Multifunctional industrial electron microscope

Abstract

The utility model relates to the technical field of microscopes, in particular to a multifunctional industrial electron microscope, which comprises a shell, a lens, an imaging module, a moving assembly and a reflecting group mirror, the lens is arranged at the front end of the shell, the head of the lens is exposed at the bottom of the shell, and lamp sources are arranged around the edge of the head of the lens; the moving assembly is arranged in the rear end of the shell, the imaging module is installed at the driving end of the moving assembly, the reflection group lens is installed above the imaging module and the lens, the position of the reflection group lens corresponds to the positions of the imaging module and the lens, and the moving assembly drives the imaging module to move relative to the reflection group lens. The lens transmits a light path to the imaging module through the reflection group mirror, and the reflection group mirror can be obliquely arranged; a lifting assembly and a supporting frame are arranged at the rear end of the shell, the supporting frame is connected to the lifting assembly, the lifting assembly is fixed to the shell, the lifting assembly is adjusted to drive the shell to move up and down relative to the supporting frame, and therefore the function of adjusting the object distance of the electron microscope is achieved.

Description

Technical Field

[0001] This utility model relates to the field of microscope technology, and in particular to a multifunctional industrial electron microscope. Background Technology

[0002] As a core piece of equipment in precision manufacturing, materials analysis, and microelectronics inspection, the performance of industrial electron microscopes directly affects the accuracy and efficiency of product quality control. However, traditional industrial electron microscopes still have significant limitations under complex operating conditions.

[0003] Existing industrial electron microscopes have the following drawbacks: 1. Large space occupation of the illumination system: Existing equipment mostly uses independent side light sources or fiber optic light guide structures, and the optical path components and mechanical structures interfere with each other, resulting in bulky equipment that is difficult to adapt to compact inspection environments; 2. Fixed observation angle: Lenses and imaging sensors usually adopt a fixed optical axis design, making it difficult to image deep holes, sidewalls, or curved surface samples from multiple angles. Repeated adjustments to the sample pose are required, significantly reducing inspection efficiency; 3. Insufficient adaptability to object distance: The fixed working distance design cannot be compatible with samples packaged with different thicknesses (such as chip packages and multilayer PCBs). Changing objectives or adding spacers greatly increases the complexity of the operation. Utility Model Content

[0004] To address the aforementioned shortcomings, the purpose of this invention is to propose a multifunctional industrial electron microscope that can adjust the position of the image center of the zoom lens and the imaging module, adjust the object distance of the electron microscope, realize the automatic focal length adjustment function of the electron microscope, utilize the effective light source brightness, and save space.

[0005] To achieve this objective, the present invention adopts the following technical solution:

[0006] A multifunctional industrial electron microscope includes a housing, a lens, an imaging module, a moving component, and a reflecting mirror assembly. The lens is located at the front end of the housing, with its head exposed at the bottom of the housing. A light source is positioned around the edge of the lens head. The moving component is located inside the rear end of the housing. The imaging module is mounted on the driving end of the moving component. The reflecting mirror assembly is mounted above the imaging module and the lens, with the position of the reflecting mirror assembly corresponding to the positions of the imaging module and the lens. The moving component drives the imaging module to move relative to the reflecting mirror assembly. The lens transmits light to the imaging module through the reflecting mirror assembly. The reflecting mirror assembly can be tilted. A lifting component and a support frame are located at the rear end of the housing. The support frame is connected to the lifting component, which is fixed to the housing. Adjusting the lifting component drives the housing to move vertically relative to the support frame.

[0007] Preferably, the rear end of the housing is provided with a clearance hole for installing the lifting assembly, and the lifting assembly is installed in the clearance hole.

[0008] Preferably, the lifting assembly includes a first guide post, a screw, and a first slider; the screw is rotatably and vertically mounted in the clearance hole, and the upper end of the screw passes through the top of the housing; the first guide post is respectively provided on both sides of the screw, the first slider passes through the first guide post and the screw, the first slider is threadedly installed with the screw, the first slider is slidably installed with the first guide post, and the first slider is fixedly connected to the support frame; rotating the screw drives the housing to move up and down.

[0009] Preferably, an adjustment knob is provided on the top of the screw, and the adjustment knob is located above the housing.

[0010] Preferably, the moving component includes a rotator, a second guide post, a lead screw, and a second slider; the lead screw is vertically and rotatably installed inside the housing, the second guide post is installed on both sides of the lead screw, the rotator is installed at one end of the lead screw and drives the lead screw to rotate; the second slider passes through the second guide post and the lead screw, the second slider is threadedly installed with the lead screw, and the second slider is slidably installed with the second guide post; the imaging module is installed on the second slider.

[0011] Preferably, the reflective lens group includes a first reflective prism, a second reflective prism, and a prism adjustment block; the installation position of the first reflective prism corresponds to the position of the lens, the installation position of the second reflective prism corresponds to the position of the imaging module; the installation position of the prism adjustment block corresponds to the position of the imaging module, the second reflective prism is installed at the prism adjustment block, and the tilt angle of the second reflective prism is adjusted by adjusting the tilt angle of the prism adjustment block.

[0012] Preferably, granulator screws are installed at the four corners of the prism adjusting block, the prism adjusting block is installed at the upper end of the granulator screws, and the lower end of the granulator screws is connected to the inside of the housing. The tilt angle of the prism adjusting block is adjusted by the installation depth of the lower ends of the four granulator screws.

[0013] Preferably, the front bottom of the housing is provided with a cover, the head of the lens is exposed at the center of the bottom end of the cover, and a light source is provided around the bottom end of the cover.

[0014] Preferably, a circuit board is disposed inside the housing, and the imaging module, the moving component, and the lens are electrically connected to the circuit board; a display is also installed at the support frame, and the display is electrically connected to the circuit board.

[0015] The technical solution provided by this utility model can include the following beneficial effects: the imaging module is installed on the driving end of the moving component, the reflecting mirror is installed above the imaging module and the lens, the position of the reflecting mirror corresponds to the position of the imaging module and the lens, the lens transmits light to the imaging module through the reflecting mirror, the reflecting mirror can be tilted, so that by setting the tilt angle of the reflecting mirror, the prism can be shifted at different angles, thereby adjusting the position of the image center of the zoom lens and the imaging module. A lifting component is provided at the rear end of the housing, and by adjusting the lifting component, the housing is driven to move up and down relative to the support frame, thereby realizing the function of adjusting the object distance of the electron microscope. The moving component is located inside the rear end of the housing, and the imaging module is installed on the driving end of the moving component, thereby driving the imaging module to move up and down, realizing the function of automatically adjusting the focal length of the electron microscope. A light source is provided around the edge of the lens head, which maximizes the effective light source brightness and saves space. Attached Figure Description

[0016] Figure 1 This is a schematic diagram of the structure of the housing, lens, and reflector group of this utility model;

[0017] Figure 2 This is a structural schematic diagram of the housing, lens, light source, and lifting assembly of this utility model;

[0018] Figure 3 This is a schematic diagram of the imaging module, moving component, and reflecting mirror group of this utility model;

[0019] Figure 4 This is a schematic diagram of the structure of the mobile component of this utility model;

[0020] Figure 5 This is a structural schematic diagram of the housing, support frame, and display of this utility model;

[0021] Figure 6 This is a structural schematic diagram of the shell and support frame of this utility model;

[0022] Wherein: 1-Housing, 2-Lens, 3-Imaging module, 4-Moving component, 5-Reflecting lens, 6-Light source, 7-Lifting component, 8-Support frame, 9-Cover, 10-Circuit board, 11-Display;

[0023] Rotator, 402-Second guide post, 403-Lead screw, 404-Second slider;

[0024] 501-First reflecting prism, 502-Second reflecting prism, 503-Prism adjusting block, 504-Mechanical screw;

[0025] 701-First guide post, 702-Screw, 703-First slider, 704-Adjustment knob. Detailed Implementation

[0026] The embodiments of this utility model are described in detail below. Examples of these embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain this utility model, and should not be construed as limiting this utility model.

[0027] In the description of this utility model, it should be understood that the terms "longitudinal," "lateral," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," and "outer," etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the accompanying drawings and are only for the convenience of describing this utility model and simplifying the description. They do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation on this utility model. Furthermore, features defined with "first" and "second" may explicitly or implicitly include one or more of these features, used to distinguish and describe features, without any order or emphasis.

[0028] In the description of this utility model, unless otherwise stated, "a number" means one or more.

[0029] In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0030] The following is combined Figures 1 to 6 This describes a multifunctional industrial electron microscope according to an embodiment of the present invention.

[0031] A multifunctional industrial electron microscope includes a housing 1, a lens 2, an imaging module 3, a moving component 4, and a reflecting mirror 5. The lens 2 is located at the front end of the housing 1, with its head exposed at the bottom of the housing 1. A light source 6 is arranged around the edge of the head of the lens 2. The moving component 4 is located inside the rear end of the housing 1. The imaging module 3 is mounted on the driving end of the moving component 4. The reflecting mirror 5 is mounted above the imaging module 3 and the lens 2. The position of the reflecting mirror 5 corresponds to the position of the imaging module 3 and the lens 2. The moving component 4 drives the imaging module 3 to move relative to the reflecting mirror 5. The lens 2 transmits light to the imaging module 3 through the reflecting mirror 5. The reflecting mirror 5 can be tilted. A lifting component 7 and a support frame 8 are provided at the rear end of the housing 1. The support frame 8 is connected to the lifting component 7, and the lifting component 7 is fixed to the housing 1. The lifting component 7 is adjusted to drive the housing 1 to move up and down relative to the support frame 8.

[0032] A multifunctional industrial electron microscope is used for industrial operations, measurement, detection, analysis, and research. An imaging module 3 is mounted on the drive end of a moving component 4. A reflecting mirror 5 is mounted above the imaging module 3 and the lens 2. The position of the reflecting mirror 5 corresponds to the positions of the imaging module 3 and the lens 2. The lens 2 transmits light to the imaging module 3 through the reflecting mirror 5. The reflecting mirror 5 can be tilted, allowing for different angle shifts in the prism by adjusting the tilt angle, thus adjusting the image center of the zoom lens relative to the position of the imaging module. A lifting component 7 is located at the rear end of the housing 1. Adjusting the lifting component 7 drives the housing 1 to move up and down relative to the support frame 8, thereby adjusting the object distance of the electron microscope. The moving component 4 is located inside the rear end of the housing 1, and the imaging module 3 is mounted on the drive end of the moving component 4, thereby moving the imaging module 3 up and down to achieve automatic focus adjustment of the electron microscope. A light source 6 is arranged around the edge of the lens 2 head, maximizing the effective light source brightness and saving space.

[0033] Specifically, the rear end of the housing 1 is provided with a clearance hole for installing the lifting assembly 7, and the lifting assembly 7 is installed in the clearance hole. The clearance hole facilitates the installation of the lifting assembly 7, and the installation of the lifting assembly 7 in the clearance hole makes the overall appearance aesthetically pleasing.

[0034] Specifically, the lifting assembly 7 includes a first guide post 701, a screw 702, and a first slider 703. The screw 702 is rotatably and vertically mounted in the clearance hole, with its upper end passing through the top of the housing 1. First guide posts 701 are respectively provided on both sides of the screw 702. The first slider 703 passes through the first guide post 701 and the screw 702, is threadedly fitted to the screw 702, and slidably fitted to the first guide post 701. The first slider 703 is fixedly connected to the support frame 8. Rotating the screw 702 causes the housing 1 to move up and down. Rotating the screw 702 causes the first slider 703 to move up and down, thus moving the microscope up and down and adjusting the object distance of the electron microscope. The first guide posts 701 on both sides of the screw 702 ensure stable up and down movement of the first slider 703.

[0035] To further explain, an adjustment knob 704 is provided on the top of the screw 702, and the adjustment knob 704 is located above the housing 1. The adjustment knob 704 is for the user to rotate, making it convenient for the user to make adjustments.

[0036] Specifically, the moving component 4 includes a rotator 401, a second guide post 402, a lead screw 403, and a second slider 404. The lead screw 403 is vertically and rotatably installed inside the housing 1. Second guide posts 402 are installed on both sides of the lead screw 403. The rotator 401 is installed at one end of the lead screw 403 and drives it to rotate. The second slider 404 passes through the second guide post 402 and the lead screw 403. The second slider 404 is threadedly fitted to the lead screw 403 and slidably fitted to the second guide post 402. The imaging module 3 is installed on the second slider 404. The second slider 404 drives the imaging module 3 to move up and down, realizing the automatic focus adjustment function of the electron microscope. The second guide posts 402 installed on both sides of the lead screw 403 ensure stable movement of the second slider 404 and guarantee the stability of the imaging module 3 during movement.

[0037] Specifically, the reflecting mirror group 5 includes a first reflecting prism 501, a second reflecting prism 502, and a prism adjustment block 503. The installation position of the first reflecting prism 501 corresponds to the position of the lens 2, and the installation position of the second reflecting prism 502 corresponds to the position of the imaging module 3. The installation position of the prism adjustment block 503 corresponds to the position of the imaging module 3. The second reflecting prism 502 is installed at the prism adjustment block 503. By adjusting the tilt angle of the prism adjustment block 503, the tilt angle of the second reflecting prism 502 can be adjusted. This allows for different angle shifts of the prism, achieving an adjustable zoom lens image center and imaging module. The first reflecting prism 501 receives the light emitted from the lens 2 and projects it onto the imaging module 3.

[0038] Specifically, granulator screws 504 are installed at the four corners of the prism adjusting block 503. The prism adjusting block 503 is installed on the upper end of the granulator screws 504, and the lower end of the granulator screws 504 is connected to the inside of the housing 1. The tilt angle of the prism adjusting block 503 is adjusted by adjusting the installation depth of the lower end of the four granulator screws 504. The tilt angle of the prism adjusting block 503 can be adjusted by rotating the granulator screws 504. The granulator screws 504 are easy to install, have high precision, and are low in cost.

[0039] To further explain, a cover 9 is provided at the bottom front of the housing 1, with the head of the lens 2 exposed at the center of the bottom of the cover 9. Light sources 6 are arranged around the bottom perimeter of the cover 9. This maximizes the effective light source brightness while saving space, ensuring sufficient light for the lens 2 during use. The light sources 6 arranged in a rectangular pattern around the bottom perimeter of the cover 9, consistent with the aspect ratio of the imaging module 3, maximize the effective light source brightness and save space compared to traditional ring lights.

[0040] Specifically, a circuit board 10 is installed inside the housing 1, and the imaging module 3, the moving component 4, and the lens 2 are electrically connected to the circuit board 10. A display 11 is also installed at the support frame 8, and the display 11 is electrically connected to the circuit board 10. A USB port is provided at the electron microscope, and the USB port is electrically connected to the circuit board 10. The USB cable on the electron microscope is connected to the display 11, and an HDMI cable is used for connection. The electron microscope and the display 11 are connected together, so that the electron microscope signal is transmitted to the display 11 via HDMI.

[0041] Other components and operations of a multifunctional industrial electron microscope according to embodiments of the present invention are known to those skilled in the art and will not be described in detail here.

[0042] In this specification, the terms "embodiment," "example," etc., refer to specific features, structures, materials, or characteristics described in connection with that embodiment or example, which are included in at least one embodiment or example of the present invention. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples.

[0043] Although embodiments of the present invention have been shown and described, those skilled in the art will understand that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the claims and their equivalents.

Claims

1. A multifunctional industrial electron microscope, characterized in that: It includes a housing (1), a lens (2), an imaging module (3), a moving component (4), and a reflecting mirror (5); The lens (2) is located at the front end of the housing (1), and the head of the lens (2) is exposed at the bottom of the housing (1). A light source (6) is provided around the edge of the head of the lens (2). The moving component (4) is disposed inside the rear end of the housing (1). The imaging module (3) is installed on the driving end of the moving component (4). The reflecting mirror (5) is installed above the imaging module (3) and the lens (2). The position of the reflecting mirror (5) corresponds to the position of the imaging module (3) and the lens (2). The moving component (4) drives the imaging module (3) to move relative to the reflecting mirror (5). The lens (2) transmits light to the imaging module (3) through the reflecting mirror (5). The reflecting mirror (5) can be tilted. The rear end of the housing (1) is provided with a lifting component (7) and a support frame (8). The support frame (8) is connected to the lifting component (7). The lifting component (7) is fixed to the housing (1). By adjusting the lifting component (7), the housing (1) is driven to move up and down relative to the support frame (8).

2. The multifunctional industrial electron microscope according to claim 1, characterized in that: The rear end of the housing (1) is provided with a clearance hole for installing the lifting assembly (7), and the lifting assembly (7) is installed in the clearance hole.

3. A multifunctional industrial electron microscope according to claim 2, characterized in that: The lifting assembly (7) includes a first guide post (701), a screw (702), and a first slider (703); The screw (702) is rotatably and vertically mounted in the clearance hole, and the upper end of the screw (702) passes through the top of the housing (1); The screw (702) is provided with the first guide post (701) on both sides respectively. The first slider (703) passes through the first guide post (701) and the screw (702). The first slider (703) is threadedly installed with the screw (702). The first slider (703) is slidably installed with the first guide post (701). The first slider (703) is fixedly connected to the support frame (8). The screw (702) is rotated to move the housing (1) up and down.

4. A multifunctional industrial electron microscope according to claim 3, characterized in that: An adjustment knob (704) is provided on the top of the screw (702), and the adjustment knob (704) is located above the housing (1).

5. A multifunctional industrial electron microscope according to claim 1, characterized in that: The moving component (4) includes a rotator (401), a second guide post (402), a lead screw (403), and a second slider (404). The lead screw (403) is vertically and rotatably installed inside the housing (1). The second guide post (402) is installed on both sides of the lead screw (403). The rotator (401) is installed at one end of the lead screw (403) and drives the lead screw (403) to rotate. The second slider (404) passes through the second guide post (402) and the lead screw (403). The second slider (404) is threadedly engaged with the lead screw (403), and the second slider (404) is slidably engaged with the second guide post (402). The imaging module (3) is mounted on the second slider (404).

6. A multifunctional industrial electron microscope according to claim 1, characterized in that: The reflector group (5) includes a first reflector prism (501), a second reflector prism (502), and a prism adjustment block (503). The installation position of the first reflecting prism (501) corresponds to the position of the lens (2), and the installation position of the second reflecting prism (502) corresponds to the position of the imaging module (3); The prism adjustment block (503) is installed at a position corresponding to the position of the imaging module (3). The second reflecting prism (502) is installed at the prism adjustment block (503). The tilt angle of the second reflecting prism (502) is adjusted by adjusting the tilt angle of the prism adjustment block (503).

7. A multifunctional industrial electron microscope according to claim 6, characterized in that: Organic screws (504) are installed at the four corners of the prism adjustment block (503). The prism adjustment block (503) is installed on the upper end of the organic screws (504), and the lower end of the organic screws (504) is connected to the inside of the housing (1). The tilt angle of the prism adjustment block (503) is adjusted by the installation depth of the lower end of the four organic screws (504).

8. A multifunctional industrial electron microscope according to claim 1, characterized in that: The front end of the housing (1) is provided with a cover (9), the head of the lens (2) is exposed at the center of the bottom of the cover (9), and a light source (6) is provided around the bottom of the cover (9).

9. A multifunctional industrial electron microscope according to claim 1, characterized in that: The housing (1) is equipped with a circuit board (10), and the imaging module (3), the moving component (4), and the lens (2) are electrically connected to the circuit board (10). A display (11) is also installed at the support frame (8), and the display (11) is electrically connected to the circuit board (10).

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