Safety equipment for monitoring temperature of tungsten hexafluoride reactor

Abstract

The utility model relates to the related field, and particularly discloses safety equipment for monitoring the temperature of a tungsten hexafluoride reactor, which comprises a temperature monitoring panel, a tungsten hexafluoride reactor main body, a temperature sensing rod, a suspender and a sealing gland, the bottom of the temperature monitoring panel is sealed on a sealing opening in the middle of the top end of the tungsten hexafluoride reactor body through a sealing gland, the middle of the bottom end of the temperature monitoring panel is connected with a temperature sensing rod through a hanging rod, cooling fins are arranged in the middles of the two sides of the temperature monitoring panel, and a warning lamp is arranged on one side of the top of the temperature monitoring panel. The middle of the bottom end of the temperature monitoring panel is connected with the temperature sensing rod through the hanging rod, the temperature sensing head is arranged at the end of the temperature sensing rod, multidirectional large-range temperature sensing can be carried out through the temperature sensing rod and the temperature sensing head, the temperature sensing efficiency and effect can be improved, the heat dissipation fins are arranged in the middles of the two sides of the temperature monitoring panel, and the heat dissipation efficiency is improved. The heat dissipation effect of the temperature monitoring panel can be improved through the heat dissipation fins.

Description

Technical Field

[0001] This utility model relates to the field of safety equipment for reactor temperature monitoring, specifically a safety device for monitoring the temperature of a tungsten hexafluoride reactor. Background Technology

[0002] Safety equipment for temperature monitoring in tungsten hexafluoride reactors is used to monitor the temperature of the reactor. Tungsten hexafluoride is a colorless gas or pale yellow liquid, and its solid form is a hygroscopic white crystalline powder that fumes in humid air. It is mainly used in the chemical vapor deposition of tungsten as a fluorinating agent.

[0003] The existing reactor temperature monitoring safety equipment is not convenient to assemble with the tungsten hexafluoride reactor body, making it impossible to perform comprehensive monitoring and control. Furthermore, the temperature monitoring is not flexible enough, the heat dissipation capacity of the monitoring equipment itself is insufficient, the warning effect is inadequate, and it is inconvenient to automatically control heating. Utility Model Content

[0004] The purpose of this invention is to provide a safety device for temperature monitoring of a tungsten hexafluoride reactor, in order to solve the problems mentioned in the background art, such as the inconvenience of assembling the safety device for reactor temperature monitoring with the main body of the tungsten hexafluoride reactor, the inability to perform comprehensive monitoring and control, the lack of flexibility in temperature monitoring, the insufficient heat dissipation capacity of the monitoring device itself, the inadequate warning effect, and the inconvenience of heating for automatic control.

[0005] To achieve the above objectives, this utility model provides the following technical solution: a safety device for temperature monitoring of a tungsten hexafluoride reactor, comprising a temperature monitoring panel, a tungsten hexafluoride reactor body, a temperature sensing rod, a hanging rod, and a sealing cap. The bottom of the temperature monitoring panel is sealed to the sealing port at the top center of the tungsten hexafluoride reactor body by the sealing cap. The bottom center of the temperature monitoring panel is connected to the temperature sensing rod by the hanging rod. Heat dissipation fins are provided at the center of both sides of the temperature monitoring panel. A warning light is provided on one side of the top of the temperature monitoring panel.

[0006] In a further embodiment, both ends of the sealing cap are provided with mounting ears, and both ends of the sealing port are provided with locking holes. The mounting ears and locking holes are locked and fixed by a lock head.

[0007] In a further embodiment, a connector is provided at the center of the top side of the tungsten hexafluoride reactor body, and an electrical control cable is provided at the lower side of the temperature monitoring panel, and the electrical control cable is connected to the connector.

[0008] In a further embodiment, a temperature sensing head is provided at one end of the temperature sensing rod, the other end of the temperature sensing rod is connected to the outside of the mounting hole, and the bottom end of the hanging rod is threadedly fixed to the mounting hole.

[0009] In a further embodiment, the tungsten hexafluoride reactor body is provided with a heating module inside, and the heating module is connected to a temperature monitoring panel via an electrical control cable.

[0010] In a further embodiment, the temperature monitoring panel is provided with a protective cover on the outside, a touch data display screen is provided on the front of the temperature monitoring panel, and a conductive core is provided inside the hanging rod, and the conductive core is connected to the temperature sensing rod.

[0011] Compared with the prior art, the beneficial effects of this utility model are:

[0012] 1. The temperature monitoring panel of this utility model is connected to the temperature sensing rod at the bottom center via a hanging rod, and the end of the temperature sensing rod is equipped with a temperature sensing head. Through the temperature sensing rod and the temperature sensing head, multi-directional and large-range temperature sensing can be performed, thereby improving the temperature sensing efficiency and effect.

[0013] 2. The temperature monitoring panel of this utility model is provided with heat dissipation fins on both sides in the center. The heat dissipation fins can improve the heat dissipation effect of the temperature monitoring panel. A warning light is provided on the top side of the temperature monitoring panel to improve the warning effect. A sealing cover is provided on the outside of the hanging rod, and a heat insulation plug is provided at the bottom of the sealing cover. The heat insulation plug can be embedded and sealed with the sealing opening to reduce the loss of temperature. Attached Figure Description

[0014] Figure 1 This is a schematic diagram of the structure of a safety device for temperature monitoring in a tungsten hexafluoride reactor according to the present invention;

[0015] Figure 2 This is a front view of the temperature monitoring panel of this utility model;

[0016] Figure 3 This is a top view of the main body of the tungsten hexafluoride reactor of this utility model;

[0017] Figure 4 This is a top view of the temperature sensing rod of this utility model;

[0018] Figure 5 This is a bottom view of the sealing gland of this utility model.

[0019] In the diagram: 1. Temperature monitoring panel; 2. Electrical control cable; 3. Tungsten hexafluoride reactor body; 4. Wiring connector; 5. Lock hole; 6. Sealing port; 7. Warning light; 8. Heat dissipation fins; 9. Temperature sensing rod; 10. Hanging rod; 11. Sealing cover; 12. Insulation plug; 13. Mounting hole; 14. Temperature sensing head; 15. Rod hole; 16. Mounting ear. Detailed Implementation

[0020] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present utility model. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments.

[0021] Please see Figures 1-5 This utility model provides an embodiment of a safety device for temperature monitoring in a tungsten hexafluoride reactor, comprising a temperature monitoring panel 1, a tungsten hexafluoride reactor body 3, a temperature sensing rod 9, a hanging rod 10, and a sealing cap 11. The bottom of the temperature monitoring panel 1 is sealed to the sealing port 6 at the top center of the tungsten hexafluoride reactor body 3 by the sealing cap 11. The bottom center of the temperature monitoring panel 1 is connected to the temperature sensing rod 9 by the hanging rod 10. Heat dissipation fins 8 are provided at the center of both sides of the temperature monitoring panel 1, and a warning light 7 is provided on one side of the top of the temperature monitoring panel 1. The sealing cap 11 is used to seal the sealing port 6, the hanging rod 10 facilitates the installation of the temperature sensing rod 9, the temperature sensing rod 9 is used to sense the internal temperature of the tungsten hexafluoride reactor body 3, the heat dissipation fins 8 can provide heat dissipation protection for both sides of the temperature monitoring panel 1, and the warning light 7 provides a warning effect for the temperature monitoring panel 1.

[0022] Both ends of the sealing cover 11 are provided with mounting ears 16, and both ends of the sealing port 6 are provided with locking holes 5. The mounting ears 16 and the locking holes 5 are locked and fixed by a lock head. The mounting ears 16 facilitate the locking and fixing of the sealing cover 11 and the locking holes 5.

[0023] A connector 4 is located in the middle of one side of the top of the tungsten hexafluoride reactor body 3. An electrical control cable 2 is located at the lower side of the temperature monitoring panel 1, and the electrical control cable 2 is connected to the connector 4. The connector 4 facilitates the installation of the electrical control cable 2. The electrical control cable 2 can be used to electrically control the heating module inside the tungsten hexafluoride reactor body 3. The heating module is located inside the tungsten hexafluoride reactor body 3, and the heating module is connected to the temperature monitoring panel 1 through the electrical control cable 2. The heating module facilitates the heating control of the tungsten hexafluoride reactor body 3.

[0024] A temperature sensing head 14 is provided at one end of the temperature sensing rod 9, and the other end of the temperature sensing rod 9 is connected to the outside of the mounting hole 13. The bottom end of the hanging rod 10 is threaded to the mounting hole 13. A protective cover is provided on the outside of the temperature monitoring panel 1, and a touch data display screen is provided on the front of the temperature monitoring panel 1. A conductive core is provided inside the hanging rod 10, and the conductive core is connected to the temperature sensing rod 9. The protective cover can provide safety protection for the outside of the temperature monitoring panel 1, and the conductive core can facilitate power connection to the temperature sensing rod 9.

[0025] Working principle: In use, connect the bottom end of the rod 10 to the mounting hole 13 in the middle of the temperature sensing rod 9, and insert the temperature sensing rod 9 into the tungsten hexafluoride reactor body 3 through the sealing port 6. The temperature sensing rod 9 and the temperature sensing head 14 at its end sense the internal temperature of the tungsten hexafluoride reactor body 3. The sensed data is fed back to the temperature monitoring panel 1. The heat dissipation fins 8 on both sides of the temperature monitoring panel 1 can improve the heat dissipation effect of the temperature monitoring panel 1. The warning light 7 is used to warn the temperature monitoring panel 1. The heat insulation plug 12 is used to seal the sealing port 6, and the sealing cover 11 is used to strengthen the seal of the sealing port 6.

[0026] It will be apparent to those skilled in the art that this invention is not limited to the details of the exemplary embodiments described above, and that it can be implemented in other specific forms without departing from the spirit or essential characteristics of this invention. Therefore, the embodiments should be considered illustrative and non-limiting in all respects, and the scope of this invention is defined by the appended claims rather than the foregoing description. Thus, it is intended that all variations falling within the meaning and scope of equivalents of the claims be included within this invention. No reference numerals in the claims should be construed as limiting the scope of the claims.

Claims

1. A safety device for temperature monitoring in a tungsten hexafluoride reactor, comprising a temperature monitoring panel (1), a tungsten hexafluoride reactor body (3), a temperature sensing rod (9), a suspension rod (10), and a sealing cap (11), characterized in that: The bottom of the temperature monitoring panel (1) is sealed to the top center sealing port (6) of the tungsten hexafluoride reactor body (3) by a sealing cap (11). The bottom center of the temperature monitoring panel (1) is connected to the temperature sensing rod (9) by a hanging rod (10). Heat dissipation fins (8) are provided in the center of both sides of the temperature monitoring panel (1). A warning light (7) is provided on one side of the top of the temperature monitoring panel (1).

2. The safety device for temperature monitoring in a tungsten hexafluoride reactor according to claim 1, characterized in that: The sealing cap (11) has mounting ears (16) at both ends, and the sealing port (6) has locking holes (5) at both ends. The mounting ears (16) and the locking holes (5) are locked and fixed by a lock head.

3. The safety device for temperature monitoring in a tungsten hexafluoride reactor according to claim 1, characterized in that: A connector (4) is provided in the middle of one side of the top of the tungsten hexafluoride reactor body (3), and an electrical control cable (2) is provided at the lower side of one side of the temperature monitoring panel (1), and the electrical control cable (2) is connected to the connector (4).

4. A safety device for temperature monitoring in a tungsten hexafluoride reactor according to claim 1, characterized in that: A temperature sensing head (14) is provided at one end of the temperature sensing rod (9), and the other end of the temperature sensing rod (9) is connected to the outside of the mounting hole (13), and the bottom end of the hanging rod (10) is threadedly fixed to the mounting hole (13).

5. A safety device for temperature monitoring in a tungsten hexafluoride reactor according to claim 1, characterized in that: The tungsten hexafluoride reactor body (3) is equipped with a heating module inside, and the heating module is connected to the temperature monitoring panel (1) via an electrical control cable (2).

6. A safety device for temperature monitoring in a tungsten hexafluoride reactor according to claim 1, characterized in that: The temperature monitoring panel (1) is provided with a protective cover on the outside, and a touch data display screen is provided on the front of the temperature monitoring panel (1). The rod (10) is provided with a conductive core inside, and the conductive core is connected to the temperature sensing rod (9).

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