PVD (Physical Vapor Deposition) coating equipment

Abstract

The utility model discloses PVD (Physical Vapor Deposition) coating equipment which comprises a main box body as well as a coating plate and a target material seat which are assembled in the main box body and are respectively distributed up and down, a closing plate is movably mounted on the front surface of the main box body, an observation window is fixedly mounted on the front surface of the closing plate, a vacuumizing pipe extending into the main box body is fixedly mounted on the back of the main box body, and a vacuumizing pipe is fixedly mounted on the back of the main box body. The utility model relates to the technical field of PVD coating. According to the PVD coating equipment, through cooperation of the first electromagnetic coil and the multiple sets of second electromagnetic coils, the magnetic field intensity and direction can be adjusted in real time according to the etching depth of a target material, the surface of the target material is evenly covered with plasmas, the utilization rate of the target material is increased, the service life of the target material is prolonged, and the production cost is saved; and water liquid cooling can be performed on the top of the circular target material during operation, so that the stability of the circular target material during use by equipment is improved, and the service life of the circular target material is prolonged.

Description

TECHNICAL FIELD

[0001] The utility model relates to PVD coating technology field, concretely to a kind of PVD coating equipment. BACKGROUND

[0002] PVD coating (Physical Vapor Deposition coating) is an advanced surface treatment technology, a layer of thin film with specific performance is deposited on the surface of material by physical method, and it is widely used in industry, decoration, electronics and other fields;

[0003] Among them, the publication number is: "CN210314463U" discloses "a kind of PVD vacuum coating equipment", including support base, the side of support base is equipped with heat dissipation block, the side of heat dissipation block is equipped with ventilation pipe, the other side of heat dissipation block is equipped with main body, the upper end of main body is equipped with rotating rod, the lower end of one end of rotating rod is equipped with operating screen;

[0004] The utilization rate of target material of traditional coating equipment is low, in the sputtering process of circular target material, due to edge effect, uneven magnetic field distribution and target material surface etching area limitation and other problems, and when using circular target material, it does not have the function of heat dissipation, when target material is poorly cooled, the temperature of target material will continue to rise, high temperature will accelerate the microstructure change of target material, the change of structure will make the physical properties of target material decrease, such as hardness reduction, brittleness increase, so it is more easily damaged by ion bombardment in sputtering process, greatly shortens the service life of target material, for this purpose, we design a kind of PVD coating equipment to solve the above problems. UTILITY MODEL CONTENTS

[0005] In view of the deficiencies of the prior art, the utility model provides a kind of PVD coating equipment, solve the problem that uneven magnetic field distribution leads to target material utilization reduction, make the cost increase situation, and do not have the cooling of circular target material, cause the temperature rise of structure change when operating.

[0006] To achieve the above object, the utility model is realized by the following technical scheme: a kind of PVD coating equipment, including main box and being assembled in the upper and lower distribution of target material seat and coating plate in main box respectively;

[0007] The front of the main box is movably installed with a closure plate, the front of the closure plate is fixedly installed with an observation window, the back of the main box is fixedly installed with a vacuum extraction pipe extending to the inside, and a barometer is fixedly installed at the central position of the front of the main box;

[0008] Rubber convex points are fixedly installed at equal distances on the top of the coating plate, vacuum suction cups are fixedly installed between the rubber convex points, and vacuum suction pipes connected with the vacuum suction cups are fixedly installed on the bottom of the coating plate.

[0009] The bottom of the target seat is provided with an electromagnetic groove, a first electromagnetic coil is fixedly installed at the central position of the electromagnetic groove, second electromagnetic coils are fixedly installed at the outer side of the electromagnetic groove at equal intervals, a limiting groove is formed at the outer side of the bottom of the target seat, two groups of sealing rings are fixedly installed at the bottom of the limiting groove, electric push rods are fixedly installed at the outer side of the target seat at equal intervals, the output ends of the electric push rods are all rotationally installed with tightening plates, a liquid inlet pipe is fixedly installed at the front side of the top of the target seat, and a liquid outlet pipe is fixedly installed at the rear side of the top of the target seat.

[0010] Preferably, a rotary motor is fixedly installed at the central position of the top of the main box body, the output end of the rotary motor extends into the main box body and is fixedly connected with the top of the target seat, and a conductive ring is sleeved on the output end of the rotary motor.

[0011] Preferably, electric sliding rails are fixedly installed at the two sides in the main box body, and sliding seats are slidingly installed at the inner sides of the electric sliding rails.

[0012] Preferably, spring pipes are fixedly connected with the liquid inlet pipe and the liquid outlet pipe.

[0013] Preferably, locking plates are rotationally installed at the two sides below the front face of the main box body, inclined plates matched with the locking plates are fixedly installed at the two sides below the front face of the closing plate, and a pulling groove is fixedly installed at the central position below the front face of the closing plate.

[0014] Preferably, support legs are fixedly installed around the bottom of the main box body.

[0015] The utility model provides a kind of PVD coating equipment.Compared with prior art, it has the following

[0016] Beneficial effects:

[0017] (1) the PVD coating equipment, by the cooperation of first electromagnetic coil and multiple second electromagnetic coils, can real-time adjust magnetic field intensity and direction according to target material etching depth, so that plasma uniformly covers target material surface, improves target material utilization, prolongs target material service life and saves production cost;

[0018] (2) by the cooperation of electromagnetic groove, liquid inlet pipe and liquid outlet pipe, the top of circular target material can be cooled by water during operation, so that the high temperature condition caused by the heat of circular target material during operation cannot be dissipated, so as to improve the stability of the equipment during the use of circular target material and prolong the service life of circular target material. BRIEF DESCRIPTION OF DRAWINGS

[0019] Figure 1 It is the overall structure schematic diagram of the utility model.

[0020] Figure 2The main box internal structure schematic view of the utility model.

[0021] Figure 3 The target material seat structure schematic view of the utility model.

[0022] Figure 4 The target material seat bottom structure schematic view of the utility model.

[0023] Figure 5 The coated plate bottom structure schematic view of the utility model.

[0024] Figure 6 The target material seat cross section structure schematic view of the utility model.

[0025] In the figure: 1, main box; 101, air pressure table; 102, support leg; 2, closing plate; 201, observation window; 202, inclined plane plate; 203, locking plate; 204, pull groove; 3, rotary motor; 301, conductive ring; 4, liquid inlet pipe; 401, liquid outlet pipe; 402, spring pipe; 5, electric sliding rail; 501, sliding seat; 6, coated plate; 601, rubber convex point; 602, vacuum chuck; 603, vacuum suction pipe; 7, target material seat; 701, electromagnetic slot; 702, first electromagnetic coil; 703, second electromagnetic coil; 704, limiting slot; 705, sealing ring; 8, vacuumizing pipe; 9, electric push rod; 901, tightening plate. DETAILED DESCRIPTION

[0026] The technical solutions in the embodiments of the utility model will be clearly and completely described below with reference to the drawings in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, rather than all the embodiments. Based on the embodiments in the utility model, all the other embodiments obtained by the person skilled in the art without creative labor fall within the protection scope of the utility model.

[0027] Embodiment one

[0028] Please refer to Figures 1-6As shown, the embodiment provides a PVD coating equipment, which comprises a main box 1, a coating plate 6 and a target seat 7 arranged in the main box 1 in an upper and lower distribution mode, a closing plate 2 movably mounted on the front surface of the main box 1, an observation window 201 fixedly mounted on the front surface of the closing plate 2, a vacuum pipe 8 fixedly mounted on the back of the main box 1 and extending into the interior of the main box 1, an air pressure gauge 101 fixedly mounted on the central position of the front surface of the main box 1, rubber convex points 601 equidistantly fixedly mounted on the top of the coating plate 6, vacuum suckers 602 fixedly mounted between the rubber convex points 601, vacuum suction pipes 603 fixedly mounted on the bottom of the coating plate 6 and connected with the vacuum suckers 602, an electromagnetic groove 701 formed in the bottom of the target seat 7, and a first electromagnetic coil 702 fixedly mounted on the central position of the electromagnetic groove 701 and a second electromagnetic coil 703 equidistantly fixedly mounted on the outer side of the electromagnetic groove 701.

[0029] In use, the raw material is placed on the coating plate 6 in the interior of the main box 1, the rubber convex points 601 can flexibly support the bottom of the raw material and cause no abrasion and scratch on the bottom of the raw material, the vacuum suckers 602 are connected with the vacuum equipment outside through the vacuum suction pipes 603, so that the bottom of the raw material can be adsorbed and fixed through the vacuum suckers 602, thereby ensuring the stability of the raw material placed on the coating plate 6, the closing plate 2 can close the front surface of the main box 1, and the raw material can be placed in the main box 1 and taken out through the opening of the closing plate 2, the vacuum pipe 8 can be connected with the vacuum equipment outside, so that the vacuum equipment can perform vacuumizing treatment on the interior of the main box 1 through the vacuum pipe 8, the ion injected can perform coating operation on the raw material through the vacuumizing treatment on the interior of the main box 1, the air pressure gauge 101 can monitor and display the air pressure in the interior of the main box 1, so that the staff can know the air pressure state in the interior of the equipment during operation, the circular target material is placed on the bottom of the target seat 7, the tightening plate 901 on the output end of the electric push rod 9 is driven to ascend to lift and tighten the edge of the circular target material, so that the circular target material can be fixed on the bottom of the target seat 7, the first electromagnetic coil 702 and the second electromagnetic coil 703 fixedly mounted in the electromagnetic groove 701 of the target seat 7 are connected with the power supply outside, so that the first electromagnetic coil 702 and the second electromagnetic coil 703 can generate a magnetic field on the top of the circular target material during operation of the circular target material, the distribution of the magnetic field can affect the distribution of the plasma, thereby affecting the deposition distribution of the sputtering atoms, and through the independent control of the multiple second electromagnetic coils 703, the magnetic field strength and direction can be adjusted in real time according to the etching depth of the target material, so that the plasma uniformly covers the surface of the target material, the utilization rate of the target material is improved, the service life of the target material is prolonged, and the production cost is saved.

[0030] Embodiment two

[0031] On the basis of embodiment one, as shown in Figure 3 , Figure 4And Figure 6 As shown in the figure, the outer side of the bottom of the target seat 7 is provided with a limiting groove 704, and the bottom of the limiting groove 704 is fixedly installed with two groups of sealing rings 705. The outer side of the target seat 7 is fixedly installed with an electric push rod 9, and the output end of the electric push rod 9 is rotatably installed with a tightening plate 901. The front side of the top of the target seat 7 is fixedly installed with a liquid inlet pipe 4, and the rear side of the top of the target seat 7 is fixedly installed with a liquid outlet pipe 401.

[0032] In use, the limiting groove 704 can limit the placement of the circular target on the bottom of the target seat 7, and the two groups of sealing rings 705 improve the sealing performance when the circular target contacts the bottom of the target seat 7. The liquid inlet pipe 4 can be connected with an external cooling liquid pipeline, so that the cooling liquid can be injected into the electromagnetic groove 701 through the liquid inlet pipe 4. The cooling liquid in the electromagnetic groove 701 can be used to cool the circular target. Through cooling, the stability of the target during operation can be improved, and the change of the structure caused by the inability to dissipate heat during operation of the target can be avoided, thereby reducing the stability and service life during use. The liquid outlet pipe 401 is connected with an external recovery pipeline, and the used cooling liquid in the electromagnetic groove 701 can be discharged through the liquid outlet pipe 401, so that the circular target can be cooled through water circulation, thereby ensuring the stability of the target during cooling and prolonging the service life.

[0033] As shown in the figure, Figure 3 The top of the main box body 1 is fixedly installed with a rotary motor 3 at the central position, the output end of the rotary motor 3 extends into the main box body 1 and is fixedly connected with the top of the target seat 7, and the output end of the rotary motor 3 is sleeved with a conductive ring 301.

[0034] In use, the rotary motor 3 can drive the target seat 7 to reciprocate, and the target can be reciprocated by rotating the target seat 7. The utilization rate of the target can be improved by rotating, and the conductive ring 301 can supply power to the first electromagnetic coil 702 and the second electromagnetic coil 703 during operation of the target seat 7, thereby avoiding the winding of the power line during rotation.

[0035] As shown in the figure, Figure 2 And Figure 5 The inside of the main box body 1 is fixedly installed with an electric sliding rail 5 on both sides, and the inside of the electric sliding rail 5 is slidably installed with a sliding seat 501.

[0036] In use, the sliding seat 501 is fixedly connected with the bottom of the coated plate 6, so that the height of the coated plate 6 and the raw material on the top thereof can be adjusted by the electric sliding rail 5, thereby facilitating the adjustment and control of the height of the raw material according to the needs of the coating.

[0037] As shown in the figure, Figure 3 And 4As shown, spring tubes 402 are fixedly connected to both the inlet pipe 4 and the outlet pipe 401.

[0038] In use, the spring tube 402 can extend and retract when the target seat 7 rotates, thereby enabling liquid supply and drainage to the internal electromagnetic tank 701 when the target seat 7 rotates.

[0039] like Figure 1 As shown, locking plates 203 are rotatably installed on both sides of the lower front of the main housing 1, and inclined plates 202 that cooperate with locking plates 203 are fixedly installed on both sides of the lower front of the closing plate 2. A pull groove 204 is fixedly installed at the center of the lower front of the closing plate 2.

[0040] When in use, the locking plate 203 rotates to the top and abuts against the inclined plate 202, thereby locking the closing plate 2 when it is closed by the locking plate 203 and the inclined plate 202, ensuring the stability of the closing plate 2 when it is closed. The groove 204 facilitates the operation of the staff when the closing plate 2 is opened.

[0041] like Figure 1 As shown, support legs 102 are fixedly installed around the bottom of the main housing 1.

[0042] In use, the support leg 102 can support the bottom of the main housing 1, and the support height can be adjusted by rotating the threaded rod on the support leg 102, thereby ensuring the stability of the equipment when it is placed on uneven ground.

[0043] Working principle: The main chamber 1 and the closing plate 2 can perform closed sealing treatment for the raw material during coating. The coating plate 6 can support and fix the raw material. The external vacuum equipment can perform vacuum treatment inside the main chamber 1 through the vacuum tube 8. The target holder 7 can fix the target. The first electromagnetic coil 702 and the second electromagnetic coil 703 can generate a magnetic field. Multiple sets of second electromagnetic coils 703 can be independently controlled, so the magnetic field can be adjusted. The strength and direction of the magnetic field can be adjusted in real time according to the etching depth of the target, so that the plasma uniformly covers the surface of the target, improves the utilization rate of the target, extends the service life of the target, and saves production costs. The liquid inlet pipe 4 and the liquid outlet pipe 401 can inject coolant into the electromagnetic tank 701. The coolant can perform water cooling treatment on the target, ensuring the stability of the target during cooling and extending its service life.

[0044] Although embodiments of the present invention have been shown and described, those skilled in the art will understand that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the claims and their equivalents.

Claims

1. A PVD coating installation, characterized in that: The main box body and the film-coated plate and the target seat arranged in the main box body are arranged in upper and lower positions respectively. The front surface of the main box body is movably mounted with a closing plate, the front surface of the closing plate is fixedly mounted with a viewing window, the back of the main box body is fixedly mounted with a vacuum pipe extending to the inside, and the central position of the front surface of the main box body is fixedly mounted with a barometer. The top of the film-coated plate is fixedly mounted with rubber convex points at equal distances, the vacuum suction cups are fixedly mounted between the rubber convex points, and the bottom of the film-coated plate is fixedly mounted with vacuum suction pipes connected with the vacuum suction cups. The bottom of the target seat is provided with an electromagnetic groove, the central position of the electromagnetic groove is fixedly mounted with a first electromagnetic coil, the outer side of the electromagnetic groove is fixedly mounted with second electromagnetic coils at equal distances, the outer side of the bottom of the target seat is provided with a limiting groove, the bottom of the limiting groove is fixedly mounted with two groups of sealing rings, the outer side of the target seat is fixedly mounted with electric push rods, the output ends of the electric push rods are rotatably mounted with tightening plates, the front side of the top of the target seat is fixedly mounted with a liquid inlet pipe, and the rear side of the top of the target seat is fixedly mounted with a liquid outlet pipe.

2. The PVD coating apparatus of claim 1, wherein: The central position of the top of the main box body is fixedly mounted with a rotary motor, the output end of the rotary motor extends to the inside of the main box body and is fixedly connected with the top of the target seat, and the output end of the rotary motor is sleeved with a conductive ring.

3. The PVD coating apparatus of claim 2, wherein: The inner sides of the electric sliding rails fixedly mounted on both sides of the inside of the main box body are slidably mounted with sliding seats.

4. The PVD coating apparatus of claim 2, wherein: The liquid inlet pipe and the liquid outlet pipe are fixedly connected with spring pipes.

5. The PVD coating apparatus of claim 1, wherein: The front surface of the main box body is rotatably mounted with locking plates on both sides below the front surface, the front surface of the closing plate is fixedly mounted with inclined plates matched with the locking plates on both sides below the front surface, and the central position of the front surface of the closing plate is fixedly mounted with a pulling groove.

6. The PVD coating apparatus of claim 1, wherein: The bottom of the main box body is fixedly mounted with supporting legs around the bottom.

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