Laser device
By combining a laser generator, a laser beam rotation unit, and a telescope lens unit, the problem of uneven laser beam distribution was solved, achieving uniform irradiation of the laser beam on the substrate and improving the quality of the manufacturing process.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-12-11
- Publication Date
- 2026-04-14
AI Technical Summary
In the crystallization process of amorphous silicon layers, existing laser devices have difficulty controlling the dispersion of the laser beam, which results in horizontal lines being observed on the substrate, affecting the quality of the manufacturing process.
It adopts a combined structure of laser generator, laser beam rotation unit and telescope lens unit, and adjusts the direction and size of laser beam through multiple mirrors and lenses to make it rotate and homogenize, forming a suitable beam shape.
This reduces the dispersion of the laser beam on the substrate, avoids the appearance of horizontal lines, and improves the quality of the manufacturing process.
Smart Images
Figure CN224115390U_ABST
Abstract
Description
Technical Field
[0001] This invention relates to laser devices. More specifically, this invention relates to laser devices utilizing excimer laser annealing (ELA). Background Technology
[0002] Methods for crystallizing amorphous silicon layers into polycrystalline silicon layers include excimer laser annealing (ELA).
[0003] In particular, in the manufacturing processes of organic light-emitting display devices, liquid crystal display devices, etc., the excimer laser annealing method, which uses a laser beam to crystallize an amorphous silicon layer into a polycrystalline silicon layer, can be used. Summary of the Invention
[0004] One objective of this invention is to provide a laser device with improved quality.
[0005] However, the purpose of this utility model is not limited to the above-mentioned purpose, but can be extended in various ways without departing from the idea and field of this utility model.
[0006] To achieve the aforementioned objective of this invention, a laser device according to an embodiment of this invention may include a laser generator, a laser beam rotating section, and a telescopic lens section. The laser generator is used to generate a laser beam traveling in a first direction. The laser beam rotating section includes a first-1 mirror that reflects the laser beam generated in the laser generator in a second direction intersecting the first direction; a first-2 mirror spaced from the first-1 mirror and reflecting the laser beam reflected by the first-1 mirror; a first-3 mirror spaced from the first-2 mirror and reflecting the laser beam reflected by the first-2 mirror; and a first-4 mirror spaced from the first-3 mirror and reflecting the laser beam reflected by the first-3 mirror in a third upward direction perpendicular to the plane formed by the first and second directions. The telescopic lens section is used to adjust the size of the laser beam reflected by the first-4 mirrors.
[0007] In one embodiment, the laser beam rotating part can rotate the laser beam generated in the laser generator.
[0008] In one embodiment, the laser beam rotating part can rotate the laser beam generated in the laser generator by about 90 degrees.
[0009] In one embodiment, the laser beam reflected by the first to fourth mirrors may have an elliptical shape in cross-section, including the major axis and the minor axis.
[0010] In one embodiment, the telescope lens portion may increase the size of the minor axis of the laser beam reflected by the first to fourth mirrors.
[0011] In one embodiment, the telescope lens portion can reduce the size of the long axis of the laser beam reflected by the first to fourth mirrors.
[0012] In one embodiment, the telescope lens section may include a first lens and a second lens that increase the size of the minor axis of the laser beam reflected by the first-fourth mirrors.
[0013] In one embodiment, the telescope lens section may further include a third lens and a fourth lens that reduce the size of the major axis of the laser beam reflected by the first-fourth mirrors.
[0014] In one embodiment, the first lens may be arranged adjacent to the third lens, and the second lens may be arranged adjacent to the fourth lens.
[0015] In one embodiment, the third lens may be arranged between the first lens and the fourth lens, and the fourth lens may be arranged between the second lens and the third lens.
[0016] In one embodiment, the laser beam rotating part may further include a second mirror that reflects the laser beam reflected by the first-fourth mirrors in the first direction.
[0017] In one embodiment, the laser beam rotating part may further include a third mirror that reflects the laser beam reflected by the second mirror in the second direction.
[0018] In one embodiment, the laser beam rotating part may further include a fourth mirror that reflects the laser beam reflected by the third mirror in the first direction.
[0019] To achieve the aforementioned objective of this invention, a laser device according to another embodiment of this invention may include a laser generator, a laser beam rotating section, and a telescopic lens section. The laser generator generates a laser beam traveling in a first direction. The laser beam rotating section includes a first mirror reflecting the laser beam generated in the laser generator in a second direction intersecting the first direction; a second-first mirror reflecting the laser beam reflected by the first mirror in a third direction intersecting the plane formed by the first and second directions; a second-second mirror spaced from the second-first mirror and reflecting the laser beam reflected by the second-first mirror; a second-third mirror spaced from the second-second mirror and reflecting the laser beam reflected by the second-second mirror; and a second-fourth mirror spaced from the second-third mirror and reflecting the laser beam reflected by the second-third mirror in the first direction. The telescopic lens section is used to adjust the size of the laser beam reflected by the second-fourth mirror.
[0020] In one embodiment, the laser beam rotating part can rotate the laser beam generated in the laser generator.
[0021] In one embodiment, the laser beam rotating part can rotate the laser beam generated in the laser generator by about 90 degrees.
[0022] In one embodiment, the laser beam reflected by the second-fourth mirrors may have an elliptical shape in cross-section, including the major axis and the minor axis.
[0023] In one embodiment, the telescope lens portion may increase the size of the minor axis of the laser beam reflected by the second-fourth mirrors.
[0024] In one embodiment, the telescope lens portion can reduce the size of the long axis of the laser beam reflected by the second-fourth mirrors.
[0025] In one embodiment, the telescope lens section may include a first lens and a second lens that reduce the size of the long axis of the laser beam reflected by the second-fourth mirrors.
[0026] In one embodiment, the telescope lens section may include a third lens and a fourth lens that increase the size of the minor axis of the laser beam reflected by the second-fourth mirrors.
[0027] In one embodiment, the first lens may be arranged adjacent to the third lens, and the second lens may be arranged adjacent to the fourth lens.
[0028] (Effects of the utility model)
[0029] The laser device according to an embodiment of the present invention may include a laser generator for generating a laser beam, a laser beam rotating part, and a telescopic lens part. The laser beam rotating part may include a first-1 mirror reflecting the laser beam generated by the laser generator in a second direction intersecting the first direction; a first-2 mirror spaced from the first-1 mirror and reflecting the laser beam reflected by the first-1 mirror; a first-3 mirror spaced from the first-2 mirror and reflecting the laser beam reflected by the first-2 mirror; and a first-4 mirror spaced from the first-3 mirror and reflecting the laser beam reflected by the first-3 mirror in a third direction perpendicular to the plane formed by the first and second directions. The telescopic lens part can adjust the size of the laser beam reflected by the first-4 mirrors.
[0030] This reduces the dispersion of the laser beam in the linear pattern irradiating the substrate. Consequently, horizontal lines can be made unobservable on the substrate.
[0031] However, the effects of this utility model are not limited to those described above, but can be extended in various ways without departing from the spirit and field of this utility model. Attached Figure Description
[0032] Figure 1 This is a block diagram illustrating a laser device according to an embodiment of the present invention.
[0033] Figure 2 It is shown Figure 1 A perspective view of the laser device.
[0034] Figure 3 It is shown Figure 1 A cross-sectional view of the laser generator included in the laser device.
[0035] Figure 4 This shows that the implementation has Figure 1 An example of a laser device.
[0036] Figure 5 It is shown Figure 4 A perspective view of the first mirror of the first laser beam rotating section included in the laser device.
[0037] Figure 6 It is shown Figure 4 A front view of the first telescope lens section included in the laser device.
[0038] Figure 7(a) is a diagram showing the cross-sectional shape of the first-1 laser beam emitted from the first laser generator, (b) is a diagram showing the cross-sectional shape of the second-1 laser beam emitted from the first laser beam rotation section, and (c) is a diagram showing the cross-sectional shape of the third-1 laser beam emitted from the first telescope lens section.
[0039] Figure 8 (a) is a graph showing the degree of dispersion of the fourth laser beam in the moving direction of the laser device when the fourth laser beam is irradiated onto the substrate using the laser device according to the comparative example, and (b) is a graph showing the degree of dispersion of the fourth laser beam in its extending direction when the fourth laser beam is irradiated onto the substrate using the laser device according to the comparative example.
[0040] Figure 9 (a) is a graph showing the degree of dispersion of the fourth laser beam in the moving direction of the laser device when the fourth laser beam is irradiated onto the substrate using the laser device according to an embodiment of the present invention, and (b) is a graph showing the degree of dispersion of the fourth laser beam in its extending direction when the fourth laser beam is irradiated onto the substrate using the laser device according to an embodiment of the present invention.
[0041] Figure 10 This is a perspective view showing the second mirror of the first laser beam rotating part included in a laser device according to another embodiment of the present invention.
[0042] Explanation of reference numerals in the attached figures
[0043] 1000: Laser device; 100: Laser generator;
[0044] 110: First laser generator; 120: Second laser generator
[0045] 200: Laser beam rotating part; 210: First laser beam rotating part
[0046] 220: Second laser beam rotating part; 300: Telescope lens part
[0047] 310: First telephoto lens section; 320: Second telephoto lens section
[0048] 400: Homogenization Department ST: Workbench
[0049] SUB: Substrate 101: Rotary Fan
[0050] 102: First electrode; 103: Second electrode
[0051] L: Major axis direction; S: Minor axis direction
[0052] 211: First Frame 211A: Frame 1-1
[0053] 211B: Mirrors 1-2 211C: Mirrors 1-3
[0054] 211D: Frames 1-4; 212: Frame 2
[0055] 213: Third Frame 214: Fourth Frame
[0056] 311: First lens; 312: Second lens
[0057] 313: Third lens; 314: Fourth lens
[0058] M1: First reflecting mirror; M2: Second reflecting mirror
[0059] M3: Third reflector M4: Fourth reflector
[0060] SP: Beam splitter; LA: First laser beam
[0061] LA1: Laser beam 1-1; LA2: Laser beam 1-2
[0062] LB: Second laser beam; LB1: Second-to-first laser beam
[0063] LB2: Second laser beam; LC: Third laser beam
[0064] LC1: Laser beam 3-1; LC2: Laser beam 3-2
[0065] LD: Fourth laser beam Detailed Implementation
[0066] Hereinafter, embodiments of the present invention will be described in more detail with reference to the accompanying drawings. The same reference numerals will be used for the same constituent elements in the drawings, and repeated descriptions of the same constituent elements will be omitted.
[0067] Figure 1 This is a block diagram illustrating a laser device according to an embodiment of the present invention. Figure 2 It is shown Figure 1 A perspective view of the laser device.
[0068] Reference Figure 1 and Figure 2 According to an embodiment of the present invention, a laser device 1000 may include a laser generator 100, a laser beam rotating part 200, a telescope lens part 300, and a homogenizing part 400.
[0069] Laser generator 100 can generate a first laser beam LA. That is, laser generator 100 can emit a first laser beam LA. In one embodiment, the first laser beam LA can be a gas laser. For example, the first laser beam LA can be an argon (Ar) laser, a krypton (Kr) laser, etc. However, the present invention is not limited to this, and in another embodiment, the first laser beam LA can be a solid-state laser. For example, the first laser beam LA can be a yttrium aluminum garnet (YAG) laser, a YVO4 laser, a YLF laser, a YA103 laser, a Y203 laser, a glass laser, a ruby laser, an alexandrite laser, a titanite sapphire laser, etc.
[0070] The laser beam rotating unit 200 can rotate the first laser beam LA. For example, the laser beam rotating unit 200 can rotate the first laser beam LA by approximately 90 degrees. The laser beam rotating unit 200 can emit a second laser beam LB that rotates the first laser beam LA.
[0071] The telescope lens section 300 can change the size of the second laser beam LB. For example, the telescope lens section 300 can change the size of both the major and minor axes of the second laser beam LB. For example, the second laser beam LB may have an elliptical shape in cross-section including both the major and minor axes; the telescope lens section 300 decreases the size of the major axis of the second laser beam LB and increases the size of the minor axis. The telescope lens section 300 can emit a third laser beam LC that changes the size of both the major and minor axes of the second laser beam LB.
[0072] The homogenization unit 400 can homogenize the third laser beam LC. For example, the homogenization unit 400 may include a homogenization lens, a condenser lens, etc. For example, the homogenization lens may include multiple lenses. The homogenization unit 400 can emit a fourth laser beam LD that homogenizes the third laser beam LC.
[0073] The laser device 1000 can irradiate the substrate SUB with a fourth laser beam LD. For example, the fourth laser beam LD can be in the form of a line beam. That is, the laser device 1000 can irradiate the substrate SUB with a fourth laser beam LD in the form of a line beam.
[0074] The stage ST can support the substrate SUB irradiated by the fourth laser beam LD. In one embodiment, the laser device 1000 can move in a direction perpendicular to the extension direction of the fourth laser beam LD (i.e., the extension direction of the beam). Thus, the laser device 1000 can scan the substrate SUB as a whole. However, the present invention is not limited to this, and in another embodiment, the stage ST can move the substrate SUB in a direction perpendicular to the extension direction of the fourth laser beam LD. Thus, the laser device 1000 can scan the substrate SUB as a whole.
[0075] An amorphous silicon thin film (NCA) can be formed on a substrate SUB. The amorphous silicon thin film NCA can be formed using conventional methods such as sputtering, reduced-pressure CVD, or plasma CVD using silicon or silicon-based materials (e.g., Si). x Ge 1-x Polycrystalline silicon thin films (CA) can be formed by irradiating the amorphous silicon thin film (NCA) with a fourth laser beam (LD) to crystallize the NCA.
[0076] Figure 3 It is shown Figure 1 A cross-sectional view of the laser generator included in the laser device.
[0077] Reference Figure 1 , Figure 2 as well as Figure 3 The laser generator 100 may include a rotating fan 101, a first electrode 102, and a second electrode 103. The rotating fan 101 can supply the gaseous medium (e.g., argon, krypton, etc.) included in the laser generator 100 to the discharge region DA. For example, the rotating fan 101 can supply the gaseous medium to the discharge region DA by rotating about a direction perpendicular to the plane formed by the major axis direction L and the minor axis direction S. For example, the rotating fan 101 can rotate counterclockwise about the direction perpendicular to the plane formed by the major axis direction L and the minor axis direction S. However, the present invention is not limited thereto, and the rotating fan 101 can also rotate clockwise about the direction perpendicular to the plane formed by the major axis direction L and the minor axis direction S.
[0078] The discharge region DA can be defined as the space disposed between the first electrode 102 and the second electrode 103. For example, the first electrode 102 can be a positive electrode and the second electrode 103 can be a negative electrode. However, the present invention is not limited thereto; the first electrode 102 can be a negative electrode and the second electrode 103 can be a positive electrode.
[0079] The first electrode 102 and the second electrode 103 can be spaced apart from each other in the major axis direction L. The minor axis direction S can be defined as the direction perpendicular to the major axis direction L. As mentioned above, the laser generator 100 can generate a first laser beam LA. Furthermore, the first laser beam LA can have an elliptical shape in cross-section, including both the major and minor axes. The major axis of the first laser beam LA can be... Figure 3 The major axis of the first laser beam LA extends along the direction L, and the minor axis of the first laser beam LA can extend along the direction L. Figure 3 It extends along the short axis direction S.
[0080] For example, the gas medium can be supplied to the discharge region DA in the minor axis direction S. Alternatively, the gas medium can be supplied to the discharge region DA in a direction substantially parallel to the minor axis direction S. That is, as the rotating fan 101 rotates counterclockwise, the gas medium can be supplied to the discharge region DA around its periphery. In this case, the direction toward the discharge region DA from its periphery can be the minor axis direction S or substantially parallel to the minor axis direction S.
[0081] Therefore, in the discharge region DA, the magnitude of the swaying of the gas medium in the minor axis direction S can be greater than the magnitude of the swaying in the major axis direction L. Consequently, the dispersion of the first laser beam LA in the minor axis direction S can be greater than the dispersion in the major axis direction L.
[0082] Figure 4 This shows that the implementation has Figure 1 An example of a laser device. Figure 5 It is shown Figure 4 A perspective view of the first mirror of the first laser beam rotating section included in the laser device. Figure 6 It is shown Figure 4 A front view of the first telescope lens section included in the laser device. Figure 7 This is a diagram showing the cross-sectional shape of a laser beam.
[0083] Reference Figure 4 The laser device 1000 may include a first laser generator 110, a second laser generator 120, a first laser beam rotating part 210, a second laser beam rotating part 220, a first telescope lens part 310, a second telescope lens part 320, and a homogenization part 400.
[0084] That is, the laser generator 100 may include a first laser generator 110 and a second laser generator 120. The laser beam rotating part 200 may include a first laser beam rotating part 210 and a second laser beam rotating part 220. The telescope lens part 300 may include a first telescope lens part 310 and a second telescope lens part 320. The first laser beam LA may include a first-1 laser beam LA1 and a first-2 laser beam LA2. The second laser beam LB may include a second-1 laser beam LB1 and a second-2 laser beam LB2. The third laser beam LC may include a third-1 laser beam LC1 and a third-2 laser beam LC2.
[0085] The first laser generator 110 can generate a first-1 laser beam LA1. That is, the first laser generator 110 can emit a first-1 laser beam LA1. For example, the first laser generator 110 can emit the first-1 laser beam LA1 in the first direction DR1.
[0086] In one embodiment, the first-1 laser beam LA1 can be a gas laser. For example, the first-1 laser beam LA1 can be an argon laser, a krypton laser, etc. However, the present invention is not limited to this, and in another embodiment, the first-1 laser beam LA1 can be a solid-state laser. For example, the first-1 laser beam LA1 can be a yttrium aluminum garnet (YAG) laser, a YVO4 laser, a YLF laser, a YA103 laser, a Y203 laser, a glass laser, a ruby laser, an alexandrite laser, a titanite sapphire laser, etc.
[0087] The first laser beam rotating part 210 may include a first mirror 211, a second mirror 212, a third mirror 213, and a fourth mirror 214.
[0088] The first mirror 211 can reflect the first-1 laser beam LA1 generated in the first laser generator 110 onto the third-direction DR3. That is, the first mirror 211 can reflect the first-1 laser beam LA1 traveling in the first direction DR1 onto the third-direction DR3.
[0089] Reference Figure 4 and Figure 5 The first mirror 211 may include mirror 1-1A, mirror 1-2B, mirror 1-3C, and mirror 1-4D.
[0090] In this specification, a first direction DR1 and a second direction DR2 intersecting the first direction DR1 can be defined. For example, the second direction DR2 can be perpendicular to the first direction DR1. However, this invention is not limited to this; the second direction DR2 can form an acute or obtuse angle with the first direction DR1. Furthermore, a third direction DR3 intersecting the plane formed by the first direction DR1 and the second direction DR2 can be defined. For example, the third direction DR3 can be perpendicular to the plane formed by the first direction DR1 and the second direction DR2. However, this invention is not limited to this; the third direction DR3 can form an acute or obtuse angle with the plane formed by the first direction DR1 and the second direction DR2.
[0091] The first-1 mirror 211A can reflect the first-1 laser beam LA1 generated in the first laser generator 110 in the second direction DR2. That is, the first-1 mirror 211A can reflect the first-1 laser beam LA1 traveling in the first direction DR1 in the second direction DR2.
[0092] The first-second mirror 211B can be separated from the first-first mirror 211A on the plane formed by the second direction DR2 and the third direction DR3. For example, the first-second mirror 211B can be separated from the first-first mirror 211A on the second direction DR2. The first-second mirror 211B can reflect the first-first laser beam LA1 reflected by the first-first mirror 211A on the third direction DR3. That is, the first-second mirror 211B can reflect the first-first laser beam LA1 traveling on the second direction DR2 on the third direction DR3.
[0093] Mirror 211C (first-third mirror) can be spaced apart from mirror 211B on the plane formed by the second direction DR2 and the third direction DR3. For example, mirror 211C can be spaced apart from mirror 211B on the third direction DR3. Mirror 211C can reflect the first-first laser beam LA1 reflected by mirror 211B in a direction opposite to the second direction DR2. That is, mirror 211C can reflect the first-first laser beam LA1 traveling on the third direction DR3 in a direction opposite to the second direction DR2.
[0094] Mirrors 1-4, 211D, can be separated from mirror 1-3, 211C, on the plane formed by the second direction DR2 and the third direction DR3. For example, mirror 1-4, 211D, can be separated from mirror 1-3, 211C, in a direction opposite to the second direction DR2. Mirror 1-4, 211D, can reflect the first-1 laser beam LA1 reflected by mirror 1-3, 211C, on the third direction DR3. That is, mirror 1-4, 211D, can reflect the first-1 laser beam LA1 traveling in a direction opposite to the second direction DR2 on the third direction DR3.
[0095] Further reference Figure 7 The cross-sectional shape of the first laser beam LA1 emitted from the first laser generator 110 can be as follows: Figure 7 As shown in part (a). That is, before reaching the first mirror 211, the cross-sectional shape of the first-1 laser beam LA1 can be as follows: Figure 7 As shown in part (a). The first-1 laser beam LA1 emitted from the first laser generator 110 may have an elliptical shape in cross-section. For example, the first-1 laser beam LA1 emitted from the first laser generator 110 may have an elliptical shape having a major axis extending in the major axis direction L and a minor axis extending in the minor axis direction S.
[0096] The first mirror 211 can rotate the first-1 laser beam LA1. For example, the first mirror 211 can rotate the first-1 laser beam LA1 by approximately 90 degrees. The cross-sectional shape of the first-1 laser beam LA1 rotated by the first mirror 211 can be as follows: Figure 7 As shown in part (b), the first-1 laser beam LA1 rotated by the first mirror 211 can have an elliptical shape in cross-section. For example, the first-1 laser beam LA1 rotated by the first mirror 211 can have an elliptical shape having a major axis extending in the minor axis direction S and a minor axis extending in the major axis direction L.
[0097] That is, as the first mirror 211 includes the first-1 mirror 211A, the first-2 mirror 211B, the first-3 mirror 211C, and the first-4 mirror 211D, the travel direction of the first-1 laser beam LA1 can be changed from the first direction DR1 to the third direction DR3. Furthermore, as the first mirror 211 includes the first-1 mirror 211A, the first-2 mirror 211B, the first-3 mirror 211C, and the first-4 mirror 211D, the first-1 laser beam LA1 can be changed from an elliptical shape having a major axis extending in the major axis direction L and a minor axis extending in the minor axis direction S in its cross-section to an elliptical shape having a minor axis extending in the major axis direction L and a major axis extending in the minor axis direction S.
[0098] As previously stated, the dispersion of the first laser beam LA emitted from the laser generator 100 in the minor axis direction S can be greater than its dispersion in the major axis direction L. For example, the dispersion of the first-1 laser beam LA1 emitted from the first laser generator 110 in the minor axis direction S can be greater than its dispersion in the major axis direction L. As the first mirror 211 rotates the first-1 laser beam LA1, the dispersion of the first-1 laser beam LA1 in the minor axis direction S can become smaller than its dispersion in the major axis direction L.
[0099] The second mirror 212 can reflect the first-1 laser beam LA1 reflected by the first mirror 211 in the first direction DR1. That is, the second mirror 212 can reflect the first-1 laser beam LA1 traveling in the third direction DR3 in the first direction DR1.
[0100] The third mirror 213 can reflect the first-1 laser beam LA1 reflected by the second mirror 212 onto the third-direction DR3. That is, the third mirror 213 can reflect the first-1 laser beam LA1 traveling in the first direction DR1 onto the third-direction DR3.
[0101] The fourth mirror 214 can reflect the first-1 laser beam LA1 reflected by the third mirror 213 in the first direction DR1. That is, the fourth mirror 214 can reflect the first-1 laser beam LA1 traveling in the third direction DR3 in the first direction DR1.
[0102] For example, the second mirror 212 may be spaced apart from the first mirror 211 in the third direction DR3. For example, the third mirror 213 may be spaced apart from the second mirror 212 in the first direction DR1. For example, the fourth mirror 214 may be spaced apart from the third mirror 213 in the third direction DR3.
[0103] In one embodiment, the first mirror 211 can be configured as follows: Figure 5 As shown. That is, the first mirror 211 may include multiple mirrors for changing the travel direction of the first-1 laser beam LA1 from the first direction DR1 to the third direction DR3 and rotating the first-1 laser beam LA1. That is, the first mirror 211 may include the first-1 mirror 211A, the first-2 mirror 211B, the first-3 mirror 211C, and the first-4 mirror 211D. In this case, each of the second mirror 212, the third mirror 213, and the fourth mirror 214 may only change the travel direction of the first-1 laser beam LA1 without rotating the first-1 laser beam LA1.
[0104] In one embodiment, the first laser beam rotating part 210 may include four mirrors. For example, the first laser beam rotating part 210 may include a first mirror 211, a second mirror 212, a third mirror 213, and a fourth mirror 214. However, the present invention is not limited thereto, and the number of mirrors constituting the first laser beam rotating part 210 may be varied.
[0105] Finally, the first laser beam rotating section 210 can emit a second laser beam LB1 that rotates the first-1 laser beam LA1. The cross-sectional shape of the second-1 laser beam LB1 can be as follows: Figure 7 As shown in part (b).
[0106] Reference Figure 4 , Figure 6 as well as Figure 7The first telescope lens section 310 may include a first lens 311, a second lens 312, a third lens 313, and a fourth lens 314.
[0107] As mentioned earlier, the cross-sectional shape of the second-first laser beam LB1 can be as follows: Figure 7 As shown in part (b), the second-first laser beam LB1 can have an elliptical shape in cross-section, having a major axis extending in the minor axis direction S and a minor axis extending in the major axis direction L.
[0108] The first telescope lens section 310 can adjust the size of the second-first laser beam LB1. For example, the first telescope lens section 310 can increase the size of the minor axis of the second-first laser beam LB1. Furthermore, the first telescope lens section 310 can decrease the size of the major axis of the second-first laser beam LB1.
[0109] That is, the first telescopic lens section 310 can emit a third-first laser beam LC1 that transforms the size of the major axis and the size of the minor axis of the second-first laser beam LB1. The cross-sectional shape of the third-first laser beam LC1 can be as follows: Figure 7 As shown in section (c). The cross-sectional shape of the third-first laser beam LC1 can be the same as the cross-sectional shape of the first-first laser beam LA1 emitted from the first laser generator 110 (i.e., Figure 7 The (a) part is substantially the same. However, the dispersion of the first-1 laser beam LA1 emitted from the first laser generator 110 in the short axis direction S can be greater than the dispersion in the long axis direction L, and the dispersion of the third-1 laser beam LC1 in the short axis direction S can be less than the dispersion in the long axis direction L.
[0110] For example, the first lens 311 and the second lens 312 can increase the size of the minor axis of the second-first laser beam LB1. The first lens 311 and the second lens 312 can be constructed from any structural element used to increase the size of the minor axis of the second-first laser beam LB1. For example, the first lens 311 and the second lens 312 could be a Keplerian telescope. For example, the first lens 311 and the second lens 312 could be a Galilean telescope.
[0111] For example, the third lens 313 and the fourth lens 314 can reduce the size of the major axis of the second-first laser beam LB1. The third lens 313 and the fourth lens 314 can be constructed from any structural element used to reduce the size of the major axis of the second-first laser beam LB1. For example, the third lens 313 and the fourth lens 314 could be a Keplerian telescope. For example, the third lens 313 and the fourth lens 314 could be a Galilean telescope.
[0112] The first lens 311 can be arranged adjacent to the third lens 313. For example, the first lens 311 can be adjacent to the third lens 313 in a direction opposite to the first direction DR1. The second lens 312 can be arranged adjacent to the fourth lens 314. For example, the second lens 312 can be adjacent to the fourth lens 314 in the first direction DR1. The fourth lens 314 can be spaced apart from the third lens 313 in the first direction DR1. That is, the third lens 313 can be arranged between the first lens 311 and the fourth lens 314, and the fourth lens 314 can be arranged between the second lens 312 and the third lens 313.
[0113] but, Figure 6 An exemplary arrangement of the first telephoto lens section 310 is shown, and the positions of the first lens 311, the second lens 312, the third lens 313, and the fourth lens 314 can be changed.
[0114] Reference Figure 4 The second laser generator 120 can emit a first-second laser beam LA2. Furthermore, the second laser beam rotating unit 220 can emit a second-second laser beam LB2 that rotates the first-second laser beam LA2. And the second telescope lens unit 320 can emit a third-second laser beam LC2 whose size is adjusted by the second-second laser beam LB2.
[0115] The second laser beam rotating unit 220 may include a first mirror 221, a second mirror 222, a third mirror 223, and a fourth mirror 224. The second laser beam rotating unit 220 may be substantially the same as the first laser beam rotating unit 210. Therefore, a detailed description of the second laser beam rotating unit 220 will be omitted.
[0116] The second telephoto lens unit 320 may include a first lens 321, a second lens 322, a third lens 323, and a fourth lens 324. The second telephoto lens unit 320 may be substantially the same as the first telephoto lens unit 310. Therefore, a detailed description of the second telephoto lens unit 320 will be omitted.
[0117] In one embodiment, the laser device 1000 may further include a first reflector M1, a second reflector M2, a third reflector M3, a fourth reflector M4, and a beam splitter SP.
[0118] The first reflector M1 can reflect the 3-1 laser beam LC1 traveling in the third direction DR3. That is, the first reflector M1 can reflect the 3-1 laser beam LC1 traveling in the first direction DR1 on the third direction DR3.
[0119] The second reflector M2 can reflect the 3-1 laser beam LC1 in the first direction DR1. That is, the second reflector M2 can reflect the 3-1 laser beam LC1 traveling in the third direction DR3 in the first direction DR1.
[0120] The third reflector M3 can reflect the third-second laser beam LC2 in a direction opposite to the third direction DR3. That is, the third reflector M3 can reflect the third-second laser beam LC2 traveling in the first direction DR1 in a direction opposite to the third direction DR3.
[0121] The beam splitter SP can reflect a portion of the 3-1 laser beam LC1 incident on it and transmit another portion of the 3-1 laser beam LC1. The 3-1 laser beam LC1 transmitted through the beam splitter SP can directly reach the homogenization section 400. The 3-1 laser beam LC1 reflected by the beam splitter SP can reach the homogenization section 400 after being reflected by the fourth mirror M4.
[0122] Furthermore, the beam splitter SP can reflect a portion of the 3-2 laser beam LC2 incident on itself, and transmit another portion of the 3-2 laser beam LC2. The 3-2 laser beam LC2 transmitted through the beam splitter SP can reach the homogenization section 400 after being reflected by the fourth mirror M4. The 3-2 laser beam LC2 reflected by the beam splitter SP can directly reach the homogenization section 400.
[0123] The homogenization unit 400 can homogenize the third-first laser beam LC1 and the third-second laser beam LC2 arriving at the homogenization unit 400. The homogenization unit 400 can emit a fourth laser beam (e.g., Figure 2 The fourth laser beam (LD).
[0124] In one embodiment, the laser device 1000 may include two laser generators, two laser beam rotating units, and two telescopic lens units. However, this is only an exemplary number, and the number of laser generators, laser beam rotating units, and telescopic lens units may be varied. For example, the laser device 1000 may include three laser generators, three laser beam rotating units, and three telescopic lens units.
[0125] Reference Figures 1 to 5The laser device according to the comparative example may not include the laser beam rotating part 200 and the telescope lens part 300 according to an embodiment of the present invention. In this case, the first laser beam LA emitted from the laser generator 100 can be directly (or, after reaching the homogenization part 400) transformed into a fourth laser beam having a beam shape. The laser device according to the comparative example can irradiate the substrate SUB with the fourth laser beam. The laser device according to the comparative example can move in a direction perpendicular to the extension direction of the fourth laser beam (i.e., the extension direction of the beam).
[0126] In this case, the dispersion of the fourth laser beam irradiating the substrate SUB in the direction of movement of the laser device can be greater than the dispersion in the direction of extension of the fourth laser beam. This may be because, as previously mentioned, the dispersion of the first laser beam LA in the minor axis direction S is greater than the dispersion in the major axis direction L. Consequently, horizontal lines may be observed on the substrate SUB irradiated by the fourth laser beam.
[0127] A laser device 1000 according to an embodiment of the present invention may include a laser beam rotating part 200 that emits a second laser beam LB by rotating a first laser beam LA. For example, the laser device 1000 may include a first laser beam rotating part 210 that emits a second laser beam LB1 by rotating a first-1 laser beam LA1. The first laser beam rotating part 210 may include a first mirror 211. The first mirror 211 may include a first-1 mirror 211A, a first-2 mirror 211B, a first-3 mirror 211C, and a first-4 mirror 211D.
[0128] The second laser beam LB can be deformed into a fourth laser beam LD via the telescope lens section 300 and the homogenization section 400. In this case, the dispersion of the fourth laser beam LD irradiating the substrate SUB in the moving direction of the laser device 1000 can be smaller than the dispersion in the extending direction of the fourth laser beam LD. As a result, the horizontal line can be made not to be observed on the substrate SUB irradiated by the fourth laser beam LD.
[0129] Figure 8 This is a graph showing the dispersion of the laser beam in the laser device according to the comparative example. Figure 9 This is a graph showing the dispersion of the laser beam in a laser device according to an embodiment of the present invention. Specifically, Figure 8 and Figure 9 It is a graph showing the dispersion of the laser beam irradiating the substrate.
[0130] In the Figure 8 and Figure 9In illustrating the graph, the X-axis represents the emission angle of the first laser beam LA emitted from the laser generator 100. The unit of angle can be degrees (°). The Y-axis represents the angle of illumination on the substrate (e.g., ...). Figure 2 The normalized intensity of the laser beam on the substrate (SUB).
[0131] Reference Figure 1 , Figure 2 as well as Figure 8 , Figure 8 Part (a) may be a graph showing the degree of dispersion of the fourth laser beam in the direction of movement of the laser device when the fourth laser beam is irradiated onto the substrate SUB using the laser device according to the comparative example. Specifically, Figure 8 Part (a) may represent the dispersion of the fourth laser beam irradiating the substrate SUB when the emission angle of the first laser beam LA emitted from the laser generator 100 changes from about -0.05° to about +0.05°.
[0132] For example, in Figure 8 In part (a), when the emission angle of the first laser beam LA emitted from the laser generator 100 is about 0.05°, the dispersion range of the fourth laser beam in the direction of movement of the laser device can be from about 0.42 to about 0.7. That is, when the emission angle of the first laser beam LA emitted from the laser generator 100 is about 0.05°, the dispersion degree of the fourth laser beam in the direction of movement of the laser device can be about 0.28.
[0133] Furthermore, when the emission angle of the first laser beam LA emitted from the laser generator 100 is approximately 0.01°, the dispersion range of the fourth laser beam in the moving direction of the laser device can be approximately 0.21 to approximately 0.76. That is, when the emission angle of the first laser beam LA emitted from the laser generator 100 is approximately 0.01°, the dispersion degree of the fourth laser beam in the moving direction of the laser device can be approximately 0.55.
[0134] Figure 8 Part (b) may be a graph showing the degree of dispersion of the fourth laser beam in the extended direction when the fourth laser beam is irradiated onto the substrate SUB using the laser device according to the comparative example. Specifically, Figure 8 Part (b) may represent the dispersion of the fourth laser beam irradiating the substrate SUB when the emission angle of the first laser beam LA emitted from the laser generator 100 changes from about -0.05° to about +0.05°.
[0135] For example, in Figure 8In part (b), when the emission angle of the first laser beam LA emitted from the laser generator 100 is about 0.05°, the dispersion range of the fourth laser beam in the extending direction can be from about 0.41 to about 0.68. That is, when the emission angle of the first laser beam LA emitted from the laser generator 100 is about 0.05°, the dispersion of the fourth laser beam in the extending direction can be about 0.27.
[0136] Furthermore, when the emission angle of the first laser beam LA emitted from the laser generator 100 is approximately 0.01°, the dispersion range of the fourth laser beam in the extending direction can be approximately 0.67 to approximately 0.75. That is, when the emission angle of the first laser beam LA emitted from the laser generator 100 is approximately 0.01°, the dispersion degree of the fourth laser beam in the extending direction can be approximately 0.08.
[0137] Figure 9 Part (a) may be a graph representing the degree of dispersion of the fourth laser beam LD in the moving direction of the laser device 1000 when the fourth laser beam LD is irradiated onto the substrate SUB using a laser device 1000 according to an embodiment of the present invention. Specifically, Figure 9 Part (a) may represent the dispersion of the fourth laser beam LD irradiating the substrate SUB when the emission angle of the first laser beam LA emitted from the laser generator 100 changes from about -0.05° to about +0.05°.
[0138] For example, in Figure 9 In part (a), when the emission angle of the first laser beam LA emitted from the laser generator 100 is approximately 0.05°, the dispersion range of the fourth laser beam LD in the moving direction of the laser device 1000 can be approximately 0.39 to approximately 0.475. That is, when the emission angle of the first laser beam LA emitted from the laser generator 100 is approximately 0.05°, the dispersion degree of the fourth laser beam LD in the moving direction of the laser device 1000 can be approximately 0.085.
[0139] Furthermore, when the emission angle of the first laser beam LA emitted from the laser generator 100 is approximately 0.01°, the dispersion range of the fourth laser beam LD in the moving direction of the laser device 1000 can be approximately 0.4 to approximately 0.49. That is, when the emission angle of the first laser beam LA emitted from the laser generator 100 is approximately 0.01°, the dispersion degree of the fourth laser beam LD in the moving direction of the laser device 1000 can be approximately 0.09.
[0140] Figure 9Part (b) may be a graph showing the degree of dispersion of the fourth laser beam LD in the said extension direction when the laser device 1000 of an embodiment of the present invention irradiates the substrate SUB with the fourth laser beam LD. Specifically, Figure 9 Part (b) may represent the dispersion of the fourth laser beam LD irradiating the substrate SUB when the emission angle of the first laser beam LA emitted from the laser generator 100 changes from about -0.05° to about +0.05°.
[0141] For example, in Figure 9 In part (b), when the emission angle of the first laser beam LA emitted from the laser generator 100 is about 0.05°, the dispersion range in the extension direction of the fourth laser beam LD can be from about 0.39 to about 0.47. That is, when the emission angle of the first laser beam LA emitted from the laser generator 100 is about 0.05°, the dispersion range in the extension direction of the fourth laser beam LD can be about 0.08.
[0142] Furthermore, when the emission angle of the first laser beam LA emitted from the laser generator 100 is approximately 0.01°, the dispersion range of the fourth laser beam LD in the extension direction can be approximately 0.38 to approximately 0.49. That is, when the emission angle of the first laser beam LA emitted from the laser generator 100 is approximately 0.01°, the dispersion degree of the fourth laser beam LD in the extension direction can be approximately 0.11.
[0143] With the laser device 1000 according to an embodiment of the present invention including a laser beam rotating part 200 and a telescope lens part 300, the dispersion of the fourth laser beam LD irradiating the substrate SUB in the moving direction of the laser device 1000 and the dispersion of the fourth laser beam LD in the extending direction can be reduced. Therefore, horizontal lines can be made not to be observed on the substrate SUB.
[0144] Figure 10 This is a perspective view showing the second mirror of the first laser beam rotating part included in a laser device according to another embodiment of the present invention.
[0145] Besides the configuration of the first mirror and the second mirror 212', the laser device according to another embodiment of the present invention can be combined with... Figure 4 The laser device 1000 is substantially the same as or similar to that of the laser device. Therefore, repeated descriptions can be omitted.
[0146] The laser device according to another embodiment of the present invention may include a first laser beam rotating part. The first laser beam rotating part may include a first mirror, a second mirror 212', a third mirror, and a fourth mirror.
[0147] According to another embodiment of the present invention, the second mirror 212' of the laser device can be configured as follows: Figure 10 As shown. That is, the second mirror 212' may include multiple mirrors that change the travel direction of the first-1 laser beam LA1 from a third direction DR3 to a first direction DR1 and rotate the first-1 laser beam LA1. For example, the second mirror 212' may include the second-1 mirror 212A, the second-2 mirror 212B, the second-3 mirror 212C, and the second-4 mirror 212D.
[0148] In this case, each of the first, third, and fourth mirrors can change only the travel direction of the first-1 laser beam LA1 without rotating the first-1 laser beam LA1. For example, the first mirror can reflect the first-1 laser beam LA1 traveling in the first direction DR1 on the third direction DR3, the third mirror can reflect the first-1 laser beam LA1 traveling in the first direction DR1 on the third direction DR3, and the fourth mirror can reflect the first-1 laser beam LA1 traveling in the third direction DR3 on the first direction DR1.
[0149] However, this invention is not limited thereto, and in another embodiment, the third mirror may be configured as follows: Figure 5 As shown. That is, the third mirror may include multiple mirrors that change the travel direction of the first-1 laser beam LA1 from the first direction DR1 to the third direction DR3 and rotate the first-1 laser beam LA1. For example, the third mirror may include mirror 3-1, mirror 3-2, mirror 3-3, and mirror 3-4.
[0150] In this configuration, each of the first, second, and fourth mirrors can change only the travel direction of the first-1 laser beam LA1 without rotating it. For example, the first mirror can reflect the first-1 laser beam LA1 traveling in the first direction DR1 on the third direction DR3, the second mirror can reflect the first-1 laser beam LA1 traveling in the third direction DR3 on the first direction DR1, and the fourth mirror can reflect the first-1 laser beam LA1 traveling in the third direction DR3 on the first direction DR1.
[0151] In yet another embodiment, the fourth mirror may be configured as follows: Figure 10 As shown. That is, the fourth mirror may include multiple mirrors that change the travel direction of the first-1 laser beam LA1 from a third direction DR3 to a first direction DR1 and rotate the first-1 laser beam LA1. For example, the fourth mirror may include mirror 4-1, mirror 4-2, mirror 4-3, and mirror 4-4.
[0152] In this configuration, each of the first, second, and third mirrors can change only the travel direction of the first-1 laser beam LA1 without rotating it. For example, the first mirror can reflect the first-1 laser beam LA1 traveling in the first direction DR1 onto the third direction DR3, the second mirror can reflect the first-1 laser beam LA1 traveling in the third direction DR3 onto the first direction DR1, and the third mirror can reflect the first-1 laser beam LA1 traveling in the first direction DR1 onto the third direction DR3.
[0153] While the above description has been based on exemplary embodiments of the present invention, it should be understood by those skilled in the art that various modifications and alterations can be made to the present invention without departing from the spirit and scope of the present invention as set forth in the appended claims.
[0154] This invention can be applied to laser devices and electronic devices utilizing them. For example, it can be applied to laser devices used in the manufacture of high-resolution smartphones, mobile phones, smart tablets, smartwatches, tablet PCs, vehicle navigation systems, televisions, computer monitors, laptops, etc.
Claims
1. A laser device, characterized in that, include: A laser generator for producing a laser beam that travels in a first direction; The laser beam rotating part includes: The first-1 mirror reflects the laser beam generated in the laser generator in a second direction intersecting the first direction. The first and second mirrors are spaced apart from the first mirror and reflect the laser beam reflected by the first mirror. Mirrors 1-3, which are spaced apart from mirror 1-2 and reflect the laser beam reflected by mirror 1-2, and Mirrors 1-4, spaced apart from mirrors 1-3, reflect the laser beam reflected by mirrors 1-3 upwards on a third direction perpendicular to the plane formed by the first direction and the second direction; and The telescope lens section is used to adjust the size of the laser beam reflected by the first to fourth mirrors.
2. The laser device according to claim 1, characterized in that, The laser beam rotating part rotates the laser beam generated in the laser generator by 90 degrees.
3. The laser device according to claim 1, characterized in that, The laser beam reflected by the first to fourth mirrors has an elliptical shape in cross-section, including both the major and minor axes. The telescope lens section increases the size of the minor axis of the laser beam reflected by the first to fourth mirrors.
4. The laser device according to claim 3, characterized in that, The telescope lens reduces the size of the long axis of the laser beam reflected by the first to fourth mirrors.
5. The laser device according to claim 4, characterized in that, The telescope lens section includes a first lens and a second lens, the first lens and the second lens increasing the size of the minor axis of the laser beam reflected by the first to fourth mirrors.
6. The laser device according to claim 5, characterized in that, The telescope lens section further includes a third lens and a fourth lens, which reduce the size of the long axis of the laser beam reflected by the first to fourth lenses.
7. A laser device, characterized in that, include: A laser generator for producing a laser beam that travels in a first direction; The laser beam rotating part includes: A first mirror reflects the laser beam generated in the laser generator in a second direction intersecting the first direction. The second-first mirror reflects the laser beam reflected by the first mirror upwards at a third point intersecting the plane formed by the first direction and the second direction. A second-2 mirror, which is spaced apart from the second-1 mirror and reflects the laser beam reflected by the second-1 mirror, The second and third mirrors are spaced apart from the second and second mirrors and reflect the laser beam reflected by the second and second mirrors. Mirrors 2-4, spaced apart from mirror 2-3, and reflecting the laser beam reflected by mirror 2-3 in the first direction; and The telescope lens section is used to adjust the size of the laser beam reflected by the second to fourth mirrors.
8. The laser device according to claim 7, characterized in that, The laser beam rotating part rotates the laser beam generated in the laser generator by 90 degrees.
9. The laser device according to claim 8, characterized in that, The laser beam reflected by the second-fourth mirrors has an elliptical shape in cross-section, including both the major and minor axes. The telescope lens section increases the size of the minor axis of the laser beam reflected by the second-fourth mirrors.
10. The laser device according to claim 9, characterized in that, The telescope lens section reduces the size of the long axis of the laser beam reflected by the second to fourth mirrors.