Deflation device of chromium plate material high-performance sputter coating equipment

Abstract

The utility model provides a deflation device of chromium plate high-performance sputter coating equipment. The deflation device comprises an air supply connecting pipe, the electromagnetic valve is mounted at the rear end of the air supply connecting pipe through a screw; the filter is mounted at the rear end of the electromagnetic valve through a screw; the air supply assembly is mounted at the rear end of the filter through a screw. The first gas distribution pipe is rotationally connected to the gas supply assembly in a threaded mode, the first gas distribution pipe can be stably placed through the gas supply assembly, the second gas distribution pipe is installed and connected to the middle of the interior of the first gas distribution pipe, and the second gas distribution pipe can convey gas into the first gas distribution pipe, so that the gas can be diffused to the outside; the second gas distribution pipe is in threaded rotary connection with the gas supply assembly, the second gas distribution pipe can receive gas conveyed by the gas supply assembly, and the first gas distribution pipe and the second gas distribution pipe are both in threaded rotary connection with the gas supply assembly, so that rotary disassembly is facilitated, and the gas distribution pipe can be correspondingly disassembled and replaced when damaged.

Description

Technical Field

[0001] This utility model relates to the field of chromium plate processing technology, and in particular to a venting device for a high-performance sputtering coating equipment for chromium plates. Background Technology

[0002] Chromium sputtering plates refer to materials that use metallic chromium as a coating during the manufacturing process. Specifically, chromium sputtering plates typically consist of a glass substrate and a chromium layer deposited on it. The chromium layer is deposited on the glass substrate using a sputtering method, and its thickness is approximately 0.1 micrometers. During the sputtering process, the vacuum level and cleanliness of the chamber have a significant impact on the formation and stability of the film. To ensure the cleanliness of the vacuum chamber, in addition to regular maintenance and upkeep of the chamber, reducing existing sources of contamination and preventing external contamination or interference are also crucial. The process gas is mainly the protective gas, such as nitrogen, introduced into the chamber of the magnetron sputtering coating equipment during the magnetron sputtering process.

[0003] The existing Chinese patent CN212199402U, published on December 22, 2020, discloses a venting device for a magnetron sputtering coating equipment and a magnetron sputtering coating equipment, including an air inlet pipe, a first air distribution pipe connected to the air inlet pipe, and a second air distribution pipe sleeved outside the first air distribution pipe. The first air distribution pipe has a plurality of first holes, and the second air distribution pipe has a plurality of second holes, with the first holes and the second holes being staggered.

[0004] However, the aforementioned device cannot be effectively disassembled as a whole; all parts are fixedly assembled. Therefore, if the first or second air distribution pipe is damaged, the entire device needs to be replaced, resulting in unnecessary waste of resources. Utility Model Content

[0005] The technical problem to be solved by this invention is to overcome the defects of the existing technology. This invention proposes a venting device for a high-performance sputtering coating equipment for chromium plates. The venting device for a high-performance sputtering coating equipment for chromium plates has a detachable structure for the first gas distribution pipe and the second gas distribution pipe, so that when the first gas distribution pipe and the second gas distribution pipe are damaged, they can be replaced accordingly, thus effectively reducing resource waste.

[0006] To solve the above-mentioned technical problems, the technical solution adopted in this utility model is: a venting device for a high-performance sputtering coating equipment for chromium plate materials, comprising:

[0007] Gas supply connection pipe;

[0008] An electromagnetic valve, which is mounted on the rear end of the gas supply connection pipe by screws;

[0009] A filter, which is mounted on the rear end of the solenoid valve by screws;

[0010] An air supply assembly, which is mounted on the rear end of the filter by screws;

[0011] The first air distribution pipe is threadedly rotatably connected to the air supply assembly.

[0012] The second air distribution pipe is installed and connected inside the middle of the first air distribution pipe, and the second air distribution pipe is threadedly rotatably connected to the air supply component.

[0013] Preferably, the gas supply assembly includes a connecting pipe, a mounting flange is fixedly connected to the front end of the connecting pipe, the mounting flange is connected to the filter by screws, a first connecting screw is fixedly connected to the inner end of the connecting pipe, a second connecting screw is fixedly connected to the inner end of the first connecting screw, the second connecting screw is rotatably threaded onto a second gas distribution pipe, and the first connecting screw is rotatably threaded onto a first gas distribution pipe.

[0014] Preferably, the connecting pipe, the first connecting screw, and the second connecting screw are connected by welding and are internally interconnected.

[0015] Preferably, the second air distribution pipe includes a second air pipe shell, a second air hole is provided on the inner side of the second air pipe shell, an outer handle is fixedly connected to the right end of the second air pipe shell, and the second air pipe shell is sleeved inside the first air distribution pipe.

[0016] Preferably, the first air distribution pipe includes a first air pipe shell, a first air hole is provided on the inner side of the first air pipe shell, and outer cover plates are installed at both ends of the first air pipe shell. The first air pipe shell and the outer cover plates are fixedly connected by assembly screws.

[0017] Preferably, the inner side of the outer end of the first air pipe shell is provided with a mounting threaded slot corresponding to the first connecting screw tube.

[0018] Preferably, the outer end of the second air pipe shell is provided with a mounting threaded slot corresponding to the second connecting screw tube.

[0019] Compared with the prior art, the beneficial effects of this utility model include: the first gas distribution pipe is threadedly rotatably connected to the gas supply assembly, and the first gas distribution pipe can be stably placed through the gas supply assembly; the second gas distribution pipe is installed and connected inside the middle of the first gas distribution pipe, and the second gas distribution pipe can deliver gas into the first gas distribution pipe, thereby allowing it to diffuse to the outside; the second gas distribution pipe is threadedly rotatably connected to the gas supply assembly, and the second gas distribution pipe can receive the gas delivered by the gas supply assembly; both the first and second gas distribution pipes are threadedly rotatably connected to the gas supply assembly, thus facilitating rotation and disassembly, so that they can be disassembled and replaced accordingly when damaged. Attached Figure Description

[0020] The disclosure of this utility model is illustrated with reference to the accompanying drawings. It should be understood that the drawings are for illustrative purposes only and are not intended to limit the scope of protection of this utility model. In the drawings, the same reference numerals are used to refer to the same parts. Wherein:

[0021] Figure 1 The diagram schematically shows a three-dimensional structural schematic of the venting device of a high-performance sputtering coating apparatus for chromium plates according to one embodiment of the present invention.

[0022] Figure 2 The diagram schematically shows a cross-sectional view of the first gas distribution pipe, the second gas distribution pipe, and the gas supply component of a venting device for a high-performance sputtering coating apparatus for chromium plates according to one embodiment of the present invention.

[0023] Figure 3 for Figure 2 The diagram schematically shows an enlarged view of region A of the venting device of a high-performance sputtering coating apparatus for chromium plates according to one embodiment of the present invention.

[0024] Figure 4 The diagram schematically shows the right-end region of the first gas distribution pipe of a high-performance sputtering coating apparatus for chromium plate material according to one embodiment of the present invention.

[0025] Figure 5 The diagram illustrates the structure of the gas supply component of the venting device for a high-performance sputtering coating apparatus for chromium plates according to one embodiment of the present invention.

[0026] The following are the labels in the diagram: 1. Air supply assembly; 2. Solenoid valve; 3. Filter; 31. Mounting flange; 4. Connecting pipe; 5. First air pipe shell; 51. Outer cover plate; 52. First air hole; 53. First connecting screw; 54. Assembly screw; 6. Second air pipe shell; 61. Second air hole; 62. Second connecting screw; 63. Outer handle. Detailed Implementation

[0027] It is readily understood that, based on the technical solution of this utility model, those skilled in the art can propose various interchangeable structural methods and implementations without altering the essential spirit of this utility model. Therefore, the following detailed embodiments and accompanying drawings are merely illustrative examples of the technical solution of this utility model and should not be considered as the entirety of this utility model or as a limitation or restriction of its technical solution.

[0028] According to one embodiment of this utility model, combined with Figures 1-5 As shown. A venting device for a high-performance sputtering coating equipment for chromium plates includes a gas supply connection pipe 1, a solenoid valve 2, a filter 3, a gas supply assembly, a first gas distribution pipe, and a second gas distribution pipe.

[0029] Solenoid valve 2 is installed on the rear end of gas supply connection pipe 1 by screws. Gas supply connection pipe 1 receives the gas and can control the discharge through solenoid valve 2. Filter 3 is installed on the rear end of solenoid valve 2 by screws. Gas discharged by solenoid valve 2 can be effectively filtered when it passes through filter 3. Gas supply assembly is installed on the rear end of filter 3 by screws. Gas supply assembly can receive and supply the gas filtered by filter 3. First gas distribution pipe is threaded and rotatably connected to gas supply assembly. First gas distribution pipe can be stably placed through gas supply assembly. Second gas distribution pipe is installed and connected inside the middle of first gas distribution pipe. Second gas distribution pipe can supply gas into first gas distribution pipe, so that it can diffuse to the outside. Second gas distribution pipe is threaded and rotatably connected to gas supply assembly. Second gas distribution pipe can receive gas supplied by gas supply assembly.

[0030] Combination Figures 1-4 As shown, the second air distribution tube includes a second air tube shell 6, which is a closed tube that can effectively receive gas. A second air hole 61 is provided on the inner side of the second air tube shell 6, through which the gas inside the second air tube shell 6 can be discharged. An outer handle 63 is fixedly connected to the right end of the second air tube shell 6, which makes it easy for a person to hold the outer handle 63 and move the second air tube shell 6. The second air tube shell 6 is sleeved inside the first air distribution tube, which makes it easy for a person to hold the outer handle 63 and move the second air tube shell 6 in the first air distribution tube.

[0031] The outer end of the second air pipe shell 6 is provided with a mounting threaded slot corresponding to the second connecting screw tube 62, so that it can be rotated and connected accordingly.

[0032] The first air distribution pipe includes a first air pipe shell 5. A first air hole 52 is provided on the inner side of the first air pipe shell 5. The gas inside the first air pipe shell 5 can be discharged through the first air hole 52. An outer cover plate 51 is installed at both ends of the first air pipe shell 5. The openings at both ends of the first air pipe shell 5 are easily closed by the outer cover plate 51, so that the first air pipe shell 5 can form a sealed tube. The first air pipe shell 5 and the outer cover plate 51 are fixedly connected by assembly screws 54, which makes it easy to install and disassemble.

[0033] The inner side of the outer end of the first tracheal shell 5 is provided with a mounting threaded slot corresponding to the first connecting screw tube 53, so that it can be rotated and connected accordingly.

[0034] Combination Figure 1 , Figure 2 , Figure 3 and Figure 5As shown, the gas supply assembly includes a connecting pipe 4. A mounting flange 31 is fixedly connected to the front end of the connecting pipe 4. The mounting flange 31 is connected to the filter 3 by screws, so that it can be installed and connected to the flange, making the fixation more stable and secure, and also facilitating installation and disassembly. A first connecting screw tube 53 is fixedly connected to the inner end of the connecting pipe 4. The first connecting screw tube 53 is threaded and rotatably connected to the first gas distribution pipe, so that it can be rotatably connected, which is convenient for installation and disassembly. A second connecting screw tube 62 is fixedly connected to the inner end of the first connecting screw tube 53. The second connecting screw tube 62 is threaded and rotatably connected to the second gas distribution pipe, so that it can be rotatably connected, which is convenient for installation and disassembly.

[0035] The connecting pipe 4, the first connecting screw pipe 53, and the second connecting screw pipe 62 are connected by welding and are internally connected, thus facilitating gas flow.

[0036] In this embodiment, the gas supply connection pipe 1 receives the gas being supplied and its discharge can be controlled by the solenoid valve 2. The gas discharged by the solenoid valve 2 can be effectively filtered when it passes through the filter 3. The gas supply assembly can receive the gas filtered by the filter 3 and supply it. The first gas distribution pipe is threadedly rotatably connected to the gas supply assembly and can be stably placed through the gas supply assembly. The second gas distribution pipe is installed and connected inside the middle of the first gas distribution pipe and can supply gas into the first gas distribution pipe, thereby allowing it to diffuse to the outside. The second gas distribution pipe is threadedly rotatably connected to the gas supply assembly and can receive the gas supplied by the gas supply assembly. Both the first and second gas distribution pipes are threadedly rotatably connected to the gas supply assembly, which facilitates rotation and disassembly, so that they can be disassembled and replaced accordingly when damaged.

[0037] The scope of this utility model is not limited to the content described above. Those skilled in the art can make various modifications and variations to the above embodiments without departing from the technical concept of this utility model, and all such modifications and variations should fall within the protection scope of this utility model.

Claims

1. A venting device for a high-performance sputtering coating equipment for chromium plate materials, characterized in that, include: Gas supply connection pipe (1); Electromagnetic valve (2), which is mounted on the rear end of the gas supply connection pipe (1) by screws; A filter (3) is mounted on the rear end of a solenoid valve (2) by screws; An air supply assembly is mounted on the rear end of the filter (3) by screws; The first air distribution pipe is threadedly rotatably connected to the air supply assembly. The second air distribution pipe is installed and connected inside the middle of the first air distribution pipe, and the second air distribution pipe is threadedly rotatably connected to the air supply component.

2. The venting device for a high-performance sputtering coating equipment for chromium plate materials according to claim 1, characterized in that, The gas supply assembly includes a connecting pipe (4), a mounting flange (31) is fixedly connected to the front end of the connecting pipe (4), the mounting flange (31) is connected to the filter (3) by screws, a first connecting screw (53) is fixedly connected to the inner end of the connecting pipe (4), a second connecting screw (62) is fixedly connected to the inner end of the first connecting screw (53), the second connecting screw (62) is threaded and rotatably connected to the second gas distribution pipe, and the first connecting screw (53) is threaded and rotatably connected to the first gas distribution pipe.

3. The venting device for a high-performance sputtering coating equipment for chromium plate materials according to claim 2, characterized in that, The connecting pipe (4), the first connecting screw pipe (53), and the second connecting screw pipe (62) are connected by welding and are internally connected.

4. The venting device for a high-performance sputtering coating equipment for chromium plate materials according to claim 2, characterized in that, The second air distribution pipe includes a second air pipe shell (6), a second air hole (61) is provided on the inner side of the second air pipe shell (6), an outer handle (63) is fixed to the right end of the second air pipe shell (6), and the second air pipe shell (6) is sleeved inside the first air distribution pipe.

5. The venting device for a high-performance sputtering coating equipment for chromium plate materials according to claim 4, characterized in that, The first air distribution pipe includes a first air pipe shell (5), a first air hole (52) is provided on the inner side of the first air pipe shell (5), and outer cover plates (51) are installed at both ends of the first air pipe shell (5). The first air pipe shell (5) and the outer cover plates (51) are fixedly connected by assembly screws (54).

6. The venting device for a high-performance sputtering coating equipment for chromium plate materials according to claim 5, characterized in that, The outer end of the first tracheal shell (5) is provided with a mounting threaded slot corresponding to the first connecting screw tube (53).

7. The venting device for a high-performance sputtering coating equipment for chromium plate materials according to claim 4, characterized in that, The outer end of the second air pipe shell (6) is provided with a mounting threaded slot corresponding to the second connecting screw pipe (62).

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