Target material production reaction device with real-time sampling structure

Abstract

The target material production reaction device with the real-time sampling structure comprises a table top, a movable seat and a sampling head, a group of supporting frames are arranged at the lower end of the table top, a group of supporting frames used for supporting a guide rail are arranged on the right rear side of the upper end of the table top, and the sampling head is arranged on the movable seat. The upper end of the supporting frame is provided with a set of guide rails used for guiding the movable base, the guide rails are of a horizontal structure, and the upper end of each guide rail is provided with a set of movable base of an L-shaped structure. Compared with the prior art, the wafer sampling device has the advantages that the electric cylinder is used for controlling the height of the telescopic end and the height of the sampling head so as to sample wafer materials at the upper end of the second carrying table, meanwhile, the linear motor can drive the movable base to move along the upper end of the guide rail, and therefore the movable base drives the sampling head to move; the sampling head moves the wafer sample to the upper end of the electrical detection table, and the wafer sample is detected.

Description

TECHNICAL FIELD

[0001] The utility model belongs to wafer target material production technical field relates to a target material production reaction unit with real -time sampling structure. BACKGROUND

[0002] Real -time electrical detection in wafer target material production process is the key link of ensuring product quality, but it has several shortcomings. Real -time sampling detection can not completely capture all the electrical characteristic changes in the production process, because wafer target material can be affected by temperature, pressure, chemical reaction and other factors in the production process, and the slight change of these factors can cause the fluctuation of electrical characteristics, and the real -time detection system can not accurately reflect these subtle changes in time, and can lead to low production efficiency or excessive detection, increase production cost.

[0003] The main reason for these shortcomings is related to the limitations of detection technology and the performance of the equipment itself. In order to deal with these shortcomings, the conventional method includes improving the precision of detection equipment, optimizing sampling frequency, using more advanced signal processing technology and improving the stability of production environment, etc. These methods also have disadvantages, such as expensive equipment investment and maintenance cost to improve the precision of detection equipment, and cannot be used with other electrical detection equipment in the wafer production process, so now there is an urgent need for a target material production reaction device with real-time sampling structure to solve the above problems. UTILITY MODEL CONTENT

[0004] In view of the deficiencies in the prior art, the utility model aims to provide a target material production reaction device with real-time sampling structure to solve the problems raised in the background art.

[0005] The utility model realizes the following technical scheme: a target material production reaction device with real-time sampling structure, comprising: a table top and a sampling head, a group of support frames are arranged at the lower end of the table top, a group of support frames are arranged at the right rear side of the upper end of the table top for supporting the guide rail;

[0006] A group of guide rails for guiding the movable seat are arranged at the upper end of the support frame, the guide rails are arranged in a horizontal structure, and a group of L-shaped movable seats are arranged at the upper end, a group of linear motors for controlling the direction of the movable seat are arranged at the right side of the movable seat;

[0007] The movable seat is connected with the linear motor driving end, a group of electric cylinders for adjusting the positions of the telescopic end and the sampling head are arranged on the front side of the movable seat, a group of telescopic ends for driving the sampling head to move up and down to sample the wafer material are arranged on the lower end of the electric cylinders, a group of sampling heads are arranged on the lower end of the telescopic end, and a group of sampling grooves for sampling the wafer material are arranged on the lower end of the sampling head.

[0008] As a preferred embodiment, the right side of the table top is internally provided with a group of table two for placing the wafer material, the top view of the table two is a circular structure, and the lower end of the table two is provided with a group of motors for driving the rotation thereof.

[0009] As a preferred embodiment, the outer sides of the front and rear ends of the table two are respectively provided with a group of side support clamping seats one for limiting the wafer, the right view of the side support clamping seat one is a 7-shaped structure, and the left side of the table two is provided with a group of pushing cylinders for pushing and adjusting the position of the wafer, so that the wafer sample and the wafer sampling body can be placed by using the table one and the table two respectively, clamped and fixed by a plurality of groups of pushing cylinders, and the stability of the wafer sampling body is maintained during the sampling process of the sampling head, so as to ensure the smooth sampling.

[0010] As a preferred embodiment, the right lower end of the support frame is provided with an electrical detection table for electrical reaction detection of the wafer sample, and the front upper end of the electrical detection table is provided with a table one for carrying the wafer sample.

[0011] As a preferred embodiment, the outer sides of the table one are uniformly distributed with a plurality of groups of side support clamping seats two for clamping the wafer sample.

[0012] As a preferred embodiment, when the movable seat is located at the rightmost position of the guide rail, the sampling head and the center position of the table one are arranged on the same vertical longitudinal line, and when the movable seat is located at the leftmost position of the guide rail, the sampling head and the center position of the table two are arranged on the same vertical longitudinal line.

[0013] The beneficial effects of the utility model are that: the height of the telescopic end and the sampling head is controlled by using the electric cylinder to carry out sampling work on the wafer material on the upper end of the carrier table 2, and the linear motor can drive the movable seat to move along the upper end of the guide rail, so that the sampling head is driven to move by the movable seat, the wafer sample is moved to the upper end of the electrical detection table by the sampling head, and the wafer sample is detected, the wafer sample and the wafer sampling body are placed by using the carrier table 1 and the carrier table 2 respectively, and are clamped and fixed by the plurality of groups of pushing cylinders, and the stability of the wafer sampling body is maintained during the sampling process of the sampling head, so that the sampling is smooth. BRIEF DESCRIPTION OF DRAWINGS

[0014] In order to more clearly illustrate the technical scheme in the embodiments of the utility model or the prior art, the drawings needed to be used in the embodiment or the prior art description will be briefly introduced, and obviously, the drawings in the following description are only some embodiments of the utility model, and other drawings can be obtained according to these drawings without creative labor for those skilled in the art.

[0015] Figure 1 It is a front side overhead structure schematic view of the target material production reaction device with the real-time sampling structure of the utility model;

[0016] Figure 2 It is a left oblique front side overhead structure schematic view of the target material production reaction device with the real-time sampling structure of the utility model;

[0017] Figure 3 It is a front side overhead structure schematic view of the target material production reaction device with the real-time sampling structure of the utility model; Figure 2 It is a structure enlarged schematic view of the middle B;

[0018] Figure 4 It is a structure enlarged schematic view of the middle A; Figure 1 It is a structure enlarged schematic view of the middle A;

[0019] In the drawing: 100 - table, 110 - support frame, 120 - guide rail, 130 - movable seat, 140 - electric cylinder, 150 - linear motor, 160 - telescopic end, 170 - electrical detection table, 180 - carrier table 1, 190 - carrier table 2, 200 - side support clamping seat 1, 210 - pushing cylinder, 220 - motor, 230 - side support clamping seat 2, 240 - sampling head. DETAILED DESCRIPTION

[0020] With reference to the drawings of the embodiments of the present application, the technical solutions in the embodiments of the present application will be clearly and completely described. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments of the present application, all other embodiments obtained by those skilled in the art without creative labor fall within the scope of the present application.

[0021] Please refer to Figures 1-4 A target material production reaction device with a real-time sampling structure, comprising: a table top 100, a movable seat 130 and a sampling head 240, the lower end of the table top 100 is provided with a set of support frames, the right rear side of the upper end of the table top 100 is provided with a set of support frames for supporting the guide rail 120;

[0022] The upper end of the support frame 110 is provided with a set of guide rails 120 for guiding the movable seat 130, the guide rail 120 is arranged in a horizontal structure, and the upper end is provided with a set of L-shaped movable seats 130, the right side of the movable seat 130 is provided with a set of linear motors 150 for controlling the direction thereof;

[0023] The movable seat 130 is connected with the driving end of the linear motor 150, the front side of the movable seat 130 is provided with a set of electric cylinders 140 for adjusting the position of the telescopic end 160 and the sampling head 240, the lower end of the electric cylinder 140 is provided with a set of telescopic ends 160 for driving the sampling head 240 to move up and down for sampling the wafer material, the lower end of the telescopic end 160 is provided with a set of sampling heads 240, the lower end of the sampling head 240 is provided with a set of sampling grooves for sampling the wafer material, the height of the telescopic end 160 and the sampling head 240 can be controlled by using the electric cylinder 140 to perform sampling work on the wafer material on the upper end of the second carrier 190, and the linear motor 150 can drive the movable seat 130 to move along the upper end of the guide rail 120, so that the movable seat 130 drives the sampling head 240 to move, and the sampling head 240 moves the wafer sample to the upper end of the electrical detection table 170, and detects the wafer sample.

[0024] The right side of the table top 100 is internally provided with a set of carriers 190 for placing the wafer material, the top view of the carrier 190 is a circular structure, and the lower end of the carrier 190 is provided with a set of motors 220 for driving the rotation thereof.

[0025] The left side of the carrier 190 is provided with a group of pushing cylinders 210 for pushing and adjusting the position of the wafer, which can place the wafer sample and the wafer sample body by using the carrier 180 and the carrier 190 respectively, and clamp and fix them by using a plurality of groups of pushing cylinders 210, and keep the wafer sample body stable during the sampling process of the sampling head 240, so as to ensure smooth sampling.

[0026] The right lower end of the support frame 110 is provided with a group of electrical detection tables 170 for detecting the electrical reaction of the wafer sample.

[0027] The outer side of the carrier 180 is uniformly distributed with a plurality of groups of side support clamping seats 230 for clamping the wafer sample.

[0028] When the movable seat 130 is located at the rightmost position of the guide rail 120, the sampling head 240 and the center position of the carrier 180 are arranged on the same vertical longitudinal line, and when the movable seat 130 is located at the leftmost position of the guide rail 120, the sampling head 240 and the center position of the carrier 190 are arranged on the same vertical longitudinal line.

[0029] Please refer to Figures 1-4 , as the first embodiment of the utility model: first, the staff places the wafer sample piece produced on the upper end of the carrier 190, then the staff adjusts the wafer on the upper end of the carrier 190 by using the side support clamping seat 200 and the electric cylinder 140, then when the staff needs to sample the wafer sample piece, the movable seat 130 needs to be moved to the leftmost position, then the height of the telescopic end 160 and the sampling head 240 is controlled by using the electric cylinder 140 to sample the wafer material on the upper end of the carrier 190, and the linear motor 150 can drive the movable seat 130 to move along the upper end of the guide rail 120, so that the sampling head 240 is moved by the movable seat 130, and the sampling head 240 moves the wafer sample to the upper end of the electrical detection table 170 and detects the wafer sample.

[0030] Please refer to Figures 1-4As the second embodiment of the utility model: based on the above embodiment, further, the two ends of the outside of the second carrier 190 are respectively equipped with a group of side support clamping seat one 200 for limiting wafer, the right view cross section of side support clamping seat one 200 is a 7-shaped structure, the left side of the second carrier 190 is equipped with a group of push cylinder 210 for pushing and adjusting the position of wafer, can be through the use of carrier one 180 and carrier two 190 respectively to place wafer sample and wafer sample body and through several groups of push cylinder 210 to its clamping fixed, and keep the stability of wafer sample body in the sampling process of sampling head 240, to ensure the smooth sampling.

[0031] The above only is the preferred embodiment of the utility model and does not limit the utility model, and any modification, equivalent replacement, improvement etc. that is made within the spirit and principle of the utility model should be included in the protection scope of the utility model.

Claims

1. A target production reaction apparatus having a real-time sampling configuration, comprising: The table (100), the movable seat (130) and the sampling head (240) are characterized in that: a group of support frames are arranged at the lower end of the table (100), and a group of support frames (110) for supporting the guide rail (120) are arranged at the right rear side of the upper end of the table (100); A group of guide rails (120) for guiding the movable seat (130) are arranged at the upper end of the support frame (110), the guide rail (120) is arranged in a horizontal structure, and a group of movable seats (130) of L-shaped structure are arranged at the upper end, the right side of the movable seat (130) is provided with a group of linear motors (150) for controlling the direction thereof; The movable seat (130) is connected with the driving end of the linear motor (150), a group of electric cylinders (140) for adjusting the position of the telescopic end (160) and the sampling head (240) are arranged at the front side of the movable seat (130), a group of telescopic ends (160) for driving the sampling head (240) to move up and down for sampling are arranged at the lower end of the electric cylinder (140), a group of sampling heads (240) are arranged at the lower end of the telescopic end (160), and a group of sampling grooves for sampling the wafer material are arranged at the lower end of the sampling head (240).

2. The target production reaction apparatus having a real-time sampling structure according to claim 1, characterized by: A group of second loading platforms (190) for placing the wafer material are arranged inside the right side of the table (100), the second loading platform (190) is in a circular structure in the top view cross section, and a group of motors (220) for driving the rotation of the second loading platform (190) are arranged at the lower end thereof.

3. The target production reaction apparatus having a real-time sampling structure according to claim 2, characterized by: A group of side support clamping seats one (200) for limiting the wafer are arranged at the outer sides of the front and rear ends of the second loading platform (190) respectively, the side support clamping seat one (200) is in a 7-shaped structure in the right view cross section, and a group of pushing cylinders (210) for pushing and adjusting the position of the wafer are arranged at the left side of the second loading platform (190).

4. The target production reaction apparatus having a real-time sampling structure according to claim 3, characterized by: A group of electrical detection tables (170) for electrically detecting the wafer sample are arranged at the lower end of the right side of the support frame (110), and a group of first loading platforms (180) for bearing the wafer sample are arranged at the upper end of the front side of the electrical detection table (170).

5. The target production reaction apparatus having a real-time sampling structure according to claim 4, characterized by: The outer side of the first loading platform (180) is uniformly distributed with a plurality of groups of side support clamping seats two (230) for clamping the wafer sample.

6. The target production reaction apparatus having a real-time sampling structure according to claim 5, characterized by: When the movable seat (130) is located at the rightmost position of the guide rail (120), the sampling head (240) thereof is arranged in the same vertical longitudinal line with the center position of the first loading platform (180), and when the movable seat (130) is located at the leftmost position of the guide rail (120), the sampling head (240) thereof is arranged in the same vertical longitudinal line with the center position of the second loading platform (190).

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