Quartz crucible drying equipment

Abstract

The utility model relates to quartz crucible drying equipment, which relates to the technical field of quartz crucibles and comprises a horizontally arranged drying platform, a downward blowing concave table embedded in the upper end surface of the drying platform and used for partially inserting a quartz crucible, and an upward blowing convex table arranged at the upper end of the drying platform and coaxially positioned on the upper side of the downward blowing concave table, a groove allowing a quartz crucible to be partially inserted is formed in the middle of the lower blowing concave table, air outlet holes blowing hot air towards the quartz crucible are evenly formed in the ends, close to each other, of the lower blowing concave table and the upper blowing boss in an array mode, and a suspension gap allowing the quartz crucible to be suspended when blown air is formed between the lower blowing concave table and the upper blowing boss. The quartz crucible drying device has the beneficial effects that no foreign object supports the quartz crucible in the drying process, the drying effect is better, and the drying efficiency is improved.

Description

TECHNICAL FIELD

[0001] The utility model relates to quartz crucible technical field especially relates to a quartz crucible drying equipment. BACKGROUND

[0002] Quartz crucible is the essential basic material for drawing large diameter single crystal silicon and developing large scale integrated circuit, and is used for containing raw materials during single crystal silicon drawing. The conventional electric arc quartz crucible for drawing single crystal is composed of inner and outer layers, the inner layer is a transparent layer with low bubble content, and the outer layer is a bubble composite layer with high bubble content, which supports the deformation strength of the crucible and uniformly radiates heat source from the outer layer of the quartz crucible to the graphite crucible passing through the graphite heat field of the crystal pulling furnace (the heat source is in a radiation state when passing through due to many tiny bubbles, so that the radiation efficiency is improved).

[0003] The manufacturing process of the quartz crucible includes high-purity quartz sand, high-purity graphite mold, vacuum loading molding, vacuum arc melting, natural cooling demolding, quartz crucible preliminary detection, cold processing sand blasting, cutting and chamfering, quartz crucible secondary detection, ultraclean cleaning, ultrasonic, high-pressure spraying, automatic drying, heating and baking, spraying, quartz crucible third detection, vacuum packaging and finished product storage.

[0004] After cleaning, the quartz crucible needs to be dried, and during the drying process, the quartz crucible always has a point in contact with the drying equipment, which is not completely dried, resulting in the need to stand for a period of time after drying is completed to ensure the dryness of the surface of the quartz crucible, thereby affecting the drying efficiency of the quartz crucible. UTILITY MODEL CONTENTS

[0005] (I) Technical problem to be solved

[0006] In view of the above-mentioned shortcomings and deficiencies of the prior art, the utility model provides a quartz crucible drying equipment, which solves the technical problem that the quartz crucible always has a point in contact with the drying equipment during the drying process, which is not completely dried, thereby affecting the drying efficiency of the quartz crucible.

[0007] (II) Technical scheme

[0008] In order to achieve the above-mentioned purpose, the main technical scheme adopted by the utility model includes:

[0009] The utility model discloses an embodiment provides a quartz crucible drying equipment, including the horizontal setting drying platform, the lower blow concave platform of being inserted to the quartz crucible part in the upper end surface of drying platform and being provided with in the upper end of drying platform and coaxial location upper side of lower blow concave platform upper blow convex platform, the recess of being inserted to the quartz crucible part is seted up in the middle part of lower blow concave platform, the end of mutual approach of lower blow concave platform and upper blow convex platform evenly arrayed is seted up and the air outlet hole of hot air blowing out to the quartz crucible, the suspension gap of the quartz crucible being blown by wind is formed between lower blow concave platform and upper blow convex platform.

[0010] The utility model discloses an embodiment provides a quartz crucible drying equipment, when drying the quartz crucible through the drying equipment, the quartz crucible is directly inserted into the recess of lower blow concave platform, the air outlet hole in lower blow concave platform blows air, and the hot air of rapid blowing will lift the quartz crucible to hang in the suspension gap, and the water vapor of quartz crucible outer wall is blown away and is dried, and then the air outlet hole on upper blow convex platform blows air to the quartz crucible, thereby drying the inner wall of quartz crucible, which makes the drying process without external support for the quartz crucible, and the drying effect is better, and the drying efficiency is improved.

[0011] Optionally, the lower blow concave platform has rubber protrusions evenly arrayed between the air outlet holes for supporting the quartz crucible.

[0012] When the drying is finished, the wind is slowly reduced, and the quartz crucible will fall back into the recess at this time. The quartz crucible itself is brittle, and once the falling angle deviates, it is easy to cause knocking and cracking. The rubber protrusions arrayed on the inner wall of the recess of the lower blow concave platform support the quartz crucible, which is safer.

[0013] Optionally, the upper end of the drying platform vertically has a lifting frame on one side of the lower blow concave platform, and the upper blow convex platform is arranged on the top of the lifting frame and vertically lifts and descends under the driving of the lifting frame.

[0014] The lifting frame is vertically arranged on the upper end of the drying platform, so that the upper blow convex platform vertically lifts and descends under the driving of the lifting frame. The height of the upper blow convex platform can be vertically adjusted as needed during drying, to improve the drying efficiency. At the same time, the size of the suspension gap can be adjusted when preparing to dry the quartz crucible, so that the quartz crucible can be more conveniently placed into the recess.

[0015] Optionally, the upper end of the drying platform vertically has a lifting frame on one side of the lower blow concave platform, and the upper blow convex platform is arranged on the top of the lifting frame and vertically lifts and descends under the driving of the lifting frame.

[0016] By vertically setting a protrusion at the lower middle of the upper blowing protrusion, the protrusion can be partially inserted into the quartz crucible. At this time, the air outlet on the protrusion is more convenient and efficient for blowing and drying the inner wall of the quartz crucible.

[0017] Optionally, the upper blown boss has rubber support points evenly arrayed on the protruding surface that abut against the inner wall of the quartz crucible.

[0018] By arranging rubber supports on the raised surface of the upper blowing platform, the quartz crucible can be dried by lowering the upper blowing platform until the rubber supports on the raised surface abut against the inner wall of the quartz crucible. Then, air is blown through the air outlet in the lower blowing platform while the upper blowing platform is gradually moved upward, so that the quartz crucible is blown up in close contact with the upper blowing platform. Then, the upper blowing platform blows the quartz crucible downward. This scheme makes the suspended drying process of the quartz crucible safer.

[0019] Optionally, the air outlet at the lowest end of the upper blowing protrusion is vertically oriented, and the angle between the axis of the air outlet at the peripheral end of the upper blowing protrusion and the inner wall of the quartz crucible away from the center is greater than 90 degrees.

[0020] By setting the air outlet at the peripheral end of the upper blowing protrusion to be inclined, that is, the angle between the axis of the air outlet and the side of the inner wall of the quartz crucible away from the center is greater than 90 degrees, when the air outlet on the protrusion blows air toward the inner wall of the quartz crucible, the water droplets attached to the inner wall of the quartz crucible will be quickly blown away to the edge of the quartz crucible, thereby making the drying efficiency of the quartz crucible higher.

[0021] Optionally, the upper end of the drying platform is vertically rotatably mounted on both sides of the lifting frame, and semi-circular arc-shaped heating lamp strips are vertically and evenly spaced on the sides of the two rotating frames. The arc-shaped heating lamp strips on the two rotating frames are locked together as they rotate to form a ring and are coaxially located on the outer periphery of the quartz crucible.

[0022] By setting rotating frames on both sides of the lifting frame, the rotating frames drive the arc-shaped heating lamp strips to rotate synchronously. When it is time to put in the quartz crucible, the arc-shaped heating lamp strips can be rotated to open, making it easier to put the quartz crucible into the groove. When drying begins, the rotating frame can be rotated so that the arc-shaped heating lamp strips are snapped together into a ring, thereby further heating the quartz crucible drying in the middle to improve drying efficiency.

[0023] Optionally, the upper surface of the drying platform is provided with a clamping assembly for clamping the dried quartz crucible away from the groove. The clamping assembly includes a support rod vertically disposed on the upper surface of the drying platform, a horizontal rod rotatably connected to the top of the support rod, a vertical sliding rod vertically slidably disposed at one end of the horizontal rod away from the support rod, a horizontal plate horizontally disposed at the lower end of the vertical sliding rod, and two arc-shaped clamping plates horizontally slidably disposed on the lower end surface of the horizontal plate and clamping the quartz crucible.

[0024] When the quartz crucible drying is finished, the temperature of the quartz crucible is relatively high, and accidents are prone to occur if the quartz crucible is directly taken out manually, and the drying efficiency is affected if the quartz crucible is taken out after cooling, the scheme sets the clamping assembly on the end face of the drying platform, so that the horizontal plate in the clamping assembly can be moved to directly abut against the upper end edge of the quartz crucible, and then the quartz crucible is clamped and moved to be away from the groove through the arc-shaped clamping plates, so that the drying efficiency is improved.

[0025] Optionally, the lower end face of the horizontal plate is provided with a rubber layer for abutting against the top edge of the quartz crucible, and the side end of the two arc-shaped clamping plates close to each other is provided with a rubber clamping piece for abutting against the side end of the quartz crucible.

[0026] By setting the rubber layer on the lower end face of the horizontal plate and the rubber clamping piece on the side end of the arc-shaped clamping plates close to each other, the quartz crucible is clamped more safely through the clamping assembly.

[0027] (Three) beneficial effects

[0028] The quartz crucible drying equipment of the utility model, when drying the quartz crucible through the drying equipment, the quartz crucible is directly inserted into the groove in the lower blowing concave table, at this time, the air outlet hole in the lower blowing concave table blows air, the hot air blown out quickly will lift the quartz crucible to hang in the suspension gap, and the water vapor on the outer wall of the quartz crucible is blown away and dried, then the air outlet hole on the upper blowing convex table blows air towards the quartz crucible, so that the inner wall of the quartz crucible is dried, the scheme makes the drying process without external support for the quartz crucible, the drying effect is better, and the drying efficiency is improved. BRIEF DESCRIPTION OF DRAWINGS

[0029] Figure 1 It is a three-dimensional schematic view of the utility model embodiment;

[0030] Figure 2 It is a sectional view of the utility model embodiment.

[0031]

Explanation of reference numerals

[0032] 1, drying platform;11, lifting frame;12, rotating frame;121, arc-shaped heating lamp strip;2, lower blowing concave table;21, groove;22, air outlet hole;23, rubber convex point;3, upper blowing convex table;31, protrusion;32, rubber fulcrum;4, clamping assembly;41, supporting rod;42, horizontal rod;43, vertical sliding rod;44, horizontal plate;45, arc-shaped clamping plate;46, rubber layer;47, rubber clamping piece;5, suspension gap. DETAILED DESCRIPTION

[0033] In order to better explain the utility model, in order to facilitate understanding, specific embodiments are described below in detail with reference to the accompanying drawings.

[0034] The quartz crucible drying equipment provided in the embodiment of the utility model, when drying the quartz crucible through the drying equipment, the quartz crucible is directly inserted vertically into the groove of the lower blowing concave platform, at this time, the air outlet hole in the lower blowing concave platform blows air, the hot air blown rapidly will lift the quartz crucible to hang in the suspension gap, at the same time, the water vapor on the outer wall of the quartz crucible is blown away and dried, then the air outlet hole on the upper blowing convex platform blows air towards the quartz crucible, thereby drying the inner wall of the quartz crucible, the scheme makes the drying process without external support for the quartz crucible, the drying effect is better, and the drying efficiency is improved.

[0035] In order to better understand the above technical solutions, the exemplary embodiments of the utility model will be described in more detail below with reference to the drawings. Although the exemplary embodiments of the utility model are shown in the drawings, it should be understood that the utility model can be implemented in various forms and should not be limited by the embodiments described herein. On the contrary, these embodiments are provided to enable a clearer and more thorough understanding of the utility model and to convey the complete scope of the utility model to those skilled in the art.

[0036] Referring to Figure 1 and Figure 2 A quartz crucible drying equipment, comprising a drying platform 1 arranged horizontally, a lower blowing concave platform 2 embedded in the upper end surface of the drying platform 1 and used for partially inserting the quartz crucible, an upper blowing convex platform 3 arranged on the upper end of the drying platform 1 and coaxially located on the upper side of the lower blowing concave platform 2, and a clamping assembly 4 arranged on one side of the lower blowing concave platform 2.

[0037] A groove 21 for partially inserting the quartz crucible is formed in the middle of the lower blowing concave platform 2, air outlet holes 22 for blowing hot air towards the quartz crucible are uniformly arranged at one end of the lower blowing concave platform 2 and the upper blowing convex platform 3, and a suspension gap 5 for suspending the quartz crucible is formed between the lower blowing concave platform 2 and the upper blowing convex platform 3. The air outlet holes 22 in the lower blowing concave platform 2 blow air, the hot air blown rapidly will lift the quartz crucible to hang in the suspension gap 5, at the same time, the water vapor on the outer wall of the quartz crucible is blown away and dried, then the air outlet holes 22 on the upper blowing convex platform 3 blow air towards the quartz crucible, thereby drying the inner wall of the quartz crucible.

[0038] A lifting frame 11 is vertically fixed on the upper end surface of the drying platform 1 at one side of the lower blowing concave platform 2 through bolts, and the upper blowing convex platform 3 is fixed on the top of the lifting frame 11 and vertically lifted under the driving of the lifting frame 11. The height of the upper blowing convex platform 3 can be adjusted vertically as needed during drying, so as to improve the drying efficiency, and at the same time, the size of the suspension gap 5 can be adjusted when preparing to dry the quartz crucible, so that the quartz crucible can be more conveniently put into the groove 21.

[0039] The lower blowing concave platform 2 is evenly arrayed with rubber convex points 23 for supporting the quartz crucible between the air outlets 22, the upper blowing convex platform 3 is vertically protruded with convex 31 partially inserted into the quartz crucible at the middle of the lower end, the air outlets 22 on the upper blowing convex platform 3 are arranged on the surface of the convex 31, and the upper blowing convex platform 3 is evenly arrayed with rubber supporting points 32 abutting against the inner wall of the quartz crucible on the surface of the convex 31. When the quartz crucible is dried, the upper blowing convex platform 3 can be lowered to the rubber supporting points 32 on the surface of the convex 31 abutting against the inner wall of the quartz crucible, then the air outlets 22 in the lower blowing concave platform 2 blow air, while gradually moving the upper blowing convex platform 3 upwards, so that the quartz crucible is tightly blown up against the upper blowing convex platform 3, then the upper blowing convex platform 3 blows the quartz crucible downwards, so that the process of drying the quartz crucible in the air is safer.

[0040] The air outlet 22 at the lowermost end of the upper blowing convex platform 3 is vertically arranged, and the axis of the air outlet 22 at the side end of the upper blowing convex platform 3 is at an angle greater than 90 degrees with the inner wall of the quartz crucible away from the center. When the air outlets 22 on the convex 31 blow air towards the inner wall of the quartz crucible, the water droplets adhered to the inner wall of the quartz crucible will be quickly blown away to the edge of the quartz crucible, thereby improving the drying efficiency of the quartz crucible.

[0041] The upper end of the drying platform 1 is vertically rotatably provided with rotating frames 12 on both sides of the lifting frame 11 through motors, and the side ends of the two rotating frames 12 are vertically and evenly spaced apart to arrange arc-shaped heating lamp strips 121 in a semicircle shape. The arc-shaped heating lamp strips 121 on the two rotating frames 12 are coaxially located on the outer peripheral side of the quartz crucible when the rotating frames 121 are rotated and buckled to form a ring. When the quartz crucible is ready to be placed, the arc-shaped heating lamp strips 121 can be rotated to be opened, thereby facilitating the placement of the quartz crucible into the groove 21. When the drying starts, the rotating frame 12 can be rotated to buckle the arc-shaped heating lamp strips 121 to form a ring, thereby further heating the quartz crucible being dried in the middle to improve the drying efficiency.

[0042] The clamping assembly 4 includes a support rod 41 vertically fixed to the upper end surface of the drying platform 1 by bolts, a horizontal rod 42 horizontally rotatably connected to the top of the support rod 41 by a motor drive, a vertical sliding rod 43 vertically slidably arranged at the end of the horizontal rod 42 away from the support rod 41 by a pneumatic cylinder drive, a horizontal plate 44 horizontally arranged at the lower end of the vertical sliding rod 43, and two arc-shaped clamping plates 45 horizontally slidably arranged on the lower end surface of the horizontal plate 44 and clamping the quartz crucible by a pneumatic cylinder drive. The lower end surface of the horizontal plate 44 is bonded with a rubber layer 46 for abutting against the top edge of the quartz crucible, and the side end of the two arc-shaped clamping plates 45 abutting against each other is bonded with a rubber clamping piece 47 for contacting the side end of the quartz crucible. The horizontal plate 44 in the clamping assembly 4 is directly abutted against the upper end edge of the quartz crucible under the driving of the horizontal rod 42 and the vertical sliding rod 43, and then the quartz crucible is clamped and moved away from the groove 21 by the arc-shaped clamping plate 45.

[0043] In the description of the utility model, it is necessary to understand that the terms "first", "second" are only for the purpose of description, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features limited by "first", "second" can explicitly or implicitly include one or more of the features. In the description of the utility model, the meaning of "multiple" is two or more than two, unless otherwise specifically limited.

[0044] In the utility model, unless otherwise specifically defined and limited, the terms "mounting", "connection", "connection", "fixing" and the like should be understood in a broad sense, for example, it can be fixed connection, or detachable connection, or integrated; it can be mechanical connection, or electrical connection; it can be directly connected, or indirectly connected through intermediate medium; it can be the communication between two elements or the interaction relationship between two elements. For ordinary skilled in the art, the specific meaning of the above terms in the utility model can be understood according to the specific circumstances.

[0045] In the utility model, unless otherwise specifically defined and limited, the first feature is "on" or "under" the second feature, which can be direct contact between the first and second features, or indirect contact between the first and second features through intermediate medium. Moreover, the first feature "above", "above" and "above" the second feature, can be directly above or obliquely above the first feature, or only indicate that the horizontal height of the first feature is higher than that of the second feature. The first feature "below", "below" and "below" the second feature, can be directly below or obliquely below the first feature, or only indicate that the horizontal height of the first feature is lower than that of the second feature.

[0046] In the description of the specification, the description of the terms "one embodiment", "some embodiments", "embodiment", "example", "specific example" or "some examples" means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the utility model. In the specification, the illustrative description of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner. In addition, those skilled in the art can combine and combine the different embodiments or features of the embodiments or examples described in the specification without contradiction.

[0047] Although the embodiments of the utility model have been shown and described above, it can be understood that the above embodiments are exemplary and cannot be understood as limiting the utility model, and those skilled in the art can modify, modify, replace and change the above embodiments within the scope of the utility model.

Claims

1. A quartz crucible drying device, characterized in that: The utility model provides a quartz crucible drying device, including the horizontal setting drying platform (1), the lower blow concave platform (2) of partial insertion of quartz crucible in the upper end surface of drying platform (1) and the upper blow convex platform (3) of coaxial location in the upper side of lower blow concave platform (2) are provided to the upper end of drying platform (1), the recess (21) of partial insertion of quartz crucible is opened in the middle part of lower blow concave platform (2), the air outlet hole (22) that the lower blow concave platform (2) and upper blow convex platform (3) are close to each other one end are opened in the uniform array towards quartz crucible and blow out hot air, the suspension gap (5) that the lower blow concave platform (2) and upper blow convex platform (3) form between the hot air suspension of quartz crucible.

2. The quartz crucible drying apparatus according to claim 1, wherein: The lower blow concave platform (2) is uniformly arrayed with rubber convex points (23) between the air outlet holes (22) for supporting the quartz crucible.

3. The quartz crucible drying apparatus according to claim 1, wherein: The upper end of the drying platform (1) is vertically provided with a lifting frame (11) on one side of the lower blow concave platform (2), and the upper blow convex platform (3) is arranged on the top of the lifting frame (11) and vertically lifts and falls under the driving of the lifting frame (11).

4. The quartz crucible drying apparatus according to claim 3, wherein: The lower end of the upper blow convex platform (3) is vertically protruded with a convex part (31) for partially inserting the quartz crucible, and the air outlet holes (22) on the upper blow convex platform (3) are arranged on the surface of the convex part (31).

5. The quartz crucible drying apparatus as claimed in claim 4, wherein: The upper blow convex platform (3) is uniformly arrayed with rubber supporting points (32) on the surface of the convex part (31) for abutting against the inner wall of the quartz crucible.

6. The quartz crucible drying apparatus according to claim 4, wherein: The air outlet holes (22) at the lowermost end of the upper blow convex platform (3) are vertically arranged, and the axes of the air outlet holes (22) at the side end of the upper blow convex platform (3) form an angle greater than 90 degrees with the inner wall of the quartz crucible away from the center.

7. The quartz crucible drying apparatus according to claim 3, wherein: The upper end of the drying platform (1) is vertically and rotatably provided with a rotating frame (12) on both sides of the lifting frame (11), and the arc-shaped heating lamp strips (121) are vertically and uniformly spaced on the side ends of the two rotating frames (12) in a semicircular shape, and the arc-shaped heating lamp strips (121) on the two rotating frames (12) are connected in a ring shape and coaxially arranged on the outer circumferential side of the quartz crucible.

8. The quartz crucible drying apparatus as claimed in claim 1, wherein: The upper end of the drying platform (1) is provided with a clamping assembly (4) for clamping the quartz crucible away from the recess (21) after drying, and the clamping assembly (4) comprises a supporting rod (41) vertically arranged on the upper end surface of the drying platform (1), a horizontal rod (42) horizontally and rotatably connected to the top of the supporting rod (41), a vertical sliding rod (43) vertically and slidably arranged on the end of the horizontal rod (42) away from the supporting rod (41), a horizontal plate (44) horizontally arranged on the lower end of the vertical sliding rod (43), and two arc-shaped clamping plates (45) horizontally and slidably arranged on the lower end surface of the horizontal plate (44) for clamping the quartz crucible.

9. The quartz crucible drying apparatus as claimed in claim 8, characterized by: The lower end surface of the horizontal plate (44) is provided with a rubber layer (46) for abutting against the top edge of the quartz crucible, and the rubber clamping pieces (47) are arranged on the side ends of the two arc-shaped clamping plates (45) close to each other for contacting the side end of the quartz crucible.

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