plate 8.

[0080] 3. After arriving, the robot grabs the stripping frame 2 and sends it to the stripping machine.

[0081] 4. After transportation is completed, the remaining materials in the trolley can be cleaned through the debris collection groove and the sewage discharge valve 9.

[0082] Compared with the prior art, the stripping frame transfer tool car 3 has the following advantages:

[0083] Compatible with manual and automatic operation: both manual pushing and AGV automatic transportation are supported.

[0084] More flexible feeding method: using the roller slide 6 to transport the stripping frame 2 is more labor-saving than the traditional feeding and discharging method.

[0085] Easy to clean and maintain: the addition of debris and sewage separation and collection functions not only beautifies the environment, but also greatly simplifies daily cleaning work.

[0086] Example 2

[0087] A crystal bar slicing system comprising the stripping frame transfer tool car 3, further comprising a stripping frame 2, a robot for grabbing the stripping frame 2, an AGV trolley, and a crystal bar slicing machine.

[0088] The technical scheme of the utility model has the advantages of:

[0089] The application sets the docking plate 8 for docking with the AGV trolley on the basis of the manual cart, reserves the AGV carrying docking interface, can complete the material carrying, cargo transportation and other tasks according to the predetermined path or instruction without human intervention, increases the compatibility of the demand for automation, increases the conveying mode through the roller slide 6, changes the mode of only feeding and discharging the degumming frame 2 through grabbing, is more labor-saving compared with the feeding and discharging mode, and is provided with the material receiving plate 7 and the sewage collecting hopper 10, increases the collection of fragments and sewage, beautifies the environment and facilitates cleaning, and improves the cleanliness of the transfer process of the degumming frame 2.

[0090] Multifunctional design: both manual cart and AGV carrying docking interface are reserved.

[0091] Roller slide 6 structure: this is an innovation in the industry, which changes the traditional feeding and discharging mode.

[0092] Fragment and sewage separation and collection structure: this design is convenient for daily maintenance and is a highlight of the scheme.

[0093] Finally, it should be pointed out that: the above embodiments are only used to illustrate the technical solutions of the utility model, and not to limit them; although the utility model has been described in detail with reference to the above embodiments, those skilled in the art should understand that: it can still modify the technical solutions recorded in the above embodiments, or make equivalent replacement for part or all of the technical features; and these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the scope of the technical solutions of the embodiments of the utility model.

[0094] The above is only the preferred embodiment of the utility model, and is not used to limit the utility model. For those skilled in the art, the utility model can have various changes and variations. Any modification, equivalent replacement, improvement, etc. made within the spirit and principles of the utility model shall be included in the protection scope of the utility model.

Claims

1. A degreasing frame transfer trolley (3), characterized in that, The utility model relates to a degumming frame transfer tool car (3) which comprises: a conveying mechanism for conveying the degumming frame (2); a receiving plate (7) for collecting the debris generated during the transfer process; a sewage collection bucket (10) for collecting sewage, the bottom of which is provided with a sewage discharge valve (9); a docking plate (8) for docking with an AGV trolley.

2. The degreasing rack transfer trolley (3) according to claim 1, characterized in that The utility model further comprises a vehicle frame, and the conveying mechanism is arranged on the top of the vehicle frame.

3. The degreasing frame transfer trolley (3) according to claim 2, characterized in that The conveying mechanism adopts a roller slide (6), and the roller slide (6) is symmetrically arranged on the left and right sides of the top of the vehicle frame and used for jointly conveying the degumming frame (2).

4. The degreasing frame transfer trolley (3) according to claim 3, characterized in that, The receiving plate (7) is arranged on the vehicle frame and below the receiving plate (7), a plurality of water leakage holes are formed in the receiving plate (7), linear guide grooves are respectively formed on the left and right sides of the vehicle frame and correspond to the receiving plate (7), and the two ends of the receiving plate (7) are respectively located in the linear guide grooves on the left and right sides, so that the receiving plate (7) can linearly displace along the linear guide grooves. The sewage collection bucket (10) is arranged on the vehicle frame and below the receiving plate (7), a drain pipe is arranged at the water outlet of the sewage collection bucket (10), and a discharge valve (9) is mounted on the drain pipe.

5. The degreasing frame transfer trolley (3) according to claim 3, characterized in that, The utility model further comprises a guide assembly, and the guide assembly is arranged on the top of the vehicle frame and outside the two roller slides (6), and the guide assemblies on the left and right sides are used for providing guidance when the degumming frame (2) is conveyed.

6. The degreasing frame transfer trolley (3) according to claim 5, characterized in that The guide assembly comprises a row of guide rollers (5) arranged in the conveying direction, the outer side of the guide roller (5) is covered with a buffer layer, the guide roller (5) is installed on the vehicle frame through a roller shaft, and the axial direction of the roller shaft and the guide roller (5) is vertical.

7. The degreasing rack transfer trolley (3) according to claim 2, characterized in that At least two stop pieces (4) are arranged at the end of the conveying mechanism and on the top of the vehicle frame and used for stopping the degumming frame (2) from continuing to be conveyed.

8. The degreasing frame transfer trolley (3) according to claim 7, characterized in that The stop piece (4) adopts a bolt, and a threaded hole is formed in the top surface of the vehicle frame, the bolt is arranged in one-to-one correspondence with the threaded hole, and the lower part of the bolt is screw-mounted in the threaded hole. Alternatively, the stop piece (4) adopts a plug rod, a plug hole is formed in the top surface of the vehicle frame, the plug rod is arranged in one-to-one correspondence with the plug hole, and the lower part of the plug rod is movably inserted into the plug hole.

9. The degreasing rack transfer trolley (3) according to claim 2, characterized in that, The docking plate (8) is arranged at the central position of the bottom of the vehicle frame, and a plurality of positioning holes (801) are uniformly distributed on the docking plate (8) and used for accurate positioning when the AGV trolley is carried.

10. A crystal bar slicing system characterized by comprising: The utility model further comprises the degumming frame transfer tool car (3) according to any one of claims 1-9. The utility model further comprises the degumming frame transfer tool car (3) according to any one of claims 1-9.

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