Glass photomask cleaning device with anti-static function

Abstract

The glass photomask cleaning device with the anti-static function comprises a cleaning box, a circulation cleaning mechanism, a placement adjusting mechanism and a fixing auxiliary mechanism, and the circulation cleaning mechanism comprises a water pumping pipe, a filtering box, a water pumping pump, a connecting pipe and a spray head. The placement adjusting mechanism comprises a placement plate, a longitudinal plate, an adjusting hole, a mounting clamp, a clamping pipe, a clamping rod, a rotating disc and an embedded plate, through cooperation of a water pumping pipe, a filter box, a water pump and a spray head, cleaning liquid can circularly flow in the cleaning box, the glass photomask is repeatedly cleaned, the cleaning effect is improved, the cleaning time is shortened, the placement plate can longitudinally slide in the cleaning box, and the cleaning efficiency is improved. And the clamping rods and the adjusting holes are fixed, so that the placement plate can be adjusted to a proper position according to needs, and the cleaning requirements of photomasks of different sizes are met.

Description

Technical Field

[0001] This utility model relates to the field of cleaning technology, and more specifically, it relates to a glass cover cleaning device with anti-static function. Background Technology

[0002] In traditional glass mask cleaning equipment, the cleaning solution is often discharged directly after use, which not only wastes resources but also increases the cost of the production process. Especially in the current context of environmental protection and sustainable development, reducing water waste and improving resource recycling rate have become important goals of industrial equipment design. However, the water after cleaning often contains some tiny impurities, dust and oil. If it is reused directly without effective treatment, it may affect the cleaning effect and even cause new pollution on the surface of the mask.

[0003] Existing cleaning placement plate designs are often customized for photomasks of specific sizes. When cleaning photomasks of different models or sizes, the size and shape of the placement plate may not match them, resulting in unsatisfactory cleaning results or even damage to the photomasks or equipment. This is especially true on large production lines where there are a wide variety of photomask models involved. How to achieve rapid adaptation and precise positioning of the placement plate without changing the equipment structure has become an urgent problem to be solved. Utility Model Content

[0004] (a) Technical problems to be solved

[0005] In view of the problems existing in the prior art, this utility model provides a glass photomask cleaning device with anti-static function to solve the technical problems mentioned in the background art, such as the difficulty in reusing the cleaning water and the difficulty in adapting the cleaning placement plate to different types of photomasks.

[0006] (II) Technical Solution

[0007] To achieve the above objectives, this utility model provides the following technical solution: a glass cover cleaning device with anti-static function, comprising a cleaning tank, a circulating cleaning mechanism, a placement and adjustment mechanism, and a fixing auxiliary mechanism. The circulating cleaning mechanism includes a water pump pipe, a filter box, a water pump, a connecting pipe, and a nozzle. One end of the water pump pipe extends into the bottom of the cleaning tank, and the other end of the water pump pipe is connected to the water pump. The filter box is mounted on the water pump pipe. The connecting pipe connects the nozzle and the water pump, and the nozzle can be movably spraying into the interior of the cleaning tank. The placement and adjustment mechanism includes a placement plate, a filter box, a water pump, a water pump, a water pump, a water pump, a water pump, a water pump, and a fixing auxiliary mechanism. The system includes a longitudinal plate, adjustment holes, mounting clips, a clamping tube, a clamping rod, a turntable, and an embedded plate. The longitudinal plate is installed on the inner wall of the cleaning tank. The mounting clip is installed on the side of the placement plate. The clamping tube is fixedly installed on the side of the mounting clip. Multiple adjustment holes are provided on the longitudinal plate. The placement plate is slidably installed longitudinally inside the cleaning tank. The clamping rod can pass through different adjustment holes and engage with the clamping tube to fix the placement plate in the required position. The turntable is installed on the side wall of the clamping tube for limiting rotation. The embedded plate is slidably guided in conjunction with the turntable. The rotation of the turntable causes the embedded plate to extend into or away from the clamping rod.

[0008] The present invention is further configured such that the fixing auxiliary mechanism includes a threaded ring, a clamping ring, an outer rotating plate, a rotating block, a tightening block, a tightening spring, and a bottom fixing plate. The outer rotating plate is installed on the outer end of the turntable, the rotating block is installed on the bottom end of the outer rotating plate, the bottom fixing plate is fixedly installed on the outer wall of the clamping tube, the tightening block is slidably installed on the bottom fixing plate, the tightening spring connects adjacent tightening blocks, and the rotating block rotates sequentially between adjacent tightening blocks to make the outer rotating plate rotate stably. The threaded ring is installed on the outer wall of the clamping tube, the clamping ring is installed on the bottom end of the threaded ring, and the clamping ring presses against the top end of the outer rotating plate to fix the outer rotating plate and the turntable in the rotation direction.

[0009] The present invention is further provided that a mounting bracket is installed on the side of the cleaning tank, and the water pump is installed on the mounting bracket. The mounting bracket facilitates the stable installation of the water pump.

[0010] The present invention is further configured such that an electrostatic brush assembly is rotatably mounted on the top end of the cleaning tank, and a drive motor is mounted on one end of the electrostatic brush assembly. The electrostatic brush assembly can effectively remove static electricity during the cleaning process and prevent static electricity accumulation.

[0011] The present invention is further configured such that the placement plate has through holes, and multiple sets of through holes are provided. Water on the placement plate flows to the bottom of the cleaning tank through the through holes. The through holes on the placement plate allow the cleaning liquid to flow to the bottom of the cleaning tank, thereby achieving more efficient liquid circulation and more thorough cleaning, and avoiding water accumulation and pollutant residue.

[0012] The present invention is further configured such that a bottom guide groove is provided on the turntable, a top guide groove is provided inside the side wall of the clamping tube, and the top end and bottom end of the embedded plate are respectively slidably guided in cooperation with the top guide groove and the bottom guide groove.

[0013] The present invention is further configured such that a centripetal rail is installed on the bottom plate, and the tightening block is slidably arranged on the centripetal rail. The centripetal rail provides a stable guide path for the tightening block, ensuring the coordinated work of each component and thus improving the overall operational stability of the device.

[0014] The present invention is further configured such that a frame is installed at the bottom of the cleaning tank, and the frame is in contact with the ground for support. The contact support between the frame at the bottom of the cleaning tank and the ground can stabilize the entire cleaning device.

[0015] (III) Beneficial Effects

[0016] Compared with the prior art, this utility model provides a glass mask cleaning device with anti-static function, which has the following beneficial effects:

[0017] This invention features a circulating cleaning mechanism. Through the cooperation of a water pipe, a filter box, a water pump, and a nozzle, the cleaning fluid can circulate within the cleaning box, repeatedly cleaning the glass cover, improving the cleaning effect, reducing cleaning time, and effectively removing impurities from the cleaning fluid, allowing the cleaning fluid to be reused and reducing resource waste.

[0018] This utility model is equipped with a placement and adjustment mechanism. The placement plate can slide longitudinally inside the cleaning tank and is fixed to the adjustment hole by a snap-fit ​​rod, so that the placement plate can be adjusted to a suitable position as needed to adapt to the cleaning needs of photomasks of different sizes. Through the cooperation of the adjustment hole and the snap-fit ​​rod, it is ensured that the placement plate is stable and does not shift after adjustment, thus ensuring the stability of the photomask during the cleaning process.

[0019] This utility model is equipped with a fixing auxiliary mechanism. Through the cooperation of components such as threaded ring, clamping ring and tightening block, it ensures that the outer rotating plate and turntable remain stable during rotation, avoiding the impact of vibration or loosening on the cleaning effect. The rotating block and tightening spring system ensure that the turntable can rotate smoothly and provide continuous and stable power support, thereby improving the cleaning effect. Attached Figure Description

[0020] Figure 1 This is a schematic diagram of the overall structure of the device in the unused state of this utility model;

[0021] Figure 2 This is a schematic diagram of the circulating cleaning mechanism in this utility model;

[0022] Figure 3 This is a structural schematic diagram of the plate fixing method in this utility model;

[0023] Figure 4 This is a structural diagram of the adjustment mechanism and the fixing auxiliary mechanism in this utility model;

[0024] Figure 5 This is a schematic diagram of the internal structure of the adjustment mechanism and the fixing auxiliary mechanism in this utility model.

[0025] In the diagram: 1. Cleaning tank; 2. Water suction pipe; 3. Filter box; 4. Water pump; 5. Connecting pipe; 6. Nozzle; 7. Placement plate; 8. Longitudinal plate; 9. Adjustment hole; 10. Mounting clamp; 11. Snap-fit ​​pipe; 12. Snap-fit ​​rod; 13. Turntable; 14. Embedded plate; 15. Threaded ring; 16. Pressure ring; 17. Outer rotating plate; 18. Rotating block; 19. Tightening block; 20. Tightening spring; 21. Bottom fixing plate; 22. Mounting bracket; 23. Electrostatic brush assembly; 24. Drive motor; 25. Through hole; 26. Bottom guide groove; 27. Top guide groove; 28. Centripetal rail; 29. ​​Frame. Detailed Implementation

[0026] It should be noted that, unless otherwise specified, the embodiments and features described in this application can be combined with each other. The present invention will now be described in detail with reference to the accompanying drawings and embodiments.

[0027] It should be noted that, unless otherwise specified, all technical and scientific terms used in this application have the same meaning as commonly understood by one of ordinary skill in the art to which this application pertains.

[0028] In this utility model, unless otherwise stated, the orientations used, such as "up" and "down", usually refer to the direction shown in the accompanying drawings, or to the vertical, perpendicular, or gravitational direction; similarly, for ease of understanding and description, "left" and "right" usually refer to the left and right shown in the accompanying drawings; "inner" and "outer" refer to the inner and outer contours of each component itself, but the above directional terms are not used to limit this utility model.

[0029] Please see Figures 1-5A glass cover cleaning device with anti-static function includes a cleaning tank 1, a circulating cleaning mechanism, a placement and adjustment mechanism, and a fixing auxiliary mechanism. The circulating cleaning mechanism includes a water pump pipe 2, a filter box 3, a water pump 4, a connecting pipe 5, and a nozzle 6. One end of the water pump pipe 2 extends into the bottom of the cleaning tank 1, and the other end of the water pump pipe 2 is connected to the water pump 4. The filter box 3 is mounted on the water pump pipe 2. The connecting pipe 5 connects the nozzle 6 and the water pump 4. The nozzle 6 can be movably spraying into the interior of the cleaning tank 1. The placement and adjustment mechanism includes a placement plate 7, a longitudinal plate 8, an adjustment hole 9, a mounting clip 10, a clamping pipe 11, and a clamping rod 1. 2. Turntable 13 and embedded plate 14, longitudinal plate 8 are installed on the inner wall of cleaning tank 1, mounting clip 10 is installed on the side of placement plate 7, clamping tube 11 is fixedly installed on the side of mounting clip 10, multiple sets of adjustment holes 9 are set on longitudinal plate 8, placement plate 7 is longitudinally slidably installed inside cleaning tank 1, clamping rod 12 can pass through different adjustment holes 9 and cooperate with clamping tube 11 to fix placement plate 7 in the required position, turntable 13 is limited to rotate and installed on the side wall of clamping tube 11, embedded plate 14 is slidably guided with turntable 13, the rotation of turntable 13 drives embedded plate 14 to extend into or away from clamping rod 12.

[0030] In this embodiment, when the water pump 4 is started, water from the bottom of the cleaning tank 1 is drawn up through the water pipe 2, filtered through the filter box 3, and then enters the water pump 4. The water pump 4 pressurizes the water and delivers it to the nozzle 6 through the connecting pipe 5. The nozzle 6 can be movably sprayed into the interior of the cleaning tank 1, achieving all-round cleaning of the glass mask placed on the placement plate 7. After rinsing the glass mask, the sprayed water flows back to the bottom of the cleaning tank 1 through multiple sets of through holes 25 on the placement plate 7, forming a complete water circulation system. This not only saves water resources, but also ensures the quality of the cleaning water through the filtration effect of the filter box 3. The increased cleanliness improves the cleaning effect. To adjust the height of the placement plate 7, first rotate the turntable 13. The rotation of the turntable 13 moves the embedded plate 14 away from the locking rod 12, releasing the locking rod 12 from the locking tube 11. Then, the placement plate 7 can be moved up and down to adjust to a suitable height. After adjustment, pass the locking rod 12 through the corresponding height adjustment hole 9, and rotate the turntable 13 again to make the embedded plate 14 extend into the locking rod 12, locking the position of the placement plate 7. This makes the height adjustment of the placement plate 7 simple and flexible, adaptable to glass covers of different sizes, and improves the applicability and practicality of the cleaning device.

[0031] The fixing auxiliary mechanism includes a threaded ring 15, a clamping ring 16, an outer rotating plate 17, a rotating block 18, a tightening block 19, a tightening spring 20, and a bottom fixing plate 21. The outer rotating plate 17 is installed on the outer end of the turntable 13, the rotating block 18 is installed on the bottom end of the outer rotating plate 17, the bottom fixing plate 21 is fixedly installed on the outer wall of the clamping tube 11, the tightening block 19 is slidably installed on the bottom fixing plate 21, the tightening spring 20 connects adjacent tightening blocks 19, and the rotating block 18 rotates sequentially between adjacent tightening blocks 19 to make the outer rotating plate 17 rotate stably. The threaded ring 15 is installed on the outer wall of the clamping tube 11, the clamping ring 16 is installed on the bottom end of the threaded ring 15, and the clamping ring 16 presses against the top end of the outer rotating plate 17 to fix the outer rotating plate 17 and the turntable 13 in the rotation direction.

[0032] In this embodiment, the tensioning spring 20 connects adjacent tensioning blocks 19, so that the tensioning blocks 19 maintain inward tension under the action of the tensioning spring 20. The rotating block 18 is designed to rotate sequentially between adjacent tensioning blocks 19. When the rotating block 18 rotates between two tensioning blocks 19, it will slightly push the tensioning blocks 19 apart, and the tensioning spring 20 will be stretched. When the rotating block 18 is fully inserted into the space between the two tensioning blocks 19, the elastic force of the tensioning spring 20 will partially close the tensioning blocks 19, forming a slight clamp on the rotating block 18, so that the outer rotating plate 17 can rotate stably and stop at a specific position, so that the outer rotating plate 17 and the turntable 13 are fixed in the rotation direction, preventing accidental rotation from causing the height of the placement plate 7 to change.

[0033] Please see Figures 1-5 As a supplementary embodiment of a glass cover cleaning device with anti-static function, which includes a circulating cleaning mechanism, a placement and adjustment mechanism, and a fixed auxiliary mechanism: A mounting frame 22 is installed on the side of the cleaning tank 1, and a water pump 4 is installed on the mounting frame 22. An electrostatic brush assembly 23 is rotatably supported at the top end of the cleaning tank 1, and a drive motor 24 is installed at one end of the electrostatic brush assembly 23. A through hole 25 is opened on the placement plate 7, and multiple sets of through holes 25 are provided. Water on the placement plate 7 flows to the bottom of the cleaning tank 1 through the through holes 25. A bottom guide groove 26 is opened on the turntable 13. A top guide groove 27 is opened inside the side wall of the clamping pipe 11. The top and bottom ends of the embedded plate 14 are respectively slidably guided with the top guide groove 27 and the bottom guide groove 26. A centripetal rail 28 is installed on the bottom fixed plate 21, and a tightening block 19 is slidably set on the centripetal rail 28. A frame 29 is installed at the bottom end of the cleaning tank 1, and the frame 29 is supported in contact with the ground.

[0034] More specifically, the glass cover is placed on the placement plate 7, and its height is adjusted to be in the optimal cleaning area of ​​the nozzle 6. The placement plate 7 is stably locked using a snap-fit ​​mechanism and a fixing auxiliary mechanism to ensure that it does not shift during operation. The circulation cleaning mechanism is started, the water pump 4 works, and the nozzle 6 sprays cleaning fluid to cover the glass surface. The cleaning fluid flows back to the bottom of the cleaning tank 1 through the through hole 25 and enters the next cycle. The top of the cleaning tank 1 is equipped with an electrostatic brush assembly 23, which is driven by a drive motor 24 to gently brush the glass surface to remove static electricity and prevent dust from adsorbing. After multiple rounds of cleaning, the water pump 4 and the motor are turned off, the glass cover is removed, and the device can be reused for the next round of cleaning. The bottom of the cleaning tank 1 is equipped with a frame 29 that contacts the ground to ensure that the whole machine operates stably without shaking.

[0035] In summary, during the use or operation of the overall equipment: when the circulating cleaning mechanism is running, when the water pump 4 is started, the water at the bottom of the cleaning tank 1 is drawn up through the water pump pipe 2, filtered through the filter box 3, and then enters the water pump 4. The water pump 4 pressurizes the water and delivers it to the nozzle 6 through the connecting pipe 5. The nozzle 6 can be movably sprayed into the interior of the cleaning tank 1, achieving all-round cleaning of the glass cover placed on the placement plate 7. After rinsing the glass cover, the sprayed water flows back to the bottom of the cleaning tank 1 through the multiple sets of through holes 25 opened on the placement plate 7, forming a complete water circulation system. This not only saves water resources, but also ensures the cleanliness of the cleaning water through the filtration effect of the filter box 3, thus improving the cleaning effect.

[0036] When the adjustment mechanism needs to be in place, adjust the height of the placement plate 7. First, rotate the turntable 13. The rotation of the turntable 13 will move the embedded plate 14 away from the locking rod 12, releasing the locking rod 12 from the locking tube 11. Then, the placement plate 7 can be moved up and down to adjust to a suitable height. After adjustment, pass the locking rod 12 through the adjustment hole 9 of the corresponding height, and rotate the turntable 13 again to make the embedded plate 14 extend into the locking rod 12, locking the position of the placement plate 7. This makes the height adjustment of the placement plate 7 simple and flexible, and can adapt to glass covers of different sizes, improving the applicability and practicality of the cleaning device.

[0037] When the auxiliary mechanism needs to be fixed in operation, the tensioning spring 20 connects the adjacent tensioning blocks 19, so that the tensioning blocks 19 maintain inward tension under the action of the tensioning spring 20. The rotating block 18 is designed to rotate sequentially between the adjacent tensioning blocks 19. When the rotating block 18 rotates between the two tensioning blocks 19, it will slightly push the tensioning blocks 19 apart, and the tensioning spring 20 will be stretched. When the rotating block 18 is fully inserted into the space between the two tensioning blocks 19, the elastic force of the tensioning spring 20 will partially close the tensioning blocks 19, forming a slight clamp on the rotating block 18, so that the outer rotating plate 17 can rotate stably and stop at a specific position, so that the outer rotating plate 17 and the turntable 13 are fixed in the rotation direction, preventing accidental rotation from causing the height of the placement plate 7 to change.

[0038] Place the glass cover on the placement plate 7 and adjust its height to position it within the optimal cleaning area of ​​the nozzle 6. Use the snap-fit ​​mechanism and fixing auxiliary mechanism to stably lock the placement plate 7 to ensure that it does not shift during operation. Start the circulation cleaning mechanism, and the water pump 4 will work. The nozzle 6 will spray cleaning fluid to cover the glass surface. The cleaning fluid will flow back to the bottom of the cleaning tank 1 through the through hole 25 and enter the next cycle. The top of the cleaning tank 1 is equipped with an electrostatic brush assembly 23, which is driven by the drive motor 24. It will lightly brush the glass surface to remove static electricity and prevent dust from adsorbing. After multiple rounds of cleaning, turn off the water pump 4 and the motor, and remove the glass cover. The device can be reused for the next round of cleaning. The bottom of the cleaning tank 1 is equipped with a frame 29 that is in contact with the ground to ensure that the whole machine operates stably without shaking.

[0039] Of all the solutions mentioned above, those involving the connection between two components can be selected according to the actual situation, such as welding, bolt and nut connection, bolt or screw connection, or other known connection methods, which will not be elaborated here. For all the fixed connections mentioned above, welding is preferred. Although embodiments of this utility model have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and variations can be made to these embodiments without departing from the principles and spirit of this utility model. The scope of this utility model is defined by the appended claims and their equivalents.

Claims

1. A glass cover cleaning device with anti-static function, comprising a cleaning tank (1), a circulating cleaning mechanism, a placement and adjustment mechanism, and a fixing auxiliary mechanism, characterized in that: The circulating cleaning mechanism includes a water pump (2), a filter box (3), a water pump (4), a connecting pipe (5), and a nozzle (6). One end of the water pump (2) extends into the bottom of the cleaning box (1), and the other end of the water pump (2) is connected to the water pump (4). The filter box (3) is mounted on the water pump (2). The connecting pipe (5) connects the nozzle (6) and the water pump (4). The placement and adjustment mechanism includes a placement plate (7), a longitudinal plate (8), an adjustment hole (9), a mounting clip (10), and a clamping pipe (11). The clamping rod (12), turntable (13) and embedding plate (14) are installed on the inner wall of the cleaning tank (1), the mounting clip (10) is installed on the side of the placement plate (7), the clamping tube (11) is fixedly installed on the side of the mounting clip (10), multiple sets of adjustment holes (9) are set on the longitudinal plate (8), the placement plate (7) is longitudinally slidably installed inside the cleaning tank (1), the turntable (13) is limited to rotate and installed on the side wall of the clamping tube (11), and the embedding plate (14) is slidably guided in cooperation with the turntable (13).

2. The glass mask cleaning device with antistatic function according to claim 1, characterized in that: The fixed auxiliary mechanism includes a threaded ring (15), a clamping ring (16), an outer rotating plate (17), a rotating block (18), a tightening block (19), a tightening spring (20), and a bottom fixing plate (21). The outer rotating plate (17) is installed on the outer end of the turntable (13). The rotating block (18) is installed on the bottom end of the outer rotating plate (17). The bottom fixing plate (21) is fixedly installed on the outer wall of the clamping tube (11). The tightening block (19) is slidably installed on the bottom fixing plate (21). The tightening spring (20) connects adjacent tightening blocks (19). The rotating block (18) rotates sequentially between adjacent tightening blocks (19) to make the outer rotating plate (17) rotate stably. The threaded ring (15) is installed on the outer wall of the clamping tube (11). The clamping ring (16) is installed on the bottom end of the threaded ring (15).

3. The glass mask cleaning device with anti-static function according to claim 1, characterized in that: The cleaning tank (1) is provided with a mounting bracket (22) on its side, and the water pump (4) is installed on the mounting bracket (22).

4. A glass mask cleaning device with antistatic function according to claim 1, characterized in that: The top end of the cleaning tank (1) is rotatably supported by an electrostatic brush assembly (23), and a drive motor (24) is installed at one end of the electrostatic brush assembly (23).

5. A glass mask cleaning device with antistatic function according to claim 1, characterized in that: The placement plate (7) has through holes (25), and there are multiple sets of through holes (25). Water on the placement plate (7) flows through the through holes (25) to the bottom of the cleaning tank (1).

6. A glass mask cleaning device with antistatic function according to claim 1, characterized in that: The turntable (13) has a bottom guide groove (26), and the side wall of the clamping pipe (11) has a top guide groove (27). The top and bottom ends of the embedded plate (14) are respectively slidably guided in cooperation with the top guide groove (27) and the bottom guide groove (26).

7. A glass mask cleaning device with antistatic function according to claim 2, characterized in that: The bottom plate (21) is provided with a centripetal rail (28), and the tightening block (19) is set to slide centripetally on the centripetal rail (28).

8. A glass mask cleaning device with antistatic function according to claim 1, characterized in that: The bottom end of the cleaning tank (1) is equipped with a frame (29), and the frame (29) is in contact with the ground for support.

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