Guide cylinder assembly and single crystal furnace

Abstract

The utility model provides a guide cylinder assembly and a single crystal furnace. The guide cylinder assembly comprises a guide cylinder body, an inner sleeve body and a positioning pin, the guide cylinder body is provided with an axially through cylinder channel; the inner sleeve body is arranged in the barrel channel and is provided with a hollow space through which a silicon rod can penetrate, and a pin hole is formed in the inner sleeve body in the wall thickness direction; the positioning pin is connected with the pin hole in a penetrating mode, and the bottom end of the positioning pin is a reference point for measuring the melting gap. By means of the arrangement, the guide cylinder body serves as an existing guide cylinder, hole opening design is not needed, the inner sleeve body is additionally arranged in the guide cylinder body, the inner sleeve body does not have the function of the guide cylinder and can be punched at will, and therefore an installation position is provided for the positioning pin, and the positioning pin is installed at the position outside the guide cylinder body. The loss of the filler in the guide cylinder body is not accelerated, the carbon pollution risk caused by tapping is avoided, and the problems that the arrangement mode of the positioning pin for detecting the melt gap in the single crystal furnace in the prior art is not beneficial to protecting the interior of the guide cylinder and the carbon pollution risk is increased are solved.

Description

Technical Field

[0001] This application relates to the field of semiconductor manufacturing technology, specifically to a flow guide tube assembly and a single crystal furnace. Background Technology

[0002] Currently, the CZ method (Czochralski method) is commonly used to produce monocrystalline silicon. In this method, a crucible is used inside the single crystal furnace to hold polycrystalline silicon raw materials. The polycrystalline silicon raw materials are melted by heating the crucible. A flow guide tube is installed above the crucible inside the single crystal furnace.

[0003] In the process of preparing single crystal silicon in the CZ method single crystal furnace, the gap between the lower edge of the guide tube and the surface of the molten liquid (hereinafter referred to as the molten gap) is crucial to the success rate of single crystal silicon preparation and product quality. In actual production, it is necessary to continuously monitor the value of the molten gap and ensure that it follows the target value.

[0004] A common method for monitoring the molten gap is to suspend a positioning pin below the flow guide tube and calculate the molten gap value by capturing the distance between the positioning pin and the reflection of the liquid surface using a camera, thus enabling real-time monitoring. In existing technologies, the positioning pin is often inserted into the flow guide tube for stable installation. However, the applicant has found that the flow guide tube has openings to provide installation positions for the positioning pin, which is detrimental to protecting the interior of the flow guide tube in extremely high-temperature production environments and also increases the risk of carbon contamination. Utility Model Content

[0005] In view of this, this application provides a flow guide tube assembly and a single crystal furnace to solve the problem that the arrangement of the positioning pins used for detecting the melt gap in the existing single crystal furnace is not conducive to protecting the inside of the flow guide tube and increases the risk of carbon pollution.

[0006] To achieve the above objectives, this application provides the following technical solution:

[0007] A flow guide assembly, comprising:

[0008] The guide tube body has an axially continuous tube channel;

[0009] The inner sleeve is disposed in the cylindrical channel and has a hollow space through which the silicon rod can pass. The inner sleeve has a pin hole along the wall thickness direction.

[0010] A positioning pin is inserted through the pin hole and connected to it. The bottom end of the positioning pin is the reference point for measuring the weld gap.

[0011] Optionally, the inner sleeve and the guide tube body can be detachably connected.

[0012] Optionally, the inner sleeve includes a variable diameter section and a constant diameter section. The outer diameter of the variable diameter section gradually decreases from top to bottom along the axial direction. The constant diameter section is connected to the bottom of the variable diameter section and has the pin hole.

[0013] The variable diameter section is engaged in the cylindrical channel, and the constant diameter section extends at least partially out of the cylindrical channel.

[0014] Optionally, the cylindrical channel includes a cylindrical variable diameter section whose inner diameter gradually decreases from top to bottom along the axial direction;

[0015] The maximum outer diameter of the sleeve-shaped variable diameter section is greater than the minimum inner diameter of the cylindrical variable diameter section but less than the maximum inner diameter of the cylindrical variable diameter section, and the minimum outer diameter of the sleeve-shaped variable diameter section is less than the minimum inner diameter of the cylindrical variable diameter section.

[0016] Optionally, the locating pin includes:

[0017] The main body of the pin extends downwards, with its bottom end serving as a reference point for measuring the weld gap;

[0018] A pin limiting part is connected to the pin body part. The pin body part and the pin limiting part are located on the inner and outer sides of the inner sleeve body, respectively, and the pin limiting part prevents the positioning pin from disengaging from the inner sleeve body.

[0019] Optionally, the positioning pin includes a first segment, a second segment, and a third segment that are bent and connected in sequence, the second segment being located in the pin hole, the first segment extending upward from the second segment, and the third segment extending downward from the second segment;

[0020] The first segment is the pin limiting part, and the third segment is the pin body part.

[0021] Optionally, the wall thickness of the inner sleeve around the pin hole is A, and the diameter of the pin hole is D, where 1.24A≤D≤1.26A;

[0022] The diameters of the first segment, the second segment, and the third segment are all less than or equal to 0.75A. The center lines of the first segment and the third segment are parallel and the distance between them is greater than 1.75A. The first segment and the second segment are connected by rounded corners with an outer rounded corner radius less than or equal to 0.75A. The second segment and the third segment are connected by rounded corners with an outer rounded corner radius less than or equal to 0.75A.

[0023] Optional, D = 1.25A.

[0024] Optionally, the pin body and the pin limiting part can be detachably connected.

[0025] A single crystal furnace, comprising the flow guide tube assembly as described in any of the above claims.

[0026] The guide tube assembly provided in this application includes a guide tube body, an inner sleeve, and a positioning pin; the guide tube body has an axially through tube channel; the inner sleeve is disposed in the tube channel and has a hollow space through which a silicon rod can pass, and the inner sleeve has a pin hole along the wall thickness direction; the positioning pin is connected to the pin hole, and the bottom end of the positioning pin is a reference point for measuring the melt gap.

[0027] With this configuration, the existing guide tube body does not require any opening design. Instead, an inner sleeve is added to the guide tube body. Since the inner sleeve does not perform the function of the guide tube, it can be drilled at will, thus providing an installation position for the positioning pin. This arrangement of positioning pins places them outside the guide tube body, which does not accelerate the loss of the filling material inside the guide tube body and avoids the carbon pollution risk caused by opening. It solves the problem that the arrangement of positioning pins used to detect the melt gap in the existing single crystal furnace is not conducive to protecting the inside of the guide tube and increases the risk of carbon pollution. Attached Figure Description

[0028] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only embodiments of this application. For those skilled in the art, other drawings can be obtained based on the provided drawings without creative effort.

[0029] Figure 1 A schematic diagram of the structure of the guide tube assembly provided in this application embodiment applied in a single crystal furnace;

[0030] Figure 2 This is a schematic diagram of the structure of the guide tube body and inner sleeve provided in the embodiments of this application;

[0031] Figure 3 for Figure 1 Detailed drawing at point A in the middle;

[0032] Figure 4 A first state diagram showing the process of the positioning pin being inserted into the pin hole, as provided in an embodiment of this application.

[0033] Figure 5 A second state diagram showing the process of the positioning pin being inserted into the pin hole, as provided in an embodiment of this application;

[0034] Figure 6 A structural diagram of the positioning pin provided in an embodiment of this application;

[0035] Figure 7 This is a dimensioning diagram of the locating pin and pin hole provided for an embodiment of this application.

[0036] exist Figures 1-7 middle:

[0037] 100. Guide tube body; 200. Inner sleeve; 300. Positioning pin; 400. Crucible; 500. Silicon rod;

[0038] 110. Cylinder diameter change section;

[0039] 201. Pin hole; 210. Variable diameter sleeve section; 220. Constant diameter section;

[0040] 310. First paragraph; 320. Second paragraph; 330. Third paragraph. Detailed Implementation

[0041] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0042] Before providing a detailed description of the flow guide assembly provided in this application, the following explanation of the relevant technology is necessary:

[0043] In related technologies, the measurement and control of the molten silicon gap is a crucial parameter in the crystal pulling process, requiring real-time monitoring and precise adjustment. The method for measuring and monitoring the molten silicon gap involves inserting a quartz hook into the lower part of the flow tube, utilizing the reflection of the hook on the molten silicon surface. The quartz hook, used for measuring the molten silicon surface, is installed on the side wall of the inner flow tube. The L-shaped hook consists of a first part and a second part. An installation hole is located on the inner wall of the flow tube. The first part of the hook is placed horizontally within the hole and then released. Under gravity, the second part, which is vertical, will point downwards. By raising and lowering the crucible by 400 degrees, the molten silicon surface is brought into just-contact with the lower edge of the vertical second part. Accurate measurement of the molten silicon surface position is essential during crystal pulling to ensure the distance between the flow tube and the surface remains at a set value. The molten silicon gap measurement is performed using the reflection of the hook in the solution.

[0044] like Figures 1-7 As shown, this application embodiment provides a flow guide tube assembly, including a flow guide tube body 100, an inner sleeve 200, and a positioning pin 300; the flow guide tube body 100 has an axially penetrating tube channel; the inner sleeve 200 is disposed in the tube channel and has a hollow space through which a silicon rod 500 can pass, and the inner sleeve 200 has a pin hole 201 along the wall thickness direction; the positioning pin 300 is connected to the pin hole 201, and the bottom end of the positioning pin 300 is a reference point for measuring the melt gap.

[0045] With this configuration, this application abandons the inherent design concept of the positioning pin 300 installation in the field. The guide tube body 100, as an existing guide tube, does not require an opening design. Instead, an inner sleeve 200 is added to the guide tube body 100. Since the inner sleeve 200 does not perform the function of the guide tube, it can be drilled at will, thereby providing an installation position for the positioning pin 300. This arrangement of the positioning pin 300 places the positioning pin 300 in a position outside the guide tube body 100, which will not accelerate the loss of the filling material inside the guide tube body 100 and avoid the carbon pollution risk caused by opening. It solves the problem that the arrangement of the positioning pin 300 used for detecting the melt gap in the existing single crystal furnace is not conducive to protecting the inside of the guide tube and increases the risk of carbon pollution.

[0046] Furthermore, since the positioning pin 300 is connected to the inner sleeve 200, the distance between the positioning pin 300 and the liquid surface can be compensated by extending the inner sleeve 200, thus avoiding the need for the positioning pin 300 to be designed to be very long, which would result in insufficient rigidity.

[0047] Generally, the positioning pin 300 should be located in the bottom area of ​​the guide tube body 100, so the positioning pin 300 is positioned hanging on the lower edge of the inner sleeve 200.

[0048] It should be noted that the inner sleeve 200 can be configured to have a graphite coating on its surface or be made of graphite material.

[0049] Regarding the connection between the inner sleeve 200 and the guide tube body 100, it can be set as an integral structure of the inner sleeve 200 and the guide tube body 100, but the manufacturing process is more difficult and the production cost is higher.

[0050] Based on the above considerations, in order to overcome the above shortcomings, in some optional embodiments, the inner sleeve 200 and the guide tube body 100 are designed as separate parts, and the inner sleeve 200 and the guide tube body 100 can be detached and connected.

[0051] With this configuration, the inner sleeve 200 is an independent component, which is easy to manufacture and has low production costs. It can be flexibly assembled and disassembled with the guide tube body 100. Moreover, as production hours accumulate, even if the inner sleeve 200 is damaged, it can be disassembled and replaced according to the production situation, making later maintenance convenient and cost-effective.

[0052] In some other alternative embodiments, the shape of the inner sleeve 200 can be a cylindrical structure, that is, the circumferential sidewalls of the inner sleeve 200 are closed; or, the inner sleeve 200 can also be a frame structure with partial material reduction, that is, the circumferential sidewalls of the inner sleeve 200 are not closed.

[0053] Based on the design of the inner sleeve 200 as a cylindrical structure, in some specific embodiments, the inner sleeve 200 includes a variable diameter section 210 and a constant diameter section 220. The outer diameter of the variable diameter section 210 gradually decreases from top to bottom along the axial direction, while the outer diameter of the constant diameter section 220 is constant. The constant diameter section 220 is connected to the bottom of the variable diameter section 210. The constant diameter section 220 has a pin hole 201, and a positioning pin 300 passes through the constant diameter section 220. The variable diameter section 210 is engaged in the cylindrical channel, and the constant diameter section 220 extends at least partially out of the cylindrical channel.

[0054] In addition, considering that most of the existing guide tube bodies 100 are designed with a tube channel that is wider at the top and narrower at the bottom, based on this, in some optional embodiments, the tube channel includes a tube diameter-reducing section 110 with an inner diameter that gradually decreases from top to bottom along the axial direction; the maximum outer diameter of the tube diameter-reducing section 210 is greater than the minimum inner diameter of the tube diameter-reducing section 110 and less than the maximum inner diameter of the tube diameter-reducing section 110, and the minimum outer diameter of the tube diameter-reducing section 210 is less than the minimum inner diameter of the tube diameter-reducing section 110.

[0055] With this setup, when installing the inner sleeve 200, it is inserted into the tube channel from above the guide tube body 100, as follows. Figure 2 As shown, the inner sleeve 200 can be snapped into the bottom area of ​​the cylinder channel from top to bottom. Based on the common design of the cylinder channel itself, the inner sleeve 200 is cleverly installed in the guide tube body 100 by utilizing the size difference of the outer diameter of different parts of the inner sleeve 200 in the axial direction. Moreover, disassembly is also very convenient, which is conducive to controlling the development cost of the guide tube assembly.

[0056] Of course, in addition to the above methods, it is also feasible to have a protrusion in the wall of the tube channel of the guide tube body 100, which can lock the variable diameter section 210 and realize the locking and mounting of the inner sleeve 200.

[0057] The applicant also discovered that during actual production, the positioning pin 300 is prone to slipping and falling into the crucible 400 due to the shaking of the guide tube or other factors, making it impossible to monitor the melt gap during production and significantly impacting the product. To address this, this application also features a design for the positioning pin 300 that differs from existing technologies, achieving both protection of the inside of the guide tube and avoidance of carbon contamination risks, while also solving the problem of the positioning pin 300 used for melt gap detection in existing single-crystal furnaces easily slipping off.

[0058] In some specific embodiments, the positioning pin 300 includes a pin body and a pin limiting part; the pin body extends downward and its bottom end is a reference point for measuring the weld gap; the pin limiting part is connected to the pin body, and the pin body and the pin limiting part are located on the inner and outer sides of the inner sleeve 200, respectively, that is, one of the pin body and the pin limiting part is located on the inner side of the inner sleeve 200 and the other is located on the outer side of the inner sleeve 200, and the pin limiting part prevents the positioning pin 300 from disengaging from the inner sleeve 200.

[0059] With this configuration, the positioning pin 300 no longer uses a simple L-shaped design. After the positioning pin 300 and the inner sleeve 200 are connected by suspension, the main body of the pin is located inside or outside the inner sleeve 200. At the same time, the pin limiting part is located on the other side to form a limit, so that the positioning pin 300 cannot come out of the pin hole 201, and the fastening is reliable.

[0060] It should be noted that, Figure 1 and Figure 3 An example is shown where the pin body of the positioning pin 300 is located inside the inner sleeve 200.

[0061] In addition, regarding the specific form of the positioning pin 300, it can be a one-piece structure design or a split structure design.

[0062] Specifically, in some optional embodiments, the positioning pin 300 is a one-piece structure design, comprising a first segment 310, a second segment 320, and a third segment 330 connected by sequential bending. The second segment 320 is located in the pin hole 201, the first segment 310 extends upward from the second segment 320, and the third segment 330 extends downward from the second segment 320. The first segment 310 is a pin limiting part, and the third segment 330 is a pin body part. For example, please refer to... Figures 3-6 .

[0063] With this configuration, the process of connecting the positioning pin 300 to the pin hole 201 can be as follows: the first segment 310 slowly tilts as it enters the pin hole 201, and finally the second segment 320 is locked in the pin hole 201. In its natural state, the positioning pin 300, through its own bending structure and gravity, forms a self-locking mechanism with the wall edge. The first segment 310 cannot pass downward through the pin hole 201, which can better resist the positioning pin 300 from slipping due to equipment shaking, making the suspension installation of the positioning pin 300 more secure, thereby avoiding affecting the product.

[0064] Furthermore, since the positioning pin 300 needs to meet high temperature resistance requirements, it is usually made of quartz, and its integrated structure design facilitates manufacturing.

[0065] It should be noted that the design parameters of the positioning pin 300 in this application are not arbitrary, but need to follow certain design principles and control the shape and parameter design. This is to ensure that the positioning pin 300 can be fixed on the inner sleeve 200, and that the positioning pin 300 cannot be removed from the inner sleeve 200 in its natural state except by human operation, thereby achieving the technical effect required by this application.

[0066] Furthermore, to ensure that the locating pin 300 can form a stable connection with the inner sleeve 200 in a preset manner, in some specific embodiments, the wall thickness of the portion of the inner sleeve 200 around the pin hole 201 is A, that is, the wall thickness of the constant diameter section 220 is A, and the diameter of the pin hole 201 is D, where 1.24A≤D≤1.26A; the diameters of the first segment 310, the second segment 320, and the third segment 330 are all less than or equal to 0.75A; the center lines of the first segment 310 and the third segment 330 are parallel and the distance between them is greater than 1.75A; the first segment 310 and the second segment 320 are connected by rounded corners with an outer corner radius less than or equal to 0.75A; the second segment 320 and the third segment 330 are connected by rounded corners with an outer corner radius less than or equal to 0.75A. The first segment 310 is shorter than the third segment 330. Please refer to... Figure 7 .

[0067] With this setup, the design of the locating pin 300 based on the aforementioned dimensional relationships has been confirmed to be feasible through testing and simulation. First, insert the first section 310 of the locating pin 300 into the pin hole 201 and gently rotate it, as shown... Figure 4 Then, while moving forward and rotating, repeat this several times to achieve the desired effect. Figure 5 After performing this process once more, the positioning pin 300 can be suspended and fixed on the inner sleeve 200, resulting in the final state as follows. Figure 3 .

[0068] Furthermore, the preferred value for D is D = 1.25A. This selection of design values ​​yields a better design for the locating pin 300 within the scope of the investigation.

[0069] Of course, in addition to the above methods, the positioning pin 300 has a split structure design, that is, the main body of the pin and the pin limiting part can be detachably connected. Since the installation and connection of the positioning pin 300 is carried out on a structure other than the guide tube body 100, even double-sided operation will not be too difficult and has a certain degree of feasibility.

[0070] Regarding how the main body of the pin and the pin limiting part are detachably connected, the main body of the pin can be L-shaped and inserted into the pin hole 201. The part of the main body of the pin that extends beyond the pin hole 201 is provided with a limiting hole. The pin limiting part is pin-shaped and inserted into the limiting hole, so that the main body of the pin cannot come out of the pin hole 201.

[0071] Based on the above embodiments, this application provides a preferred embodiment that can be obtained within the scope of exploration. This application embodiment provides a guide tube assembly, including a guide tube body 100, an inner sleeve 200, and a positioning pin 300.

[0072] The guide tube body 100 has an axially through tube channel, which includes a tube diameter-reducing section 110 whose inner diameter gradually decreases from top to bottom along the axial direction.

[0073] The inner sleeve 200 and the guide tube body 100 are detachably connected. The inner sleeve 200 is snapped into the tube channel and has a hollow space through which the silicon rod 500 can pass. The inner sleeve 200 is a cylindrical structure. The inner sleeve 200 includes a variable diameter section 210 and a constant diameter section 220. The outer diameter of the variable diameter section 210 gradually decreases from top to bottom along the axial direction. The outer diameter of the constant diameter section 220 is constant. The constant diameter section 220 is connected to the bottom of the variable diameter section 210. The constant diameter section 220 has a pin hole 201 along the wall thickness direction. The maximum outer diameter of the variable diameter section 210 is greater than the minimum inner diameter of the tube variable diameter section 110 and less than the maximum inner diameter of the tube variable diameter section 110. The minimum outer diameter of the variable diameter section 210 is less than the minimum inner diameter of the tube variable diameter section 110, so that the variable diameter section 210 is snapped into the tube variable diameter section 110 of the tube channel, and the constant diameter section 220 extends at least partially out of the tube channel.

[0074] The positioning pin 300 is connected to the pin hole 201. The positioning pin 300 is an integral structure design. The positioning pin 300 includes a first section 310, a second section 320, and a third section 330 that are bent and connected in sequence. The second section 320 is located in the pin hole 201. The first section 310 extends upward from the second section 320, and the third section 330 extends downward from the second section 320. The first section 310 is the pin limiting part and is located on the outside of the inner sleeve 200. The third section 330 is the pin body and is located on the inside of the inner sleeve 200. The pin limiting part prevents the positioning pin 300 from disengaging from the inner sleeve 200. The bottom end of the pin body is the reference point for measuring the weld gap.

[0075] The wall thickness of the constant diameter section 220 of the inner sleeve 200 is A, and the diameter of the pin hole 201 is D, where 1.24A ≤ D ≤ 1.26A. The diameters of the first section 310, the second section 320, and the third section 330 are all less than or equal to 0.75A. The center lines of the first section 310 and the third section 330 are parallel and the distance between them is greater than 1.75A. The first section 310 and the second section 320 are connected by rounded corners with an outer corner radius less than or equal to 0.75A, and the second section 320 and the third section 330 are connected by rounded corners with an outer corner radius less than or equal to 0.75A. The first section 310 is shorter than the third section 330.

[0076] With this configuration, this application abandons the conventional design concept for installing the positioning pin 300 in this field. Since the guide tube body 100 is an existing guide tube, there is no need for an opening design. Instead, an inner sleeve 200 is added to the guide tube body 100. Because the inner sleeve 200 does not perform the function of a guide tube, it can be drilled arbitrarily, thus providing an installation position for the positioning pin 300. This arrangement of the positioning pin 300 places it outside the guide tube body 100, preventing the filling of the guide tube body 100 from being accelerated. This design reduces losses and avoids the carbon pollution risk associated with openings. It solves the problem of the existing arrangement of the positioning pins 300 used for detecting the melt gap in single-crystal furnaces, which is detrimental to protecting the inside of the guide tube and increases the risk of carbon pollution. Furthermore, since the positioning pins 300 are connected to the inner sleeve 200, the distance between the positioning pins 300 and the liquid surface can be compensated for by extending the inner sleeve 200, avoiding the need for excessively long positioning pins 300 that would result in insufficient rigidity. The inner sleeve 200, as an independent component, has low manufacturing difficulty and is easy to produce. It is low in cost and can be flexibly assembled and disassembled with the guide tube body 100. Moreover, even if the inner sleeve 200 is worn out due to accumulated production hours, it can be disassembled and replaced according to production conditions, making subsequent maintenance convenient and low in cost. When installing the inner sleeve 200, it is inserted into the tube channel from above the guide tube body 100, and the inner sleeve 200 is snapped into place in the bottom area of ​​the tube channel from top to bottom. In this way, based on the common design of the tube channel itself, the inner sleeve 200 is used to... The design of different outer diameters at different axial locations cleverly enables the inner sleeve 200 to be installed in the guide tube body 100, and disassembly is also very convenient, which is conducive to controlling the development cost of the guide tube assembly. In the natural state, the positioning pin 300 forms a self-locking mechanism with the wall edge by utilizing its own bending structure and gravity. The first section 310 cannot pass downward through the pin hole 201, which can better resist the positioning pin 300 from slipping due to equipment shaking, making the suspension installation of the positioning pin 300 more secure, thereby avoiding affecting the product.

[0077] To better demonstrate the design advantages of the flow guide assembly provided in this application, some designs in the prior art are introduced below for comparison.

[0078] Existing technologies, such as patent CN112725884A, involve assembling and extending the positioning pin 300 from inside the guide tube. While this structure achieves stable suspension, it requires altering the guide tube, making its structure more complex. Furthermore, the lower opening is detrimental to protecting the internal structure of the guide tube under extreme temperatures and increases the risk of carbon contamination. Additionally, installing and removing the positioning pin 300 is difficult, requiring complete removal of the entire guide tube. Similarly, patent CN202898594U also requires modifying the guide tube structure and creating openings; installation from the inside also necessitates complete removal, making installation inconvenient and increasing the risk of carbon contamination. Moreover, the split design of the positioning pin 300 makes it prone to sliding relative to the guide tube, resulting in poor accuracy in weld gap monitoring. After prolonged use at high temperatures, it is prone to adhesion, making disassembly and replacement extremely difficult. The guide tube assembly provided in this application, however, achieves stable installation of the positioning pin 300 without damaging the original structure of the guide tube.

[0079] Based on the aforementioned flow guide tube assembly, this application also provides a single crystal furnace, which includes the aforementioned flow guide tube assembly. Since the single crystal furnace has the aforementioned flow guide tube assembly, the beneficial effects brought by the flow guide tube assembly to the single crystal furnace are described above and will not be repeated here.

[0080] The basic principles of this application have been described above with reference to specific embodiments. However, it should be noted that the advantages, benefits, and effects mentioned in this application are merely examples and not limitations, and should not be considered as essential features of each embodiment of this application. Furthermore, the specific details disclosed above are for illustrative and facilitative purposes only, and are not limitations. These details do not limit the application to the necessity of employing the aforementioned specific details for implementation.

[0081] The block diagrams of devices, apparatuses, devices, and systems involved in this application are merely illustrative examples and are not intended to require or imply that they must be connected, arranged, or configured in the manner shown in the block diagrams. As those skilled in the art will recognize, these devices, apparatuses, devices, and systems can be connected, arranged, and configured in any manner. Words such as “comprising,” “including,” “having,” etc., are open-ended terms meaning “including but not limited to,” and are used interchangeably with them. The terms “or” and “and” as used herein refer to the terms “and / or,” and are used interchangeably with them unless the context clearly indicates otherwise. The term “such as” as used herein refers to the phrase “such as but not limited to,” and is used interchangeably with it.

[0082] It should also be noted that in the apparatus, equipment, and methods of this application, the components or steps can be disassembled and / or recombined. These disassemblies and / or recombinations should be considered as equivalent solutions of this application.

[0083] The above description of the disclosed aspects is provided to enable any person skilled in the art to make or use this application. Various modifications to these aspects will be readily apparent to those skilled in the art, and the general principles defined herein can be applied to other aspects without departing from the scope of this application. Therefore, this application is not intended to be limited to the aspects shown herein, but rather to be accorded the widest scope consistent with the principles and novel features disclosed herein.

[0084] It should be understood that the qualifying terms “first,” “second,” “third,” “fourth,” “fifth,” and “sixth” used in the description of the embodiments of this application are only used to more clearly illustrate the technical solutions and are not intended to limit the scope of protection of this application.

[0085] The above description has been given for purposes of illustration and description. Furthermore, this description is not intended to limit the embodiments of this application to the forms disclosed herein. Although numerous exemplary aspects and embodiments have been discussed above, those skilled in the art will recognize certain variations, modifications, alterations, additions, and sub-combinations thereof.

Claims

1. A flow guide tube assembly, characterized in that, include: The guide tube body (100) has an axially through tube channel; The inner sleeve (200) is disposed in the cylindrical channel and has a hollow space through which the silicon rod (500) can pass. The inner sleeve (200) has a pin hole (201) along the wall thickness direction. A positioning pin (300) is connected to the pin hole (201), and the bottom end of the positioning pin (300) is the reference point for measuring the weld gap.

2. The guide tube assembly according to claim 1, characterized in that, The inner sleeve (200) and the guide tube body (100) can be detachably connected.

3. The guide tube assembly according to claim 1 or 2, characterized in that, The inner sleeve (200) includes a variable diameter section (210) and a constant diameter section (220). The outer diameter of the variable diameter section (210) gradually decreases from top to bottom along the axial direction. The constant diameter section (220) is connected to the bottom of the variable diameter section (210). The constant diameter section (220) has the pin hole (201). The variable diameter section (210) is engaged in the cylindrical channel, and the constant diameter section (220) extends at least partially out of the cylindrical channel.

4. The guide tube assembly according to claim 3, characterized in that, The cylindrical channel includes a cylindrical variable diameter section (110) whose inner diameter gradually decreases from top to bottom along the axial direction; The maximum outer diameter of the sleeve diameter-changing section (210) is greater than the minimum inner diameter of the cylinder diameter-changing section (110) and less than the maximum inner diameter of the cylinder diameter-changing section (110). The minimum outer diameter of the sleeve diameter-changing section (210) is less than the minimum inner diameter of the cylinder diameter-changing section (110).

5. The guide tube assembly according to claim 1, characterized in that, The locating pin (300) includes: The main body of the pin extends downwards, with its bottom end serving as a reference point for measuring the weld gap; The pin limiting part is connected to the pin body part. The pin body part and the pin limiting part are located on the inner and outer sides of the inner sleeve (200), respectively, and the pin limiting part prevents the positioning pin (300) from disengaging from the inner sleeve (200).

6. The guide tube assembly according to claim 5, characterized in that, The positioning pin (300) includes a first segment (310), a second segment (320) and a third segment (330) that are bent and connected in sequence. The second segment (320) is located in the pin hole (201). The first segment (310) extends upward from the second segment (320), and the third segment (330) extends downward from the second segment (320). The first segment (310) is the pin limiting part, and the third segment (330) is the pin body part.

7. The guide tube assembly according to claim 6, characterized in that, The inner sleeve (200) has a wall thickness of A around the pin hole (201), and the pin hole (201) has a diameter of D, where 1.24A≤D≤1.26A; The diameters of the first segment (310), the second segment (320), and the third segment (330) are all less than or equal to 0.75A. The center lines of the first segment (310) and the third segment (330) are parallel and the distance between them is greater than 1.75A. The first segment (310) and the second segment (320) are connected by rounded corners with an outer rounded corner radius less than or equal to 0.75A. The second segment (320) and the third segment (330) are connected by rounded corners with an outer rounded corner radius less than or equal to 0.75A.

8. The guide tube assembly according to claim 7, characterized in that, D = 1.25A.

9. The guide tube assembly according to claim 5, characterized in that, The main body of the pin and the pin limiting part are detachably connected.

10. A single crystal furnace, characterized in that, Includes the flow guide tube assembly as described in any one of claims 1-9.

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