Wafer carrier height detection jig

Abstract

The utility model discloses a wafer carrier height detection tool comprising a pedestal, a test rod and a test block. The base is connected with the test rod and is used for placing a to-be-tested wafer carrier; the test rod is connected with the test block and is used for setting the height range of the test block; the test block is used for detecting whether the height of the to-be-tested wafer carrier is within the height range; the height range is the height qualified range of the wafer carrier to be detected. According to the jig, the height range of the test block is adjusted through the test rod, whether the height is qualified or not is judged by detecting whether the height of the to-be-tested wafer carrier is within the height range of the test block or not, testing can be conducted only by moving the to-be-tested wafer carrier to the position between the test block and the base, the structure is simple, cost is low, and efficiency is high.

Description

TECHNICAL FIELD

[0001] The utility model relates to wafer carrier detection technical field especially relates to a wafer carrier height detection fixture. BACKGROUND

[0002] In the wafer carrier, in order to avoid the damage caused by the wobble of wafer in the moving process, need to be fixed in the wafer carrier, avoid wobble and cause damage when handling. Therefore the size of wafer carrier needs to be accurate, avoid the error too big and cause the damage of wafer fixing instability or handling process wafer mutual or with other structure collision. In order to avoid the size error, wafer carrier needs to carry out height detection before leaving factory, avoid the product that does not meet the accuracy requirement leaves factory.

[0003] At present most wafer carriers adopt the automatic detection system of sensor or the detection system with high accuracy gauge to carry out height detection. The automatic detection system of a large number of sensors is high in cost;The detection system with high accuracy gauge needs manual viewing and inspection, and the efficiency is not high. SUMMARY

[0004] In order to reduce the wafer carrier height detection cost and improve the detection efficiency, the utility model provides a wafer carrier height detection fixture.

[0005] Based on the above purpose, the utility model provides a wafer carrier height detection fixture, including: base, test rod and test block;The base is connected with the test rod, for placing the wafer carrier to be measured;The test rod is connected with the test block, for setting the height range of the test block;The test block is used for detecting whether the height of the wafer carrier to be measured is within the height range;The height range is the height qualified range of the wafer carrier to be measured.

[0006] Optionally, the test rod includes: T-shaped groove and guide rail;The guide rail is arranged in the T-shaped groove;The test block is arranged on the T-shaped groove and can slide on the guide rail.

[0007] Optionally, the test block includes: sliding block and limiting block;Sliding block and limiting block are connected;The sliding block is arranged between T-shaped groove and guide rail and can slide between T-shaped groove and guide rail to set the height of test block;The limiting block is used for detecting whether the height of wafer carrier to be measured is within the height range.

[0008] Optionally, the test rod further includes: through hole;The through hole is arranged in the T-shaped groove, and the sliding block is fixed on the through hole.

[0009] Optionally, the through hole is a waist-shaped hole.

[0010] Optionally, the test rod further comprises a mounting block; the test rod is mounted on the base through the mounting block.

[0011] Optionally, the base comprises a mounting groove; the mounting block is mounted in the mounting groove.

[0012] Optionally, the number of the test rod and the test block is 2.

[0013] The wafer carrier height detection jig has the following beneficial effects:

[0014] The wafer carrier height detection jig adjusts the height range of the test block through the test rod, determines whether the height is qualified by detecting whether the height of the wafer carrier to be measured is in the height range of the test block, and only needs to move the wafer carrier to be measured between the test block and the base for testing, so that the structure is simple, the cost is low, and the efficiency is high.

[0015] The slider of the test block can move between the guide rail and the T-shaped groove of the test rod, so that the height of the test block is adjusted, the maximum and minimum qualified height values can be set, different height sizes of the wafer carrier can be set, and the cost is further reduced. BRIEF DESCRIPTION OF DRAWINGS

[0016] Fig. 1 is a structural schematic diagram of a wafer carrier height detection jig provided by an embodiment of the utility model;

[0017] Fig. 2 is an explosion structural schematic diagram of a wafer carrier height detection jig of an embodiment of the utility model;

[0018] Fig. 3 is another perspective view of the explosion structure of the wafer carrier height detection jig of the embodiment of the utility model.

[0019] Explanation of Reference Numerals:

[0020] 1, base; 11, mounting groove; 2, test rod; 21, T-shaped groove; 22, guide rail; 23, through hole; 24, mounting block; 3, test block; 31, slider; 32, limiting block. DETAILED DESCRIPTION

[0021] In order to make the above purpose, features and advantages of the utility model more obvious and easy to understand, the specific implementation of the utility model is described in detail below. In the following description, a lot of specific details are set forth in order to fully understand the utility model. However, the utility model can be implemented in many other ways different from the description, and those skilled in the art can make similar improvements without departing from the connotation of the utility model, so the utility model is not limited by the specific embodiments disclosed below.

[0022] Referring to Figs. 1-3 A wafer carrier height detection jig, comprising: a base 1, a test rod 2 and a test block 3; the base 1 is connected with the test rod 2, used for placing a wafer carrier to be tested; the test rod 2 is connected with the test block 3, used for setting a height range of the test block 3; the test block 3 is used for detecting whether the height of the wafer carrier to be tested is within the height range; and the height range is a qualified height range of the wafer carrier to be tested.

[0023] The test rod 2 comprises: a T-shaped groove 21 and a guide rail 22; the guide rail 22 is arranged in the T-shaped groove 21; and the test block 3 is arranged on the T-shaped groove 21 and can slide on the guide rail 22. Further, the guide rail 22 is fixed in the T-shaped groove 21 by bolts or screws.

[0024] The test block 3 comprises: a sliding block 31 and a limiting block 32; the sliding block 31 is connected with the limiting block 32; the sliding block 31 is arranged between the T-shaped groove 21 and the guide rail 22 and can slide between the T-shaped groove 21 and the guide rail 22 to set the height of the test block 3; and the limiting block 32 is used for detecting whether the height of the wafer carrier to be tested is within the height range.

[0025] The test rod 2 further comprises: a through hole 23; the through hole 23 is arranged in the T-shaped groove 21; the sliding block 31 is fixed on the through hole 23 by screws or bolts; and after the sliding block 31 slides to a set height on the guide rail 22, the sliding block 31 is fixed on the through hole 23, so as to set the height range of the test block 3. Further, the through hole 23 is a waist-shaped hole.

[0026] The test rod 2 further comprises: a mounting block 24; and the test rod 2 is mounted on the base 1 through the mounting block 24.

[0027] The base 1 comprises: a mounting groove 11; and the mounting block 24 is mounted in the mounting groove 11. Further, the mounting block 24 is mounted in the mounting groove 11 by screws or bolts.

[0028] Further, the number of the test rod 2 and the test block 3 can be set according to the height accuracy requirement of the wafer carrier and the flatness accuracy of the test block 3. In the embodiment, the number of the test rod 2 is 2, and the number of the test block 3 is also 2.

[0029] The height range includes a maximum qualified height and a minimum qualified height. When the slider 31 slides to the maximum qualified height of the wafer carrier, the wafer carrier to be tested can be placed between the limiting block 32 and the base 1; at the same time, when the slider 31 slides to the minimum qualified height of the wafer carrier, the wafer carrier to be tested cannot be placed between the limiting block 32 and the base 1, and the wafer carrier to be tested is qualified in height; otherwise, the wafer carrier to be tested is unqualified in height. In an embodiment, two wafer carrier height detection jigs are used for detection, wherein the test block 3 of the first wafer carrier height detection jig is set to the maximum qualified height, and the test block 3 of the second wafer carrier height detection jig is set to the minimum qualified height. In an embodiment, the test blocks 3 of the two wafer carrier height detection jigs are set to the maximum qualified height and the minimum qualified height respectively for wafer carrier height detection. In another embodiment, the test block 3 of the wafer carrier height detection jig is set to the maximum qualified height and the minimum qualified height respectively for wafer carrier height detection.

[0030] The technical features of the above embodiments can be combined in any manner. To make the description concise, all possible combinations of the technical features in the above embodiments are not described, but as long as the combinations of the technical features do not contradict, they should be considered within the scope of the present disclosure.

[0031] The above embodiments only express several implementation manners of the present application, and the description is relatively specific and detailed, but it should not be understood as a limitation on the scope of the present application. It should be pointed out that for ordinary skilled in the art, without departing from the concept of the present application, a number of modifications and improvements can be made, which are all within the protection scope of the present application. Therefore, the protection scope of the present application should be subject to the appended claims.

Claims

1. A wafer carrier height detection jig, characterized by, The application relates to a wafer carrier height testing device. The device comprises a base (1), a testing rod (2) and a testing block (3); the base (1) is connected with the testing rod (2) and used for placing a wafer carrier to be tested; the testing rod (2) is connected with the testing block (3) and used for setting the height range of the testing block (3); the testing block (3) is used for detecting whether the height of the wafer carrier to be tested is within the height range; and the height range is the qualified height range of the wafer carrier to be tested.

2. The wafer carrier height inspection tool of claim 1, wherein The testing rod (2) comprises a T-shaped groove (21) and a guide rail (22); the guide rail (22) is arranged in the T-shaped groove (21); and the testing block (3) is arranged on the T-shaped groove (21) and can slide on the guide rail (22).

3. The wafer carrier height detection tool of claim 2, wherein, The testing block (3) comprises a sliding block (31) and a limiting block (32); the sliding block (31) is connected with the limiting block (32); the sliding block (31) is arranged between the T-shaped groove (21) and the guide rail (22) and can slide between the T-shaped groove (21) and the guide rail (22) to set the height of the testing block (3); and the limiting block (32) is used for detecting whether the height of the wafer carrier to be tested is within the height range.

4. The wafer carrier height detection tool of claim 3, wherein, The testing rod (2) further comprises a through hole (23); the through hole (23) is arranged in the T-shaped groove (21); and the sliding block (31) is fixed on the through hole (23).

5. The wafer carrier height detection tool of claim 4, wherein, The through hole (23) is a waist-shaped hole.

6. The wafer carrier height detection tool of any of claims 1-5, wherein, The testing rod (2) further comprises a mounting block (24); and the testing rod (2) is mounted on the base (1) through the mounting block (24).

7. The wafer carrier height detection tool of claim 6, wherein, The base (1) comprises a mounting groove (11); and the mounting block (24) is mounted in the mounting groove (11).

8. The wafer carrier height detection tool of claim 7, wherein, The number of the testing rod (2) and the number of the testing block (3) are both two.

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